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1. Sputter 5‏‎ (18:49, 27 June 2012)
2. Sputter 1 (Custom)‏‎ (13:43, 10 July 2012)
3. Wire Saw (Takatori)‏‎ (07:22, 12 July 2012)
4. Molecular Vapor Deposition Recipes‏‎ (06:31, 17 August 2012)
5. Flood Exposure Recipes‏‎ (07:54, 21 August 2012)
6. LegacyTable‏‎ (17:19, 18 July 2013)
7. Vapor HF Etch (uETCH)‏‎ (16:41, 30 January 2014)
8. HF Vapor Etch‏‎ (15:51, 31 January 2014)
9. E-BEAM‏‎ (08:53, 13 March 2014)
10. PECVD1-SiN standard recipe.pdf‏‎ (15:21, 18 March 2014)
11. PECVD1-SIN Standard Recipe (PlasmaTherm 790)‏‎ (15:37, 18 March 2014)
12. PECVD1-(PlasmaTherm 790)‏‎ (14:59, 19 March 2014)
13. PECVD1 Operating Instructions.pdf‏‎ (13:45, 20 March 2014)
14. Strip Annealer‏‎ (11:43, 31 March 2014)
15. Advanced PECVD Recipes‏‎ (09:22, 16 April 2014)
16. Thermal Evaporator 2‏‎ (10:40, 16 April 2014)
17. PECVD1-SiN-standard recipe.pdf‏‎ (10:20, 10 December 2014)
18. PECVD1 Recipes‏‎ (16:22, 8 January 2015)
19. Jack Whaley‏‎ (07:57, 14 April 2015)
20. Adam Abrahamsen‏‎ (08:00, 14 April 2015)
21. RIE 1 (Custom)‏‎ (13:03, 13 June 2015)
22. Surfscan6200 photos‏‎ (10:12, 12 April 2016)
23. Thermal Evaporator 1‏‎ (17:31, 12 October 2017)
24. ASML 5500: Recovering from a Typo in Reticle ID‏‎ (23:59, 20 March 2018)
25. CDE ResMap Quick-Start instructions‏‎ (13:01, 17 April 2018)
26. Unaxis Test Recipe Page‏‎ (15:19, 20 April 2018)
27. InP Etch test -details‏‎ (08:43, 2 May 2018)
28. InP Etch Test-in details‏‎ (08:57, 2 May 2018)
29. TEST PAGE‏‎ (18:14, 18 June 2018)
30. Thermal Evaporation Recipes‏‎ (17:00, 26 June 2018)
31. ASML 5500: Choose Marks for Prealignment‏‎ (14:17, 17 July 2018)
32. UV Ozone Quick Start‏‎ (15:40, 17 July 2018)
33. Olympus LEXT OLS4000 Confocal uScope - Quick Start‏‎ (18:19, 25 July 2018)
34. Lab Rules backup‏‎ (11:07, 3 August 2018)
35. ProcessGroup: Shipping Samples on Dicing Tape+Frame‏‎ (17:27, 4 September 2018)
36. Sputter 2 (SFI Endeavor)‏‎ (10:28, 5 September 2018)
37. Test Data of etching SiO2 with CHF3/CF4/O2‏‎ (16:17, 8 October 2018)
38. Ellipsometer (Rudolph)‏‎ (23:06, 10 October 2018)
39. RIE5 - Standard Operating procedure (Cortex Software)‏‎ (14:09, 17 October 2018)
40. ADT UV-Tape Table 1042R‏‎ (10:29, 22 October 2018)
41. Suss MA-6 Backside Alignment QuickStart‏‎ (14:52, 28 November 2018)
42. Stepper 2 (AutoStep 200) - Operating Procedure - Piece Parts‏‎ (11:12, 17 December 2018)
43. Nano-Imprint (Nanonex NX2000)‏‎ (11:58, 18 December 2018)
44. ADT 7100 - Recovering an Old Recipe (2019)‏‎ (03:15, 27 March 2019)
45. Lab Rules OLD 2018‏‎ (15:26, 2 April 2019)
46. Filmetrics F50 - Operating Procedure‏‎ (13:43, 26 April 2019)
47. Test Page‏‎ (21:15, 16 May 2019)
48. Filmetrics F40-UV Quick Start‏‎ (11:13, 31 May 2019)
49. FIJI - Microscope Measurement Tools‏‎ (11:02, 10 June 2019)
50. Intellemetrics Laser Etch Monitor Procedure for Panasonic ICP Etchers‏‎ (14:23, 13 June 2019)
51. User Accessible Commands‏‎ (15:24, 13 June 2019)
52. Stepper 1 (GCA6300) How to select proper chuck‏‎ (15:13, 20 June 2019)
53. Stepper 1 (GCA 6300) Substrate Thickness, Shim Thickness ans Target Thickness‏‎ (15:32, 20 June 2019)
54. Stepper 1 (GCA 6300) Available chucks‏‎ (15:41, 20 June 2019)
55. Unaxis SiN100C 300nm-2019‏‎ (08:33, 10 September 2019)
56. DS-K101-304 Bake Temp. versus Develop Rate‏‎ (14:02, 2 October 2019)
57. SiN 100C Table-2019‏‎ (07:39, 3 October 2019)
58. THz Physics Presentations‏‎ (13:59, 11 October 2019)
59. Photonics Presentations‏‎ (09:04, 24 October 2019)
60. Electronics Presentations‏‎ (15:17, 30 October 2019)
61. PubList2018‏‎ (16:10, 27 November 2019)
62. Older Publications‏‎ (16:30, 4 March 2020)
63. Publications - 2013-2014‏‎ (16:34, 4 March 2020)
64. Stepper 1 (GCA 6300) - Standard Operating Procedure‏‎ (09:42, 19 March 2020)
65. Programming a Job‏‎ (10:36, 20 March 2020)
66. GCA 6300 training manual -old instructions‏‎ (08:49, 23 March 2020)
67. GCA Old full training manual‏‎ (09:58, 23 March 2020)
68. Tino Sy‏‎ (11:26, 23 March 2020)
69. Bill Mitchell‏‎ (11:32, 23 March 2020)
70. Old training manual‏‎ (13:52, 23 March 2020)
71. Autostep 200 Old training manual‏‎ (14:36, 23 March 2020)
72. Old Training Manual‏‎ (21:41, 23 March 2020)
73. Ning Cao‏‎ (12:18, 24 March 2020)
74. Brian Thibeault‏‎ (14:44, 26 March 2020)
75. Mike Day‏‎ (15:05, 26 March 2020)
76. Unaxis SOP 3-12-2020.docx‏‎ (10:03, 27 March 2020)
77. Claudia Gutierrez‏‎ (10:19, 30 March 2020)
78. Wafer Coating Process Traveler1‏‎ (13:32, 30 March 2020)
79. PECV1 Wafer Coating Process Traveler‏‎ (16:00, 30 March 2020)
80. PECVD1 Wafer Coating Process Traveler‏‎ (16:38, 30 March 2020)
81. PECVD.docx‏‎ (21:23, 30 March 2020)
82. UCSBTEST1Gain4.jpg‏‎ (09:18, 1 April 2020)
83. Surfscan photo‏‎ (09:35, 1 April 2020)
84. Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer)‏‎ (18:26, 6 April 2020)
85. InP Etch Test Result in Details‏‎ (18:31, 6 April 2020)
86. Autostep 200 User Accessible Commands‏‎ (13:08, 7 April 2020)
87. Exposing a wafer piece‏‎ (20:33, 7 April 2020)
88. AUTOSTEP 200-PIECES instruction 6-20-19.pptx‏‎ (20:34, 7 April 2020)
89. AUTOSTEP 200-PIECES 1st litho BL and BR orientation.pptx‏‎ (10:03, 8 April 2020)
90. Errors‏‎ (09:14, 15 April 2020)
91. Glossary‏‎ (09:25, 15 April 2020)
92. Fluorescence Microscope (Olympus MX51)‏‎ (11:09, 15 April 2020)
93. Wafer Scanning/Coating Process Traveler ( combined/less detailed)‏‎ (13:41, 20 April 2020)
94. STD SiO2 recipe‏‎ (11:00, 21 April 2020)
95. Wafer Scanning process Traveler‏‎ (11:31, 22 April 2020)
96. Wafer Coating Process Traveler‏‎ (16:54, 22 April 2020)
97. Operating Instructions‏‎ (09:43, 27 May 2020)
98. Intellemetrics Laser Etch Monitor Procedure for Plasma-Therm Etchers‏‎ (11:11, 8 June 2020)
99. Main Page mod‏‎ (14:56, 17 June 2020)
100. Demis D. John‏‎ (10:22, 18 June 2020)
101. Wafer coating procedure‏‎ (11:42, 2 July 2020)
102. MVD - Wafer Coating - Process Traveler‏‎ (13:38, 26 July 2020)
103. Tom Reynolds‏‎ (08:29, 7 August 2020)
104. IR Aligner (SUSS MJB-3 IR)‏‎ (11:56, 7 August 2020)
105. Logitech WBS7 - Procedure for Wax Mounting with Spin-On Crystalbond‏‎ (08:12, 11 August 2020)
106. Unaxis wafer coating procedure‏‎ (21:29, 12 August 2020)
107. Goniometer (Rame-Hart A-100) - Operating Procedure‏‎ (16:07, 30 September 2020)
108. Stocked Chemical List‏‎ (13:15, 28 November 2020)
109. Video Training: Hosting with Zoom and GacuhoCast/Panopto‏‎ (13:08, 10 December 2020)
110. PECVD1 Wafer Coating Process‏‎ (13:16, 10 December 2020)
111. GoPro Hero8 Black (Internal)‏‎ (23:15, 12 January 2021)
112. ASML Stepper 3 Dicing Guide Programming‏‎ (11:07, 30 January 2021)
113. Process Group - Lab Stocking/Supplies Tasks‏‎ (11:08, 30 January 2021)
114. Test Data of Etching SiO2 with CHF3/CF4-Florine ICP Etcher‏‎ (18:30, 2 February 2021)
115. Test Data of etching SiO2 with CHF3/CF4-Florine‏‎ (18:33, 2 February 2021)
116. Test Data of etching SiO2 with CHF3/CF4-Florine ICP Etcher‏‎ (18:37, 2 February 2021)
117. ASML Stepper 3 - Substrates smaller than 100mm/4-inch‏‎ (10:12, 23 February 2021)
118. Tech Talks Seminar Series‏‎ (07:30, 12 March 2021)
119. Focused Ion-Beam Lithography (Raith Velion)‏‎ (09:56, 15 March 2021)
120. Laser Etch Monitor Simulation in Python‏‎ (12:54, 21 April 2021)
121. GCA 6300 USer Accessible Commands‏‎ (10:01, 5 May 2021)
122. GCA 6300 Reboot Procedures‏‎ (09:44, 7 May 2021)
123. Troubleshooting and Recovery‏‎ (09:47, 7 May 2021)
124. Vacuum Oven (YES)‏‎ (12:12, 3 June 2021)
125. RIE Etching Recipes‏‎ (10:02, 14 June 2021)
126. ADT 7100 - Initial Setup Before Cutting‏‎ (09:50, 2 July 2021)
127. Nick test‏‎ (22:15, 23 August 2021)
128. Chemical List - OLD 2018-09-05‏‎ (12:50, 4 September 2021)
129. YES-150C-Various-Resists‏‎ (12:51, 4 September 2021)
130. InP etch result in details‏‎ (12:51, 4 September 2021)
131. KLA Tencor P7 - Saving Profile Data‏‎ (12:52, 4 September 2021)
132. Filmetrics F10-RT-UVX Operating Procedure‏‎ (12:52, 4 September 2021)
133. Editing Tutorials‏‎ (12:52, 4 September 2021)
134. Bill Millerski‏‎ (08:28, 28 October 2021)
135. Don Freeborn‏‎ (09:48, 28 October 2021)
136. Tony Bosch‏‎ (09:53, 28 October 2021)
137. Lee Sawyer‏‎ (09:59, 28 October 2021)
138. InP Etch Rate and Selectivity (InP/SiO2)‏‎ (18:00, 8 November 2021)
139. SiO2 Etching Test using CF4/CHF3‏‎ (13:43, 9 November 2021)
140. Process Group - Billing Instructions‏‎ (21:43, 22 November 2021)
141. MA6 Backside Alignment - Allowed Mark Locations‏‎ (12:16, 8 December 2021)
142. Old Deposition Data - NastaziaM 2021-11-22‏‎ (09:31, 14 December 2021)
143. Deposition Data - temporary 2021-12-15‏‎ (00:07, 16 December 2021)
144. Old Deposition Data - 2021-12-15‏‎ (00:18, 16 December 2021)
145. Video Training - Introduction (Internal)‏‎ (08:43, 7 January 2022)
146. Video Training: Uploading to GauchoCast/Panopto (Internal)‏‎ (08:48, 7 January 2022)
147. Autostep 200 Troubleshooting and Recovery‏‎ (16:55, 31 January 2022)
148. OLD - PECVD2 Recipes‏‎ (12:28, 3 March 2022)
149. ASML Stepper 3 - Job Creator‏‎ (21:08, 7 April 2022)
150. Lift-Off with DUV Imaging + PMGI Underlayer‏‎ (16:32, 27 April 2022)
151. Optical Film Thickness (Filmetrics)‏‎ (07:27, 13 May 2022)
152. Optical Film Thickness (Nanometric)‏‎ (07:30, 13 May 2022)
153. Brian Lingg‏‎ (16:59, 18 June 2022)
154. Hummer SEM Sample Coater - Techniques to reduce charging in SEMs‏‎ (06:41, 22 June 2022)
155. Vacuum Deposition Recipes‏‎ (15:44, 7 July 2022)
156. MLA150 - Large Image GDS Generation‏‎ (16:45, 29 July 2022)
157. E-Beam Lithography System (JEOL JBX-6300FS)‏‎ (23:28, 14 August 2022)
158. Luis Zuzunaga‏‎ (10:34, 18 August 2022)
159. Dan Read‏‎ (08:44, 20 August 2022)
160. Ovens - Overview of All Lab Ovens‏‎ (09:41, 24 August 2022)
161. ASML Stepper 3: Wafer Handler Reset Procedure‏‎ (16:28, 24 August 2022)
162. Equipment Group - Video Training Procedures‏‎ (09:55, 25 August 2022)
163. Laser Scanning Confocal M-scope (Olympus LEXT)‏‎ (09:30, 30 August 2022)
164. IR Thermal Microscope (QFI)‏‎ (09:37, 30 August 2022)
165. Oven 5 (Labline)‏‎ (10:21, 30 August 2022)
166. Thermal Evap 1‏‎ (10:28, 30 August 2022)
167. Thermal Evap 2 (Solder)‏‎ (10:29, 30 August 2022)
168. PECVD 1 (PlasmaTherm 790)‏‎ (10:30, 30 August 2022)
169. PECVD 2 (Advanced Vacuum)‏‎ (10:30, 30 August 2022)
170. Molecular Vapor Deposition‏‎ (10:34, 30 August 2022)
171. Sputter 3 (AJA ATC 2000-F)‏‎ (10:36, 30 August 2022)
172. Sputter 4 (AJA ATC 2200-V)‏‎ (10:37, 30 August 2022)
173. RIE 3 (MRC)‏‎ (10:42, 30 August 2022)
174. Vapor HF Etch‏‎ (10:53, 30 August 2022)
175. Spin Rinse Dryer (SemiTool)‏‎ (11:02, 30 August 2022)
176. Chemical-Mechanical Polisher (Logitech)‏‎ (11:03, 30 August 2022)
177. Tube Furnace AlGaAs Oxidation (Lindberg)‏‎ (11:13, 30 August 2022)
178. Vacuum Sealer‏‎ (11:21, 30 August 2022)
179. Flip-Chip Bonder (Finetech)‏‎ (11:22, 30 August 2022)
180. Digital Microscope (Olympus DSX1000)‏‎ (11:49, 30 August 2022)
181. Atomic Force Microscope (Bruker ICON)‏‎ (11:57, 30 August 2022)
182. Film Stress (Tencor Flexus)‏‎ (11:58, 30 August 2022)
183. Deep UV Optical Microscope (Olympus)‏‎ (07:24, 31 August 2022)
184. Lift-Off with I-Line Imaging Resist + LOL2000 Underlayer‏‎ (14:58, 31 August 2022)
185. Michael Barreraz‏‎ (10:03, 7 September 2022)
186. High Temp Oven (Blue M)‏‎ (10:33, 8 September 2022)
187. E-Beam 3 (Temescal)‏‎ (12:11, 8 September 2022)
188. CC-PRIME OnBoarding 2022-08‏‎ (09:58, 9 September 2022)
189. Optical Film Thickness & Wafer-Mapping (Filmetrics F50)‏‎ (10:03, 13 September 2022)
190. Optical Film Spectra + Optical Properties (Filmetrics F10-RT-UVX)‏‎ (10:04, 13 September 2022)
191. Oven 4 (Thermo-Fisher HeraTherm)‏‎ (16:25, 13 September 2022)
192. Ovens 1, 2 & 3 (Labline)‏‎ (17:09, 13 September 2022)
193. Sputter 5 (AJA ATC 2200-V)‏‎ (15:50, 16 September 2022)
194. SEM Sample Coater (Hummer)‏‎ (15:10, 21 September 2022)
195. Filmetrics F40-UV Microscope-Mounted‏‎ (14:28, 29 September 2022)
196. ICP-Etch (Unaxis VLR)‏‎ (16:31, 29 September 2022)
197. Chemical List‏‎ (13:26, 4 October 2022)
198. ASML DUV: Edge Bead Removal via Photolithography‏‎ (23:06, 4 October 2022)
199. DUMMY TOOL‏‎ (01:11, 19 October 2022)
200. E-Beam Evaporation Recipes‏‎ (11:59, 25 October 2022)
201. KLA Tencor P7 - Basic profile instructions‏‎ (15:20, 2 November 2022)
202. S-Cubed Flexi - Operating Procedure‏‎ (14:39, 8 November 2022)
203. Automated Coat/Develop System (S-Cubed Flexi)‏‎ (14:41, 8 November 2022)
204. Ashers (Technics PEII)‏‎ (13:06, 11 November 2022)
205. Unaxis VLR Etch - Process Control Data‏‎ (18:41, 21 November 2022)
206. RIE 5 (PlasmaTherm)‏‎ (10:54, 28 November 2022)
207. Contact Alignment Recipes‏‎ (12:20, 1 December 2022)
208. Process Group - Remote Fabrication Jobs‏‎ (16:52, 6 December 2022)
209. Other Dry Etching Recipes‏‎ (08:17, 9 December 2022)
210. Wafer Cleaver (PELCO Flip-Scribe)‏‎ (07:57, 13 December 2022)
211. Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher‏‎ (15:03, 9 January 2023)
212. Test Data of etching SiO2 with CHF3/CF4‏‎ (13:15, 11 January 2023)
213. Test Data of etching SiO2 with CHF3/CF4-ICP1‏‎ (09:54, 12 January 2023)
214. Oxford ICP Etcher - Process Control Data‏‎ (15:38, 12 January 2023)
215. Foong Fatt‏‎ (11:24, 1 February 2023)
216. Probe Station & Curve Tracer‏‎ (13:23, 10 February 2023)
217. COVID-19 User Policies‏‎ (16:56, 13 February 2023)
218. Research‏‎ (17:49, 16 February 2023)
219. Probe Station: I-V Curves with Keithley 2400 and Python Script‏‎ (15:01, 21 February 2023)
220. Atomic Layer Deposition (Oxford FlexAL)‏‎ (14:56, 8 March 2023)
221. Oxford Etcher - Sample Size Effect on Etch Rate‏‎ (16:05, 20 March 2023)
222. E-Beam 5 (Plasys)‏‎ (10:13, 21 March 2023)
223. E-Beam Lithography Recipes‏‎ (15:33, 4 April 2023)
224. E-Beam 4 (CHA)‏‎ (12:04, 11 April 2023)
225. Lab Rules‏‎ (10:16, 12 April 2023)
226. Mike Silva‏‎ (08:31, 14 April 2023)
227. Peder Lenvik‏‎ (09:05, 14 April 2023)
228. ASML Stepper 3 Standard Operating Procedure‏‎ (13:59, 23 April 2023)
229. Logitech WBS7 - Procedure for Wax Mounting with bulk Crystalbond Stick‏‎ (10:52, 26 April 2023)
230. Ellipsometer (Woollam) - Measuring thin dielectrics with Native Oxide pre-measurement‏‎ (12:44, 26 April 2023)
231. Oxford ICP Etcher (PlasmaPro 100 Cobra)‏‎ (23:33, 4 May 2023)
232. Step Profilometer (DektakXT)‏‎ (21:51, 10 May 2023)
233. Mechanical Polisher (Allied)‏‎ (09:06, 15 May 2023)
234. ICP-PECVD (Unaxis VLR)‏‎ (10:35, 23 May 2023)
235. YES-SPR220-Various-Temps‏‎ (09:53, 5 June 2023)
236. SPR220-7 at 3kW various temperature without N2 gas‏‎ (10:01, 5 June 2023)
237. Gold surface oxidation (darkening) due to O2/N2 plasma; the need for O2 only recipe.‏‎ (16:22, 9 June 2023)
238. Comparison of ash rate for different gas mixtures, especially between O2 only vs O2/N2 mixture.‏‎ (16:33, 9 June 2023)
239. Rapid Thermal Processor (AET RX6)‏‎ (08:58, 15 June 2023)
240. Atomic Layer Deposition Recipes‏‎ (10:27, 15 June 2023)
241. RIE 2 (MRC)‏‎ (07:55, 21 July 2023)
242. Wafer Cleaver Recipes (LSD-155LT)‏‎ (15:12, 15 August 2023)
243. Vraj Mehalana‏‎ (09:23, 23 August 2023)
244. E-Beam 2 (Custom)‏‎ (11:31, 25 August 2023)
245. UV Ozone Reactor‏‎ (09:17, 29 August 2023)
246. Nanofab-IT - Add Device to Network‏‎ (11:52, 30 August 2023)
247. NanoFab Process Group‏‎ (16:46, 11 September 2023)
248. Stepper 2 (Autostep 200) - Chuck Selection‏‎ (13:17, 13 September 2023)
249. Stepper 2 (Autostep 200) - Table of Chucks, Shims, Target Thicknesses‏‎ (13:39, 13 September 2023)
250. ASML Stepper 3 Error Recovery, Troubleshooting and Calibration‏‎ (10:36, 15 September 2023)
251. ASML 5500: Recovering from an Error‏‎ (10:41, 15 September 2023)
252. Wafer Bonder (SUSS SB6-8E)‏‎ (10:53, 20 September 2023)
253. Sputtering Recipes‏‎ (21:36, 21 September 2023)
254. Photomask Ordering Procedure for UCSB Users‏‎ (14:05, 22 September 2023)
255. Contact Aligner (SUSS MA-6)‏‎ (14:08, 22 September 2023)
256. GCA 6300 Mask Making Guidance‏‎ (14:11, 22 September 2023)
257. Automated Wafer Cleaver (Loomis LSD-155LT)‏‎ (08:16, 26 September 2023)
258. Photoluminescence PL Setup (Custom)‏‎ (20:45, 26 September 2023)
259. Holographic Lith/PL Setup (Custom)‏‎ (20:48, 26 September 2023)
260. News Feed‏‎ (12:10, 4 October 2023)
261. Nanofab New User Onboarding‏‎ (14:52, 12 October 2023)
262. Photolithography - Manual Edge-Bead Removal Techniques‏‎ (13:53, 13 October 2023)
263. UCSB NanoFab Microscope Training‏‎ (12:41, 16 October 2023)
264. Measurements and Imaging with Amscope Camera - Quickstart Usage Guide‏‎ (16:57, 16 October 2023)
265. Dicing Saw (ADT)‏‎ (15:11, 17 October 2023)
266. Plasma Activation (EVG 810)‏‎ (11:06, 30 October 2023)
267. Wafer Bonder (Logitech WBS7)‏‎ (14:50, 30 October 2023)
268. Tube Furnace Wafer Bonding (Thermco)‏‎ (14:55, 30 October 2023)
269. XeF2 Etch (Xetch)‏‎ (15:03, 30 October 2023)
270. Resistivity Mapper (CDE RESMAP)‏‎ (15:07, 30 October 2023)
271. Microscopes‏‎ (17:02, 1 November 2023)
272. Aidan Hopkins‏‎ (17:15, 1 November 2023)
273. Homepage Draft1‏‎ (13:59, 2 November 2023)
274. Frequently Asked Questions‏‎ (08:59, 21 November 2023)
275. Plasma Clean (YES EcoClean)‏‎ (12:31, 22 November 2023)
276. Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP)‏‎ (13:09, 22 November 2023)
277. Usage Data and Statistics‏‎ (17:53, 25 November 2023)
278. YES Recipe Screenshots: STD-N2-O2‏‎ (12:08, 30 November 2023)
279. YES Recipe Screenshots: STD-O2‏‎ (12:12, 30 November 2023)
280. Laser Etch Monitoring‏‎ (15:09, 6 December 2023)
281. Rapid Thermal Processor (SSI Solaris 150)‏‎ (08:36, 8 December 2023)
282. PECVD Recipes‏‎ (10:28, 20 December 2023)
283. CAIBE (Oxford Ion Mill)‏‎ (09:47, 21 December 2023)
284. Biljana Stamenic‏‎ (16:07, 29 December 2023)
285. Surfscan Errors and Workarounds‏‎ (11:36, 4 January 2024)
286. Autostep 200 Mask Making Guidance‏‎ (14:44, 4 January 2024)
287. DUV Flood Expose‏‎ (15:40, 4 January 2024)
288. Wafer scanning process traveler‏‎ (17:05, 4 January 2024)
289. Stepper 2 (AutoStep 200) Operating Procedures‏‎ (16:24, 8 January 2024)
290. Services‏‎ (21:55, 9 January 2024)
291. Ion Beam Deposition (Veeco NEXUS)‏‎ (11:04, 11 January 2024)
292. Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences‏‎ (14:38, 11 January 2024)
293. Maskless Aligner (Heidelberg MLA150)‏‎ (10:34, 26 January 2024)
294. Thermal Processing Recipes‏‎ (16:24, 30 January 2024)
295. Surface Analysis (KLA/Tencor Surfscan)‏‎ (18:02, 2 February 2024)
296. MLA150 - Design Guidelines‏‎ (15:41, 4 February 2024)
297. ICP Etch 1 (Panasonic E646V)‏‎ (15:18, 7 February 2024)
298. ICP Etch 2 (Panasonic E626I)‏‎ (15:19, 7 February 2024)
299. Dry Etching Recipes‏‎ (15:31, 7 February 2024)
300. Photolithography - Improving Adhesion Photoresist Adhesion‏‎ (12:41, 10 February 2024)
301. Ellipsometer (Woollam)‏‎ (15:37, 12 February 2024)
302. Ellipsometer (Woollam) - Measuring thin metals with oxide pre-measurement‏‎ (15:39, 12 February 2024)
303. Stepper 1 (GCA 6300)‏‎ (17:43, 12 February 2024)
304. Stepper 2 (AutoStep 200)‏‎ (17:44, 12 February 2024)
305. DSEIII (PlasmaTherm/Deep Silicon Etcher)‏‎ (15:17, 15 February 2024)
306. Plasma Clean (Gasonics 2000)‏‎ (12:12, 23 February 2024)
307. Critical Point Dryer‏‎ (12:16, 23 February 2024)
308. SEM 1 (JEOL IT800SHL)‏‎ (21:07, 29 February 2024)
309. Field Emission SEM 2 (JEOL IT800SHL)‏‎ (21:08, 29 February 2024)
310. Tool List‏‎ (11:52, 1 March 2024)
311. Suss Aligners (SUSS MJB-3)‏‎ (12:07, 1 March 2024)
312. Oxygen Plasma System Recipes‏‎ (13:55, 1 March 2024)
313. Tube Furnace (Tystar 8300)‏‎ (11:15, 7 March 2024)
314. IBD: Calibrating Optical Thickness‏‎ (10:19, 9 March 2024)
315. Staff List‏‎ (09:42, 11 March 2024)
316. Main Page‏‎ (16:13, 12 March 2024)
317. Direct-Write Lithography Recipes‏‎ (15:04, 20 March 2024)
318. MLA150 - Troubleshooting‏‎ (15:05, 20 March 2024)
319. Wet Benches‏‎ (13:24, 21 March 2024)
320. Stepper Recipes‏‎ (17:03, 21 March 2024)
321. Gold Plating Bench‏‎ (10:27, 1 April 2024)
322. Wet Etching Recipes‏‎ (10:34, 1 April 2024)
323. MLA150 - CAD Files and Templates‏‎ (21:25, 4 April 2024)
324. Calculators + Utilities‏‎ (22:44, 4 April 2024)
325. Step Profilometer (KLA Tencor P-7)‏‎ (23:06, 4 April 2024)
326. Nanofab Staff Internal Pages‏‎ (16:10, 9 April 2024)
327. Nanofab Job Postings‏‎ (11:48, 24 April 2024)
328. Process Group - Process Control Data‏‎ (12:03, 24 April 2024)
329. KLayout Design Tips‏‎ (08:57, 1 May 2024)
330. ASML Stepper 3 - UCSB Test Reticles‏‎ (09:35, 1 May 2024)
331. Packaging Recipes‏‎ (11:18, 1 May 2024)
332. Stepper 3 (ASML DUV)‏‎ (13:08, 3 May 2024)
333. ICP Etching Recipes‏‎ (12:49, 7 May 2024)
334. E-Beam 1 (Sharon)‏‎ (16:03, 7 May 2024)
335. MLA Recipes‏‎ (12:08, 9 May 2024)
336. Lithography Recipes‏‎ (12:37, 9 May 2024)

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