Deep UV Optical Microscope (Olympus)

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Deep UV Optical Microscope (Olympus)
Tool Type Inspection, Test and Characterization
Location Bay 7
Supervisor Tony Bosch
Supervisor Phone (805) 893-3486
Supervisor E-Mail
Description Deep-Ultraviolet (250nm) Microscope
Manufacturer Olympus
Model MX61A-DUV


This system does general purpose imaging in the visible and also has high resolution/high magnification DUV imaging using 250 nm light. Surface features less than 100nm can be resolved.

The system has precision motorized stage control and is fully computer controlled for image capture and sample manipulation.

A Good system for CD measurements on wafer (250nm and above) without entry into the SEM.

Detailed Specifications

  • Microscope Objectives:
    • 5x, 10x, 20x, 50x, 100x, DUV-100x
  • Software Control:
    • Motorized Stage & Objective Turret
    • Calibrated Measurements (calibrations fixed)
    • Z-motor (focus height) measurement
  • Filters:
    • Bright Field / Dark Field (visible only)


DUV microscope image with 1µm scale bar
100x DUV image taken with the Olympus MX61A-DUV, showing sub-micron resolution.