Vacuum Oven (YES)

From UCSB Nanofab Wiki
Jump to: navigation, search
Vacuum Oven (YES)
Vacuum Oven.jpg
Tool Type Lithography
Location Bay 3
Supervisor Brian Lingg
Supervisor Phone (805) 893-8145
Supervisor E-Mail lingg_b@ucsb.edu
Description Vacuum/Ammonia Oven
Manufacturer Yield Engineering Systems



Detailed Info

  • Max. Temp: 250°C
  • Gases available: N2
  • Atmospheric Pressure Only

This oven is slated to be replaced with a programmable, high-temp vacuum oven.