ASML 5500: Recovering from a Typo in Reticle ID
If you ran a job and got "Reticle Not Present" due to a typo in your job/layer/image's reticle ID.
- Do NOT exit task streaming!
- Abort the Batch: Choose the task, click "Abort"
- In the following popup window, click "Remove Wafer from Litho Cluster"
- Wait for the task status to change from "Aborting" to "Aborted"
Your wafer should be removed to Port #2, and the task should be "Aborted" on the task list.
Edit your job and type in the correct reticle ID. You can look at the "Mat Hdl" (Material handler) > Exchange Reticles and copy/paste the Recticle ID from there.