SEM Sample Coater (Hummer)
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SEM Sample Coater (Hummer)
Tool Type
Inspection, Test and Characterization
Location
Bay 1
Supervisor
Don Freeborn
Supervisor Phone
(805) 893-7975
Supervisor E-Mail
dfreeborn@ece.ucsb.edu
Description
Manufacturer
Hummer
About
This system is for coating Pd/Au thin layers onto samples that will charge during FESEM inspection.
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