Glossary

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Access code

The characters a user must enter at the logon screen.

Area

The term that identifies events larger than the maximum particle size for a scan (as set by the recipe’s Area From parameter). Defect maps display areas as a series of chords.

Area From

A recipe parameter that sets the maximum size for LPDs during data collection. Defects larger than the Area From value are classified as areas.

Automatic operation

A scan option that allows each selected wafer in a cassette to be scanned automatically in sequence. See scan mode and scan sequence.

Back up

To save data from the instrument’s hard disk to diskettes or a network drive (if available). The data can be restored at a later time.

Bin splits

Color-coded defect or haze ranges. The instrument displays data on maps and histograms using thecolor-coding scheme. Data within a bin split range can be enabled or disabled by clicking a bin split button in the wafer summary. Bin split ranges can be changed through the histogram.

Calibration curve

A curve that matches cross section (scattering efficiency) measurements to defect diameters for a given substrate, or that matches measured haze to actual haze.

Cassette catalog

A part of the Scan window. When a cassette is loaded on an indexer and cataloged, the cassette catalog displays which slots are occupied. The cassette catalog can be used to select one or more wafers for scanning.

Catalog (a cassette)

To list the cassette slots occupied by wafers. Catalog scan To catalog and then scan wafers from a cassette. The cassette can be cataloged by slot number in 1 to 25 order or 25 to 1 order.

Choose

To pick a menu item or other item that starts an action. You can choose an item using the mouse or keypad.

Chord

A line representing one sweep in an area defect. A series of chords forms an area. See area.

Control chart

In statistical process control, a graphic representation of a characteristic of a process showing plotted values of some statistic gathered from that characteristic and one or two control limits. A control chart is used to judge if a process is in control and as an aid in achieving and maintaining statistical control.

Control limit

In statistical process control, a line or lines on a control chart that are used as a basis for judging the significance of variations from subgroup to subgroup. Variation beyond a control limit is evidence that special causes are affecting the process. Control limits are calculated from process data.

Cycle control

A control within dialog boxes that when clicked presents options one at a time. Click the left button to cycle forward through the list of options. Click the right button to cycle backward.

Desktop

The software running on a desktop computer rather than an instrument. Data data can be analyzed by importing it into the desktop.

Dialog box

A rectangular box on the screen that can contain a combination of lists, options, data entry fields, and command buttons. A dialog box appears when the instrument needs more information before performing an operation.

Direct access mode

See One-Wafer mode.

Disk space

The total amount of space available on the hard disk. Free disk space is the amount of disk space unused.

Directory

Computer files are stored on the computer’s hard disk in directories. The directory name identifies the location where the files are stored. See Path.

Edge exclusion

The area at the edge of the substrate that is excluded from data collection during a scan. Exclusion regions Regions on a substrate that are excluded from data collection.

Export

To save selected data, such as recipes, wafer summaries, and wafer maps, to diskette. Exported data can be imported into another Surfscan 6000-series system. See import.

Field

A rectangle in a dialog box used for entering data. The text cursor (a vertical bar) generally appears in the first field in a dialog box. Also, a data item stored in a database. A collection of related fields is called a record.

Gain

A recipe parameter that sets the overall measurable defect or haze data collection range.

Graphics cursor

Graphics cursors appear as vertical bars in histogram windows and can be used to change defect bin splits.

Haze

Background scatter caused by imperfections in the surface of the substrate, such as intrinsic substrate roughness and polishing damage. Haze data can be displayed in a map, histogram, or both. Haze is measured in parts-per-million (ppm) of the incident beam.

Haze average

The total haze in parts-per-million divided by the measurable wafer surface area.

Haze peak

The maximum measured haze value.

Haze region

The percentage of the measurable wafer surface area containing haze.

Histogram

A plot of data that has possible values on one axis and frequency of those values on the other axis. In the Scan application, the histogram displays the distribution of defects or haze from the last scan. When a defect map is displayed, the histogram shows defect size versus counts. When a haze map is displayed, the histogram shows haze value (ppm) versus counts.

Histogram zoom

Changing the defect or haze range through the histogram.

Hold (a scan)

Press the MICROSCOPE key. When a scan is on-hold, a MicroView can be performed on the wafer.

Home

The position of the indexer when it is fully raised.

Import

To load data previously saved in an export file. See export.

Indexer

The mechanism that moves the cassette up and down.

Light point defect

An event characterized as a particle.

Limit marker

The marker used to change defect or haze bin limits in the histogram.

Locator

The plate upon which a cassette rests when in the indexer. The locator must be changed for different cassette sizes.

Log off

Sign off from the instrument by choosing the Log Off icon from the System Menu.

Log on

Sign on to the instrument by entering your access code.

Lot ID

The ID assigned to a wafer lot. This ID can be entered in the Scan application.

Lot summary

A summary of the data collected for wafers in a cassette. The instrument displays a lot summary when a scan sequence completes or when you press HOME after a scan.

LPD cursor

The cursor used in a magnified (zoomed) wafer map. This cursor automatically snaps to the nearest LPD. The particle box displays the location and size of the particle.

Map-to-Map

A defect comparison technique. The before map and after map are compared and the instrument generates an added defects map (defects found on the after map but not on the before map), removed defects map (defects found on the before map but not on the after map), and common defects map (defects common to both maps).

Measurable (wafer) surface area

The substrate area measured by the instrument. The total substrate area minus the edge exclusion and exclusion regions, if any.

Menu

A list of commands. Two types of menus are supported — full-screen menus and drop-down menus. Full-screen menus such as the System Menu display application icons. You can start an application by double-clicking the left button on its icon. A menu in the menu bar opens when clicked. See menu bar.

Menu Bar

Menu bars are displayed at the top of application windows and list menu titles. You can open a menu listed in the menu bar by clicking on its title. You can choose from the menu by clicking on an item.

MicroView

An analytical tool that displays the topography of a substrate’s surface and that reveals the characteristic light scattering distribution often associated with contaminants. MicroViews can be rendered in color or wireframe and can be viewed using different perspectives.

On-screen keypad

The miniature keyboard displayed on the screen that is used for entering alphabetic and numeric data with the mouse.

One-Wafer scan

A scan mode in which only one wafer is selected for scanning. Also called Direct Access mode.

Point

To move the mouse until the tip of the pointer overlaps (points to) an item on the screen. See pointer.

Range

A measure of the variation in a data set. It is calculated by subtracting the lowest value in the data set from the highest in that same set.

Recipe

A set of instrument data collection, data display, configuration, and sort parameters that are stored by a unique name. The name of the current recipe is displayed in the Scan window title bar.  

Rendering

A MicroView display format: color or wire frame.

Restore To return data previously saved by a backup operation.

Sample

In statistical process control, one or more individual events or measurements selected from the output of a process. Sample size is denoted by the letter n.

Sample wafer

A wafer having defects of a known diameter and that is used for calibrating the instrument.

Scan

To collect defect or haze data from a substrate. The Surfscan 6000-series instrument collects and processes data using the data collection, data display, configuration, and sort parameters specified in the current recipe. The instrument displays the results of the scan and can print or save the data.

Scan operation

Automatic or manual. In automatic operation, the instrument scans all wafers (or selected wafers) automatically in the specified scan sequence. In manual mode, the operator must press START for each wafer scan. See scan sequence.

Scan sequence

The order in which wafers in a cassette will be scanned.

Select

To highlight an item by clicking it with the mouse or by using the keypad.

Select button

A button within dialog boxes that when selected opens another dialog box.

Selection bar

The highlighted bar or dotted rectangle appearing in a dialog box that indicates the option or command button that will be selected if you press the ENTER key. The selection bar can be moved by using the keypad.

Slot selector

A control displayed in Cassette Catalog window that allows you to choose slots for scanning.

Sort

In the scan application, sort parameters specify the pass/fail limits. When two cassettes are used, substrates can be sorted to appropriate cassettes.

Status box

The box in the lower left of the Scan window that displays the scan sequence, scan mode, and status messages.

Summary

The scan summary results.

System log

A list of activities or events performed on the system. Using the ViewLog utility, the system log can be viewed and printed. Log entries can be deleted when no longer needed.

System Menu

The System Menu displays icons of the applications available to the user.

Tencor File Format

A file interchange format that is used for analyzing data on a review station or Surfscan SWIFT/ Station.

Text cursor

The vertical straight line appearing in fields. The text cursor marks the location where characters will appear when typed.

TFF

See Tencor File Format.

Threshold

The bottom limit of the defect or haze range for a scan.

Throughput

The speed at which the instrument processes wafers.

Tile

The smallest area on the wafer when collecting haze values. Each tile is 832 x 860 µm. Also, refers to an action of displaying more than one window at a time on the screen.

Title bar

Each application displays a title bar at the top of the application window. The title bar shows the application name, current recipe in parentheses, communication mode—Local or Remote—and window control buttons.

User ID

A customer-defined data field that is stored in the database.

User names

The names assigned to operators, engineers, system managers, and other instrument users. This name must be supplied when starting the instrument and determines which functions the user is allowed to perform.

Wafer comment

A comment that can be applied to a wafer.

Wafer ID

A name, number, or other identifier applied to a wafer. Wafer IDs are stored in the database.

Wafer map

An area on the screen that displays a defect or haze map of the wafer. A part of the Scan and Browser Review windows.

Wafer summary

An area that displays wafer scan results, defect and haze ranges, and controls for enabling or disabling the display of ranges. Wafer summaries are displayed in the Scan and Browser Review windows.

Zoom

To magnify a wafer map. The instrument provides five magnification levels.