Intellemetrics Laser Etch Monitor Procedure for Plasma-Therm Etchers

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The Plasma-Therm software is already set up in a way such that it is very easy to perform manual transfers of wafers in/out of the chamber, and manual ending of a running recipe, so specific detailed instructions are not necessary.

Please follow the General Procedure on the previous page. Contact staff if you need a full training on the Intellemetrics laser monitor systems.