S-Cubed Flexi - Operating Procedure

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Work In Progress

This article is still under construction. It may contain factual errors. Content is subject to change.

Only staff & designated maintenance users are allowed to write recipes on this tool!  
Maintaining low particle counts on this tool is extremely important, so users must strictly follow the training procedures.


make sure system is not running, is on correct screen etc.

Check liquids

CHeck if nozzle has been cleaned, TBD?

RUn a test wafer, look for uniformity.

Wafer Load

TBD, including check

Run Recipe