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  1. Video Training - Introduction (Internal)‏‎ (1 revision)
  2. InP Etch Test-in details‏‎ (1 revision)
  3. AUTOSTEP 200-PIECES 1st litho BL and BR orientation.pptx‏‎ (1 revision)
  4. Stepper 1 (GCA 6300) Substrate Thickness, Shim Thickness ans Target Thickness‏‎ (1 revision)
  5. Surfscan Errors and Workarounds‏‎ (1 revision)
  6. Photomask Ordering Procedure for UCSB Users‏‎ (1 revision)
  7. Stepper 2 (AutoStep 200) - Operating Procedure - Piece Parts‏‎ (1 revision)
  8. Operating Instructions‏‎ (1 revision)
  9. PECVD.docx‏‎ (1 revision)
  10. PECVD1 Operating Instructions.pdf‏‎ (1 revision)
  11. Older Publications‏‎ (1 revision)
  12. YES Recipe Screenshots: STD-N2-O2‏‎ (1 revision)
  13. Advanced PECVD Recipes‏‎ (1 revision)
  14. Wafer coating procedure‏‎ (1 revision)
  15. LegacyTable‏‎ (1 revision)
  16. Lab Rules backup‏‎ (1 revision)
  17. Test Data of etching SiO2 with CHF3/CF4/O2‏‎ (2 revisions)
  18. GCA 6300 training manual -old instructions‏‎ (2 revisions)
  19. Test Page‏‎ (2 revisions)
  20. PECVD1-SIN Standard Recipe (PlasmaTherm 790)‏‎ (2 revisions)
  21. Process Group - Lab Stocking/Supplies Tasks‏‎ (2 revisions)
  22. Molecular Vapor Deposition Recipes‏‎ (2 revisions)
  23. THz Physics Presentations‏‎ (2 revisions)
  24. E-Beam Lithography Recipes‏‎ (2 revisions)
  25. Video Training: Uploading to GauchoCast/Panopto (Internal)‏‎ (2 revisions)
  26. Surfscan photo‏‎ (2 revisions)
  27. Thermal Evaporator 2‏‎ (2 revisions)
  28. Michael Barreraz‏‎ (2 revisions)
  29. Plasma Clean (Gasonics 2000)‏‎ (2 revisions)
  30. ASML Stepper 3: Wafer Handler Reset Procedure‏‎ (2 revisions)
  31. SPR220-7 at 3kW various temperature without N2 gas‏‎ (2 revisions)
  32. Main Page mod‏‎ (2 revisions)
  33. Exposing a wafer piece‏‎ (2 revisions)
  34. Unaxis SiN100C 300nm-2019‏‎ (2 revisions)
  35. Surfscan6200 photos‏‎ (2 revisions)
  36. Autostep 200 Old training manual‏‎ (2 revisions)
  37. Errors‏‎ (2 revisions)
  38. SiO2 Etching Test using CF4/CHF3‏‎ (2 revisions)
  39. CDE ResMap Quick-Start instructions‏‎ (2 revisions)
  40. ASML 5500: Choose Marks for Prealignment‏‎ (2 revisions)
  41. Stepper 2 (Autostep 200) - Table of Chucks, Shims, Target Thicknesses‏‎ (2 revisions)
  42. E-Beam 5 (Plasys)‏‎ (2 revisions)
  43. ADT 7100 - Recovering an Old Recipe (2019)‏‎ (2 revisions)
  44. Stepper 2 (Autostep 200) - Chuck Selection‏‎ (2 revisions)
  45. Strip Annealer‏‎ (2 revisions)
  46. MVD - Wafer Coating - Process Traveler‏‎ (3 revisions)
  47. ASML Stepper 3 Dicing Guide Programming‏‎ (3 revisions)
  48. Vacuum Sealer‏‎ (3 revisions)
  49. ADT UV-Tape Table 1042R‏‎ (3 revisions)
  50. Ellipsometer (Woollam) - Measuring thin metals with oxide pre-measurement‏‎ (3 revisions)
  51. PECVD1-SiN standard recipe.pdf‏‎ (3 revisions)
  52. Test Data of Etching SiO2 with CHF3/CF4-Florine ICP Etcher‏‎ (3 revisions)
  53. Test Data of etching SiO2 with CHF3/CF4-Florine ICP Etcher‏‎ (3 revisions)
  54. Logitech WBS7 - Procedure for Wax Mounting with Spin-On Crystalbond‏‎ (3 revisions)
  55. Ellipsometer (Rudolph)‏‎ (3 revisions)
  56. DS-K101-304 Bake Temp. versus Develop Rate‏‎ (3 revisions)
  57. MLA Recipes‏‎ (3 revisions)
  58. Gold surface oxidation (darkening) due to O2/N2 plasma; the need for O2 only recipe.‏‎ (3 revisions)
  59. Wire Saw (Takatori)‏‎ (3 revisions)
  60. Vacuum Oven (YES)‏‎ (3 revisions)
  61. Mike Day‏‎ (3 revisions)
  62. ASML 5500: Recovering from a Typo in Reticle ID‏‎ (3 revisions)
  63. Vapor HF Etch (uETCH)‏‎ (3 revisions)
  64. Nanofab New User Onboarding‏‎ (3 revisions)
  65. Sputter 1 (Custom)‏‎ (3 revisions)
  66. Nick test‏‎ (3 revisions)
  67. Foong Fatt‏‎ (3 revisions)
  68. Glossary‏‎ (3 revisions)
  69. Video Training: Hosting with Zoom and GacuhoCast/Panopto‏‎ (3 revisions)
  70. User Accessible Commands‏‎ (3 revisions)
  71. Claudia Gutierrez‏‎ (4 revisions)
  72. Suss MA-6 Backside Alignment QuickStart‏‎ (4 revisions)
  73. Gold Plating Bench‏‎ (4 revisions)
  74. GCA 6300 Reboot Procedures‏‎ (4 revisions)
  75. Electronics Presentations‏‎ (4 revisions)
  76. Tube Furnace AlGaAs Oxidation (Lindberg)‏‎ (4 revisions)
  77. MLA150 - Large Image GDS Generation‏‎ (4 revisions)
  78. Vraj Mehalana‏‎ (4 revisions)
  79. Wafer Scanning process Traveler‏‎ (4 revisions)
  80. ASML DUV: Edge Bead Removal via Photolithography‏‎ (4 revisions)
  81. Laser Etch Monitor Simulation in Python‏‎ (4 revisions)
  82. Filmetrics F10-RT-UVX Operating Procedure‏‎ (4 revisions)
  83. Critical Point Dryer‏‎ (4 revisions)
  84. Test Data of etching SiO2 with CHF3/CF4-Florine‏‎ (4 revisions)
  85. Photolithography - Improving Adhesion Photoresist Adhesion‏‎ (4 revisions)
  86. KLA Tencor P7 - Basic profile instructions‏‎ (4 revisions)
  87. Jack Whaley‏‎ (4 revisions)
  88. Peder Lenvik‏‎ (4 revisions)
  89. Sputter 2 (SFI Endeavor)‏‎ (5 revisions)
  90. PubList2018‏‎ (5 revisions)
  91. Goniometer (Rame-Hart A-100) - Operating Procedure‏‎ (5 revisions)
  92. Thermal Evaporator 1‏‎ (5 revisions)
  93. Lift-Off with I-Line Imaging Resist + LOL2000 Underlayer‏‎ (5 revisions)
  94. Tino Sy‏‎ (5 revisions)
  95. Old Training Manual‏‎ (5 revisions)
  96. News Feed‏‎ (5 revisions)
  97. Spin Rinse Dryer (SemiTool)‏‎ (5 revisions)
  98. Old Deposition Data - 2021-12-15‏‎ (5 revisions)
  99. Mechanical Polisher (Allied)‏‎ (5 revisions)
  100. Olympus LEXT OLS4000 Confocal uScope - Quick Start‏‎ (6 revisions)
  101. S-Cubed Flexi - Operating Procedure‏‎ (6 revisions)
  102. Tube Furnace Wafer Bonding (Thermco)‏‎ (6 revisions)
  103. MLA150 - CAD Files and Templates‏‎ (6 revisions)
  104. Photonics Presentations‏‎ (6 revisions)
  105. E-BEAM‏‎ (6 revisions)
  106. Optical Film Thickness (Filmetrics)‏‎ (6 revisions)
  107. Wafer Cleaver (PELCO Flip-Scribe)‏‎ (6 revisions)
  108. Luis Zuzunaga‏‎ (6 revisions)
  109. Automated Wafer Cleaver (Loomis LSD-155LT)‏‎ (6 revisions)
  110. Digital Microscope (Olympus DSX1000)‏‎ (6 revisions)
  111. PECV1 Wafer Coating Process Traveler‏‎ (7 revisions)
  112. Stocked Chemical List‏‎ (7 revisions)
  113. Ovens 1, 2 & 3 (Labline)‏‎ (7 revisions)
  114. NanoFab Process Group‏‎ (7 revisions)
  115. Autostep 200 User Accessible Commands‏‎ (7 revisions)
  116. Wafer Scanning/Coating Process Traveler ( combined/less detailed)‏‎ (7 revisions)
  117. Optical Film Thickness & Wafer-Mapping (Filmetrics F50)‏‎ (7 revisions)
  118. Probe Station: I-V Curves with Keithley 2400 and Python Script‏‎ (7 revisions)
  119. PECVD1-(PlasmaTherm 790)‏‎ (7 revisions)
  120. GCA Old full training manual‏‎ (7 revisions)
  121. Deposition Data - temporary 2021-12-15‏‎ (7 revisions)
  122. Bill Millerski‏‎ (7 revisions)
  123. ADT 7100 - Initial Setup Before Cutting‏‎ (7 revisions)
  124. High Temp Oven (Blue M)‏‎ (7 revisions)
  125. Programming a Job‏‎ (7 revisions)
  126. RIE 1 (Custom)‏‎ (7 revisions)
  127. Dan Read‏‎ (7 revisions)
  128. Flip-Chip Bonder (Finetech)‏‎ (7 revisions)
  129. Optical Film Spectra + Optical Properties (Filmetrics F10-RT-UVX)‏‎ (7 revisions)
  130. Resistivity Mapper (CDE RESMAP)‏‎ (8 revisions)
  131. Filmetrics F40-UV Quick Start‏‎ (8 revisions)
  132. FIJI - Microscope Measurement Tools‏‎ (8 revisions)
  133. SEM Sample Coater (Hummer)‏‎ (8 revisions)
  134. ASML 5500: Recovering from an Error‏‎ (8 revisions)
  135. Focused Ion-Beam Lithography (Raith Velion)‏‎ (8 revisions)
  136. Old Deposition Data - NastaziaM 2021-11-22‏‎ (9 revisions)
  137. Nano-Imprint (Nanonex NX2000)‏‎ (9 revisions)
  138. SEM 1 (JEOL IT800SHL)‏‎ (9 revisions)
  139. Process Group - Billing Instructions‏‎ (9 revisions)
  140. Fluorescence Microscope (Olympus MX51)‏‎ (9 revisions)
  141. GCA 6300 Mask Making Guidance‏‎ (9 revisions)
  142. Photoluminescence PL Setup (Custom)‏‎ (9 revisions)
  143. Oven 4 (Thermo-Fisher HeraTherm)‏‎ (9 revisions)
  144. Optical Film Thickness (Nanometric)‏‎ (9 revisions)
  145. Holographic Lith/PL Setup (Custom)‏‎ (9 revisions)
  146. Bill Mitchell‏‎ (9 revisions)
  147. YES-150C-Various-Resists‏‎ (9 revisions)
  148. KLA Tencor P7 - Saving Profile Data‏‎ (9 revisions)
  149. Ashers (Technics PEII)‏‎ (9 revisions)
  150. Photolithography - Manual Edge-Bead Removal Techniques‏‎ (10 revisions)
  151. Unaxis wafer coating procedure‏‎ (10 revisions)
  152. Measurements and Imaging with Amscope Camera - Quickstart Usage Guide‏‎ (10 revisions)
  153. InP Etch Test Result in Details‏‎ (10 revisions)
  154. Wafer Coating Process Traveler1‏‎ (10 revisions)
  155. Intellemetrics Laser Etch Monitor Procedure for Panasonic ICP Etchers‏‎ (10 revisions)
  156. GCA 6300 USer Accessible Commands‏‎ (10 revisions)
  157. Ning Cao‏‎ (10 revisions)
  158. CC-PRIME OnBoarding 2022-08‏‎ (10 revisions)
  159. Logitech WBS7 - Procedure for Wax Mounting with bulk Crystalbond Stick‏‎ (10 revisions)
  160. IBD: Calibrating Optical Thickness‏‎ (10 revisions)
  161. Adam Abrahamsen‏‎ (10 revisions)
  162. UV Ozone Reactor‏‎ (11 revisions)
  163. Deep UV Optical Microscope (Olympus)‏‎ (11 revisions)
  164. Homepage Draft1‏‎ (11 revisions)
  165. KLayout Design Tips‏‎ (11 revisions)
  166. IR Aligner (SUSS MJB-3 IR)‏‎ (11 revisions)
  167. Step Profilometer (KLA Tencor P-7)‏‎ (11 revisions)
  168. Chemical-Mechanical Polisher (Logitech)‏‎ (12 revisions)
  169. Chemical List‏‎ (12 revisions)
  170. Nanofab Job Postings‏‎ (12 revisions)
  171. Brian Thibeault‏‎ (12 revisions)
  172. Process Group - Remote Fabrication Jobs‏‎ (12 revisions)
  173. Ovens - Overview of All Lab Ovens‏‎ (12 revisions)
  174. Molecular Vapor Deposition‏‎ (12 revisions)
  175. Wafer Bonder (SUSS SB6-8E)‏‎ (12 revisions)
  176. YES-SPR220-Various-Temps‏‎ (12 revisions)
  177. Film Stress (Tencor Flexus)‏‎ (12 revisions)
  178. InP etch result in details‏‎ (13 revisions)
  179. Field Emission SEM 2 (JEOL IT800SHL)‏‎ (13 revisions)
  180. Step Profilometer (DektakXT)‏‎ (14 revisions)
  181. Lee Sawyer‏‎ (14 revisions)
  182. ASML Stepper 3 - UCSB Test Reticles‏‎ (15 revisions)
  183. Unaxis VLR Etch - Process Control Data‏‎ (15 revisions)
  184. Laser Etch Monitoring‏‎ (15 revisions)
  185. ASML Stepper 3 Standard Operating Procedure‏‎ (15 revisions)
  186. PECVD1 Wafer Coating Process Traveler‏‎ (16 revisions)
  187. DUV Flood Expose‏‎ (16 revisions)
  188. E-Beam Lithography System (JEOL JBX-6300FS)‏‎ (16 revisions)
  189. Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer)‏‎ (16 revisions)
  190. Plasma Activation (EVG 810)‏‎ (17 revisions)
  191. XeF2 Etch (Xetch)‏‎ (17 revisions)
  192. Main Page‏‎ (17 revisions)
  193. Thermal Processing Recipes‏‎ (18 revisions)
  194. Atomic Force Microscope (Bruker ICON)‏‎ (18 revisions)
  195. Sputter 5 (AJA ATC 2200-V)‏‎ (18 revisions)
  196. Wafer Bonder (Logitech WBS7)‏‎ (18 revisions)
  197. MLA150 - Design Guidelines‏‎ (18 revisions)
  198. Laser Scanning Confocal M-scope (Olympus LEXT)‏‎ (18 revisions)
  199. Process Group - Process Control Data‏‎ (19 revisions)
  200. Filmetrics F40-UV Microscope-Mounted‏‎ (19 revisions)
  201. Tech Talks Seminar Series‏‎ (19 revisions)
  202. Troubleshooting and Recovery‏‎ (19 revisions)
  203. Oven 5 (Labline)‏‎ (19 revisions)
  204. Probe Station & Curve Tracer‏‎ (19 revisions)
  205. Oxford ICP Etcher (PlasmaPro 100 Cobra)‏‎ (19 revisions)
  206. UCSB NanoFab Microscope Training‏‎ (19 revisions)
  207. Automated Coat/Develop System (S-Cubed Flexi)‏‎ (19 revisions)
  208. Lift-Off with DUV Imaging + PMGI Underlayer‏‎ (19 revisions)
  209. Brian Lingg‏‎ (20 revisions)
  210. Tom Reynolds‏‎ (20 revisions)
  211. Sputter 4 (AJA ATC 2200-V)‏‎ (20 revisions)
  212. IR Thermal Microscope (QFI)‏‎ (20 revisions)
  213. Rapid Thermal Processor (SSI Solaris 150)‏‎ (20 revisions)
  214. RIE 5 (PlasmaTherm)‏‎ (20 revisions)
  215. Rapid Thermal Processor (AET RX6)‏‎ (20 revisions)
  216. DSEIII (PlasmaTherm/Deep Silicon Etcher)‏‎ (21 revisions)
  217. Plasma Clean (YES EcoClean)‏‎ (21 revisions)
  218. Autostep 200 Mask Making Guidance‏‎ (21 revisions)
  219. GoPro Hero8 Black (Internal)‏‎ (21 revisions)
  220. RIE 2 (MRC)‏‎ (22 revisions)
  221. Wafer Coating Process Traveler‏‎ (23 revisions)
  222. CAIBE (Oxford Ion Mill)‏‎ (23 revisions)
  223. Suss Aligners (SUSS MJB-3)‏‎ (24 revisions)
  224. DUMMY TOOL‏‎ (24 revisions)
  225. Don Freeborn‏‎ (24 revisions)
  226. Mike Silva‏‎ (25 revisions)
  227. Biljana Stamenic‏‎ (25 revisions)
  228. Usage Data and Statistics‏‎ (25 revisions)
  229. Ellipsometer (Woollam)‏‎ (25 revisions)
  230. Demis D. John‏‎ (25 revisions)
  231. Sputter 3 (AJA ATC 2000-F)‏‎ (26 revisions)
  232. Stepper 1 (GCA 6300) - Standard Operating Procedure‏‎ (26 revisions)
  233. Aidan Hopkins‏‎ (26 revisions)
  234. PECVD1 Wafer Coating Process‏‎ (27 revisions)
  235. Tony Bosch‏‎ (28 revisions)
  236. ICP-Etch (Unaxis VLR)‏‎ (29 revisions)
  237. Services‏‎ (30 revisions)
  238. Other Dry Etching Recipes‏‎ (30 revisions)
  239. Vapor HF Etch‏‎ (30 revisions)
  240. Atomic Layer Deposition (Oxford FlexAL)‏‎ (30 revisions)
  241. HF Vapor Etch‏‎ (31 revisions)
  242. RIE 3 (MRC)‏‎ (31 revisions)
  243. Stepper 2 (AutoStep 200) Operating Procedures‏‎ (32 revisions)
  244. Tube Furnace (Tystar 8300)‏‎ (34 revisions)
  245. Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher‏‎ (34 revisions)
  246. Old training manual‏‎ (34 revisions)
  247. Packaging Recipes‏‎ (36 revisions)
  248. ASML Stepper 3 Error Recovery, Troubleshooting and Calibration‏‎ (38 revisions)
  249. Ion Beam Deposition (Veeco NEXUS)‏‎ (39 revisions)
  250. COVID-19 User Policies‏‎ (40 revisions)

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