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Showing below up to 256 results in range #81 to #336.

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  1. User Accessible Commands‏‎ (3 revisions)
  2. MVD - Wafer Coating - Process Traveler‏‎ (3 revisions)
  3. Vacuum Sealer‏‎ (3 revisions)
  4. ASML Stepper 3 Dicing Guide Programming‏‎ (3 revisions)
  5. Ellipsometer (Woollam) - Measuring thin metals with oxide pre-measurement‏‎ (3 revisions)
  6. ADT UV-Tape Table 1042R‏‎ (3 revisions)
  7. Test Data of Etching SiO2 with CHF3/CF4-Florine ICP Etcher‏‎ (3 revisions)
  8. PECVD1-SiN standard recipe.pdf‏‎ (3 revisions)
  9. Test Data of etching SiO2 with CHF3/CF4-Florine ICP Etcher‏‎ (3 revisions)
  10. Logitech WBS7 - Procedure for Wax Mounting with Spin-On Crystalbond‏‎ (3 revisions)
  11. Ellipsometer (Rudolph)‏‎ (3 revisions)
  12. DS-K101-304 Bake Temp. versus Develop Rate‏‎ (3 revisions)
  13. Gold surface oxidation (darkening) due to O2/N2 plasma; the need for O2 only recipe.‏‎ (3 revisions)
  14. Wire Saw (Takatori)‏‎ (3 revisions)
  15. Vacuum Oven (YES)‏‎ (3 revisions)
  16. Mike Day‏‎ (3 revisions)
  17. ASML 5500: Recovering from a Typo in Reticle ID‏‎ (3 revisions)
  18. Vapor HF Etch (uETCH)‏‎ (3 revisions)
  19. Nanofab New User Onboarding‏‎ (3 revisions)
  20. Critical Point Dryer‏‎ (4 revisions)
  21. MLA Recipes‏‎ (4 revisions)
  22. Test Data of etching SiO2 with CHF3/CF4-Florine‏‎ (4 revisions)
  23. Photolithography - Improving Adhesion Photoresist Adhesion‏‎ (4 revisions)
  24. KLA Tencor P7 - Basic profile instructions‏‎ (4 revisions)
  25. Jack Whaley‏‎ (4 revisions)
  26. Peder Lenvik‏‎ (4 revisions)
  27. Claudia Gutierrez‏‎ (4 revisions)
  28. Suss MA-6 Backside Alignment QuickStart‏‎ (4 revisions)
  29. Gold Plating Bench‏‎ (4 revisions)
  30. Electronics Presentations‏‎ (4 revisions)
  31. Tube Furnace AlGaAs Oxidation (Lindberg)‏‎ (4 revisions)
  32. GCA 6300 Reboot Procedures‏‎ (4 revisions)
  33. MLA150 - Large Image GDS Generation‏‎ (4 revisions)
  34. Vraj Mehalana‏‎ (4 revisions)
  35. Wafer Scanning process Traveler‏‎ (4 revisions)
  36. ASML DUV: Edge Bead Removal via Photolithography‏‎ (4 revisions)
  37. Laser Etch Monitor Simulation in Python‏‎ (4 revisions)
  38. Filmetrics F10-RT-UVX Operating Procedure‏‎ (4 revisions)
  39. News Feed‏‎ (5 revisions)
  40. Spin Rinse Dryer (SemiTool)‏‎ (5 revisions)
  41. Old Deposition Data - 2021-12-15‏‎ (5 revisions)
  42. Mechanical Polisher (Allied)‏‎ (5 revisions)
  43. Sputter 2 (SFI Endeavor)‏‎ (5 revisions)
  44. PubList2018‏‎ (5 revisions)
  45. Goniometer (Rame-Hart A-100) - Operating Procedure‏‎ (5 revisions)
  46. Thermal Evaporator 1‏‎ (5 revisions)
  47. Lift-Off with I-Line Imaging Resist + LOL2000 Underlayer‏‎ (5 revisions)
  48. Tino Sy‏‎ (5 revisions)
  49. Old Training Manual‏‎ (5 revisions)
  50. Luis Zuzunaga‏‎ (6 revisions)
  51. Automated Wafer Cleaver (Loomis LSD-155LT)‏‎ (6 revisions)
  52. Digital Microscope (Olympus DSX1000)‏‎ (6 revisions)
  53. Olympus LEXT OLS4000 Confocal uScope - Quick Start‏‎ (6 revisions)
  54. S-Cubed Flexi - Operating Procedure‏‎ (6 revisions)
  55. Tube Furnace Wafer Bonding (Thermco)‏‎ (6 revisions)
  56. MLA150 - CAD Files and Templates‏‎ (6 revisions)
  57. Photonics Presentations‏‎ (6 revisions)
  58. Optical Film Thickness (Filmetrics)‏‎ (6 revisions)
  59. E-BEAM‏‎ (6 revisions)
  60. Wafer Cleaver (PELCO Flip-Scribe)‏‎ (6 revisions)
  61. ADT 7100 - Initial Setup Before Cutting‏‎ (7 revisions)
  62. High Temp Oven (Blue M)‏‎ (7 revisions)
  63. Programming a Job‏‎ (7 revisions)
  64. RIE 1 (Custom)‏‎ (7 revisions)
  65. Dan Read‏‎ (7 revisions)
  66. Flip-Chip Bonder (Finetech)‏‎ (7 revisions)
  67. Optical Film Spectra + Optical Properties (Filmetrics F10-RT-UVX)‏‎ (7 revisions)
  68. Stocked Chemical List‏‎ (7 revisions)
  69. PECV1 Wafer Coating Process Traveler‏‎ (7 revisions)
  70. Ovens 1, 2 & 3 (Labline)‏‎ (7 revisions)
  71. NanoFab Process Group‏‎ (7 revisions)
  72. Autostep 200 User Accessible Commands‏‎ (7 revisions)
  73. Probe Station: I-V Curves with Keithley 2400 and Python Script‏‎ (7 revisions)
  74. Optical Film Thickness & Wafer-Mapping (Filmetrics F50)‏‎ (7 revisions)
  75. Wafer Scanning/Coating Process Traveler ( combined/less detailed)‏‎ (7 revisions)
  76. PECVD1-(PlasmaTherm 790)‏‎ (7 revisions)
  77. GCA Old full training manual‏‎ (7 revisions)
  78. Deposition Data - temporary 2021-12-15‏‎ (7 revisions)
  79. Bill Millerski‏‎ (7 revisions)
  80. Filmetrics F40-UV Quick Start‏‎ (8 revisions)
  81. FIJI - Microscope Measurement Tools‏‎ (8 revisions)
  82. SEM Sample Coater (Hummer)‏‎ (8 revisions)
  83. ASML 5500: Recovering from an Error‏‎ (8 revisions)
  84. Focused Ion-Beam Lithography (Raith Velion)‏‎ (8 revisions)
  85. Resistivity Mapper (CDE RESMAP)‏‎ (8 revisions)
  86. Holographic Lith/PL Setup (Custom)‏‎ (9 revisions)
  87. Bill Mitchell‏‎ (9 revisions)
  88. YES-150C-Various-Resists‏‎ (9 revisions)
  89. KLA Tencor P7 - Saving Profile Data‏‎ (9 revisions)
  90. Ashers (Technics PEII)‏‎ (9 revisions)
  91. Old Deposition Data - NastaziaM 2021-11-22‏‎ (9 revisions)
  92. Nano-Imprint (Nanonex NX2000)‏‎ (9 revisions)
  93. Fluorescence Microscope (Olympus MX51)‏‎ (9 revisions)
  94. Process Group - Billing Instructions‏‎ (9 revisions)
  95. GCA 6300 Mask Making Guidance‏‎ (9 revisions)
  96. Photoluminescence PL Setup (Custom)‏‎ (9 revisions)
  97. Oven 4 (Thermo-Fisher HeraTherm)‏‎ (9 revisions)
  98. Optical Film Thickness (Nanometric)‏‎ (9 revisions)
  99. Intellemetrics Laser Etch Monitor Procedure for Panasonic ICP Etchers‏‎ (10 revisions)
  100. Ning Cao‏‎ (10 revisions)
  101. GCA 6300 USer Accessible Commands‏‎ (10 revisions)
  102. CC-PRIME OnBoarding 2022-08‏‎ (10 revisions)
  103. Adam Abrahamsen‏‎ (10 revisions)
  104. IBD: Calibrating Optical Thickness‏‎ (10 revisions)
  105. Photolithography - Manual Edge-Bead Removal Techniques‏‎ (10 revisions)
  106. Logitech WBS7 - Procedure for Wax Mounting with bulk Crystalbond Stick‏‎ (10 revisions)
  107. Unaxis wafer coating procedure‏‎ (10 revisions)
  108. Measurements and Imaging with Amscope Camera - Quickstart Usage Guide‏‎ (10 revisions)
  109. InP Etch Test Result in Details‏‎ (10 revisions)
  110. Wafer Coating Process Traveler1‏‎ (10 revisions)
  111. UV Ozone Reactor‏‎ (11 revisions)
  112. Deep UV Optical Microscope (Olympus)‏‎ (11 revisions)
  113. KLayout Design Tips‏‎ (11 revisions)
  114. IR Aligner (SUSS MJB-3 IR)‏‎ (11 revisions)
  115. Homepage Draft1‏‎ (11 revisions)
  116. Step Profilometer (KLA Tencor P-7)‏‎ (11 revisions)
  117. Brian Thibeault‏‎ (12 revisions)
  118. Process Group - Remote Fabrication Jobs‏‎ (12 revisions)
  119. Ovens - Overview of All Lab Ovens‏‎ (12 revisions)
  120. Molecular Vapor Deposition‏‎ (12 revisions)
  121. Wafer Bonder (SUSS SB6-8E)‏‎ (12 revisions)
  122. YES-SPR220-Various-Temps‏‎ (12 revisions)
  123. Film Stress (Tencor Flexus)‏‎ (12 revisions)
  124. Chemical-Mechanical Polisher (Logitech)‏‎ (12 revisions)
  125. Chemical List‏‎ (12 revisions)
  126. SEM 1 (JEOL IT800SHL)‏‎ (12 revisions)
  127. Nanofab Job Postings‏‎ (12 revisions)
  128. InP etch result in details‏‎ (13 revisions)
  129. Field Emission SEM 2 (JEOL IT800SHL)‏‎ (13 revisions)
  130. Step Profilometer (DektakXT)‏‎ (14 revisions)
  131. Lee Sawyer‏‎ (14 revisions)
  132. ASML Stepper 3 Standard Operating Procedure‏‎ (15 revisions)
  133. ASML Stepper 3 - UCSB Test Reticles‏‎ (15 revisions)
  134. Unaxis VLR Etch - Process Control Data‏‎ (15 revisions)
  135. Laser Etch Monitoring‏‎ (15 revisions)
  136. Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer)‏‎ (16 revisions)
  137. PECVD1 Wafer Coating Process Traveler‏‎ (16 revisions)
  138. DUV Flood Expose‏‎ (16 revisions)
  139. E-Beam Lithography System (JEOL JBX-6300FS)‏‎ (16 revisions)
  140. Main Page‏‎ (17 revisions)
  141. Plasma Activation (EVG 810)‏‎ (17 revisions)
  142. XeF2 Etch (Xetch)‏‎ (17 revisions)
  143. MLA150 - Design Guidelines‏‎ (18 revisions)
  144. Laser Scanning Confocal M-scope (Olympus LEXT)‏‎ (18 revisions)
  145. Thermal Processing Recipes‏‎ (18 revisions)
  146. Atomic Force Microscope (Bruker ICON)‏‎ (18 revisions)
  147. Sputter 5 (AJA ATC 2200-V)‏‎ (18 revisions)
  148. Wafer Bonder (Logitech WBS7)‏‎ (18 revisions)
  149. Automated Coat/Develop System (S-Cubed Flexi)‏‎ (19 revisions)
  150. Lift-Off with DUV Imaging + PMGI Underlayer‏‎ (19 revisions)
  151. Process Group - Process Control Data‏‎ (19 revisions)
  152. Tech Talks Seminar Series‏‎ (19 revisions)
  153. Filmetrics F40-UV Microscope-Mounted‏‎ (19 revisions)
  154. Oven 5 (Labline)‏‎ (19 revisions)
  155. Troubleshooting and Recovery‏‎ (19 revisions)
  156. Probe Station & Curve Tracer‏‎ (19 revisions)
  157. Oxford ICP Etcher (PlasmaPro 100 Cobra)‏‎ (19 revisions)
  158. UCSB NanoFab Microscope Training‏‎ (19 revisions)
  159. Rapid Thermal Processor (SSI Solaris 150)‏‎ (20 revisions)
  160. Rapid Thermal Processor (AET RX6)‏‎ (20 revisions)
  161. RIE 5 (PlasmaTherm)‏‎ (20 revisions)
  162. Brian Lingg‏‎ (20 revisions)
  163. Tom Reynolds‏‎ (20 revisions)
  164. Sputter 4 (AJA ATC 2200-V)‏‎ (20 revisions)
  165. IR Thermal Microscope (QFI)‏‎ (20 revisions)
  166. GoPro Hero8 Black (Internal)‏‎ (21 revisions)
  167. DSEIII (PlasmaTherm/Deep Silicon Etcher)‏‎ (21 revisions)
  168. Autostep 200 Mask Making Guidance‏‎ (21 revisions)
  169. Plasma Clean (YES EcoClean)‏‎ (21 revisions)
  170. RIE 2 (MRC)‏‎ (22 revisions)
  171. CAIBE (Oxford Ion Mill)‏‎ (23 revisions)
  172. Wafer Coating Process Traveler‏‎ (23 revisions)
  173. DUMMY TOOL‏‎ (24 revisions)
  174. Suss Aligners (SUSS MJB-3)‏‎ (24 revisions)
  175. Don Freeborn‏‎ (24 revisions)
  176. Demis D. John‏‎ (25 revisions)
  177. Mike Silva‏‎ (25 revisions)
  178. Biljana Stamenic‏‎ (25 revisions)
  179. Usage Data and Statistics‏‎ (25 revisions)
  180. Ellipsometer (Woollam)‏‎ (25 revisions)
  181. Aidan Hopkins‏‎ (26 revisions)
  182. Stepper 1 (GCA 6300) - Standard Operating Procedure‏‎ (26 revisions)
  183. Sputter 3 (AJA ATC 2000-F)‏‎ (26 revisions)
  184. PECVD1 Wafer Coating Process‏‎ (27 revisions)
  185. Tony Bosch‏‎ (28 revisions)
  186. ICP-Etch (Unaxis VLR)‏‎ (29 revisions)
  187. Atomic Layer Deposition (Oxford FlexAL)‏‎ (30 revisions)
  188. Services‏‎ (30 revisions)
  189. Other Dry Etching Recipes‏‎ (30 revisions)
  190. Vapor HF Etch‏‎ (30 revisions)
  191. RIE 3 (MRC)‏‎ (31 revisions)
  192. HF Vapor Etch‏‎ (31 revisions)
  193. Stepper 2 (AutoStep 200) Operating Procedures‏‎ (32 revisions)
  194. Tube Furnace (Tystar 8300)‏‎ (34 revisions)
  195. Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher‏‎ (34 revisions)
  196. Old training manual‏‎ (34 revisions)
  197. Packaging Recipes‏‎ (36 revisions)
  198. ASML Stepper 3 Error Recovery, Troubleshooting and Calibration‏‎ (38 revisions)
  199. Ion Beam Deposition (Veeco NEXUS)‏‎ (39 revisions)
  200. RIE Etching Recipes‏‎ (40 revisions)
  201. COVID-19 User Policies‏‎ (40 revisions)
  202. Contact Aligner (SUSS MA-6)‏‎ (40 revisions)
  203. Atomic Layer Deposition Recipes‏‎ (40 revisions)
  204. Oxygen Plasma System Recipes‏‎ (42 revisions)
  205. Lab Rules‏‎ (42 revisions)
  206. MLA150 - Troubleshooting‏‎ (44 revisions)
  207. Research‏‎ (44 revisions)
  208. Dicing Saw (ADT)‏‎ (46 revisions)
  209. Maskless Aligner (Heidelberg MLA150)‏‎ (46 revisions)
  210. Lab Rules OLD 2018‏‎ (47 revisions)
  211. Microscopes‏‎ (48 revisions)
  212. Autostep 200 Troubleshooting and Recovery‏‎ (48 revisions)
  213. PECVD 2 (Advanced Vacuum)‏‎ (48 revisions)
  214. Nanofab Staff Internal Pages‏‎ (49 revisions)
  215. Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP)‏‎ (49 revisions)
  216. Contact Alignment Recipes‏‎ (51 revisions)
  217. Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences‏‎ (51 revisions)
  218. Wet Benches‏‎ (51 revisions)
  219. Editing Tutorials‏‎ (52 revisions)
  220. Direct-Write Lithography Recipes‏‎ (53 revisions)
  221. ICP Etch 2 (Panasonic E626I)‏‎ (55 revisions)
  222. OLD - PECVD2 Recipes‏‎ (56 revisions)
  223. Staff List‏‎ (57 revisions)
  224. Test Data of etching SiO2 with CHF3/CF4-ICP1‏‎ (58 revisions)
  225. InP Etch Rate and Selectivity (InP/SiO2)‏‎ (60 revisions)
  226. E-Beam Evaporation Recipes‏‎ (60 revisions)
  227. ICP-PECVD (Unaxis VLR)‏‎ (62 revisions)
  228. Thermal Evaporation Recipes‏‎ (62 revisions)
  229. ICP Etch 1 (Panasonic E646V)‏‎ (63 revisions)
  230. E-Beam 4 (CHA)‏‎ (63 revisions)
  231. PECVD 1 (PlasmaTherm 790)‏‎ (64 revisions)
  232. Oxford ICP Etcher - Process Control Data‏‎ (65 revisions)
  233. Thermal Evap 2 (Solder)‏‎ (66 revisions)
  234. Chemical List - OLD 2018-09-05‏‎ (68 revisions)
  235. E-Beam 3 (Temescal)‏‎ (68 revisions)
  236. E-Beam 2 (Custom)‏‎ (74 revisions)
  237. Wet Etching Recipes‏‎ (75 revisions)
  238. Thermal Evap 1‏‎ (76 revisions)
  239. E-Beam 1 (Sharon)‏‎ (79 revisions)
  240. Stepper Recipes‏‎ (83 revisions)
  241. Test Data of etching SiO2 with CHF3/CF4‏‎ (84 revisions)
  242. Surface Analysis (KLA/Tencor Surfscan)‏‎ (89 revisions)
  243. Stepper 2 (AutoStep 200)‏‎ (89 revisions)
  244. Calculators + Utilities‏‎ (94 revisions)
  245. Stepper 3 (ASML DUV)‏‎ (103 revisions)
  246. PECVD1 Recipes‏‎ (105 revisions)
  247. Frequently Asked Questions‏‎ (107 revisions)
  248. Stepper 1 (GCA 6300)‏‎ (111 revisions)
  249. Wafer scanning process traveler‏‎ (127 revisions)
  250. Tool List‏‎ (185 revisions)
  251. Dry Etching Recipes‏‎ (195 revisions)
  252. Vacuum Deposition Recipes‏‎ (222 revisions)
  253. Lithography Recipes‏‎ (233 revisions)
  254. ICP Etching Recipes‏‎ (354 revisions)
  255. Sputtering Recipes‏‎ (405 revisions)
  256. PECVD Recipes‏‎ (836 revisions)

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