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Combined display of all available logs of UCSB Nanofab Wiki. You can narrow down the view by selecting a log type, the username (case-sensitive), or the affected page (also case-sensitive).
(newest | oldest) View (newer 250 | older 250) (20 | 50 | 100 | 250 | 500)- 15:32, 19 July 2019 John d talk contribs automatically marked revision 156579 of page Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) patrolled
- 15:32, 19 July 2019 John d talk contribs automatically marked revision 156578 of page Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) patrolled
- 10:23, 19 July 2019 Freeborn d talk contribs uploaded File:Running a process on Plasma Therm SLR.pdf
- 09:58, 19 July 2019 Lingg talk contribs automatically marked revision 156576 of page Rapid Thermal Processor (SSI Solaris 150) patrolled
- 09:57, 19 July 2019 Lingg talk contribs automatically marked revision 156575 of page Rapid Thermal Processor (SSI Solaris 150) patrolled
- 07:46, 19 July 2019 Lingg talk contribs automatically marked revision 156574 of page File:Solaris 150 install manual software3 0 revQ.pdf patrolled
- 07:46, 19 July 2019 Lingg talk contribs uploaded File:Solaris 150 install manual software3 0 revQ.pdf
- 15:13, 18 July 2019 Lingg talk contribs automatically marked revision 156573 of page SSI Solaris 150 - Operating Procedure patrolled
- 12:29, 18 July 2019 John d talk contribs automatically marked revision 156572 of page Stepper 3 (ASML DUV) patrolled
- 12:27, 18 July 2019 John d talk contribs automatically marked revision 156571 of page Stepper 3 (ASML DUV) patrolled
- 12:24, 18 July 2019 John d talk contribs automatically marked revision 156570 of page Atomic Layer Deposition Recipes patrolled
- 09:20, 10 July 2019 Thibeault talk contribs automatically marked revision 156569 of page Template:Announcements patrolled
- 11:05, 9 July 2019 Silva talk contribs automatically marked revision 156568 of page Template:Announcements patrolled
- 11:03, 9 July 2019 Silva talk contribs automatically marked revision 156567 of page Template:Announcements patrolled
- 22:48, 8 July 2019 John d talk contribs automatically marked revision 156566 of page Template:WIP patrolled
- 22:47, 8 July 2019 John d talk contribs automatically marked revision 156565 of page GCA 6300 Mask Making Guidance patrolled
- 16:12, 8 July 2019 John d talk contribs automatically marked revision 156564 of page Stepper Recipes patrolled
- 16:10, 8 July 2019 John d talk contribs automatically marked revision 156563 of page Stepper Recipes patrolled
- 19:30, 7 July 2019 John d talk contribs automatically marked revision 156562 of page Frequently Asked Questions patrolled
- 11:50, 5 July 2019 John d talk contribs automatically marked revision 156561 of page Lithography Recipes patrolled
- 16:09, 3 July 2019 Silva talk contribs automatically marked revision 156560 of page Template:Announcements patrolled
- 14:33, 3 July 2019 John d talk contribs automatically marked revision 156559 of page IR Thermal Microscope (QFI) patrolled
- 14:31, 3 July 2019 John d talk contribs automatically marked revision 156558 of page IR Thermal Microscope (QFI) patrolled
- 10:46, 26 June 2019 John d talk contribs automatically marked revision 156557 of page Deep UV Optical Microscope (Olympus) patrolled
- 10:59, 24 June 2019 John d talk contribs automatically marked revision 156556 of page Tool List patrolled
- 10:09, 24 June 2019 Silva talk contribs automatically marked revision 156555 of page Template:Announcements patrolled
- 10:08, 24 June 2019 Sawyer l talk contribs automatically marked revision 156554 of page RIE 3 (MRC) patrolled
- 14:13, 21 June 2019 Biljana talk contribs automatically marked revision 156553 of page Stepper 2 (AutoStep 200) patrolled
- 08:08, 21 June 2019 Thibeault talk contribs automatically marked revision 156552 of page Template:Announcements patrolled
- 15:41, 20 June 2019 Biljana talk contribs automatically marked revision 156551 of page Stepper 1 (GCA 6300) Available chucks patrolled
- 15:39, 20 June 2019 Biljana talk contribs automatically marked revision 156550 of page Stepper 1 (GCA 6300) - Standard Operating Procedure patrolled
- 15:32, 20 June 2019 Biljana talk contribs automatically marked revision 156549 of page Stepper 1 (GCA 6300) Substrate Thickness, Shim Thickness ans Target Thickness patrolled
- 15:25, 20 June 2019 Biljana talk contribs automatically marked revision 156548 of page Stepper 1 (GCA 6300) - Standard Operating Procedure patrolled
- 15:24, 20 June 2019 Biljana talk contribs automatically marked revision 156547 of page Stepper 1 (GCA 6300) - Standard Operating Procedure patrolled
- 15:13, 20 June 2019 Biljana talk contribs automatically marked revision 156546 of page Stepper 1 (GCA6300) How to select proper chuck patrolled
- 15:10, 20 June 2019 Biljana talk contribs automatically marked revision 156545 of page Stepper 1 (GCA 6300) - Standard Operating Procedure patrolled
- 14:23, 20 June 2019 Biljana talk contribs automatically marked revision 156544 of page Stepper 2 (AutoStep 200) Operating Procedures patrolled
- 13:46, 20 June 2019 Biljana talk contribs automatically marked revision 156543 of page Stepper 2 (Autostep 200) - Job Programming patrolled
- 13:37, 20 June 2019 Biljana talk contribs automatically marked revision 156542 of page Stepper 2 (Autostep 200) - Table of Chucks, Shims, Target Thicknesses patrolled
- 13:35, 20 June 2019 Biljana talk contribs automatically marked revision 156541 of page Stepper 2 (Autostep 200) - Chuck Selection patrolled
- 13:28, 20 June 2019 Biljana talk contribs automatically marked revision 156540 of page Stepper 2 (AutoStep 200) Operating Procedures patrolled
- 07:58, 19 June 2019 Silva talk contribs automatically marked revision 156539 of page Template:Announcements patrolled
- 07:57, 19 June 2019 Silva talk contribs automatically marked revision 156538 of page Template:Announcements patrolled
- 13:38, 18 June 2019 John d talk contribs automatically marked revision 156537 of page IR Thermal Microscope (QFI) patrolled
- 12:26, 18 June 2019 John d talk contribs automatically marked revision 156536 of page IR Thermal Microscope (QFI) patrolled
- 09:40, 17 June 2019 Silva talk contribs automatically marked revision 156535 of page Template:Announcements patrolled
- 09:38, 17 June 2019 Silva talk contribs automatically marked revision 156534 of page Template:Announcements patrolled
- 09:38, 17 June 2019 Silva talk contribs automatically marked revision 156533 of page Template:Announcements patrolled
- 08:22, 17 June 2019 Biljana talk contribs automatically marked revision 156532 of page Stepper 1 (GCA 6300) patrolled
- 08:20, 17 June 2019 Biljana talk contribs automatically marked revision 156531 of page GCA 6300 USer Accessible Commands patrolled
- 08:09, 17 June 2019 Biljana talk contribs automatically marked revision 156530 of page GCA 6300 USer Accessible Commands patrolled
- 08:09, 17 June 2019 Biljana talk contribs automatically marked revision 156529 of page Stepper 1 (GCA 6300) patrolled
- 08:08, 17 June 2019 Biljana talk contribs automatically marked revision 156528 of page Stepper 1 (GCA 6300) patrolled
- 08:07, 17 June 2019 Biljana talk contribs automatically marked revision 156527 of page Autostep 200 User Accessible Commands patrolled
- 08:06, 17 June 2019 Biljana talk contribs automatically marked revision 156526 of page Autostep 200 User Accessible Commands patrolled
- 08:06, 17 June 2019 Biljana talk contribs automatically marked revision 156525 of page Stepper 2 (AutoStep 200) patrolled
- 08:05, 17 June 2019 Biljana talk contribs automatically marked revision 156524 of page Stepper 2 (AutoStep 200) patrolled
- 08:04, 17 June 2019 Biljana talk contribs automatically marked revision 156523 of page Stepper 2 (AutoStep 200) patrolled
- 15:38, 13 June 2019 Biljana talk contribs automatically marked revision 156521 of page Stepper 2 (AutoStep 200) patrolled
- 15:37, 13 June 2019 Biljana talk contribs automatically marked revision 156520 of page Autostep 200 Troubleshooting and Recovery patrolled
- 15:36, 13 June 2019 Biljana talk contribs automatically marked revision 156519 of page Autostep 200 Troubleshooting and Recovery patrolled
- 15:36, 13 June 2019 Biljana talk contribs automatically marked revision 156518 of page Stepper 2 (AutoStep 200) patrolled
- 15:34, 13 June 2019 Biljana talk contribs automatically marked revision 156517 of page Stepper 2 (AutoStep 200) patrolled
- 15:33, 13 June 2019 Biljana talk contribs automatically marked revision 156516 of page Troubleshooting and Recovery patrolled
- 15:33, 13 June 2019 Biljana talk contribs automatically marked revision 156515 of page Stepper 1 (GCA 6300) patrolled
- 15:30, 13 June 2019 Biljana talk contribs automatically marked revision 156514 of page GCA 6300 Mask Making Guidance patrolled
- 15:28, 13 June 2019 Biljana talk contribs automatically marked revision 156513 of page Autostep 200 Mask Making Guidance patrolled
- 15:24, 13 June 2019 Biljana talk contribs automatically marked revision 156512 of page User Accessible Commands patrolled
- 15:15, 13 June 2019 Biljana talk contribs automatically marked revision 156511 of page Autostep 200 Mask Making Guidance patrolled
- 15:15, 13 June 2019 Biljana talk contribs automatically marked revision 156510 of page Stepper 2 (AutoStep 200) patrolled
- 15:13, 13 June 2019 Biljana talk contribs automatically marked revision 156509 of page Stepper 1 (GCA 6300) patrolled
- 15:12, 13 June 2019 Biljana talk contribs automatically marked revision 156508 of page GCA 6300 Mask Making Guidance patrolled
- 15:10, 13 June 2019 Biljana talk contribs automatically marked revision 156507 of page User Accessible Commands patrolled
- 14:44, 13 June 2019 Biljana talk contribs automatically marked revision 156506 of page User Accessible Commands patrolled
- 14:43, 13 June 2019 Biljana talk contribs automatically marked revision 156505 of page GCA 6300 Mask Making Guidance patrolled
- 14:42, 13 June 2019 Biljana talk contribs automatically marked revision 156504 of page Stepper 1 (GCA 6300) patrolled
- 14:35, 13 June 2019 Biljana talk contribs automatically marked revision 156503 of page Stepper 2 (AutoStep 200) Operating Procedures patrolled
- 14:32, 13 June 2019 Biljana talk contribs automatically marked revision 156502 of page Stepper 2 (AutoStep 200) Operating Procedures patrolled
- 14:29, 13 June 2019 Biljana talk contribs automatically marked revision 156501 of page Stepper 2 (AutoStep 200) Operating Procedures patrolled
- 14:27, 13 June 2019 Biljana talk contribs automatically marked revision 156500 of page Stepper 1 (GCA 6300) - Standard Operating Procedure patrolled
- 14:27, 13 June 2019 Biljana talk contribs automatically marked revision 156499 of page Stepper 2 (AutoStep 200) Operating Procedures patrolled
- 14:25, 13 June 2019 Biljana talk contribs automatically marked revision 156498 of page Stepper 1 (GCA 6300) - Standard Operating Procedure patrolled
- 14:23, 13 June 2019 John d talk contribs automatically marked revision 156497 of page Intellemetrics Laser Etch Monitor Procedure for Panasonic ICP Etchers patrolled
- 14:22, 13 June 2019 Biljana talk contribs automatically marked revision 156496 of page Stepper 1 (GCA 6300) - Standard Operating Procedure patrolled
- 12:14, 13 June 2019 Biljana talk contribs automatically marked revision 156495 of page Stepper 2 (Autostep 200) - Job Programming patrolled
- 12:04, 13 June 2019 Biljana talk contribs automatically marked revision 156494 of page Programming a Job patrolled
- 11:59, 13 June 2019 Biljana talk contribs automatically marked revision 156493 of page Programming a Job patrolled
- 08:42, 12 June 2019 John d talk contribs automatically marked revision 156492 of page Stepper 3 (ASML DUV) patrolled
- 00:05, 12 June 2019 John d talk contribs automatically marked revision 156491 of page ASML Stepper 3 Standard Operating Procedure patrolled
- 23:56, 11 June 2019 John d talk contribs automatically marked revision 156490 of page File:Stepper 3 - FEM Matrix Schematic.png patrolled
- 23:56, 11 June 2019 John d talk contribs uploaded File:Stepper 3 - FEM Matrix Schematic.png
- 23:55, 11 June 2019 John d talk contribs automatically marked revision 156489 of page File:Stepper 3 - FEM Energy Meander Schematic.png patrolled
- 23:55, 11 June 2019 John d talk contribs uploaded File:Stepper 3 - FEM Energy Meander Schematic.png
- 16:46, 11 June 2019 John d talk contribs automatically marked revision 156488 of page Oven 4 (Thermo-Fisher HeraTherm) patrolled
- 16:31, 11 June 2019 John d talk contribs automatically marked revision 156487 of page File:Oven4.jpg patrolled
- 16:31, 11 June 2019 John d talk contribs uploaded a new version of File:Oven4.jpg (New HeraTherm oven photo)
- 16:01, 11 June 2019 Biljana talk contribs automatically marked revision 156486 of page Programming a Job patrolled
- 16:01, 11 June 2019 Biljana talk contribs automatically marked revision 156485 of page Stepper 1 (GCA 6300) patrolled
- 16:00, 11 June 2019 Biljana talk contribs automatically marked revision 156484 of page Stepper 2 (Autostep 200) - Job Programming patrolled
- 15:59, 11 June 2019 Biljana talk contribs automatically marked revision 156483 of page Programming a Job patrolled
- 15:20, 11 June 2019 Biljana talk contribs automatically marked revision 156482 of page Programming a Job patrolled
- 15:18, 11 June 2019 Biljana talk contribs automatically marked revision 156481 of page Programming a Job patrolled
- 15:17, 11 June 2019 Biljana talk contribs automatically marked revision 156480 of page Stepper 1 (GCA 6300) patrolled
- 12:17, 11 June 2019 Ningcao talk contribs automatically marked revision 156479 of page Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Florine etch of the underneath layer) patrolled
- 12:16, 11 June 2019 Ningcao talk contribs automatically marked revision 156478 of page File:I11904.pdf patrolled
- 12:16, 11 June 2019 Ningcao talk contribs uploaded File:I11904.pdf
- 12:13, 11 June 2019 Ningcao talk contribs automatically marked revision 156477 of page Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Florine etch of the underneath layer) patrolled
- 10:17, 11 June 2019 John d talk contribs automatically marked revision 156476 of page Profilm3D - Quick Start - Surface Roughness Measurement (PSI Mode) patrolled
- 10:16, 11 June 2019 John d talk contribs automatically marked revision 156475 of page Profilm3D - Quick Start - Surface Roughness Measurement (PSI Mode) patrolled
- 15:35, 10 June 2019 Biljana talk contribs automatically marked revision 156474 of page Stepper 1 (GCA 6300) patrolled
- 15:34, 10 June 2019 Biljana talk contribs automatically marked revision 156473 of page Stepper 1 (GCA 6300) patrolled
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- 15:31, 10 June 2019 Biljana talk contribs automatically marked revision 156470 of page Stepper 2 (Autostep 200) - Job Programming patrolled
- 15:28, 10 June 2019 Biljana talk contribs automatically marked revision 156469 of page Stepper 2 (Autostep 200) - Job Programming patrolled
- 11:02, 10 June 2019 John d talk contribs automatically marked revision 156468 of page FIJI - Microscope Measurement Tools patrolled
- 11:01, 10 June 2019 John d talk contribs automatically marked revision 156467 of page File:MicroscopeMeasurementTools - FIJI draw measurement - line.png patrolled
- 11:01, 10 June 2019 John d talk contribs uploaded a new version of File:MicroscopeMeasurementTools - FIJI draw measurement - line.png (smaller cropped version of same image)
- 11:00, 10 June 2019 John d talk contribs automatically marked revision 156466 of page FIJI - Microscope Measurement Tools patrolled
- 10:59, 10 June 2019 John d talk contribs automatically marked revision 156465 of page File:FIJI MMT UCSB-Fork Choose Microscope Calibration drop down.png patrolled
- 10:59, 10 June 2019 John d talk contribs uploaded File:FIJI MMT UCSB-Fork Choose Microscope Calibration drop down.png
- 10:53, 10 June 2019 John d talk contribs automatically marked revision 156464 of page Calculators + Utilities patrolled
- 10:49, 10 June 2019 John d talk contribs automatically marked revision 156463 of page File:FIJI Install Directory - MacOS.png patrolled
- 10:49, 10 June 2019 John d talk contribs uploaded a new version of File:FIJI Install Directory - MacOS.png (annotated showing the MMT folder)
- 10:48, 10 June 2019 John d talk contribs automatically marked revision 156462 of page FIJI - Microscope Measurement Tools patrolled
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- 10:33, 10 June 2019 John d talk contribs automatically marked revision 156457 of page File:MicroscopeMeasurementTools - FIJI draw measurement - line.png patrolled
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- 10:06, 10 June 2019 John d talk contribs automatically marked revision 156456 of page File:MicroscopeMeasurementTools - FIJI Install - Mac Show Package Contents.png patrolled
- 10:06, 10 June 2019 John d talk contribs uploaded File:MicroscopeMeasurementTools - FIJI Install - Mac Show Package Contents.png
- 10:05, 10 June 2019 John d talk contribs automatically marked revision 156455 of page File:MicroscopeMeasurementTools - FIJI Install Directory - WinXP.jpg patrolled
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- 10:03, 10 June 2019 John d talk contribs automatically marked revision 156454 of page File:FIJI Install Directory - MacOS.png patrolled
- 10:03, 10 June 2019 John d talk contribs uploaded File:FIJI Install Directory - MacOS.png
- 09:30, 10 June 2019 Biljana talk contribs automatically marked revision 156453 of page Stepper 2 (Autostep 200) - Job Programming patrolled
- 23:26, 6 June 2019 John d talk contribs automatically marked revision 156452 of page FIJI - Microscope Measurement Tools patrolled
- 22:14, 6 June 2019 John d talk contribs automatically marked revision 156451 of page Optical Film Spectra + Optical Properties (Filmetrics F10-RT-UVX) patrolled
- 21:39, 6 June 2019 John d talk contribs automatically marked revision 156450 of page Optical Film Spectra + Optical Properties (Filmetrics F10-RT-UVX) patrolled
- 21:38, 6 June 2019 John d talk contribs automatically marked revision 156449 of page File:Filmetrics-F10-RT Photo.jpeg patrolled
- 21:38, 6 June 2019 John d talk contribs uploaded File:Filmetrics-F10-RT Photo.jpeg (Photo of Filmetrics f10-RT-UVX Spectrophotometer)
- 16:05, 6 June 2019 Ningcao talk contribs automatically marked revision 156448 of page Test Data of etching SiO2 with CHF3/CF4-ICP1 patrolled
- 15:58, 6 June 2019 Biljana talk contribs automatically marked revision 156447 of page Stepper 2 (Autostep 200) - Job Programming patrolled
- 15:58, 6 June 2019 Biljana talk contribs automatically marked revision 156446 of page Stepper 2 (AutoStep 200) Operating Procedures patrolled
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- 14:50, 6 June 2019 Ningcao talk contribs automatically marked revision 156444 of page Test Data of etching SiO2 with CHF3/CF4-ICP1 patrolled
- 14:48, 6 June 2019 Ningcao talk contribs automatically marked revision 156443 of page File:I11903.pdf patrolled
- 14:48, 6 June 2019 Ningcao talk contribs uploaded File:I11903.pdf
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- 14:07, 6 June 2019 Biljana talk contribs automatically marked revision 156441 of page Stepper 2 (AutoStep 200) Operating Procedures patrolled
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- 14:00, 6 June 2019 Biljana talk contribs automatically marked revision 156439 of page Stepper 1 (GCA 6300) - Standard Operating Procedure patrolled
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- 13:01, 6 June 2019 John d talk contribs automatically marked revision 156434 of page Intellemetrics Laser Etch Monitor Procedure for Panasonic ICP Etchers patrolled
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- 12:40, 6 June 2019 John d talk contribs automatically marked revision 156432 of page File:Filmetrics F40-UV - spectrum curve fit 07.jpg patrolled
- 12:40, 6 June 2019 John d talk contribs uploaded a new version of File:Filmetrics F40-UV - spectrum curve fit 07.jpg (Computer Screenshot instead of photo)
- 11:20, 6 June 2019 Biljana talk contribs automatically marked revision 156431 of page Stepper 2 (AutoStep 200) Operating Procedures patrolled
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- 13:50, 4 June 2019 John d talk contribs automatically marked revision 156425 of page ASML Stepper 3 - UCSB Test Reticles patrolled
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- 10:59, 4 June 2019 John d talk contribs automatically marked revision 156423 of page Ovens - Overview of All Lab Ovens patrolled
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- 10:47, 4 June 2019 John d talk contribs moved page Oven 4 (Fisher) to Oven 4 (Thermo-Fisher HeraTherm) (changed out for new oven)
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- 23:06, 30 May 2019 John d talk contribs automatically marked revision 156392 of page Rapid Thermal Processor (SSI Solaris 150) patrolled
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- 23:24, 21 May 2019 John d talk contribs uploaded File:Filmetrics F40-UV - Measurement screenshot on metal pad 01.PNG (Filmetrics F40-UV - Measurement screenshot on metal pad 01, showing icroscope view and resulting spectrum meas. + curve fitting and film thickness.)
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