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- 12:32, 16 October 2020 (diff | hist) . . (+150) . . Stepper Recipes (current)
- 21:28, 13 October 2020 (diff | hist) . . (-2) . . PECVD Recipes (→SiO2 deposition (PECVD #1)) (current)
- 21:28, 13 October 2020 (diff | hist) . . (+118) . . PECVD Recipes (→SiN deposition (PECVD #1))
- 09:38, 13 October 2020 (diff | hist) . . (-228) . . PECVD Recipes
- 09:14, 13 October 2020 (diff | hist) . . (-1) . . PECVD Recipes (→Historical Particulate Data)
- 09:13, 13 October 2020 (diff | hist) . . (+1) . . PECVD Recipes (→PECVD 1 (PlasmaTherm 790))
- 09:13, 13 October 2020 (diff | hist) . . (-109) . . PECVD Recipes (→SiN deposition (PECVD #1))
- 16:38, 9 October 2020 (diff | hist) . . (-10) . . Maskless Aligner Recipes (→Negative Resist (MLA150))
- 16:37, 9 October 2020 (diff | hist) . . (+64) . . Maskless Aligner Recipes (→Negative Resist (MLA150))
- 16:16, 9 October 2020 (diff | hist) . . (+45) . . Maskless Aligner Recipes (→Negative Resist (MLA150))
- 16:14, 9 October 2020 (diff | hist) . . (+10) . . Maskless Aligner Recipes (→Negative Resist (MLA150))
- 16:12, 9 October 2020 (diff | hist) . . (+7) . . Maskless Aligner Recipes (→Negative Resist (MLA150))
- 15:42, 9 October 2020 (diff | hist) . . (0) . . Maskless Aligner Recipes (→Negative Resist (MLA150))
- 15:34, 9 October 2020 (diff | hist) . . (0) . . Maskless Aligner Recipes (→Negative Resist (MLA150))
- 15:33, 9 October 2020 (diff | hist) . . (+22) . . Maskless Aligner Recipes (→Positive Resist (MLA150))
- 15:01, 9 October 2020 (diff | hist) . . (-1) . . Maskless Aligner Recipes (→Positive Resist (MLA150))
- 14:58, 9 October 2020 (diff | hist) . . (+1) . . Maskless Aligner Recipes (→Positive Resist (MLA150))
- 14:56, 9 October 2020 (diff | hist) . . (+4) . . Maskless Aligner Recipes (→Positive Resist (MLA150))
- 14:52, 9 October 2020 (diff | hist) . . (+3) . . Maskless Aligner Recipes (→Positive Resist (MLA150))
- 14:12, 9 October 2020 (diff | hist) . . (+19) . . Maskless Aligner Recipes (→Positive Resist (MLA150))
- 11:41, 9 October 2020 (diff | hist) . . (+3) . . Maskless Aligner Recipes (→Positive Resist (MLA150))
- 11:39, 9 October 2020 (diff | hist) . . (-2) . . Maskless Aligner Recipes (→Maskless Aligner (Heidelberg MLA150))
- 11:38, 9 October 2020 (diff | hist) . . (+55) . . Maskless Aligner Recipes (→Positive Resist (MLA150))
- 20:53, 14 July 2020 (diff | hist) . . (0) . . PECVD Recipes (→Uniformity Data)
- 20:52, 14 July 2020 (diff | hist) . . (0) . . PECVD Recipes (→Uniformity Data)
- 20:49, 14 July 2020 (diff | hist) . . (0) . . PECVD Recipes (→Uniformity Data)
- 20:47, 14 July 2020 (diff | hist) . . (0) . . PECVD Recipes (→Uniformity Data)
- 20:46, 14 July 2020 (diff | hist) . . (-124) . . PECVD Recipes (→SiN deposition (PECVD #2))
- 20:45, 14 July 2020 (diff | hist) . . (0) . . PECVD Recipes (→Thin-Film Properties)
- 20:43, 14 July 2020 (diff | hist) . . (+126) . . PECVD Recipes (→Thin-Film Properties)
- 20:41, 14 July 2020 (diff | hist) . . (0) . . PECVD Recipes (→SiO2 deposition (PECVD #2))
- 20:40, 14 July 2020 (diff | hist) . . (+1) . . PECVD Recipes (→PECVD 2 (Advanced Vacuum))
- 12:03, 2 July 2020 (diff | hist) . . (-8) . . Unaxis wafer coating procedure (→a) Prepare wafers:) (Tag: Visual edit)
- 12:02, 2 July 2020 (diff | hist) . . (-20) . . Unaxis wafer coating procedure (→1. Unaxis deposition - 300nm of SiO2 LDR film @250°C) (Tag: Visual edit)
- 12:01, 2 July 2020 (diff | hist) . . (+29) . . Unaxis wafer coating procedure (Tag: Visual edit)
- 12:01, 2 July 2020 (diff | hist) . . (+7) . . Unaxis wafer coating procedure (Tag: Visual edit)
- 12:00, 2 July 2020 (diff | hist) . . (+4,199) . . N Unaxis wafer coating procedure (Created page with "'''1. Unaxis deposition - 300nm of SiO2 LDR film @250°C''' a) Prepare wafers: · Regular 4 " Si wafer ~500nm think for seasoning · Your substrate for d...") (Tag: Visual edit)
- 11:47, 2 July 2020 (diff | hist) . . (-58) . . ICP-PECVD (Unaxis VLR) (Tag: Visual edit)
- 11:44, 2 July 2020 (diff | hist) . . (+65) . . ICP-PECVD (Unaxis VLR) (→Documentation) (Tag: Visual edit)
- 11:42, 2 July 2020 (diff | hist) . . (+68) . . N Wafer coating procedure (Created page with "[https://wiki.nanotech.ucsb.edu/wiki/File:Unaxis_SOP_3-30-2020.docx]") (current) (Tag: Visual edit)
- 11:41, 2 July 2020 (diff | hist) . . (+4) . . ICP-PECVD (Unaxis VLR) (→Documentation: wafer coating procedure correction) (Tag: Visual edit)
- 11:37, 2 July 2020 (diff | hist) . . (-76) . . ICP-PECVD (Unaxis VLR) (→Documentation) (Tag: Visual edit)
- 11:36, 2 July 2020 (diff | hist) . . (+65) . . ICP-PECVD (Unaxis VLR) (→Documentation) (Tag: Visual edit)
- 22:39, 11 June 2020 (diff | hist) . . (0) . . PECVD Recipes (→Thin-Film Properties)
- 22:37, 11 June 2020 (diff | hist) . . (-125) . . PECVD Recipes (→Thin-Film Properties)
- 22:37, 11 June 2020 (diff | hist) . . (+125) . . PECVD Recipes (→Thin-Film Properties)
- 10:12, 27 May 2020 (diff | hist) . . (-17) . . PECVD 2 (Advanced Vacuum) (→Documentation) (current) (Tag: Visual edit)
- 10:12, 27 May 2020 (diff | hist) . . (+77) . . PECVD 2 (Advanced Vacuum) (→Documentation) (Tag: Visual edit)
- 10:10, 27 May 2020 (diff | hist) . . (+40) . . N File:SOP for Advanced Vacuum PECVD.pdf (5-27-2020 Biljana Stamenic) (current)
- 10:04, 27 May 2020 (diff | hist) . . (+49) . . PECVD 2 (Advanced Vacuum) (→Documentation) (Tag: Visual edit)
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