User contributions
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- 17:37, 6 April 2020 (diff | hist) . . (+35) . . ICP Etching Recipes (Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/")
- 17:36, 6 April 2020 (diff | hist) . . (+1) . . Probe Station & Curve Tracer (Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/")
- 17:36, 6 April 2020 (diff | hist) . . (+2) . . Test Data of etching SiO2 with CHF3/CF4-ICP1 (Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/")
- 17:36, 6 April 2020 (diff | hist) . . (+6) . . Frequently Asked Questions (Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/")
- 17:36, 6 April 2020 (diff | hist) . . (+1) . . InP etch result in details (Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/") (current)
- 17:36, 6 April 2020 (diff | hist) . . (+1) . . Suss Aligners (SUSS MJB-3) (Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/")
- 17:35, 6 April 2020 (diff | hist) . . (+1) . . Plasma Clean (YES EcoClean) (Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/")
- 17:35, 6 April 2020 (diff | hist) . . (+1) . . Rapid Thermal Processor (AET RX6) (Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/") (current)
- 17:35, 6 April 2020 (diff | hist) . . (+2) . . Chemical List - OLD 2018-09-05 (Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/") (current)
- 17:35, 6 April 2020 (diff | hist) . . (+1) . . Editing Tutorials (Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/") (current)
- 17:35, 6 April 2020 (diff | hist) . . (+28) . . InP Etch Rate and Selectivity (InP/SiO2) (Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/")
- 17:35, 6 April 2020 (diff | hist) . . (+1) . . Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) (Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/")
- 17:34, 6 April 2020 (diff | hist) . . (+24) . . Sputtering Recipes (Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/")
- 17:34, 6 April 2020 (diff | hist) . . (+1) . . Vapor HF Etch (Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/") (current)
- 17:34, 6 April 2020 (diff | hist) . . (+4) . . Stepper 3 (ASML DUV) (Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/")
- 17:34, 6 April 2020 (diff | hist) . . (+1) . . Profilm3D - Quick Start - Surface Roughness Measurement (PSI Mode) (Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/") (current)
- 17:33, 6 April 2020 (diff | hist) . . (+1) . . NanoFab Process Group (Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/") (current)
- 17:33, 6 April 2020 (diff | hist) . . (+1) . . Ovens - Overview of All Lab Ovens (Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/") (current)
- 17:33, 6 April 2020 (diff | hist) . . (+2) . . CAIBE (Oxford Ion Mill) (Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/")
- 17:33, 6 April 2020 (diff | hist) . . (+1) . . GCA 6300 Mask Making Guidance (Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/") (current)
- 17:32, 6 April 2020 (diff | hist) . . (+2) . . Plasma Activation (EVG 810) (Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/") (current)
- 17:32, 6 April 2020 (diff | hist) . . (+1) . . Usage Data and Statistics (Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/") (current)
- 17:32, 6 April 2020 (diff | hist) . . (+1) . . Wafer Bonder (Logitech WBS7) (Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/")
- 17:32, 6 April 2020 (diff | hist) . . (+1) . . Lab Rules (Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/")
- 17:31, 6 April 2020 (diff | hist) . . (+1) . . ICP-Etch (Unaxis VLR) (Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/") (current)
- 17:31, 6 April 2020 (diff | hist) . . (+2) . . Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Florine etch of the underneath layer) (Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/") (current)
- 17:31, 6 April 2020 (diff | hist) . . (+1) . . InP Etch Test Result in Details (Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/") (current)
- 17:31, 6 April 2020 (diff | hist) . . (+6) . . Dry Etching Recipes (Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/")
- 17:31, 6 April 2020 (diff | hist) . . (+1) . . ASML Stepper 3 Error Recovery, Troubleshooting and Calibration (Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/")
- 17:31, 6 April 2020 (diff | hist) . . (+1) . . Filmetrics F10-RT-UVX Operating Procedure (Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/") (current)
- 17:31, 6 April 2020 (diff | hist) . . (+2) . . Dicing Saw (ADT) (Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/")
- 17:30, 6 April 2020 (diff | hist) . . (+6) . . Vacuum Deposition Recipes (Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/")
- 17:30, 6 April 2020 (diff | hist) . . (+2) . . ICP Etch 2 (Panasonic E640) (Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/")
- 17:30, 6 April 2020 (diff | hist) . . (+4) . . Microscopes (Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/")
- 17:29, 6 April 2020 (diff | hist) . . (+13) . . Wet Etching Recipes (Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/") (current)
- 17:29, 6 April 2020 (diff | hist) . . (+1) . . UV Ozone Reactor (Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/") (current)
- 17:29, 6 April 2020 (diff | hist) . . (+1) . . Automated Coat/Develop System (S-Cubed Flexi) (Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/")
- 17:29, 6 April 2020 (diff | hist) . . (+4) . . Test Data of etching SiO2 with CHF3/CF4 (Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/")
- 17:29, 6 April 2020 (diff | hist) . . (+1) . . DSEIII (PlasmaTherm/Deep Silicon Etcher) (Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/")
- 17:28, 6 April 2020 (diff | hist) . . (+2) . . Calculators + Utilities (Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/")
- 17:28, 6 April 2020 (diff | hist) . . (+14) . . PECVD Recipes (Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/")
- 17:28, 6 April 2020 (diff | hist) . . (+1) . . Rapid Thermal Processor (SSI Solaris 150) (Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/") (current)
- 17:28, 6 April 2020 (diff | hist) . . (+2) . . Atomic Layer Deposition (Oxford FlexAL) (Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/")
- 17:28, 6 April 2020 (diff | hist) . . (+7) . . Stepper Recipes (Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/")
- 17:27, 6 April 2020 (diff | hist) . . (+1) . . Lift-Off with DUV Imaging + PMGI Underlayer (Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/")
- 17:27, 6 April 2020 (diff | hist) . . (+1) . . YES-150C-Various-Resists (Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/") (current)
- 17:27, 6 April 2020 (diff | hist) . . (+2) . . Tool List (Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/")
- 17:27, 6 April 2020 (diff | hist) . . (+1) . . IR Aligner (SUSS MJB-3 IR) (Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/")
- 17:27, 6 April 2020 (diff | hist) . . (+2) . . IR Thermal Microscope (QFI) (Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/") (current)
- 17:27, 6 April 2020 (diff | hist) . . (+1) . . Chemical List (Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/")
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