NanoFab COVID Response
Following guidelines provided by our Office of Research, the UCSB Nanofabrication Facility is open only for limited/authorized use for critical activity at this time.
Contact the Lab Director for more information.
// John d 15:00, 19 July 2020 (PDT)
ASML Maintenance: Aug. 11-15th
ASML will be performing a PM from Tues. Aug. 11th to Sat. Aug. 15th. // John d 14:50, 19 July 2020 (PDT)
New Tool Installations
// John d 17:48, 2 June 2020 (PDT)
The ICP-PECVD module is available upon request. Contact Tony Bosch if interested. System is using deuterated Silane for low loss optical films use only.
// Thibeault 14:22, 26 March 2020 (PDT)