From UCSB Nanofab Wiki
Jump to: navigation, search

Equipment Status

NanoFab COVID Response

Following guidelines provided by our Office of Research, the UCSB Nanofabrication Facility is open only for limited/authorized use for critical activity at this time.

Contact the Lab Director for more information.

// John d 15:00, 19 July 2020 (PDT)

ASML Maintenance: Aug. 11-15th

ASML will be performing a PM from Tues. Aug. 11th to Sat. Aug. 15th. // John d 14:50, 19 July 2020 (PDT)

New Tool Installations

See the News Feed for info on two upcoming tool installations! We have a Raith Velion FIB and a Heidelberg MLA150 Maskless Aligner on the way.

// John d 17:48, 2 June 2020 (PDT)


The ICP-PECVD module is available upon request. Contact Tony Bosch if interested. System is using deuterated Silane for low loss optical films use only.

// Thibeault 14:22, 26 March 2020 (PDT)