Lee Sawyer

Lee Sawyer Position Equipment Engineer Room Number 1109F Phone (805) 893-2123 E-Mail lee_sawyer@ucsb.edu

Tools

Lee Sawyer is in charge of the following tools:

Contact Aligner (SUSS MA-6) Suss Aligners (SUSS MJB-3) Wafer Bonder (SUSS SB6-8E) DUV Flood Expose Molecular Vapor Deposition ICP Etch 1 (Panasonic E626I) RIE 2 (MRC) RIE 3 (MRC)

UV Ozone Reactor Plasma Activation (EVG 810) Dicing Saw (ADT) Goniometer (Rame-Hart A-100) Plasma Clean (YES EcoClean) Film Stress (Tencor Flexus) Maskless Aligner (Heidelberg MLA150) E-Beam 2 (Custom)