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- 11:39, 27 September 2021 diff hist -1 Sputtering Recipes →Materials Table (Sputter 5) current
- 11:38, 27 September 2021 diff hist -2 Sputtering Recipes →Materials Table (Sputter 5)
- 11:37, 27 September 2021 diff hist +15 Sputtering Recipes →Materials Table (Sputter 5)
- 11:34, 27 September 2021 diff hist +48 Vacuum Deposition Recipes current
- 11:32, 27 September 2021 diff hist -4 Vacuum Deposition Recipes
- 11:31, 27 September 2021 diff hist -7 Vacuum Deposition Recipes
- 11:29, 27 September 2021 diff hist +26 Vacuum Deposition Recipes
- 11:26, 27 September 2021 diff hist +33 Vacuum Deposition Recipes
- 11:21, 27 September 2021 diff hist +97 Sputtering Recipes →Materials Table (Sputter 5)
- 11:19, 27 September 2021 diff hist +10 Sputtering Recipes →Materials Table (Sputter 5)
- 11:16, 27 September 2021 diff hist -8 Sputtering Recipes →Materials Table (Sputter 5)
- 11:14, 27 September 2021 diff hist +98 Sputtering Recipes →Materials Table (Sputter 5)
- 18:46, 10 August 2021 diff hist +59 Test Data of etching SiO2 with CHF3/CF4 add a SEM pic current Tag: Visual edit
- 18:45, 10 August 2021 diff hist 0 N File:I2210411.pdf current
- 18:40, 10 August 2021 diff hist +89 Test Data of etching SiO2 with CHF3/CF4 add a data poing Tag: Visual edit
- 19:30, 9 August 2021 diff hist +59 Test Data of etching SiO2 with CHF3/CF4 add a SEM Tag: Visual edit
- 19:28, 9 August 2021 diff hist +2 Test Data of etching SiO2 with CHF3/CF4 Tag: Visual edit
- 19:24, 9 August 2021 diff hist 0 N File:I2210508.pdf current
- 19:19, 9 August 2021 diff hist +86 Test Data of etching SiO2 with CHF3/CF4 save a data point Tag: Visual edit
- 18:28, 22 July 2021 diff hist +59 Test Data of etching SiO2 with CHF3/CF4 adding a SEM pic Tag: Visual edit
- 18:27, 22 July 2021 diff hist 0 N File:I2210308.pdf current
- 18:21, 22 July 2021 diff hist +37 Test Data of etching SiO2 with CHF3/CF4 adding a data point Tag: Visual edit
- 19:30, 19 May 2021 diff hist +17 Test Data of etching SiO2 with CHF3/CF4 add a data point Tag: Visual edit
- 19:08, 19 May 2021 diff hist +59 Test Data of etching SiO2 with CHF3/CF4 add a SEM Tag: Visual edit
- 19:06, 19 May 2021 diff hist 0 N File:I2210214.pdf current
- 19:05, 19 May 2021 diff hist +37 Test Data of etching SiO2 with CHF3/CF4 add a new data point Tag: Visual edit
- 18:00, 8 April 2021 diff hist -45 m Lithography Recipes →Holography Recipes
- 17:55, 8 April 2021 diff hist +46 m Lithography Recipes →Holography Recipes
- 17:54, 8 April 2021 diff hist 0 N File:Holography Process for 1D-lines and 2D-dots (ARC-11 & THMR-IP3600HP-D)-updated-4-8-2021.pdf current
- 16:32, 4 February 2021 diff hist +23 Dry Etching Recipes
- 16:16, 4 February 2021 diff hist +59 Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher current Tag: Visual edit
- 16:14, 4 February 2021 diff hist +260 N Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher Created page with "{| class="wikitable" | colspan="6" |Fluorine ICP: 3.8mT, 50/800W, CHF3/CF4=10/30sccm, time=90 sec |- |Date |Sample# |Etch Rate (nm/min) |Etch Selectivity (SiO2/PR) |Average..." Tag: Visual edit
- 16:12, 4 February 2021 diff hist +1 ICP Etching Recipes →SiO2 Etch Historical Data Tag: Visual edit
- 16:07, 4 February 2021 diff hist +1 ICP Etching Recipes →SiO2 Etch Historical Data
- 18:33, 3 February 2021 diff hist +59 InP Etch Rate and Selectivity (InP/SiO2) add another pic current Tag: Visual edit
- 18:32, 3 February 2021 diff hist 0 N File:IP210119.pdf current
- 18:32, 3 February 2021 diff hist +59 InP Etch Rate and Selectivity (InP/SiO2) add a pic Tag: Visual edit
- 18:31, 3 February 2021 diff hist 0 N File:IP210117.pdf current
- 18:28, 3 February 2021 diff hist +35 InP Etch Rate and Selectivity (InP/SiO2) add a data point Tag: Visual edit
- 18:43, 2 February 2021 diff hist 0 ICP Etching Recipes →Historical Data (SiO2, Florine ICP Etcher) Tag: Visual edit
- 18:39, 2 February 2021 diff hist +19 ICP Etching Recipes →Historical Data (SiO2, Florine ICP Etcher) Tag: Visual edit
- 18:37, 2 February 2021 diff hist +59 Test Data of etching SiO2 with CHF3/CF4-Florine ICP Etcher current Tag: Visual edit
- 18:36, 2 February 2021 diff hist +4 Test Data of etching SiO2 with CHF3/CF4-Florine ICP Etcher Tag: Visual edit
- 18:36, 2 February 2021 diff hist +259 N Test Data of etching SiO2 with CHF3/CF4-Florine ICP Etcher Created page with "{| class="wikitable" | colspan="6" |Florine ICP: 3.8mT, 50/800W, CHF3/CF4=10/30sccm, time=90 sec |- |Date |Sample# |Etch Rate (nm/min) |Etch Selectivity (SiO2/PR) |Averaged..." Tag: Visual edit
- 18:35, 2 February 2021 diff hist +11 ICP Etching Recipes →Historical Data (SiO2, Florine ICP Etcher) Tag: Visual edit
- 18:33, 2 February 2021 diff hist +4 Test Data of etching SiO2 with CHF3/CF4-Florine current Tag: Visual edit
- 18:30, 2 February 2021 diff hist +4 Test Data of Etching SiO2 with CHF3/CF4-Florine ICP Etcher current Tag: Visual edit
- 18:29, 2 February 2021 diff hist +59 Test Data of Etching SiO2 with CHF3/CF4-Florine ICP Etcher adding a SEM Tag: Visual edit
- 18:27, 2 February 2021 diff hist 0 N File:FE210206.pdf current
- 18:18, 2 February 2021 diff hist +259 N Test Data of Etching SiO2 with CHF3/CF4-Florine ICP Etcher Created page with "{| class="wikitable" | colspan="6" |Florine ICP: 3.8mT, 50/800W, CHF3/CF4=10/30sccm, time=90 sec |- |Date |Sample# |Etch Rate (nm/min) |Etch Selectivity (SiO2/PR) |Averaged..." Tag: Visual edit