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- 14:28, 9 November 2021 diff hist +59 SiO2 Etch Test using CF4/CHF3 add a SEM pic current Tag: Visual edit
- 14:26, 9 November 2021 diff hist +259 N SiO2 Etch Test using CF4/CHF3 add a table Tag: Visual edit
- 14:24, 9 November 2021 diff hist +35 ICP Etching Recipes add a SiO2 Etch link using Flourine ICP Tag: Visual edit
- 14:17, 9 November 2021 diff hist 0 N File:SOFL0103.pdf current
- 12:43, 9 November 2021 diff hist +21 SiO2 Etching Test using CF4/CHF3 add a data point current Tag: Visual edit
- 12:29, 9 November 2021 diff hist +238 N SiO2 Etching Test using CF4/CHF3 add a table Tag: Visual edit
- 17:00, 8 November 2021 diff hist +59 InP Etch Rate and Selectivity (InP/SiO2) add a SEM current Tag: Visual edit
- 16:59, 8 November 2021 diff hist 0 N File:IP210212.pdf current
- 16:58, 8 November 2021 diff hist +119 InP Etch Rate and Selectivity (InP/SiO2) add a SEM Tag: Visual edit
- 16:56, 8 November 2021 diff hist 0 N File:IP210201.pdf current
- 16:48, 8 November 2021 diff hist +38 InP Etch Rate and Selectivity (InP/SiO2) enter a data point Tag: Visual edit
- 10:39, 27 September 2021 diff hist -1 Sputtering Recipes →Materials Table (Sputter 5)
- 10:38, 27 September 2021 diff hist -2 Sputtering Recipes →Materials Table (Sputter 5)
- 10:37, 27 September 2021 diff hist +15 Sputtering Recipes →Materials Table (Sputter 5)
- 10:34, 27 September 2021 diff hist +48 Vacuum Deposition Recipes current
- 10:32, 27 September 2021 diff hist -4 Vacuum Deposition Recipes
- 10:31, 27 September 2021 diff hist -7 Vacuum Deposition Recipes
- 10:29, 27 September 2021 diff hist +26 Vacuum Deposition Recipes
- 10:26, 27 September 2021 diff hist +33 Vacuum Deposition Recipes
- 10:21, 27 September 2021 diff hist +97 Sputtering Recipes →Materials Table (Sputter 5)
- 10:19, 27 September 2021 diff hist +10 Sputtering Recipes →Materials Table (Sputter 5)
- 10:16, 27 September 2021 diff hist -8 Sputtering Recipes →Materials Table (Sputter 5)
- 10:14, 27 September 2021 diff hist +98 Sputtering Recipes →Materials Table (Sputter 5)
- 17:46, 10 August 2021 diff hist +59 Test Data of etching SiO2 with CHF3/CF4 add a SEM pic Tag: Visual edit
- 17:45, 10 August 2021 diff hist 0 N File:I2210411.pdf current
- 17:40, 10 August 2021 diff hist +89 Test Data of etching SiO2 with CHF3/CF4 add a data poing Tag: Visual edit
- 18:30, 9 August 2021 diff hist +59 Test Data of etching SiO2 with CHF3/CF4 add a SEM Tag: Visual edit
- 18:28, 9 August 2021 diff hist +2 Test Data of etching SiO2 with CHF3/CF4 Tag: Visual edit
- 18:24, 9 August 2021 diff hist 0 N File:I2210508.pdf current
- 18:19, 9 August 2021 diff hist +86 Test Data of etching SiO2 with CHF3/CF4 save a data point Tag: Visual edit
- 17:28, 22 July 2021 diff hist +59 Test Data of etching SiO2 with CHF3/CF4 adding a SEM pic Tag: Visual edit
- 17:27, 22 July 2021 diff hist 0 N File:I2210308.pdf current
- 17:21, 22 July 2021 diff hist +37 Test Data of etching SiO2 with CHF3/CF4 adding a data point Tag: Visual edit
- 18:30, 19 May 2021 diff hist +17 Test Data of etching SiO2 with CHF3/CF4 add a data point Tag: Visual edit
- 18:08, 19 May 2021 diff hist +59 Test Data of etching SiO2 with CHF3/CF4 add a SEM Tag: Visual edit
- 18:06, 19 May 2021 diff hist 0 N File:I2210214.pdf current
- 18:05, 19 May 2021 diff hist +37 Test Data of etching SiO2 with CHF3/CF4 add a new data point Tag: Visual edit
- 17:00, 8 April 2021 diff hist -45 m Lithography Recipes →Holography Recipes
- 16:55, 8 April 2021 diff hist +46 m Lithography Recipes →Holography Recipes
- 16:54, 8 April 2021 diff hist 0 N File:Holography Process for 1D-lines and 2D-dots (ARC-11 & THMR-IP3600HP-D)-updated-4-8-2021.pdf current
- 15:32, 4 February 2021 diff hist +23 Dry Etching Recipes
- 15:16, 4 February 2021 diff hist +59 Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher current Tag: Visual edit
- 15:14, 4 February 2021 diff hist +260 N Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher Created page with "{| class="wikitable" | colspan="6" |Fluorine ICP: 3.8mT, 50/800W, CHF3/CF4=10/30sccm, time=90 sec |- |Date |Sample# |Etch Rate (nm/min) |Etch Selectivity (SiO2/PR) |Average..." Tag: Visual edit
- 15:12, 4 February 2021 diff hist +1 ICP Etching Recipes →SiO2 Etch Historical Data Tag: Visual edit
- 15:07, 4 February 2021 diff hist +1 ICP Etching Recipes →SiO2 Etch Historical Data
- 17:33, 3 February 2021 diff hist +59 InP Etch Rate and Selectivity (InP/SiO2) add another pic Tag: Visual edit
- 17:32, 3 February 2021 diff hist 0 N File:IP210119.pdf current
- 17:32, 3 February 2021 diff hist +59 InP Etch Rate and Selectivity (InP/SiO2) add a pic Tag: Visual edit
- 17:31, 3 February 2021 diff hist 0 N File:IP210117.pdf current
- 17:28, 3 February 2021 diff hist +35 InP Etch Rate and Selectivity (InP/SiO2) add a data point Tag: Visual edit