User contributions
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- 18:00, 8 April 2021 (diff | hist) . . (-45) . . m Lithography Recipes (→Holography Recipes) (current)
- 17:55, 8 April 2021 (diff | hist) . . (+46) . . m Lithography Recipes (→Holography Recipes)
- 17:54, 8 April 2021 (diff | hist) . . (0) . . N File:Holography Process for 1D-lines and 2D-dots (ARC-11 & THMR-IP3600HP-D)-updated-4-8-2021.pdf (current)
- 16:32, 4 February 2021 (diff | hist) . . (+23) . . Dry Etching Recipes (current)
- 16:16, 4 February 2021 (diff | hist) . . (+59) . . Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher (current) (Tag: Visual edit)
- 16:14, 4 February 2021 (diff | hist) . . (+260) . . N Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher (Created page with "{| class="wikitable" | colspan="6" |Fluorine ICP: 3.8mT, 50/800W, CHF3/CF4=10/30sccm, time=90 sec |- |Date |Sample# |Etch Rate (nm/min) |Etch Selectivity (SiO2/PR) |Average...") (Tag: Visual edit)
- 16:12, 4 February 2021 (diff | hist) . . (+1) . . ICP Etching Recipes (→SiO2 Etch Historical Data) (Tag: Visual edit)
- 16:07, 4 February 2021 (diff | hist) . . (+1) . . ICP Etching Recipes (→SiO2 Etch Historical Data)
- 18:33, 3 February 2021 (diff | hist) . . (+59) . . InP Etch Rate and Selectivity (InP/SiO2) (add another pic) (current) (Tag: Visual edit)
- 18:32, 3 February 2021 (diff | hist) . . (0) . . N File:IP210119.pdf (current)
- 18:32, 3 February 2021 (diff | hist) . . (+59) . . InP Etch Rate and Selectivity (InP/SiO2) (add a pic) (Tag: Visual edit)
- 18:31, 3 February 2021 (diff | hist) . . (0) . . N File:IP210117.pdf (current)
- 18:28, 3 February 2021 (diff | hist) . . (+35) . . InP Etch Rate and Selectivity (InP/SiO2) (add a data point) (Tag: Visual edit)
- 18:43, 2 February 2021 (diff | hist) . . (0) . . ICP Etching Recipes (→Historical Data (SiO2, Florine ICP Etcher)) (Tag: Visual edit)
- 18:39, 2 February 2021 (diff | hist) . . (+19) . . ICP Etching Recipes (→Historical Data (SiO2, Florine ICP Etcher)) (Tag: Visual edit)
- 18:37, 2 February 2021 (diff | hist) . . (+59) . . Test Data of etching SiO2 with CHF3/CF4-Florine ICP Etcher (current) (Tag: Visual edit)
- 18:36, 2 February 2021 (diff | hist) . . (+4) . . Test Data of etching SiO2 with CHF3/CF4-Florine ICP Etcher (Tag: Visual edit)
- 18:36, 2 February 2021 (diff | hist) . . (+259) . . N Test Data of etching SiO2 with CHF3/CF4-Florine ICP Etcher (Created page with "{| class="wikitable" | colspan="6" |Florine ICP: 3.8mT, 50/800W, CHF3/CF4=10/30sccm, time=90 sec |- |Date |Sample# |Etch Rate (nm/min) |Etch Selectivity (SiO2/PR) |Averaged...") (Tag: Visual edit)
- 18:35, 2 February 2021 (diff | hist) . . (+11) . . ICP Etching Recipes (→Historical Data (SiO2, Florine ICP Etcher)) (Tag: Visual edit)
- 18:33, 2 February 2021 (diff | hist) . . (+4) . . Test Data of etching SiO2 with CHF3/CF4-Florine (current) (Tag: Visual edit)
- 18:30, 2 February 2021 (diff | hist) . . (+4) . . Test Data of Etching SiO2 with CHF3/CF4-Florine ICP Etcher (current) (Tag: Visual edit)
- 18:29, 2 February 2021 (diff | hist) . . (+59) . . Test Data of Etching SiO2 with CHF3/CF4-Florine ICP Etcher (adding a SEM) (Tag: Visual edit)
- 18:27, 2 February 2021 (diff | hist) . . (0) . . N File:FE210206.pdf (current)
- 18:18, 2 February 2021 (diff | hist) . . (+259) . . N Test Data of Etching SiO2 with CHF3/CF4-Florine ICP Etcher (Created page with "{| class="wikitable" | colspan="6" |Florine ICP: 3.8mT, 50/800W, CHF3/CF4=10/30sccm, time=90 sec |- |Date |Sample# |Etch Rate (nm/min) |Etch Selectivity (SiO2/PR) |Averaged...") (Tag: Visual edit)
- 16:53, 2 February 2021 (diff | hist) . . (+16) . . Test Data of etching SiO2 with CHF3/CF4-Florine (Tag: Visual edit)
- 16:50, 2 February 2021 (diff | hist) . . (-6) . . Test Data of etching SiO2 with CHF3/CF4-Florine (Tag: Visual edit)
- 16:47, 2 February 2021 (diff | hist) . . (+250) . . N Test Data of etching SiO2 with CHF3/CF4-Florine (Created page with "{| class="wikitable" | colspan="5" |ICP#2: 0.5Pa, 50/500W, CHF3/CF4/O2=35/5/10sccm, time=210 sec |- |Date |Sample# |Etch Rate (nm/min) |Etch Selectivity (SiO2/PR) |Averaged...") (Tag: Visual edit)
- 16:39, 2 February 2021 (diff | hist) . . (+52) . . ICP Etching Recipes (→Historical Data (SiO2, Florine ICP Etcher)) (Tag: Visual edit)
- 16:26, 2 February 2021 (diff | hist) . . (-1) . . ICP Etching Recipes (→Historical Data (SiO2, Florine ICP Etcher))
- 16:25, 2 February 2021 (diff | hist) . . (+53) . . ICP Etching Recipes (→Historical Data (SiO2, Florines ICP Etcher))
- 16:22, 2 February 2021 (diff | hist) . . (+49) . . ICP Etching Recipes (→PlasmaTherm/SLR Fluorine Etcher)
- 19:42, 8 January 2021 (diff | hist) . . (+59) . . Test Data of etching SiO2 with CHF3/CF4 (add a SEM pic) (current) (Tag: Visual edit)
- 19:41, 8 January 2021 (diff | hist) . . (0) . . N File:I2210102.pdf (current)
- 19:39, 8 January 2021 (diff | hist) . . (+59) . . Test Data of etching SiO2 with CHF3/CF4-ICP1 (add a SEM pic) (current) (Tag: Visual edit)
- 19:37, 8 January 2021 (diff | hist) . . (0) . . N File:I1210113.pdf (current)
- 17:45, 8 January 2021 (diff | hist) . . (+36) . . Test Data of etching SiO2 with CHF3/CF4 (adding a data point) (Tag: Visual edit)
- 17:44, 8 January 2021 (diff | hist) . . (+36) . . Test Data of etching SiO2 with CHF3/CF4-ICP1 (add a data poing) (Tag: Visual edit)
- 18:55, 30 August 2020 (diff | hist) . . (+59) . . InP Etch Rate and Selectivity (InP/SiO2) (add a Sem PIC) (Tag: Visual edit)
- 18:54, 30 August 2020 (diff | hist) . . (0) . . N File:IP020104.pdf (current)
- 18:50, 30 August 2020 (diff | hist) . . (+38) . . InP Etch Rate and Selectivity (InP/SiO2) (add a data point) (Tag: Visual edit)
- 17:21, 10 August 2020 (diff | hist) . . (+10) . . Test Data of etching SiO2 with CHF3/CF4 (Tag: Visual edit)
- 17:21, 10 August 2020 (diff | hist) . . (+27) . . Test Data of etching SiO2 with CHF3/CF4 (a comment added) (Tag: Visual edit)
- 17:19, 10 August 2020 (diff | hist) . . (+59) . . Test Data of etching SiO2 with CHF3/CF4 (add a SEM) (Tag: Visual edit)
- 17:18, 10 August 2020 (diff | hist) . . (0) . . N File:I2200203.pdf (current)
- 17:12, 10 August 2020 (diff | hist) . . (+36) . . Test Data of etching SiO2 with CHF3/CF4 (add a etch data point) (Tag: Visual edit)
- 15:59, 31 July 2020 (diff | hist) . . (-30) . . Dry Etching Recipes
- 15:56, 31 July 2020 (diff | hist) . . (+72) . . Dry Etching Recipes
- 15:43, 31 July 2020 (diff | hist) . . (0) . . Dry Etching Recipes (add a recipe) (Tag: Visual edit)
- 15:36, 31 July 2020 (diff | hist) . . (0) . . N File:InP Etching result-CAIBE.pdf (current)
- 15:27, 31 July 2020 (diff | hist) . . (+3) . . Other Dry Etching Recipes (add a etch recipe) (current) (Tag: Visual edit)
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