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18:00, 8 April 2021 (diff | hist) . . (-45)‎ . . m Lithography Recipes ‎ (→‎Holography Recipes) (current)
17:55, 8 April 2021 (diff | hist) . . (+46)‎ . . m Lithography Recipes ‎ (→‎Holography Recipes)
17:54, 8 April 2021 (diff | hist) . . (0)‎ . . N File:Holography Process for 1D-lines and 2D-dots (ARC-11 & THMR-IP3600HP-D)-updated-4-8-2021.pdf ‎ (current)
16:32, 4 February 2021 (diff | hist) . . (+23)‎ . . Dry Etching Recipes ‎ (current)
16:16, 4 February 2021 (diff | hist) . . (+59)‎ . . Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher ‎ (current) (Tag: Visual edit)
16:14, 4 February 2021 (diff | hist) . . (+260)‎ . . N Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher ‎ (Created page with "{| class="wikitable" | colspan="6" |Fluorine ICP: 3.8mT, 50/800W, CHF3/CF4=10/30sccm, time=90 sec |- |Date |Sample# |Etch Rate (nm/min) |Etch Selectivity (SiO2/PR) |Average...") (Tag: Visual edit)
16:12, 4 February 2021 (diff | hist) . . (+1)‎ . . ICP Etching Recipes ‎ (→‎SiO2 Etch Historical Data) (Tag: Visual edit)
16:07, 4 February 2021 (diff | hist) . . (+1)‎ . . ICP Etching Recipes ‎ (→‎SiO2 Etch Historical Data)
18:33, 3 February 2021 (diff | hist) . . (+59)‎ . . InP Etch Rate and Selectivity (InP/SiO2) ‎ (add another pic) (current) (Tag: Visual edit)
18:32, 3 February 2021 (diff | hist) . . (0)‎ . . N File:IP210119.pdf ‎ (current)
18:32, 3 February 2021 (diff | hist) . . (+59)‎ . . InP Etch Rate and Selectivity (InP/SiO2) ‎ (add a pic) (Tag: Visual edit)
18:31, 3 February 2021 (diff | hist) . . (0)‎ . . N File:IP210117.pdf ‎ (current)
18:28, 3 February 2021 (diff | hist) . . (+35)‎ . . InP Etch Rate and Selectivity (InP/SiO2) ‎ (add a data point) (Tag: Visual edit)
18:43, 2 February 2021 (diff | hist) . . (0)‎ . . ICP Etching Recipes ‎ (→‎Historical Data (SiO2, Florine ICP Etcher)) (Tag: Visual edit)
18:39, 2 February 2021 (diff | hist) . . (+19)‎ . . ICP Etching Recipes ‎ (→‎Historical Data (SiO2, Florine ICP Etcher)) (Tag: Visual edit)
18:37, 2 February 2021 (diff | hist) . . (+59)‎ . . Test Data of etching SiO2 with CHF3/CF4-Florine ICP Etcher ‎ (current) (Tag: Visual edit)
18:36, 2 February 2021 (diff | hist) . . (+4)‎ . . Test Data of etching SiO2 with CHF3/CF4-Florine ICP Etcher ‎ (Tag: Visual edit)
18:36, 2 February 2021 (diff | hist) . . (+259)‎ . . N Test Data of etching SiO2 with CHF3/CF4-Florine ICP Etcher ‎ (Created page with "{| class="wikitable" | colspan="6" |Florine ICP: 3.8mT, 50/800W, CHF3/CF4=10/30sccm, time=90 sec |- |Date |Sample# |Etch Rate (nm/min) |Etch Selectivity (SiO2/PR) |Averaged...") (Tag: Visual edit)
18:35, 2 February 2021 (diff | hist) . . (+11)‎ . . ICP Etching Recipes ‎ (→‎Historical Data (SiO2, Florine ICP Etcher)) (Tag: Visual edit)
18:33, 2 February 2021 (diff | hist) . . (+4)‎ . . Test Data of etching SiO2 with CHF3/CF4-Florine ‎ (current) (Tag: Visual edit)
18:30, 2 February 2021 (diff | hist) . . (+4)‎ . . Test Data of Etching SiO2 with CHF3/CF4-Florine ICP Etcher ‎ (current) (Tag: Visual edit)
18:29, 2 February 2021 (diff | hist) . . (+59)‎ . . Test Data of Etching SiO2 with CHF3/CF4-Florine ICP Etcher ‎ (adding a SEM) (Tag: Visual edit)
18:27, 2 February 2021 (diff | hist) . . (0)‎ . . N File:FE210206.pdf ‎ (current)
18:18, 2 February 2021 (diff | hist) . . (+259)‎ . . N Test Data of Etching SiO2 with CHF3/CF4-Florine ICP Etcher ‎ (Created page with "{| class="wikitable" | colspan="6" |Florine ICP: 3.8mT, 50/800W, CHF3/CF4=10/30sccm, time=90 sec |- |Date |Sample# |Etch Rate (nm/min) |Etch Selectivity (SiO2/PR) |Averaged...") (Tag: Visual edit)
16:53, 2 February 2021 (diff | hist) . . (+16)‎ . . Test Data of etching SiO2 with CHF3/CF4-Florine ‎ (Tag: Visual edit)
16:50, 2 February 2021 (diff | hist) . . (-6)‎ . . Test Data of etching SiO2 with CHF3/CF4-Florine ‎ (Tag: Visual edit)
16:47, 2 February 2021 (diff | hist) . . (+250)‎ . . N Test Data of etching SiO2 with CHF3/CF4-Florine ‎ (Created page with "{| class="wikitable" | colspan="5" |ICP#2: 0.5Pa, 50/500W, CHF3/CF4/O2=35/5/10sccm, time=210 sec |- |Date |Sample# |Etch Rate (nm/min) |Etch Selectivity (SiO2/PR) |Averaged...") (Tag: Visual edit)
16:39, 2 February 2021 (diff | hist) . . (+52)‎ . . ICP Etching Recipes ‎ (→‎Historical Data (SiO2, Florine ICP Etcher)) (Tag: Visual edit)
16:26, 2 February 2021 (diff | hist) . . (-1)‎ . . ICP Etching Recipes ‎ (→‎Historical Data (SiO2, Florine ICP Etcher))
16:25, 2 February 2021 (diff | hist) . . (+53)‎ . . ICP Etching Recipes ‎ (→‎Historical Data (SiO2, Florines ICP Etcher))
16:22, 2 February 2021 (diff | hist) . . (+49)‎ . . ICP Etching Recipes ‎ (→‎PlasmaTherm/SLR Fluorine Etcher)
19:42, 8 January 2021 (diff | hist) . . (+59)‎ . . Test Data of etching SiO2 with CHF3/CF4 ‎ (add a SEM pic) (current) (Tag: Visual edit)
19:41, 8 January 2021 (diff | hist) . . (0)‎ . . N File:I2210102.pdf ‎ (current)
19:39, 8 January 2021 (diff | hist) . . (+59)‎ . . Test Data of etching SiO2 with CHF3/CF4-ICP1 ‎ (add a SEM pic) (current) (Tag: Visual edit)
19:37, 8 January 2021 (diff | hist) . . (0)‎ . . N File:I1210113.pdf ‎ (current)
17:45, 8 January 2021 (diff | hist) . . (+36)‎ . . Test Data of etching SiO2 with CHF3/CF4 ‎ (adding a data point) (Tag: Visual edit)
17:44, 8 January 2021 (diff | hist) . . (+36)‎ . . Test Data of etching SiO2 with CHF3/CF4-ICP1 ‎ (add a data poing) (Tag: Visual edit)
18:55, 30 August 2020 (diff | hist) . . (+59)‎ . . InP Etch Rate and Selectivity (InP/SiO2) ‎ (add a Sem PIC) (Tag: Visual edit)
18:54, 30 August 2020 (diff | hist) . . (0)‎ . . N File:IP020104.pdf ‎ (current)
18:50, 30 August 2020 (diff | hist) . . (+38)‎ . . InP Etch Rate and Selectivity (InP/SiO2) ‎ (add a data point) (Tag: Visual edit)
17:21, 10 August 2020 (diff | hist) . . (+10)‎ . . Test Data of etching SiO2 with CHF3/CF4 ‎ (Tag: Visual edit)
17:21, 10 August 2020 (diff | hist) . . (+27)‎ . . Test Data of etching SiO2 with CHF3/CF4 ‎ (a comment added) (Tag: Visual edit)
17:19, 10 August 2020 (diff | hist) . . (+59)‎ . . Test Data of etching SiO2 with CHF3/CF4 ‎ (add a SEM) (Tag: Visual edit)
17:18, 10 August 2020 (diff | hist) . . (0)‎ . . N File:I2200203.pdf ‎ (current)
17:12, 10 August 2020 (diff | hist) . . (+36)‎ . . Test Data of etching SiO2 with CHF3/CF4 ‎ (add a etch data point) (Tag: Visual edit)
15:59, 31 July 2020 (diff | hist) . . (-30)‎ . . Dry Etching Recipes ‎
15:56, 31 July 2020 (diff | hist) . . (+72)‎ . . Dry Etching Recipes ‎
15:43, 31 July 2020 (diff | hist) . . (0)‎ . . Dry Etching Recipes ‎ (add a recipe) (Tag: Visual edit)
15:36, 31 July 2020 (diff | hist) . . (0)‎ . . N File:InP Etching result-CAIBE.pdf ‎ (current)
15:27, 31 July 2020 (diff | hist) . . (+3)‎ . . Other Dry Etching Recipes ‎ (add a etch recipe) (current) (Tag: Visual edit)

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