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- 17:23, 11 October 2019 diff hist +44 N File:Editing Tutorials - 5- insert link into page.png current
- 17:21, 11 October 2019 diff hist +47 N File:Editing Tutorials 4b- file info right click URL.png
- 17:20, 11 October 2019 diff hist +40 N File:Editing Tutorials 3c- modifications etc..png current
- 17:17, 11 October 2019 diff hist +767 Editing Tutorials →Linking to a PDF or other file: more upload PDF... Tag: Visual edit
- 17:10, 11 October 2019 diff hist +512 Editing Tutorials →Basic Editing: start of "insert PDF" section Tag: Visual edit
- 16:56, 11 October 2019 diff hist -245 Template:Announcements removed ASML
- 16:40, 8 October 2019 diff hist +45 N File:Editing Tutorials - Upload PDF - 3b- filename descript upload button.png current
- 16:36, 8 October 2019 diff hist +50 N File:Editing Tutorials - Upload PDF - 2- choose file.png current
- 16:35, 8 October 2019 diff hist +49 N File:Editing Tutorials - Upload PDF - 1- upload file.png current
- 16:30, 8 October 2019 diff hist +73 Template:Tool minor updates
- 16:25, 8 October 2019 diff hist -24 m Automated Coat/Develop System (S-Cubed Flexi) fixed ToolTemplate 'type' arg
- 16:18, 8 October 2019 diff hist +56 m Stepper 3 (ASML DUV) →Troubleshooting and Recovery: minor grammar Tag: Visual edit
- 16:17, 8 October 2019 diff hist +67 m Stepper 3 (ASML DUV) toolTemplate added Litho links
- 16:16, 8 October 2019 diff hist +50 m Automated Coat/Develop System (S-Cubed Flexi) ToolTemplate: model & mfg. link
- 16:09, 8 October 2019 diff hist +1 m Editing Tutorials move TOC
- 16:07, 8 October 2019 diff hist +125 m Lithography Recipes →Automated Coat/Develop System Recipes (S-Cubed Flexi): link to tool page Tag: Visual edit
- 16:05, 8 October 2019 diff hist +86 Tool List added S-Cubed Flexi to Wet processing tools as well Tag: Visual edit
- 16:04, 8 October 2019 diff hist -10 m Automated Coat/Develop System (S-Cubed Flexi) edit staff use notice Tag: Visual edit
- 16:03, 8 October 2019 diff hist +233 Automated Coat/Develop System (S-Cubed Flexi) added notice abotu staff use only Tag: Visual edit
- 16:00, 8 October 2019 diff hist +395 Automated Coat/Develop System (S-Cubed Flexi) added PR's and links to recipes Tag: Visual edit
- 15:49, 8 October 2019 diff hist +154 Lithography Recipes added S-Cubed coater section Tag: Visual edit
- 15:31, 8 October 2019 diff hist +49 Automated Coat/Develop System (S-Cubed Flexi) Added ToolTemplate - tool type and recepe
- 15:09, 8 October 2019 diff hist +397 N Automated Coat/Develop System (S-Cubed Flexi) initial page
- 15:07, 8 October 2019 diff hist -49 Stepper 1 (GCA 6300) delete email/phone
- 15:06, 8 October 2019 diff hist +86 Tool List →Lithography: link to S-Cubed Coater Tag: Visual edit
- 13:15, 4 October 2019 diff hist -12 Template:Announcements ASML down - TCU, minimal info
- 12:23, 4 October 2019 diff hist +1,487 ICP Etching Recipes →Ru (Ruthenium) Etch (Panasonic 2): Ru etch PDF Tag: Visual edit
- 12:11, 4 October 2019 diff hist +45 N File:194 Ru Etch O2,Cl2.pdf BillM - Pan2 Ru etch 2019-09-19 current
- 14:02, 2 October 2019 diff hist +122 DS-K101-304 Bake Temp. versus Develop Rate →Conditions: added 185*C current Tag: Visual edit
- 21:47, 27 September 2019 diff hist +19 m Gold Plating Bench added model
- 13:51, 25 September 2019 diff hist +52 Stepper Recipes →Positive Resist (ASML DUV): added Annular illum in notes Tag: Visual edit
- 10:54, 25 September 2019 diff hist +13 m Microscopes documentation -> procedures & documentation Tag: Visual edit
- 10:53, 25 September 2019 diff hist +395 Microscopes →Microscope #1: Olympus Optiphot-2 (Bay 3): renamed, moved to Nikon, added info, highlighted Microscope training Tag: Visual edit
- 09:46, 25 September 2019 diff hist +78 YES-150C-Various-Resists link to PR datasheets Tag: Visual edit
- 09:45, 25 September 2019 diff hist +52 YES-150C-Various-Resists Tag: Visual edit
- 09:44, 25 September 2019 diff hist +211 m YES-150C-Various-Resists description Tag: Visual edit
- 09:41, 25 September 2019 diff hist +10 m YES-SPR220-Various-Temps smaller figure Tag: Visual edit
- 09:41, 25 September 2019 diff hist -30 Oxygen Plasma System Recipes →Plasma Clean (YES EcoClean): correct YES EcoClean link Tag: Visual edit
- 09:40, 25 September 2019 diff hist -113 Tool List →Dry Etch: correct YES EcoClean link Tag: Visual edit
- 09:39, 25 September 2019 diff hist 0 m Plasma Clean (YES EcoClean) John d moved page Plamsa Clean (YES EcoClean) to Plasma Clean (YES EcoClean) without leaving a redirect: spelling
- 19:22, 21 September 2019 diff hist 0 m Demis D. John mnor gif tweak Tag: Visual edit
- 19:21, 21 September 2019 diff hist +10 m Demis D. John moved gif
- 19:20, 21 September 2019 diff hist -1 m Demis D. John moved gif
- 16:12, 19 September 2019 diff hist +25 Frequently Asked Questions →Wifi Access in the Nanofab: header for "cell phone calls " section Tag: Visual edit
- 15:59, 19 September 2019 diff hist +263 Frequently Asked Questions →I can't connect to the Nanofiles FTP server!: add'l info about winscp & filezilla blocking Tag: Visual edit
- 08:39, 18 September 2019 diff hist +256 Template:Announcements ASML PM
- 07:42, 17 September 2019 diff hist -29 DS-K101-304 Bake Temp. versus Develop Rate courtesy brian burkett (omit Google) Tag: Visual edit
- 07:37, 17 September 2019 diff hist +450 N DS-K101-304 Bake Temp. versus Develop Rate added data from email form Sean Demura Tag: Visual edit
- 07:31, 17 September 2019 diff hist -558 Stepper Recipes →DS-K101-304: link to bake temp vs. dev. rate Tag: Visual edit
- 11:59, 12 September 2019 diff hist +14 Frequently Asked Questions →Authorship Tag: Visual edit
- 09:31, 12 September 2019 diff hist +124 Lift-Off with DUV Imaging + PMGI Underlayer added PMGI dissolution rate Tag: Visual edit
- 09:17, 12 September 2019 diff hist +367 Frequently Asked Questions →Publications acknowledging the Nanofab: updated, added separate "authorship" sub-heading Tag: Visual edit
- 15:17, 11 September 2019 diff hist +146 Plasma Activation (EVG 810) link to recipes page, not yet fixed Tool info link Tag: Visual edit
- 08:52, 11 September 2019 diff hist +54 Template:Announcements →Logitech Wafer Bonder: Down: 3 week estiamte for repalcement part delivery
- 08:52, 11 September 2019 diff hist +530 Frequently Asked Questions →Processing/Fabrication Questions: user manuals section Tag: Visual edit
- 12:06, 9 September 2019 diff hist +216 m Laser Etch Monitoring →Monitoring Photoresist Etch Rate: minor caption formatting Tag: Visual edit
- 12:02, 9 September 2019 diff hist +56 Laser Etch Monitoring →Monitoring Photoresist Etch Rate: updated captions Tag: Visual edit
- 11:26, 9 September 2019 diff hist +1,138 Laser Etch Monitoring added examples of etch monitoring Tag: Visual edit
- 11:24, 9 September 2019 diff hist +40 N File:Annotated PR etch - Om1000 03 - ARC + Cl + PR etch v1.jpg
- 11:18, 9 September 2019 diff hist +51 N File:ARC etch + Cr etch - UV6 at 2krpm (900nm) survived v2 - screenshot.jpg current
- 08:35, 9 September 2019 diff hist -7 m Tech Talks Seminar Series rename subheading Tag: Visual edit
- 08:34, 9 September 2019 diff hist +45 Tech Talks Seminar Series sub-heading for slides Tag: Visual edit
- 20:22, 7 September 2019 diff hist +281 Lift-Off with DUV Imaging + PMGI Underlayer Minor updates to process Tag: Visual edit
- 22:31, 6 September 2019 diff hist +231 Lift-Off with DUV Imaging + PMGI Underlayer →Examples: insert SEM Tag: Visual edit
- 22:30, 6 September 2019 diff hist +84 N File:PMGI+UV6 lift-off SEM - 2017-06-30 DJ.png current
- 22:18, 6 September 2019 diff hist +1 m Lithography Recipes →Lift-Off Techniques: fixed link
- 22:15, 6 September 2019 diff hist +202 m Lift-Off with DUV Imaging + PMGI Underlayer Tag: Visual edit
- 21:45, 6 September 2019 diff hist +2,196 N Lift-Off with DUV Imaging + PMGI Underlayer initial process
- 18:35, 6 September 2019 diff hist -48 Probe Station & Curve Tracer Changed super to Demis
- 11:46, 6 September 2019 diff hist +137 Step Profilometer (KLA Tencor P-7) added placeholders for detailed specs Tag: Visual edit
- 10:30, 6 September 2019 diff hist -41 Lithography Recipes →Lift-Off Techniques: added links to wiki version of lift-off tutorial + DUV lift-off page Tag: Visual edit
- 21:18, 4 September 2019 diff hist -21 Optical Film Thickness & Wafer-Mapping (Filmetrics F50) Corrected wavelength range & model Tag: Visual edit
- 08:23, 30 August 2019 diff hist +67 Template:News Corrected info and titles
- 08:20, 30 August 2019 diff hist +60 m Template:News →TechTalk: Dr. Garett Cole & Songtao Liu
- 08:19, 30 August 2019 diff hist +277 Template:News Initial placeholder for tech talk
- 08:16, 30 August 2019 diff hist +51 Tech Talks Seminar Series Show table of contents for linking
- 13:33, 27 August 2019 diff hist -633 m Dry Etching Recipes fix ICP1 GaAs link Tag: Visual edit
- 15:36, 23 August 2019 diff hist +94 Demis D. John testing file upload Tag: Visual edit
- 15:35, 23 August 2019 diff hist +40 N File:Demis UCSB-Photonics-Gif.gif current
- 17:47, 22 August 2019 diff hist +365 Template:Announcements added Aidan's SCE outage email
- 15:18, 22 August 2019 diff hist +116 Demis D. John →About: testing editing Tag: Visual edit
- 00:32, 22 August 2019 diff hist +350 Laser Etch Monitoring listed which tools have which laser, added redlink to RIE5 lasermon procedure
- 13:51, 20 August 2019 diff hist +186 Template:Announcements added logitech bonder
- 08:53, 15 August 2019 diff hist +54 m Demis D. John →External Professional Websites: added phosoc Tag: Visual edit
- 16:46, 14 August 2019 diff hist +91 m Demis D. John website work Tag: Visual edit
- 14:01, 14 August 2019 diff hist 0 m Frequently Asked Questions →Bring a new chemical/material into the lab: emphasis Tag: Visual edit
- 14:00, 14 August 2019 diff hist +340 Frequently Asked Questions →Who do I contact for an equipment problem or general NanoFab problem?: added [Report Tool Issue] button Tag: Visual edit
- 13:44, 14 August 2019 diff hist -8 m Frequently Asked Questions →Wifi Access in the Nanofab: minor typo Tag: Visual edit
- 13:43, 14 August 2019 diff hist +161 Frequently Asked Questions →Wifi Access in the Nanofab: mention verizon repeaters Tag: Visual edit
- 11:06, 7 August 2019 diff hist +79 Template:News link to wiki page
- 11:03, 7 August 2019 diff hist +384 Template:News YES ASHER info
- 10:58, 7 August 2019 diff hist +767 Packaging Recipes →Surface Protection: Blue tape Tag: Visual edit
- 10:50, 7 August 2019 diff hist +20 Packaging Recipes →Surface Protection: UV release time Tag: Visual edit
- 13:16, 24 July 2019 diff hist +56 Packaging Recipes →Surface Protection: added details such as "remove from tape" Tag: Visual edit
- 13:14, 24 July 2019 diff hist +280 Dicing Saw (ADT) Corrected staff info infobox, added model number, added tape applicator model number, linked to recipes page
- 13:07, 24 July 2019 diff hist +61 m Packaging Recipes →Mounting/Unmounting Samples: link to nonexistent SOP for tape mounting Tag: Visual edit
- 13:04, 24 July 2019 diff hist +42 Packaging Recipes →Calculated Blade Exposures: 51mm unavailable Tag: Visual edit
- 10:42, 22 July 2019 diff hist +127 m KLA Tencor P7 - Basic profile instructions explain autromatic cals Tag: Visual edit
- 08:53, 21 July 2019 diff hist +8 Logitech WBS7 - Procedure for Wax Mounting with Spin-On Crystalbond added Work In Progress
- 08:53, 21 July 2019 diff hist -2 m Packaging Recipes →Wafer Bonder (Logitech WBS7): link to procedure Tag: Visual edit
- 08:51, 21 July 2019 diff hist +622 Logitech WBS7 - Procedure for Wax Mounting with bulk Crystalbond Stick pasted miguel's procedure Tag: Visual edit
- 16:34, 19 July 2019 diff hist -12 Vacuum Deposition Recipes corrected PECVD2 a-Si link Tag: Visual edit
- 15:32, 19 July 2019 diff hist -47 m Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) →Documentation: corrected link
- 15:32, 19 July 2019 diff hist +117 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) →Documentation: link to SOP & mention Cortex software
- 12:29, 18 July 2019 diff hist -2 Stepper 3 (ASML DUV) changes supervisor to Demis
- 12:27, 18 July 2019 diff hist -51 m Stepper 3 (ASML DUV) corrected supervisor template
- 12:24, 18 July 2019 diff hist +154 m Atomic Layer Deposition Recipes →Atomic Layer Deposition (Oxford FlexAL): 30nm max. thickness indicated Tag: Visual edit
- 22:48, 8 July 2019 diff hist +2 m Template:WIP
- 22:47, 8 July 2019 diff hist +584 GCA 6300 Mask Making Guidance added {{todo}} of corrections needed, delted photronics info
- 16:12, 8 July 2019 diff hist +14 m Stepper Recipes →DS-K101: approx. thickness Tag: Visual edit
- 16:10, 8 July 2019 diff hist +243 m Stepper Recipes →DS-K101: link to datasheet Tag: Visual edit
- 19:30, 7 July 2019 diff hist +343 Frequently Asked Questions →Publications acknowledging the Nanofab: add staff as author is novel process developed Tag: Visual edit
- 11:50, 5 July 2019 diff hist +4 Lithography Recipes →Chemicals Stocked + Datasheets: DSK-101 --> DSK-101-304 Tag: Visual edit
- 14:33, 3 July 2019 diff hist +18 IR Thermal Microscope (QFI) →Capabilities: update MIR camera type Tag: Visual edit
- 14:31, 3 July 2019 diff hist +326 IR Thermal Microscope (QFI) →About: moves MIR wavelength range to Capabilities + some more info about that Tag: Visual edit
- 10:46, 26 June 2019 diff hist +310 Deep UV Optical Microscope (Olympus) detailed specs - first pass Tag: Visual edit
- 10:59, 24 June 2019 diff hist +30 m Tool List corrected photo chemicals link, moved inside table for easier location Tag: Visual edit
- 13:38, 18 June 2019 diff hist +146 IR Thermal Microscope (QFI) added microscope objectives & cameras Tag: Visual edit
- 12:26, 18 June 2019 diff hist +186 IR Thermal Microscope (QFI) link to python script Tag: Visual edit
- 14:23, 13 June 2019 diff hist +587 m Intellemetrics Laser Etch Monitor Procedure for Panasonic ICP Etchers added sub headings, moved recipe edit current Tag: Visual edit
- 08:42, 12 June 2019 diff hist +98 m Stepper 3 (ASML DUV) Indicated that FEM is in SOP Tag: Visual edit
- 00:05, 12 June 2019 diff hist +611 ASML Stepper 3 Standard Operating Procedure →Running a focus and/or exposure matrix: added schematics for die ordering Tag: Visual edit
- 23:56, 11 June 2019 diff hist +32 N File:Stepper 3 - FEM Matrix Schematic.png current
- 23:55, 11 June 2019 diff hist +40 N File:Stepper 3 - FEM Energy Meander Schematic.png current
- 16:46, 11 June 2019 diff hist +612 Oven 4 (Thermo-Fisher HeraTherm) added info, needs verification Tag: Visual edit: Switched
- 16:31, 11 June 2019 diff hist 0 File:Oven4.jpg John d uploaded a new version of File:Oven4.jpg current
- 11:02, 10 June 2019 diff hist +1 m FIJI - Microscope Measurement Tools switch image example current
- 11:01, 10 June 2019 diff hist 0 File:MicroscopeMeasurementTools - FIJI draw measurement - line.png John d uploaded a new version of File:MicroscopeMeasurementTools - FIJI draw measurement - line.png current
- 11:00, 10 June 2019 diff hist +425 FIJI - Microscope Measurement Tools imge of calibrations list Tag: Visual edit
- 10:59, 10 June 2019 diff hist +71 N File:FIJI MMT UCSB-Fork Choose Microscope Calibration drop down.png current
- 10:53, 10 June 2019 diff hist -299 Calculators + Utilities →Analysis Programs: link to FIJI MMT installge/usage page Tag: Visual edit
- 10:49, 10 June 2019 diff hist 0 File:FIJI Install Directory - MacOS.png John d uploaded a new version of File:FIJI Install Directory - MacOS.png current
- 10:48, 10 June 2019 diff hist 0 m FIJI - Microscope Measurement Tools →Installation: image size Tag: Visual edit
- 10:47, 10 June 2019 diff hist +12 m FIJI - Microscope Measurement Tools image broder Tag: Visual edit
- 10:46, 10 June 2019 diff hist +5 m FIJI - Microscope Measurement Tools →Installation: spacing Tag: Visual edit
- 10:45, 10 June 2019 diff hist +3 m FIJI - Microscope Measurement Tools →Installation: tabs images Tag: Visual edit: Switched
- 10:40, 10 June 2019 diff hist +1,338 FIJI - Microscope Measurement Tools inserted images, corrections Tag: Visual edit
- 10:33, 10 June 2019 diff hist +55 N File:MicroscopeMeasurementTools - FIJI draw measurement - line.png
- 10:06, 10 June 2019 diff hist +69 N File:MicroscopeMeasurementTools - FIJI Install - Mac Show Package Contents.png current
- 10:05, 10 June 2019 diff hist +61 N File:MicroscopeMeasurementTools - FIJI Install Directory - WinXP.jpg current
- 10:03, 10 June 2019 diff hist +59 N File:FIJI Install Directory - MacOS.png
- 23:26, 6 June 2019 diff hist +2,910 N FIJI - Microscope Measurement Tools Initial instruction, no links
- 22:14, 6 June 2019 diff hist +46 Optical Film Spectra + Optical Properties (Filmetrics F10-RT-UVX) Changed tool info box name
- 21:39, 6 June 2019 diff hist +4 Optical Film Spectra + Optical Properties (Filmetrics F10-RT-UVX) Added photo
- 21:38, 6 June 2019 diff hist +48 N File:Filmetrics-F10-RT Photo.jpeg Photo of Filmetrics f10-RT-UVX Spectrophotometer current
- 13:01, 6 June 2019 diff hist 0 m Intellemetrics Laser Etch Monitor Procedure for Panasonic ICP Etchers move image
- 12:59, 6 June 2019 diff hist +4 m Intellemetrics Laser Etch Monitor Procedure for Panasonic ICP Etchers temp: manual box set to 300px Tag: Visual edit
- 12:40, 6 June 2019 diff hist 0 File:Filmetrics F40-UV - spectrum curve fit 07.jpg John d uploaded a new version of File:Filmetrics F40-UV - spectrum curve fit 07.jpg current
- 13:50, 4 June 2019 diff hist +121 m ASML Stepper 3 - UCSB Test Reticles →Alignment Markers: MA6 mark: contact Brian/Demis for GDS Tag: Visual edit
- 11:04, 4 June 2019 diff hist +75 Tool List →Thermal Processing: linked to new Ovens Overview page, reorganized ovens under this, removed Strip Annealer link (removed from lab) Tag: Visual edit
- 10:59, 4 June 2019 diff hist -169 Ovens - Overview of All Lab Ovens removed Tool Template - too cluttered and useless
- 10:58, 4 June 2019 diff hist +1,411 Ovens - Overview of All Lab Ovens inital page with some info filled in/guessed at Tag: Visual edit
- 10:55, 4 June 2019 diff hist +2 High Temp Oven (Blue M) tool id included for SUM link
- 10:47, 4 June 2019 diff hist +46 N Oven 4 (Fisher) John d moved page Oven 4 (Fisher) to Oven 4 (Thermo-Fisher HeraTherm): changed out for new oven current
- 10:47, 4 June 2019 diff hist 0 m Oven 4 (Thermo-Fisher HeraTherm) John d moved page Oven 4 (Fisher) to Oven 4 (Thermo-Fisher HeraTherm): changed out for new oven
- 10:44, 4 June 2019 diff hist +169 N Ovens - Overview of All Lab Ovens created page, generic Tool info
- 10:25, 4 June 2019 diff hist +74 Tool List →Thermal Processing for Photolithography: link to new Ovens Overview page Tag: Visual edit
- 11:23, 31 May 2019 diff hist -14 Filmetrics F40-UV Microscope-Mounted removed "screenshots" section --> "Examples" Tag: Visual edit
- 11:23, 31 May 2019 diff hist +1,293 Filmetrics F40-UV Microscope-Mounted →Screenshots + Examples: updated examples & confirming removal of SiO2 on Pt Tag: Visual edit
- 11:13, 31 May 2019 diff hist +19 m Filmetrics F40-UV Quick Start formatting current Tag: Visual edit
- 11:11, 31 May 2019 diff hist +131 Filmetrics F40-UV Quick Start →Sample Measurement: clarified good/bad fit & contatc Ning/Demis for help Tag: Visual edit: Switched
- 23:14, 30 May 2019 diff hist 0 m Template:Tool Removed spaces from filename in example.
- 23:10, 30 May 2019 diff hist +34 m Template:Tool →Options: no spaces in Picture filename
- 23:08, 30 May 2019 diff hist +20 m Template:Tool Typo in recipes thermalmproc
- 23:06, 30 May 2019 diff hist 0 m Rapid Thermal Processor (SSI Solaris 150) Corrected typo in recipe link
- 23:04, 30 May 2019 diff hist +14 m Thermal Processing Recipes More accurate description of how partial pressure derived Tag: Visual edit
- 23:00, 30 May 2019 diff hist +93 m Thermal Processing Recipes →Simulation Parameters: clarified partial pressure is from curve fitting Tag: Visual edit
- 22:56, 30 May 2019 diff hist +63 Tube Furnace (Tystar 8300) →About: specified tube 2: unprocessed, Tube3 processed is ok Tag: Visual edit
- 14:01, 30 May 2019 diff hist 0 m Tool List →Optical/Electron Microscopy: moved SEMs to bottom Tag: Visual edit
- 11:28, 30 May 2019 diff hist +565 Probe Station & Curve Tracer link to Keithley manuals etc. Tag: Visual edit
- 14:08, 28 May 2019 diff hist +114 m Thermal Processing Recipes linked to tool pages, minor updates, added HeraTherm for wafer bonding Tag: Visual edit
- 14:05, 28 May 2019 diff hist +1 m Tool List →Thermal Processing: corrected linberg --> lindberg over Tag: Visual edit
- 13:20, 28 May 2019 diff hist +972 Frequently Asked Questions new chemicals: include substrate materiasl Tag: Visual edit
- 13:10, 28 May 2019 diff hist +41 Frequently Asked Questions reordered by importance Tag: Visual edit
- 13:06, 28 May 2019 diff hist +89 m Frequently Asked Questions →Publications acknowledging the Nanofab: minor Tag: Visual edit
- 13:04, 28 May 2019 diff hist +575 Frequently Asked Questions →Wifi Access in the Nanofab: link to iOS/Android Wifi Calling instructions Tag: Visual edit
- 12:56, 28 May 2019 diff hist -217 Template:Announcements deleted Lab Open fan exhaust maintenance
- 12:55, 28 May 2019 diff hist +335 Template:Announcements ASMl PM
- 12:30, 28 May 2019 diff hist +87 Thermal Processing Recipes anned RTP Solaris section Tag: Visual edit: Switched
- 12:28, 28 May 2019 diff hist +1,043 Frequently Asked Questions publications and Wifi access/calling Tag: Visual edit
- 12:13, 28 May 2019 diff hist +522 N Rapid Thermal Processor (SSI Solaris 150) inital page with `todo` listed
- 12:05, 28 May 2019 diff hist +48 Tool List →Thermal Processing: link to RTP Solaris 150 Tag: Visual edit
- 12:04, 28 May 2019 diff hist +1 m Template:News →New Rapid Thermal Annealer Installation: spelling
- 12:03, 28 May 2019 diff hist +320 Template:News SSI RTP installation
- 09:41, 24 May 2019 diff hist +125 MediaWiki:Sidebar added Main Page: Force Refresh, clarified Tempaltes
- 09:37, 24 May 2019 diff hist -19 Template:Announcements lab open, deleted exhaust shutdown
- 00:03, 24 May 2019 diff hist 0 m Filmetrics F40-UV Microscope-Mounted punctiation of tool type
- 21:47, 23 May 2019 diff hist -59 m Filmetrics F40-UV Microscope-Mounted tool descr. update
- 21:44, 23 May 2019 diff hist +11 m Filmetrics F40-UV Microscope-Mounted updated tool description
- 21:39, 23 May 2019 diff hist +583 Filmetrics F40-UV Microscope-Mounted →Screenshots + Examples: Added example of inspecting for SiO2 dry-etch completion. Tag: Visual edit
- 21:36, 23 May 2019 diff hist +72 N File:Filmetrics F40-UV - 2018-11-08 - SiO Etch 4m+4m+1m - Fully Removed.png current
- 21:33, 23 May 2019 diff hist +51 N File:Filmetrics F40-UV - SiO Etch 4m+4m - Incomplete Etch.png current
- 23:33, 21 May 2019 diff hist +10 m Template:Tool showing spaces in photo filename
- 23:31, 21 May 2019 diff hist +78 m Template:Tool updated description
- 23:27, 21 May 2019 diff hist +312 Filmetrics F40-UV Microscope-Mounted added measurement screenshot
- 23:24, 21 May 2019 diff hist +147 N File:Filmetrics F40-UV - Measurement screenshot on metal pad 01.PNG Filmetrics F40-UV - Measurement screenshot on metal pad 01, showing icroscope view and resulting spectrum meas. + curve fitting and film thickness. current
- 23:19, 21 May 2019 diff hist +301 Filmetrics F40-UV Microscope-Mounted added Tool template instead of simple photo
- 12:35, 21 May 2019 diff hist -182 m Template:Tool →Arguments with Specific Values: cleanup options lists
- 12:11, 21 May 2019 diff hist +216 m Template:Tool →Arguments with Specific Values: clearified lists
- 12:07, 21 May 2019 diff hist +1,120 Template:Tool more info on editing supervisor info.
- 11:57, 21 May 2019 diff hist +1,995 Template:Tool info on each argument.
- 11:32, 16 May 2019 diff hist +81 Intellemetrics Laser Etch Monitor Procedure for Panasonic ICP Etchers pic of manual box
- 11:32, 16 May 2019 diff hist 0 File:Panasonic ICP1 Manual Box - annot v2.png John d uploaded a new version of File:Panasonic ICP1 Manual Box - annot v2.png current
- 11:26, 16 May 2019 diff hist +61 N File:Panasonic ICP1 Manual Box - annot v2.png Pan ICP1 Manual Box annotated to show RF Off & Ethcing Select
- 20:14, 15 May 2019 diff hist 0 m Demis D. John →Tools
- 20:12, 15 May 2019 diff hist +77 Demis D. John →Tools: added laser monitors Tag: Visual edit
- 20:11, 15 May 2019 diff hist +117 Intellemetrics Laser Etch Monitor Procedure for Panasonic ICP Etchers Notice that training required. Tag: Visual edit
- 19:32, 15 May 2019 diff hist +102 Intellemetrics Laser Etch Monitor Procedure for Panasonic ICP Etchers Added to press Enable buttons on Manual box. Tag: Visual edit
- 19:05, 15 May 2019 diff hist -22 m Laser Etch Monitoring Monor removed Intellemetrics text die to Horiba and custom system. Tag: Visual edit
- 18:57, 15 May 2019 diff hist +70 N File:Intellemetrics LEP500 Photo.jpg Photo of Intellemetrics LEP 500 laser etch monitor on Panasonic ICP #2 current
- 18:56, 15 May 2019 diff hist +271 Laser Etch Monitoring Added Intellemetrics tool info
- 00:51, 15 May 2019 diff hist +101 m Intellemetrics Laser Etch Monitor Procedure for Panasonic ICP Etchers manual box : etch select Tag: Visual edit
- 00:47, 15 May 2019 diff hist +131 m Intellemetrics Laser Etch Monitor Procedure for Panasonic ICP Etchers HR Tag: Visual edit
- 00:47, 15 May 2019 diff hist +59 m Intellemetrics Laser Etch Monitor Procedure for Panasonic ICP Etchers name and date Tag: Visual edit
- 00:39, 15 May 2019 diff hist +4,472 N Intellemetrics Laser Etch Monitor Procedure for Panasonic ICP Etchers INitial procedures for ICP1 & 2 Tag: Visual edit
- 00:00, 15 May 2019 diff hist +1,028 Laser Etch Monitoring →Procedures: general procedure Tag: Visual edit
- 23:50, 14 May 2019 diff hist +568 UCSB NanoFab Microscope Training inserted images for focus on edge, shadow iris, focus knob with gradations
- 23:43, 14 May 2019 diff hist 0 File:Nikon OptiPhot 200 - 6224 - field iris.jpg John d uploaded a new version of File:Nikon OptiPhot 200 - 6224 - field iris.jpg current
- 23:42, 14 May 2019 diff hist +47 N File:Nikon OptiPhot 200 - 6224 - field iris.jpg microscope knob for field aperture/focus shadow
- 23:39, 14 May 2019 diff hist +39 N File:Nikon OptiPhot 200 - 6219 - focus knob - .jpg Microscope - Focus Knob with Gradations current
- 23:29, 14 May 2019 diff hist +38 N File:Microscope Training - focus on edge crop - .jpg microscope - focusing on edge of wafer current
- 23:07, 14 May 2019 diff hist +63 m Fluorescence Microscope (Olympus MX51) included fluor. in description, mentioned calibations locked Tag: Visual edit
- 23:04, 14 May 2019 diff hist +307 m Microscopes update LEXT location, other minor updates
- 22:55, 14 May 2019 diff hist +186 Microscopes updated model numbers, Epi/Dia corrections Tag: Visual edit
- 20:59, 10 May 2019 diff hist +6 m UCSB NanoFab Microscope Training Moved shadow iris to focus sec.
- 20:57, 10 May 2019 diff hist +325 UCSB NanoFab Microscope Training Move TOC, shadow iris
- 10:16, 10 May 2019 diff hist +717 Microscopes updates on ProgRes/LEXT/DUV to specify user-editable vs. locked calibrations Tag: Visual edit
- 11:16, 7 May 2019 diff hist +9 m Calculators + Utilities →Analysis Programs: minor typos Tag: Visual edit
- 09:21, 7 May 2019 diff hist +27 N User:Zuzunaga lu redirect to Luis Zuzunaga staff page current
- 22:34, 6 May 2019 diff hist +73 m Stocked Chemical List su-8 = PR Tag: Visual edit
- 20:57, 6 May 2019 diff hist +1,088 Stocked Chemical List added alternate names col Tag: Visual edit
- 16:33, 6 May 2019 diff hist -2 Lithography Recipes →Photolithography Recipes: UVN2300-->UVN Tag: Visual edit
- 16:33, 6 May 2019 diff hist -4 Stepper Recipes →Negative Resist (ASML DUV): updates UVN2300 --> UVN30, from S.Cronin Traveler Tag: Visual edit
- 11:53, 3 May 2019 diff hist +26 m Stepper 1 (GCA 6300) →Process Information: updated recipe slink Tag: Visual edit
- 11:53, 3 May 2019 diff hist +26 m Stepper 1 (GCA 6300) →Process Information: minor text update Tag: Visual edit
- 08:25, 3 May 2019 diff hist +309 m UCSB NanoFab Microscope Training →General Focusing: minor updates Tag: Visual edit
- 23:29, 1 May 2019 diff hist 0 m Calculators + Utilities →Scripts + Programs: moved nk.py to python scripts section.
- 23:15, 1 May 2019 diff hist +121 N Talk:Vacuum Deposition Recipes Trying out mentioning brianT, curious if it’ll send him a notification. current
- 23:04, 1 May 2019 diff hist +486 m Frequently Asked Questions →How do I edit a page?: clarify restricted pages and course of action Tag: Visual edit
- 21:11, 1 May 2019 diff hist +191 m Frequently Asked Questions →Wiki Questions: encourage users to edit Tag: Visual edit
- 21:09, 1 May 2019 diff hist +147 m Editing Tutorials Minor intro Tag: Visual edit
- 21:08, 1 May 2019 diff hist +27 N Wiki Admin Redirect to Demis page current
- 21:03, 1 May 2019 diff hist +484 m Editing Tutorials Explain user/admin permissions, link to wiki Admin, highlight visual editor is recommended. Tag: Visual edit
- 20:50, 26 April 2019 diff hist +13 m Probe Station & Curve Tracer →About: minor grammar Tag: Visual edit
- 13:43, 26 April 2019 diff hist +9,961 N Filmetrics F50 - Operating Procedure inital copy of Ning's, formatted to numbered headings current Tag: Visual edit
- 13:37, 26 April 2019 diff hist +145 Optical Film Thickness & Wafer-Mapping (Filmetrics F50) →Operating Procedures: link to SOP & adding a new model (placeholder) Tag: Visual edit
- 13:28, 26 April 2019 diff hist +109 m Probe Station & Curve Tracer →Installed Equipment: computer control specified Tag: Visual edit
- 13:27, 26 April 2019 diff hist +520 Probe Station & Curve Tracer images of each equipemnt Tag: Visual edit: Switched
- 13:25, 26 April 2019 diff hist +41 N File:BK Precision 1672 DC supply.png current
- 13:24, 26 April 2019 diff hist +26 N File:HP 3466A DMM.png current
- 13:24, 26 April 2019 diff hist +34 N File:HP 34401A multimeter.png current
- 13:23, 26 April 2019 diff hist +31 N File:Keithley 2400 SMU.png current
- 13:22, 26 April 2019 diff hist +26 N File:Tektronix 370A curve tracer IMG 5890 - PNG.png current
- 13:16, 26 April 2019 diff hist +3 m Probe Station & Curve Tracer mfg. update
- 13:16, 26 April 2019 diff hist +868 Probe Station & Curve Tracer →Equipment Specifications: model numbers, updated details on capbilities Tag: Visual edit
- 12:56, 26 April 2019 diff hist +107 N File:Filmetrics Profilm3D System Photo.png RENAMED FILE: Photograph of the Filmetrics Profilm3D including Computer and Microscope and sample displayed current
- 12:55, 26 April 2019 diff hist +93 N File:Profim3D System Photo.png Photograph of the Filmetrics Profilm3D including Computer and Microscope and sample displayed current
- 15:14, 25 April 2019 diff hist +1 m Optical Film Thickness & Wafer-Mapping (Filmetrics F50) →Operatin Procedures: spelling Tag: Visual edit
- 15:10, 25 April 2019 diff hist +161 Optical Film Thickness & Wafer-Mapping (Filmetrics F50) →Equipment Specifications: added photo, minor updates Tag: Visual edit: Switched
- 15:09, 25 April 2019 diff hist +78 N File:FIlmetrics F50 Photo v1.jpg Photo of the Filmetrics F50 showing wafer map and spectrum and motorized stage current
- 00:05, 18 April 2019 diff hist +167 m Frequently Asked Questions →Specific Equipment Problem: minor update formatting Tag: Visual edit
- 23:58, 17 April 2019 diff hist +259 m UCSB NanoFab Microscope Training →Overview: minor addition/format Tag: Visual edit
- 23:54, 17 April 2019 diff hist +4,074 UCSB NanoFab Microscope Training initial: overview, focusing, microscope WD Tag: Visual edit
- 23:20, 17 April 2019 diff hist +32 m Fluorescence Microscope (Olympus MX51) added model
- 22:55, 17 April 2019 diff hist -6 m Microscopes →Fluorescence Microscope: Olympus MX51 (Bay 6) Tag: Visual edit
- 22:55, 17 April 2019 diff hist +634 Microscopes →Microscope #4: (Bay 6): info on olympus uscopes Tag: Visual edit
- 22:05, 17 April 2019 diff hist +701 Microscopes added info for microscope 2 + 3 Tag: Visual edit
- 16:53, 17 April 2019 diff hist +63 Biljana Stamenic →Current Work: remote work in description, minor fomratting update Tag: Visual edit: Switched
- 00:06, 12 April 2019 diff hist +658 Frequently Asked Questions →Can I add equipment reservations to my phone/computer/online calendar?: Added section for "programatically accessing reservation data" Tag: Visual edit
- 23:57, 11 April 2019 diff hist +93 m Frequently Asked Questions →How do I get my files from the NanoFab computers?: clarified folder naming Tag: Visual edit
- 23:55, 11 April 2019 diff hist +311 m KLA Tencor P7 - Saving Profile Data added Nanofiles folder location Tag: Visual edit
- 23:50, 11 April 2019 diff hist +7 Template:FeaturedArticle formatted to highlight Supervisor role
- 12:01, 11 April 2019 diff hist +81 m Template:News →S-Cubed Spin/Coat/Dev Station Installation: added that all ASML users will be able to use eventually.
- 09:44, 11 April 2019 diff hist +24 m Surface Analysis (KLA/Tencor Surfscan) →Documentation: minor formating Tag: Visual edit
- 23:58, 10 April 2019 diff hist +150 Microscopes →Olympus: DUV scope more info Tag: Visual edit
- 23:56, 10 April 2019 diff hist -1 m Don Freeborn minor formatting
- 23:55, 10 April 2019 diff hist -1 m Ning Cao minor formatting
- 22:48, 10 April 2019 diff hist +101 m KLA Tencor P7 - Saving Profile Data last step to close APEX software Tag: Visual edit
- 22:38, 10 April 2019 diff hist +20 m KLA Tencor P7 - Saving Profile Data newline fix via source
- 22:35, 10 April 2019 diff hist +5 m KLA Tencor P7 - Saving Profile Data newlines fix Tag: Visual edit
- 22:34, 10 April 2019 diff hist -1 m KLA Tencor P7 - Saving Profile Data minor newline fix Tag: Visual edit
- 22:33, 10 April 2019 diff hist +745 N KLA Tencor P7 - Saving Profile Data Added screenshots and instructions for using APEX to save profile data Tag: Visual edit
- 22:32, 10 April 2019 diff hist +46 N File:5-Export Options.jpg current
- 22:30, 10 April 2019 diff hist +43 N File:KLA-Tencor P7 - Saving Data - 4-Save as TXT.jpg current
- 22:28, 10 April 2019 diff hist +63 N File:KLA-Tencor P7 - Saving Data - 3-Apex Save the Studiable profile.jpg current
- 22:27, 10 April 2019 diff hist +46 N File:KLA-Tencor P7 - Saving Data - 2-switch to APEX.jpg current
- 22:25, 10 April 2019 diff hist +43 N File:KLA-Tencor P7 - Saving Data - 1-APEX button.jpg current
- 22:01, 10 April 2019 diff hist +73 Step Profilometer (KLA Tencor P-7) →Instructions: "Saving+Extracting data" - link to nonexistent page Tag: Visual edit
- 13:34, 9 April 2019 diff hist +10 m Wet Benches →Detailed Specifications: TMAH: "vertical" Tag: Visual edit
- 13:34, 9 April 2019 diff hist +264 Wet Benches →About: Added that SRDs are adjacent Tag: Visual edit
- 13:31, 9 April 2019 diff hist +698 Wet Benches →Wafer Toxic Corrosive Benches: added the vertical baths. Tag: Visual edit
- 10:11, 9 April 2019 diff hist +106 m Wafer Bonder (Logitech WBS7) →About: minor formatting, added CMP mounting use Tag: Visual edit
- 10:08, 9 April 2019 diff hist +2 Wafer Bonder (Logitech WBS7) real photo of the tool
- 10:08, 9 April 2019 diff hist +35 N File:Logitech WSBU-6 Wafer Bonder - photo - 800px.png Photo of Logitech WBS7 Wafer Bonder current
- 12:50, 3 April 2019 diff hist +4 m Calculators + Utilities →Material Parameters: fixed link to WebElements Compounds Tag: Visual edit
- 15:27, 2 April 2019 diff hist 0 m Lab Rules John d moved page Lab Rules Draft to Lab Rules without leaving a redirect: Replaces old version
- 15:26, 2 April 2019 diff hist 0 m Lab Rules OLD 2018 John d moved page Lab Rules to Lab Rules OLD 2018 without leaving a redirect: replacing with WikiMarkup version current
- 20:05, 1 April 2019 diff hist +44 m Template:Tool minor instruction updates
- 19:52, 1 April 2019 diff hist +94 Template:Tool added lee sawyer
- 19:55, 30 March 2019 diff hist +398 Template:Announcements April 2 lab shutdown
- 09:49, 29 March 2019 diff hist +207 Calculators + Utilities →Analysis Programs: Microscope Measurement Tools: JEOL SEM auto-cal Tag: Visual edit
- 03:15, 27 March 2019 diff hist -40 ADT 7100 - Recovering an Old Recipe (2019) deleted link to other page current
- 03:14, 27 March 2019 diff hist +527 N ADT 7100 - Recovering an Old Recipe (2019) pasted source
- 03:13, 27 March 2019 diff hist -446 Dicing Saw (ADT) cut recipe recovery, pasting into own page Tag: Visual edit: Switched
- 03:11, 27 March 2019 diff hist +47 ADT 7100 - Initial Setup Before Cutting pasted text, formatted headings and numbered Tag: Visual edit
- 03:09, 27 March 2019 diff hist +3,881 N ADT 7100 - Initial Setup Before Cutting pasted text
- 03:09, 27 March 2019 diff hist +80 Dicing Saw (ADT) →Operating Procedures: added "initial setup before cutting" link Tag: Visual edit
- 03:08, 27 March 2019 diff hist -3,884 Dicing Saw (ADT) moved initialization instructions into own page
- 21:49, 26 March 2019 diff hist +1 m Lab Rules move PDF instrucitons to top
- 21:48, 26 March 2019 diff hist +99 Lab Rules instruction to save as PDF Tag: Visual edit
- 15:09, 25 March 2019 diff hist +173 Surface Analysis (KLA/Tencor Surfscan) →Documentation: link to SOP (blank) Tag: Visual edit
- 11:54, 22 March 2019 diff hist +61 Dry Etching Recipes link to ICP2 Ru etch Tag: Visual edit
- 11:52, 22 March 2019 diff hist +87 ICP Etching Recipes →ICP Etch 2 (Panasonic E640): added placeholder for Ru etch Tag: Visual edit
- 01:00, 22 March 2019 diff hist +2 m Lab Rules move document description to bottom of Paragraph Tag: Visual edit
- 00:56, 22 March 2019 diff hist +2,073 Lab Rules finished inserting images from word doc Tag: Visual edit
- 00:55, 22 March 2019 diff hist +43 N File:Lab Rules - 7.8 clock + after hours contact.png current
- 00:54, 22 March 2019 diff hist +39 N File:Lab Rules - 7.2 signupmonkey.png current
- 00:53, 22 March 2019 diff hist +31 N File:Lab Rules - 6.3.1.4 glove racks.png current
- 00:52, 22 March 2019 diff hist +42 N File:Lab Rules - 6.1.3 hangar reservation sheet.png current
- 00:51, 22 March 2019 diff hist +51 N File:Lab Rules - 7.12.2.2 solvent drain and lift station.png current
- 00:50, 22 March 2019 diff hist +53 N File:Lab Rules - 7.12.2.1 developer drain and lift station.png current
- 00:49, 22 March 2019 diff hist +50 N File:Lab Rules - 7.12.1 chemical storage-disposal sheet.png current
- 00:48, 22 March 2019 diff hist +26 N File:Lab Rules - 7.9 PR spinner.png current
- 00:47, 22 March 2019 diff hist +43 N File:Lab Rules - 7.6.2 spin bowl liners on racks.png current
- 00:47, 22 March 2019 diff hist +34 N File:Lab Rules - 7.5.3 acid benches PPE.png current
- 00:46, 22 March 2019 diff hist +31 N File:Lab Rules - 7.3.6 refrigerators.png current
- 00:45, 22 March 2019 diff hist +30 N File:Lab Rules - 7.3.5.2 PR Cabinet.png current
- 00:43, 22 March 2019 diff hist +38 N File:Lab Rules - 7.3.4 Solvent + PR storage.png current
- 00:42, 22 March 2019 diff hist +30 N File:Lab Rules - 7.3.2 base cabinet.png current
- 00:41, 22 March 2019 diff hist +28 N File:Lab Rules - 7.3 acid cabinet.png current
- 00:41, 22 March 2019 diff hist +37 N File:Lab Rules - 7.2.1 container labelling.png current
- 00:40, 22 March 2019 diff hist +28 N File:Lab Rules - 7.1 MSDS binders.png current
- 00:40, 22 March 2019 diff hist +48 N File:Lab Rules - 5.1.1 HF exposure response calgonate.png current
- 00:39, 22 March 2019 diff hist +24 N File:Lab Rules - 4.7 exit map.png current
- 00:38, 22 March 2019 diff hist +40 N File:Lab Rules - 4.6 after hours contact sign.png current
- 00:38, 22 March 2019 diff hist +33 N File:Lab Rules - 4.5 fire extinguisher.png current
- 00:37, 22 March 2019 diff hist +52 N File:Lab Rules - 4.4 supplies rack chemical spill cleanup.png current
- 00:37, 22 March 2019 diff hist +19 N File:Lab Rules - 4.3 AED.png current
- 00:36, 22 March 2019 diff hist +35 N File:Lab Rules - 4.2 eye wash and shower.png current
- 00:35, 22 March 2019 diff hist +39 N File:Lab Rules - 4.1 map to cottage hospital.png current
- 00:34, 22 March 2019 diff hist +43 N File:Lab Rules - 3.3 wet bench overhead controls.png current
- 00:34, 22 March 2019 diff hist +35 N File:Lab Rules - 3.1 fire and gas alarms.png current
- 00:33, 22 March 2019 diff hist +41 N File:Lab Rules - 2.6.1 spinner bench hotplates.png current
- 00:33, 22 March 2019 diff hist +48 N File:Lab Rules - 2.3 equipment maintaner contact sign.png current
- 00:32, 22 March 2019 diff hist +36 N File:Lab Rules - 1.16 surveillance camera.png current
- 00:31, 22 March 2019 diff hist +685 Lab Rules added images up to surveillance cameras Tag: Visual edit
- 00:30, 22 March 2019 diff hist +40 N File:Lab Rules - 1.15.4 metals weighing scale.png current
- 00:29, 22 March 2019 diff hist +34 N File:Lab Rules - 1.15.2 metals lock box.png current
- 00:29, 22 March 2019 diff hist +42 N File:Lab Rules - 1.14.2 face masks.png current
- 00:28, 22 March 2019 diff hist +42 N File:Lab Rules - 1.13.1 maintenance chase doors.png current
- 00:28, 22 March 2019 diff hist +47 N File:Lab Rules - 1.10.1 supplies racks NanoFab paper.png current
- 00:27, 22 March 2019 diff hist +36 N File:Lab Rules - 1.9.3 glass sharps waste.png current
- 00:26, 22 March 2019 diff hist +39 N File:Lab Rules - 1.8.1 beneficial time sheet.png current
- 00:25, 22 March 2019 diff hist +28 N File:Lab Rules - 1.6 iris scanner.png current
- 00:25, 22 March 2019 diff hist +28 N File:Lab Rules - 1.4.3 ASML masks.png current
- 00:24, 22 March 2019 diff hist +25 N File:Lab Rules - 1.4.2 dry box.png current
- 00:23, 22 March 2019 diff hist +29 N File:Lab Rules - 1.4.1 shelf space.png current
- 22:58, 21 March 2019 diff hist +53 Lab Rules move TOC below summary
- 22:57, 21 March 2019 diff hist +10 m Lab Rules removed Heading level for sub-title Tag: Visual edit
- 22:56, 21 March 2019 diff hist -407 Lab Rules removed bolded titles except for important sections Tag: Visual edit
- 21:38, 21 March 2019 diff hist +53 Lab Rules force numbered headings
- 21:37, 21 March 2019 diff hist +2 Main Page revert to remove numbering
- 21:37, 21 March 2019 diff hist -2 m Main Page test numbered headings
- 21:36, 21 March 2019 diff hist +43 Main Page no numbered headings
- 19:00, 21 March 2019 diff hist +45 m Tool List →Inspection, Test and Characterization: QFI added "thermal" Tag: Visual edit
- 08:05, 19 March 2019 diff hist +14 m ICP Etching Recipes →Si Etching: minor typo Tag: Visual edit
- 07:58, 19 March 2019 diff hist +36 Dry Etching Recipes linked to Fluorine Si etch Tag: Visual edit
- 10:17, 14 March 2019 diff hist +158 Lithography Recipes →General Information: PR's - cleaned up/clarified. Tag: Visual edit
- 10:14, 14 March 2019 diff hist +66 m Lithography Recipes →General Information: minor formatting, check links to litho chemicals section Tag: Visual edit
- 10:10, 14 March 2019 diff hist -2 Lithography Recipes →Chemicals Available + Datasheets: changed name to Stocked
- 10:10, 14 March 2019 diff hist +13 Lithography Recipes →Chemical Datasheets: changed name to "Chemicals Available + Datasheets"
- 13:34, 9 March 2019 diff hist +72 Probe Station & Curve Tracer →Equipment Specifications: update Keithley model
- 16:23, 5 March 2019 diff hist +238 Stepper 3 (ASML DUV) →Process Information: expand recipes text, added wafer size Tag: Visual edit
- 13:53, 4 March 2019 diff hist 0 m Template:Announcements moved Lab Closed to top
- 13:49, 4 March 2019 diff hist 0 m Template:Announcements →Lab Closed Mar. 6th 7-8am: Fire Alarm Testing: corrected date typo
- 13:49, 4 March 2019 diff hist +37 Template:Announcements added date to fire alarm testing
- 11:25, 26 February 2019 diff hist +180 Stepper 2 (AutoStep 200) →Detailed Specifications: info on quadrant mask field sizes Tag: Visual edit
- 10:07, 25 February 2019 diff hist +26 N User:Freeborn d redirect to staff page current
- 10:06, 25 February 2019 diff hist +27 N User:Hopkins a redirect to staff page current
- 10:05, 25 February 2019 diff hist +24 N User:Sawyer l redirect to Lee's staff page current
- 10:01, 25 February 2019 diff hist +29 User:John d redirect to Demis' staff page current
- 13:10, 20 February 2019 diff hist +490 Template:News s-cubed
- 12:56, 20 February 2019 diff hist +135 ASML Stepper 3 Standard Operating Procedure bring reportto sem Tag: Visual edit
- 12:05, 15 February 2019 diff hist +53 m ASML Stepper 3 - UCSB Test Reticles →Alignment Markers: note polarity Tag: Visual edit
- 12:04, 15 February 2019 diff hist -41 m ASML Stepper 3 - UCSB Test Reticles →Alignment Markers: deleted dicing alignment guides comment Tag: Visual edit
- 12:02, 15 February 2019 diff hist +267 Template:Announcements asml PM, added // to Mike's signatures.
- 00:40, 8 February 2019 diff hist 0 m Demis D. John Corrected phone nimber
- 11:39, 6 February 2019 diff hist +176 m Calculators + Utilities →Analysis Programs: link to AFM/profilm3d Tag: Visual edit
- 11:37, 6 February 2019 diff hist +10 m Tool List →Topographical Metrology: Profilm3D new URL Tag: Visual edit
- 11:36, 6 February 2019 diff hist +96 N White-Light/Phase-Shift Interference Profilometer (Filmetrics Profilm3D) John d moved page White-Light/Phase-Shift Interference Profilometer (Filmetrics Profilm3D) to Optical Profilometer - White-Light/Phase-Shift Interference (Filmetrics Profilm3D): clarify capability in title/links current
- 16:58, 4 February 2019 diff hist +352 m Template:Announcements added comments with RSS feed URLs
- 15:10, 4 February 2019 diff hist +252 m Wet Etching Recipes prominent link to master table Tag: Visual edit
- 11:15, 4 February 2019 diff hist -1 m Lee Sawyer fixed spacing error
- 11:04, 4 February 2019 diff hist +86 Template:Announcements test 2
- 11:03, 4 February 2019 diff hist +51 Template:Announcements test post
- 16:31, 31 January 2019 diff hist +33 N File:ASML On Wafer Mark.gds CAD file for ASML Alignment Marks current
- 01:19, 30 January 2019 diff hist +83 m Stocked Chemical List sorting Tag: Visual edit
- 01:17, 30 January 2019 diff hist +2 m Staff List →Process Group: minor formatting Tag: Visual edit
- 01:13, 30 January 2019 diff hist +219 N Lee Sawyer initial page
- 01:11, 30 January 2019 diff hist -25 m Demis D. John →Tools: removed table
- 01:10, 30 January 2019 diff hist +183 Demis D. John →Current Work: added stepper 3, managing role Tag: Visual edit: Switched
- 01:03, 30 January 2019 diff hist +247 Biljana Stamenic →Tools: added stepper #1/2 + Surfscan
- 00:58, 30 January 2019 diff hist -89 Tom Reynolds deleted "directs the lab" text Tag: Visual edit: Switched
- 00:58, 30 January 2019 diff hist +93 Brian Thibeault →Tools: removes JAW, added Stepper #3. Moved text from Tom's to BrianT's. Tag: Visual edit: Switched
- 00:10, 30 January 2019 diff hist +8 m ICP Etching Recipes →Photoresist and ARC etching: ARC --> BARC Tag: Visual edit
- 00:07, 30 January 2019 diff hist +17 Test Data of etching SiO2 with CHF3/CF4 move SEM image to table, changed File: --> direct URL Tag: Visual edit
- 00:05, 30 January 2019 diff hist +12 Test Data of etching SiO2 with CHF3/CF4-ICP1 moved SEM iamge to table, changed File: --> direct link Tag: Visual edit
- 00:03, 30 January 2019 diff hist +14 Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) moved SEM images to table, changed "File:" link --> Direct link to file Tag: Visual edit
- 12:29, 29 January 2019 diff hist +240 Template:News Profilm3D links/update
- 12:23, 29 January 2019 diff hist +6 Template:Announcements changed title to equip. status
- 12:21, 29 January 2019 diff hist +6 Template:Links Added job submission/lab access link
- 12:20, 29 January 2019 diff hist +83 Template:Links Added job submission link
- 03:15, 29 January 2019 diff hist +156 m Frequently Asked Questions →How do I get my files from the NanoFab computers?: explain group folder and re-sending teh email Tag: Visual edit
- 14:12, 28 January 2019 diff hist +4 m Frequently Asked Questions →"Somethign went wrong" while saving my edits! How do i keep my edits?: corrected spelling Tag: Visual edit
- 14:11, 28 January 2019 diff hist +62 m Frequently Asked Questions →"Somethign went wrong" while saving my edits! How do i keep my edits?: updated button names Tag: Visual edit
- 14:09, 28 January 2019 diff hist +1,025 Frequently Asked Questions →Wiki Questions: logged out while editing Tag: Visual edit
- 14:00, 28 January 2019 diff hist +23 m Ellipsometer (Woollam) →Specifications: added lorentz/drude Tag: Visual edit
- 13:59, 28 January 2019 diff hist 0 m Ellipsometer (Woollam) updated ning's phone #
- 13:52, 28 January 2019 diff hist +49 m Ellipsometer (Woollam) set to NingC super + added model; light source type
- 13:49, 28 January 2019 diff hist +242 Optical Film Spectra + Optical Properties (Filmetrics F10-RT-UVX) →About: link to JAw for RIx data Tag: Visual edit
- 13:43, 28 January 2019 diff hist +798 Ellipsometer (Woollam) added specs Tag: Visual edit
- 13:03, 28 January 2019 diff hist +104 Ning Cao →Tools: added JAW ellipsometer Tag: Visual edit
- 13:03, 28 January 2019 diff hist +346 Ning Cao added filmetrics tools Tag: Visual edit
- 12:58, 28 January 2019 diff hist +39 Atomic Layer Deposition (Oxford FlexAL) →ALD Recipes: max thickness → 30nm Tag: Visual edit
- 12:54, 28 January 2019 diff hist +64 m Editing Tutorials →Inserting images into a page: minor mistakes Tag: Visual edit
- 12:46, 28 January 2019 diff hist +641 N Logitech WBS7 - Procedure for Wax Mounting with bulk Crystalbond Stick draft recipe
- 12:43, 28 January 2019 diff hist +632 Wafer Bonder (Logitech WBS7) →About: added more info, placeholders for detailed info Tag: Visual edit
- 12:29, 28 January 2019 diff hist +2 m Dry Etching Recipes fixed ICP2 PR etching link Tag: Visual edit
- 18:04, 25 January 2019 diff hist +117 Staff List moved Admin to top, moved BrianT into Admin group. Changed Equip --> Equip + Faciltiies.
- 10:46, 24 January 2019 diff hist -404 Template:Announcements Cleared announcements
- 08:50, 24 January 2019 diff hist +2 m Dicing Saw (ADT) →Operating Procedures: minor formatting Tag: Visual edit
- 10:09, 23 January 2019 diff hist +206 m Dicing Saw (ADT) →Operating Procedures: links to operating procedures Tag: Visual edit
- 00:23, 17 January 2019 diff hist +179 m Frequently Asked Questions →How do I get my files from the NanoFab computers?: 24hr wait for new group folders
- 00:20, 17 January 2019 diff hist +176 m Calculators + Utilities →CAD Layout Programs: Klayout set database unit
- 12:37, 7 January 2019 diff hist +79 Tool List →Inspection, Test and Characterization: link for Filmetrics profilm3D Tag: Visual edit
- 12:32, 3 January 2019 diff hist -414 Template:Announcements deleted shutdowns, asml issue, updated filmetrics note.
- 22:57, 26 December 2018 diff hist +280 Editing Tutorials →It won't let me "Save" my changes!: pasted actual error message Tag: Visual edit
- 22:55, 26 December 2018 diff hist +1,692 Editing Tutorials FAQ: can't save page / can't upload file Tag: Visual edit
- 19:20, 26 December 2018 diff hist +54 N Stepper 2 (AutoStep 200) Operating Procedures initial placeholder page Tag: Visual edit
- 16:38, 19 December 2018 diff hist -45 Lab Rules finished heading levels! Now need images Tag: Visual edit
- 16:26, 19 December 2018 diff hist +2 m Lab Rules title heading level reduction Tag: Visual edit
- 16:25, 19 December 2018 diff hist -1,964 Lab Rules still updating headings Tag: Visual edit
- 18:23, 18 December 2018 diff hist +130 Calculators + Utilities →Scripts + Programs: added example AFM scan Tag: Visual edit
- 16:39, 18 December 2018 diff hist +1,063 Fluorescence Microscope (Olympus MX51) updated details / FLuorescence filters Tag: Visual edit
- 16:15, 18 December 2018 diff hist +4 m Template:Announcements bolded dates
- 16:10, 18 December 2018 diff hist -292 Template:Announcements deleted email/google issue
- 11:58, 18 December 2018 diff hist +40 Nano-Imprint (Nanonex NX2000) added wikipage to template current
- 11:57, 18 December 2018 diff hist +18 m Tony Bosch fixed typo/spacing
- 11:55, 18 December 2018 diff hist +479 Template:Announcements email issue, asml update
- 11:43, 18 December 2018 diff hist -1,251 Tony Bosch deleted placeholder text Tag: Visual edit: Switched
- 09:30, 18 December 2018 diff hist +97 m Calculators + Utilities →CAD Layout Programs: viewiing update Tag: Visual edit
- 23:03, 17 December 2018 diff hist +119 Template:News →Filmetrics Optical Profilometer: links
- 11:59, 14 December 2018 diff hist +310 Template:News filmetrics profilometer
- 16:26, 12 December 2018 diff hist +39 m Template:News link to KLA P-7 page
- 16:24, 12 December 2018 diff hist +383 Template:News KLATencor: past-tense / Filmetrics installs
- 16:21, 12 December 2018 diff hist +263 Template:Announcements lab shutdown, delete DSEiii issue
- 11:05, 12 December 2018 diff hist +4,303 N Filmetrics F10-RT-UVX Operating Procedure copy/pasted Ning's instructions, converted to wiki format
- 10:46, 12 December 2018 diff hist +72 Optical Film Spectra + Optical Properties (Filmetrics F10-RT-UVX) link to SOP
- 09:24, 8 December 2018 diff hist +19 m ASML 5500: Recovering from an Error minor formats Tag: Visual edit
- 09:19, 8 December 2018 diff hist +13 m Calculators + Utilities →CAD Layout Programs: format folder path Tag: Visual edit
- 09:19, 8 December 2018 diff hist +144 Calculators + Utilities →CAD Layout Programs: Users can download LEdit from Nanofiles SFTP Tag: Visual edit
- 16:45, 7 December 2018 diff hist +328 Stepper 2 (AutoStep 200) moved PR's out of paragraph into separate table. Tag: Visual edit
- 23:05, 6 December 2018 diff hist +1,370 N Optical Film Thickness & Wafer-Mapping (Filmetrics F50) pasted F20 text, update for F50
- 22:57, 6 December 2018 diff hist +1,458 N Optical Film Spectra + Optical Properties (Filmetrics F10-RT-UVX) copied F20 page, updated for f10-rt-uvx
- 22:42, 6 December 2018 diff hist +215 Tool List →Thin-Film Analysis/Measurement: Add links to Filmetrics F10RT-UVX & F50 Tag: Visual edit
- 22:47, 4 December 2018 diff hist +158 m Calculators + Utilities →Refractive Indices: description of why RIx is useful for NanoFab users Tag: Visual edit
- 18:15, 29 November 2018 diff hist +74 m Vacuum Deposition Recipes fixed AJA3 Cr link Tag: Visual edit
- 14:52, 28 November 2018 diff hist +219 Suss MA-6 Backside Alignment QuickStart how to expose more wafers current Tag: Visual edit
- 14:42, 28 November 2018 diff hist +49 Suss MA-6 Backside Alignment QuickStart added illumination knob setting Tag: Visual edit
- 09:11, 27 November 2018 diff hist +33 m Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) →Detailed Specifications: minor update to laser mon description Tag: Visual edit
- 09:10, 27 November 2018 diff hist +77 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) →Recipes: corrected link to recipes sub-heading Tag: Visual edit
- 09:07, 27 November 2018 diff hist +23 m Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) →Detailed Specifications: corrected subscripts Tag: Visual edit
- 16:59, 21 November 2018 diff hist +2 m ICP Etching Recipes →Photoresist and ARC Etching: corrected link Tag: Visual edit
- 11:52, 19 November 2018 diff hist 0 File:ASML Reticle Programming Params - MASKJAN2020 v1.xlsx John d uploaded a new version of File:ASML Reticle Programming Params - MyReticleBarCode v1.xlsx
- 11:30, 19 November 2018 diff hist +33 N File:ASML Reticle Programming Params - MASKJAN2020 v1.xlsx ASML Reticle programming template
- 11:11, 16 November 2018 diff hist +178 Frequently Asked Questions →Specific Equipment Problem: updated equipment problem procedure Tag: Visual edit
- 08:46, 14 November 2018 diff hist +231 Calculators + Utilities klayout> draw circles Tag: Visual edit
- 11:17, 9 November 2018 diff hist +135 Tool List →Dry Etch: link to etch monitors, specifically Laser Etch Monitoring page Tag: Visual edit
- 11:14, 9 November 2018 diff hist 0 m Laser Etch Monitoring John d moved page Intellemetrics Laser Etch Monitoring to Laser Etch Monitoring without leaving a redirect: make it generic to all laser etch monitors
- 11:14, 9 November 2018 diff hist +2,080 N Laser Etch Monitoring initial page, overview of laser monitoring, references and links to non-existent (desired) procedures Tag: Visual edit
- 09:08, 9 November 2018 diff hist +195 Template:Announcements deleted Cary500, added FIlmetrics announcements
- 10:35, 2 November 2018 diff hist +69,241 N Lab Rules initial copy/paste, partially formatted headings. Tag: Visual edit
- 09:56, 1 November 2018 diff hist +122 Photoluminescence PL Setup (Custom) Added spectrometer Tag: Visual edit
- 17:45, 29 October 2018 diff hist +225 Atomic Layer Deposition Recipes added temps and plasma/reactant info Tag: Visual edit
- 17:41, 29 October 2018 diff hist +4 Atomic Layer Deposition Recipes →ZnO Deposition (ALD Chamber 1): added approx rate from old notes Tag: Visual edit
- 13:37, 24 October 2018 diff hist +57 Stepper Recipes →Positive Resist (ASML DUV): UV6-0.7 recipe - mentioned replaced by -0.8 Tag: Visual edit
- 10:40, 23 October 2018 diff hist -139 m Wet Etching Recipes deleted test stuff Tag: Visual edit
- 10:38, 23 October 2018 diff hist +84 m Wet Etching Recipes table test Tag: Visual edit
- 10:34, 23 October 2018 diff hist +57 m Wet Etching Recipes example testing Tag: Visual edit
- 10:30, 22 October 2018 diff hist +29 Packaging Recipes →Mounting/Unmounting Samples: corrected tape model # and link to image
- 10:29, 22 October 2018 diff hist 0 m ADT UV-Tape Table 1042R John d moved page ? to ADT UV-Tape Table 1042R without leaving a redirect: give a name to page current
- 07:15, 22 October 2018 diff hist -360 Template:Announcements deleted lab closed
- 14:09, 17 October 2018 diff hist +2,218 N RIE5 - Standard Operating procedure (Cortex Software) pasted Don's SOP's current Tag: Visual edit
- 13:58, 17 October 2018 diff hist +40 RIE 5 (PlasmaTherm) →Documentation: link to new SOP Tag: Visual edit
- 13:49, 17 October 2018 diff hist -36 Packaging Recipes →Cutting Parameters: made header row Tag: Visual edit
- 13:47, 17 October 2018 diff hist +707 N Logitech WBS7 - Procedure for Wax Mounting with Spin-On Crystalbond pasted draft procedure
- 13:47, 17 October 2018 diff hist -513 Packaging Recipes moved logitech procedure to separate page. Tag: Visual edit
- 12:19, 17 October 2018 diff hist 0 m Editing Tutorials →Inserting images into a page: adjut recommended image height
- 12:18, 17 October 2018 diff hist +119 m Editing Tutorials →Inserting images into a page: moved floating image to end of sentence
- 12:15, 17 October 2018 diff hist +1,717 Editing Tutorials →Inserting images into a page: added instructions for inserting images Tag: Visual edit