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- 22:10, 23 September 2021 diff hist -44 Template:Publications →Highly Selective and Vertical Etch of Silicon Dioxide using Ruthenium Films as an Etch Mask: fixed FL-ICP link
- 15:57, 23 September 2021 diff hist +91 Template:Announcements wifi update
- 10:26, 23 September 2021 diff hist -83 Dicing Saw (ADT) →Detailed Specifications: deleted old SOP, Lee's SOP only Tag: Visual edit
- 10:14, 23 September 2021 diff hist -64 Dicing Saw (ADT) →Recipes: corrected link to recipes Tag: Visual edit
- 10:11, 23 September 2021 diff hist +17 Packaging Recipes →Dicing Saw Recipes (ADT 7100): link to Thermocarbon website Tag: Visual edit
- 17:25, 21 September 2021 diff hist +68 Calculators + Utilities →Example CAD File: GDS version of CAD Tutorial Tag: Visual edit
- 17:23, 21 September 2021 diff hist +27 N File:CAD Tutorial for ASML Reticle v1 GDS.gds current
- 17:21, 21 September 2021 diff hist -1,195 Calculators + Utilities →KLayout: moved KLayout tips to separate Klayout tips page Tag: Visual edit
- 17:20, 21 September 2021 diff hist +1,952 KLayout Design Tips pasted more tips from Calc+Utilities page Tag: Visual edit
- 17:08, 21 September 2021 diff hist +374 Calculators + Utilities →Material Parameters: added Lesker links Tag: Visual edit
- 17:04, 21 September 2021 diff hist +302 Calculators + Utilities →KLayout: minor updates to KLayout / Circles Tag: Visual edit
- 16:02, 21 September 2021 diff hist -168 Calculators + Utilities →L-Edit: updated to ECE's license Tag: Visual edit
- 17:32, 20 September 2021 diff hist +23 m Template:Announcements
- 17:32, 20 September 2021 diff hist +253 Template:Announcements UCSB netowrk problems
- 14:18, 11 September 2021 diff hist +1 Dry Etching Recipes FL-ICP: SiN = A Tag: Visual edit
- 21:44, 10 September 2021 diff hist +381 Sputter 5 (AJA ATC 2200-V) link to sputter 3/4 procedures, link to SUM page for targets, and ToolInfo toolID added Tag: Visual edit
- 21:36, 10 September 2021 diff hist +62 m Sputter 3 (AJA ATC 2000-F) →Materials Table: minor cleanup Tag: Visual edit
- 21:34, 10 September 2021 diff hist +290 Sputter 4 (AJA ATC 2200-V) link to recipes page, rearranged specs, materials at bottom Tag: Visual edit
- 17:07, 9 September 2021 diff hist +1,173 Stepper Recipes linked to PR datasheets Tag: Visual edit
- 15:59, 9 September 2021 diff hist +67 Stepper 2 (AutoStep 200) move mask-making to "process info" Tag: Visual edit
- 15:40, 9 September 2021 diff hist +687 Stepper 2 (AutoStep 200) →Process Information: aded CAD files section Tag: Visual edit
- 15:38, 9 September 2021 diff hist +68 N File:GCA Local Alignment Mark Dotted.gds current
- 15:36, 9 September 2021 diff hist +48 N File:GCA Local Alignment Mark.gds current
- 15:31, 9 September 2021 diff hist +12 Stepper 1 (GCA 6300) →Process Information: added CAD Files heading Tag: Visual edit
- 15:29, 9 September 2021 diff hist +522 Stepper 1 (GCA 6300) →Process Information: links to Photomask & Alignment CAD files Tag: Visual edit
- 15:27, 9 September 2021 diff hist +46 N File:GCA Global Mark.gds current
- 15:19, 8 September 2021 diff hist +650 Template:Announcements added MikeS's Stepper 1+2 PM's
- 22:39, 7 September 2021 diff hist +54 Template:Announcements →New COVID Protocols: link to full policies
- 16:13, 7 September 2021 diff hist +156 Stepper 3 (ASML DUV) reorganization Tag: Visual edit
- 16:04, 7 September 2021 diff hist +380 Template:Announcements Aidan's fire alarm email
- 16:03, 7 September 2021 diff hist +270 Template:Announcements ASML PM Feb March 8th
- 15:00, 3 September 2021 diff hist -28 Oxford ICP Etcher (PlasmaPro 100 Cobra) →Recipes: corrected link to recipes Tag: Visual edit
- 14:12, 3 September 2021 diff hist +48 Dry Etching Recipes corrected Oxford link Tag: Visual edit
- 14:10, 3 September 2021 diff hist +705 ICP Etching Recipes Added Oxfrod ICP section and placeholder recipes Tag: Visual edit
- 14:04, 3 September 2021 diff hist +360 m Dry Etching Recipes corrected Row Bg colors
- 13:58, 3 September 2021 diff hist +973 Dry Etching Recipes Updated formatting- smaller font for model #, header colors
- 13:41, 3 September 2021 diff hist +231 Dry Etching Recipes inserted Oxford ICP column Tag: Visual edit
- 13:38, 3 September 2021 diff hist +2,774 N Oxford ICP Etcher (PlasmaPro 100 Cobra) first attempt at page
- 13:33, 3 September 2021 diff hist -4 m DSEIII (PlasmaTherm/Deep Silicon Etcher) corrected header level Tag: Visual edit
- 13:14, 3 September 2021 diff hist +359 Laser Etch Monitoring →Specific Procedures: Added Oxford Laser Mon Tag: Visual edit
- 13:13, 3 September 2021 diff hist +40 Tool List →ICP-RIE: link to Oxford ICP new page Tag: Visual edit
- 12:55, 3 September 2021 diff hist 0 File:Annotated PR etch - Om1000 03 - ARC + Cl + PR etch v1.jpg John d uploaded a new version of File:Annotated PR etch - Om1000 03 - ARC + Cl + PR etch v1.jpg current
- 09:35, 30 August 2021 diff hist -729 Template:Announcements deleted aidan's announcements
- 14:47, 27 August 2021 diff hist +299 Microscopes added Filmetrics F40-UV Tag: Visual edit
- 14:43, 27 August 2021 diff hist +139 Microscopes →Procedures & Tools: General-Use vs. Training-Required sections Tag: Visual edit
- 10:25, 26 August 2021 diff hist +1 m Services →Other U.C. Campuses: indent Attachment A
- 10:25, 26 August 2021 diff hist 0 m Services →Other U.C. Campuses: indent Attachment A
- 10:24, 26 August 2021 diff hist -8 m Services →Other U.C> Campuses: removed redlink to questionnaire, →Fabrication Services by NanoFab Staff: minor wording/formatting Tag: Visual edit
- 08:34, 26 August 2021 diff hist +135 Process Group - Remote Fabrication Jobs direct link to Fab Svc wall Tag: Visual edit
- 08:21, 26 August 2021 diff hist +143 Services →Fabrication Services by NanoFab Staff: formatting updates Tag: Visual edit: Switched
- 14:47, 24 August 2021 diff hist +30 PECVD 2 (Advanced Vacuum) moved recipes to bottom (like other pages) Tag: Visual edit
- 14:46, 24 August 2021 diff hist +8 PECVD 1 (PlasmaTherm 790) →Recipes & Process Data: renamed to Recipes and Historical Tag: Visual edit
- 14:45, 24 August 2021 diff hist +40 PECVD 2 (Advanced Vacuum) →Recipes: renamed to Recipes & Historical Tag: Visual edit
- 15:05, 23 August 2021 diff hist +81 Template:Announcements slashes on users
- 15:03, 23 August 2021 diff hist +6 m Template:Announcements changed CDA to Aidan
- 15:03, 23 August 2021 diff hist +365 Template:Announcements CDA repair closures
- 09:20, 7 August 2021 diff hist +157 Contact Aligner (SUSS MA-6) link to recipes Tag: Visual edit
- 14:18, 4 August 2021 diff hist +362 Autostep 200 Mask Making Guidance →Photomask Ordering Info: updated Photomask pordering info, added GDS template file Tag: Visual edit
- 14:15, 4 August 2021 diff hist +194 N File:GCA Stepper MaskPlate Master-DarkField 5x.gds GCA Stepper (Autostep 200 or 6300) Photomask template. Darkfield, at Reticle-scale (5x magnification already applied). Insert your design as Instances with 5x up-scaling applied. current
- 12:16, 3 August 2021 diff hist +263 MLA150 - Troubleshooting →Known Bugs & Workarounds: Stage bot centered - note about Small / OV camera Tag: Visual edit
- 09:50, 3 August 2021 diff hist +38 Test Data of etching SiO2 with CHF3/CF4 Comment on 7/22 check. Tag: Visual edit
- 12:05, 2 August 2021 diff hist +77 Template:Announcements SEM2 update from Aidan
- 12:04, 2 August 2021 diff hist -1 m Template:Announcements corrected timestamp
- 12:03, 2 August 2021 diff hist +39 Template:Announcements corrected timestamp
- 10:31, 30 July 2021 diff hist +113 Template:Announcements Sem 2 down
- 10:58, 27 July 2021 diff hist -10 m Stepper Recipes →DUV-42P-6: updated spin speed / noted mistake Tag: Visual edit
- 10:19, 27 July 2021 diff hist +991 Process Group - Remote Fabrication Jobs Links ot OnDema pages for each employee Tag: Visual edit
- 10:15, 27 July 2021 diff hist -13 Nanofab Staff Internal Pages →Process Group: minor rename Tag: Visual edit
- 11:58, 20 July 2021 diff hist +169 MLA150 - Troubleshooting →Defocus: unable to enter ±25 full range: Added name of recent Resist tempalte "General-Focus" Tag: Visual edit
- 10:50, 15 July 2021 diff hist +583 MLA150 - Design Guidelines →Alignment Marks: comment on mark placement across wafer Tag: Visual edit
- 10:42, 15 July 2021 diff hist +145 MLA150 - Design Guidelines →Automatic Alignment: added Reduced Detection area Tag: Visual edit
- 10:03, 15 July 2021 diff hist +663 MLA150 - Design Guidelines added alignment marks Tag: Visual edit
- 10:53, 14 July 2021 diff hist +65 ICP Etching Recipes →PlasmaTherm/SLR Fluorine Etcher: section header for Cleaning Recipes / TBA Tag: Visual edit
- 10:01, 14 July 2021 diff hist -47 Wet Etching Recipes →The Master Table of Wet Etching (Include All Materials): deleted 2nd "Extra Notes" column, combined date into "Verified by" Tag: Visual edit
- 08:19, 14 July 2021 diff hist +69 Wet Etching Recipes →The Master Table of Wet Etching (Include All Materials): KOH > linked to KOH bath Tag: Visual edit
- 10:46, 13 July 2021 diff hist +41 N File:200um square v1.gds TESTING only - please delte current
- 13:47, 12 July 2021 diff hist +48 m Stepper Recipes →DUV-42P-6: updated etching links Tag: Visual edit
- 13:43, 12 July 2021 diff hist +16 m ICP Etching Recipes →Photoresist and ARC Etching (Panasonic 1): fixed URL link Tag: Visual edit
- 14:19, 9 July 2021 diff hist +928 Atomic Layer Deposition Recipes →Atomic Layer Deposition (Oxford FlexAL): Recipe info on Plasma, Ratios Tag: Visual edit
- 11:49, 9 July 2021 diff hist -2 Services →Other U.C. Campuses: corrected broken email link
- 16:50, 8 July 2021 diff hist +40 Autostep 200 Mask Making Guidance added magnification Tag: Visual edit
- 16:48, 8 July 2021 diff hist +5 Autostep 200 Mask Making Guidance corercted dimensions to 5x5x0.090 Tag: Visual edit
- 16:44, 8 July 2021 diff hist +163 Autostep 200 Mask Making Guidance added Plate materials/dimensions Tag: Visual edit
- 11:20, 7 July 2021 diff hist +88 Nanofab Staff Internal Pages →Process Group: added link to Supplies Costs Tag: Visual edit
- 12:55, 2 July 2021 diff hist +91 Process Group - Billing Instructions →Supplies Costs: sotrage location in notes Tag: Visual edit
- 12:53, 2 July 2021 diff hist -2 m Process Group - Billing Instructions →Supplies Charges: --> Supplies Costs Tag: Visual edit
- 12:53, 2 July 2021 diff hist +51 Process Group - Billing Instructions force TOC
- 12:45, 2 July 2021 diff hist +16 Process Group - Billing Instructions →Supplies Charges: updated prices wafers Tag: Visual edit
- 12:44, 2 July 2021 diff hist +238 Process Group - Billing Instructions added wafer costs Tag: Visual edit
- 11:51, 2 July 2021 diff hist +24 m Process Group - Billing Instructions table title row Tag: Visual edit: Switched
- 11:48, 2 July 2021 diff hist +1,068 Process Group - Billing Instructions added shipping supplies table Tag: Visual edit: Switched
- 11:39, 2 July 2021 diff hist +1,637 N Process Group - Billing Instructions added overhead charges, F&A rate etc. Tag: Visual edit
- 11:36, 2 July 2021 diff hist +27 N File:RechargeApp - 02 - F+A auto v2.png current
- 11:27, 2 July 2021 diff hist +25 N File:RechargeApp - 01 - line items for other charges.png current
- 11:21, 2 July 2021 diff hist +17 m Nanofab Staff Internal Pages Tag: Visual edit
- 11:21, 2 July 2021 diff hist +106 Nanofab Staff Internal Pages →Process Group: link to Billing Instructions Tag: Visual edit
- 23:32, 29 June 2021 diff hist +17 m Chemical List BT --> Lab Director Tag: Visual edit
- 23:31, 29 June 2021 diff hist +466 m Wet Etching Recipes KOH: added mention of "low-stress" SiN Tag: Visual edit
- 23:19, 29 June 2021 diff hist +218 Wet Etching Recipes link to Chemicals List Tag: Visual edit
- 23:09, 29 June 2021 diff hist +33 m Mechanical Polisher (Allied) recipes TBD Tag: Visual edit
- 23:04, 29 June 2021 diff hist -51 Flip-Chip Bonder (Finetech) remove incorrect phone/email tags from Tool template
- 20:35, 23 June 2021 diff hist -801 Process Group - Remote Fabrication Jobs deleted Trello, updated OnDema Tag: Visual edit
- 10:22, 23 June 2021 diff hist +904 Plasma Clean (YES EcoClean) added etch method & applications Tag: Visual edit
- 10:16, 23 June 2021 diff hist +742 Ashers (Technics PEII) →About: applicaitons section Tag: Visual edit
- 09:47, 21 June 2021 diff hist +12 Stepper Recipes →DUV-42P: corrected to 2500rpm for 60nm thick, DUV42P-6 formulation Tag: Visual edit
- 11:30, 17 June 2021 diff hist 0 m Vacuum Deposition Recipes changed IBD SiON A --> R Tag: Visual edit
- 13:46, 14 June 2021 diff hist -293 Template:Announcements ISO spray updat,e deleted ASML maint.
- 10:02, 14 June 2021 diff hist -1 m RIE Etching Recipes →Photoresist and ARC (RIE 5) current Tag: Visual edit
- 10:02, 14 June 2021 diff hist +121 Dry Etching Recipes corrected links to PR & ARC etching Tag: Visual edit
- 10:01, 14 June 2021 diff hist +256 RIE Etching Recipes →Photoresist and ARC: added tool name to header title Tag: Visual edit
- 09:59, 14 June 2021 diff hist +28 ICP Etching Recipes →ICP Etch 1 (Panasonic E626I): corrected header titles to include "(Pan 1/2" Tag: Visual edit
- 10:41, 7 June 2021 diff hist +47 m MLA150 - Troubleshooting →Workaround Tag: Visual edit
- 10:40, 7 June 2021 diff hist +58 m MLA150 - Troubleshooting →Workaround: link to reboot prcedure
- 10:38, 7 June 2021 diff hist +1,997 MLA150 - Troubleshooting Out of Focus exposures - problem + solutions Tag: Visual edit
- 12:12, 3 June 2021 diff hist +175 Vacuum Oven (YES) added info from Brian Lingg current Tag: Visual edit
- 12:09, 3 June 2021 diff hist +114 Ovens - Overview of All Lab Ovens added YES info Tag: Visual edit
- 13:32, 2 June 2021 diff hist +25 m Stepper 3 (ASML DUV) added Model field in Tool templ.
- 13:24, 2 June 2021 diff hist +35 m Vacuum Deposition Recipes BG color of "SiN- Low stress"
- 14:13, 28 May 2021 diff hist +96 Atomic Layer Deposition Recipes →Oxford FlexAL Chamber #3: Dielectrics: started historical data seciton Tag: Visual edit
- 08:34, 27 May 2021 diff hist -2 m Editing Tutorials Tag: Visual edit
- 08:34, 27 May 2021 diff hist +831 Editing Tutorials Updating a file version Tag: Visual edit
- 08:32, 27 May 2021 diff hist 0 File:UCSB-Facilities-Use-Agreement.pdf John d uploaded a new version of File:UCSB-Facilities-Use-Agreement.pdf
- 08:32, 27 May 2021 diff hist 0 File:UCSB Service Agreement.pdf John d uploaded a new version of File:UCSB Service Agreement.pdf
- 08:25, 27 May 2021 diff hist +106 m Frequently Asked Questions →How do I get a login to the wiki?: link to Wiki admin contact page Tag: Visual edit
- 08:07, 27 May 2021 diff hist +19 Template:News →SiO2 etching, High-Aspect Ratio
- 08:05, 27 May 2021 diff hist +51 m Template:News added date to SiO2 etch article
- 08:01, 27 May 2021 diff hist +253 ICP Etching Recipes →SiO2 Etching (Fluorine ICP Etcher): link to publication Tag: Visual edit
- 07:58, 27 May 2021 diff hist +36 ICP Etching Recipes →Ru (Ruthenium) Etch (Panasonic 2): link to pub Tag: Visual edit
- 07:56, 27 May 2021 diff hist +905 Template:News Added info about Bill's SiO2 etching paper
- 07:41, 27 May 2021 diff hist +536 Template:Publications link to Bill's Ru-masked SiO2 paper
- 12:35, 26 May 2021 diff hist +149 Direct-Write Lithography Recipes →Maskless Aligner (Heidelberg MLA150): mention that any I-Line PR will work. Tag: Visual edit
- 13:26, 21 May 2021 diff hist +42 m Template:Announcements
- 13:25, 21 May 2021 diff hist +27 m Template:Announcements
- 13:24, 21 May 2021 diff hist -31 m Template:Announcements linked to new policies directly
- 13:22, 21 May 2021 diff hist +24 m COVID-19 User Policies summary at top of annoucnements Tag: Visual edit
- 15:57, 17 May 2021 diff hist 0 File:Nanofabrication Facility Project Description.xlsx John d uploaded a new version of File:Nanofabrication Facility Project Description.xlsx
- 13:06, 17 May 2021 diff hist +155 Stepper Recipes →DUV-42P: link to FL-ICP and Technics for BARC etches Tag: Visual edit
- 13:04, 17 May 2021 diff hist +526 ICP Etching Recipes →PlasmaTherm/SLR Fluorine Etcher: added BARC and PR etches Tag: Visual edit
- 12:55, 17 May 2021 diff hist +8 m Stepper Recipes →DUV-42P-6: comments on corrected spin speed Tag: Visual edit
- 12:53, 17 May 2021 diff hist +4 Stepper Recipes →DUV-42P: aDDED "-6" to the DUV42P part number Tag: Visual edit
- 12:52, 17 May 2021 diff hist +3 Lithography Recipes →Chemicals Stocked + Datasheets: corrected part number for DUV42P (added "-6") Tag: Visual edit
- 06:17, 17 May 2021 diff hist +8 Nanofab Staff Internal Pages →Process Group: moved lab Stocking to "Old" section Tag: Visual edit
- 06:15, 17 May 2021 diff hist +218 Process Group - Remote Fabrication Jobs link to OnDema.io NanoFab Workspace Tag: Visual edit
- 12:09, 11 May 2021 diff hist +4 Template:News →Wafer Polisher available: link to Lingg's page
- 12:08, 11 May 2021 diff hist +57 m Template:News →Wafer Polisher added to tool list: link to polisher wiki page
- 11:38, 11 May 2021 diff hist +34 Tool List →Wet Processing: link to Mechanical_Polisher_(Allied) Tag: Visual edit
- 11:36, 11 May 2021 diff hist +96 N File:AlliedPolisher10-1110.jpg Photo of Allied Polisher model 10-1110 ; Initial photo - cropped and color boosted current
- 11:33, 11 May 2021 diff hist +620 N Mechanical Polisher (Allied) initial Page
- 16:49, 10 May 2021 diff hist +203 Template:News Added allied polisher
- 06:56, 6 May 2021 diff hist +62 Process Group - Remote Fabrication Jobs link to Trello: UCSB Nanofab Tag: Visual edit
- 06:51, 6 May 2021 diff hist +30 m Process Group - Remote Fabrication Jobs Tag: Visual edit
- 06:50, 6 May 2021 diff hist +10 Process Group - Remote Fabrication Jobs Tag: Visual edit
- 06:50, 6 May 2021 diff hist -43 Process Group - Remote Fabrication Jobs Tag: Visual edit
- 21:34, 5 May 2021 diff hist +920 N Process Group - Remote Fabrication Jobs Trello -filter your own jobs Tag: Visual edit
- 21:33, 5 May 2021 diff hist +46 N File:Board - Search Cards - Select User.png current
- 21:30, 5 May 2021 diff hist +46 N File:Trello - Board - Search Cards.png current
- 21:27, 5 May 2021 diff hist +40 N File:Trello - Board - Show Menu.png current
- 21:22, 5 May 2021 diff hist +136 Nanofab Staff Internal Pages →Process Group: link to Remote Job Tracking Tag: Visual edit
- 09:59, 4 May 2021 diff hist +96 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) →Recipes: mention historical data Tag: Visual edit
- 09:56, 4 May 2021 diff hist +118 ICP Etch 1 (Panasonic E646V) →Recipes: mention historical data Tag: Visual edit
- 09:55, 4 May 2021 diff hist +96 ICP Etch 2 (Panasonic E626I) →Recipes: mentioned historical data Tag: Visual edit
- 06:51, 30 April 2021 diff hist -250 Template:Announcements deleted MLA
- 23:13, 28 April 2021 diff hist -1 m Main Page minor updates
- 23:10, 28 April 2021 diff hist -600 Template:FeaturedArticle current
- 23:06, 28 April 2021 diff hist +23 Editing Tutorials →Editing an Existing Page: link to how to get a login Tag: Visual edit
- 22:56, 28 April 2021 diff hist +443 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →Common Warnings: updated warnings Tag: Visual edit
- 22:44, 28 April 2021 diff hist -22 Template:Announcements deleted ASML 4/26, added HIMT 4/29
- 12:54, 21 April 2021 diff hist +30 Laser Etch Monitor Simulation in Python author credits. current Tag: Visual edit
- 08:11, 20 April 2021 diff hist -765 Template:Announcements deleted Flu Season notice, shortened Weekly Testing article
- 08:07, 20 April 2021 diff hist +272 Template:Announcements asml service Apr 26th 2021
- 07:32, 20 April 2021 diff hist +390 Template:Announcements ASML May service
- 19:55, 16 April 2021 diff hist +175 Frequently Asked Questions →Authorship on Publications: note on process discusssions Tag: Visual edit
- 18:32, 16 April 2021 diff hist +364 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F): Reduced Heading Levels below "Page Title" Tag: Visual edit
- 15:53, 16 April 2021 diff hist -190 Template:Announcements deleted "lab shutdown"
- 09:36, 16 April 2021 diff hist +84 ICP Etching Recipes →SiO2 Etching (Fluorine ICP Etcher): added ER and Sel for 50W & 200W bias Tag: Visual edit
- 11:14, 12 April 2021 diff hist 0 File:ASML Reticle Programming Params - MASKJAN2020 v1.xlsx John d uploaded a new version of File:ASML Reticle Programming Params - MyReticleBarCode v1.xlsx
- 16:13, 9 April 2021 diff hist +1 m Template:News →Digital Microscope: Olympus DSX-1000: correct model in text
- 11:35, 9 April 2021 diff hist +820 Microscopes Added Scope7: Olympus DSX1000 Tag: Visual edit
- 11:29, 9 April 2021 diff hist -2,040 Digital Microscope (Olympus DSX1000) initial updates
- 11:29, 9 April 2021 diff hist +2,040 Laser Scanning Confocal M-scope (Olympus LEXT) revert back to TonyB's April 2020 revision.
- 11:25, 9 April 2021 diff hist -2,040 Laser Scanning Confocal M-scope (Olympus LEXT) initial page
- 11:20, 9 April 2021 diff hist +2,720 N Digital Microscope (Olympus DSX1000) pasted LEXT page source
- 11:19, 9 April 2021 diff hist +82 Tool List →Inspection, Test and Characterization: Link to Olympus DSX1000 page Tag: Visual edit
- 11:14, 9 April 2021 diff hist +1 m Template:News →Digital Microscope: Olympus DX-1000: Corrected model number to DSX
- 13:49, 8 April 2021 diff hist +337 Template:News Olympus DX-1000 announcemnet
- 20:50, 6 April 2021 diff hist +109 m Lithography Recipes →Photolithography Recipes: corrected row colors, link to XHRiC
- 20:47, 6 April 2021 diff hist +37 Lithography Recipes →Photolithography Recipes: added XHRiC BARC to table, and "A" for many PR's previouly blank on MLA150 Tag: Visual edit
- 20:44, 6 April 2021 diff hist +38 m Lithography Recipes TOC formatting Tag: Visual edit
- 20:39, 6 April 2021 diff hist +780 Lithography Recipes linked to each page of litho recipes Tag: Visual edit: Switched
- 09:19, 31 March 2021 diff hist +1,520 N KLayout Design Tips copied from parent page, and added non-orthogonal arrays issue Tag: Visual edit
- 09:15, 31 March 2021 diff hist +53 N File:KLayout - Non-Orthogonal Arrays.png current
- 09:13, 31 March 2021 diff hist +148 Calculators + Utilities →KLayout: link to KLayout Design Tips page Tag: Visual edit
- 15:58, 25 March 2021 diff hist +2 Template:Announcements moved GCA items into main RSS section
- 08:19, 20 March 2021 diff hist -361 Template:Announcements Delete MLA & ASML
- 15:00, 19 March 2021 diff hist +204 MLA150 - Troubleshooting →Nanofiles folder not showing up on SFTP: link to FAQ on Nanofiles FTP Tag: Visual edit
- 14:59, 19 March 2021 diff hist +596 MLA150 - Troubleshooting →Known Bugs & Workarounds: added "Nanofiles folder not showing up" Tag: Visual edit
- 14:55, 19 March 2021 diff hist +331 MLA150 - Troubleshooting →Defocus: unable to enter ±25 full range: updated Tag: Visual edit
- 08:45, 16 March 2021 diff hist +3 m Frequently Asked Questions Tag: Visual edit
- 08:44, 16 March 2021 diff hist +14 m Frequently Asked Questions Tag: Visual edit
- 08:43, 16 March 2021 diff hist +127 Frequently Asked Questions added NanoFab@ece.ucsb.edu note at the top.
- 07:17, 16 March 2021 diff hist +186 Template:Announcements MLA maint.
- 09:56, 15 March 2021 diff hist +11 Focused Ion-Beam Lithography (Raith Velion) added toolid, removed WIP, Pt dep/writing current
- 09:42, 15 March 2021 diff hist +14 Template:Announcements asml calibrated/ready for use
- 07:23, 15 March 2021 diff hist 0 m Template:Announcements
- 06:29, 15 March 2021 diff hist +32 Template:Announcements ASML temp stable/cals
- 16:12, 11 March 2021 diff hist -443 Template:Announcements deleted compressor note, ASML Open for use
- 14:19, 10 March 2021 diff hist +235 Tube Furnace (Tystar 8300) →Process Information: added Gases Available Tag: Visual edit
- 10:13, 9 March 2021 diff hist +31 m Services →Request Remote Fabrication Services: minor emphasis Tag: Visual edit
- 10:11, 9 March 2021 diff hist +25 Services point to 'fab svc on this page instgead of Wix Tag: Visual edit
- 11:41, 5 March 2021 diff hist -4 m Calculators + Utilities →KLayout: large files comments Tag: Visual edit
- 12:54, 3 March 2021 diff hist +412 Services Remote Fab Svc: added UCSB & Inter-UC paperwork Tag: Visual edit
- 19:56, 1 March 2021 diff hist -13 Template:Announcements CR open, compressors
- 12:55, 1 March 2021 diff hist +74 Stepper Recipes →DUV-42P: added 2500rpm note Tag: Visual edit
- 06:23, 1 March 2021 diff hist -143 m Template:Announcements updated post time
- 06:21, 1 March 2021 diff hist +394 Template:Announcements cleanroom closed, compressor down
- 15:50, 26 February 2021 diff hist +386 Laser Etch Monitoring →Procedures: Linked to video training Tag: Visual edit
- 07:46, 26 February 2021 diff hist +31 Atomic Layer Deposition Recipes →Al2O3 deposition (ALD CHAMBER 3): rate on AlOx / O* ~2x faster Tag: Visual edit
- 18:54, 24 February 2021 diff hist +31 Lift-Off with DUV Imaging + PMGI Underlayer →Tips: changed to 2x underlayer thickness Tag: Visual edit
- 10:13, 23 February 2021 diff hist +13 Category:NOID current
- 10:12, 23 February 2021 diff hist +790 N ASML Stepper 3 - Substrates smaller than 100mm/4-inch initial topic placeholders current Tag: Visual edit
- 07:46, 23 February 2021 diff hist +109 Stepper 3 (ASML DUV) →Operating Procedures: link to "ASML Stepper 3 - Substrates smaller than 100mm/4-inch" Tag: Visual edit
- 23:57, 22 February 2021 diff hist +24 m Maskless Aligner (Heidelberg MLA150) Tag: Visual edit: Switched
- 23:56, 22 February 2021 diff hist -28 Maskless Aligner (Heidelberg MLA150) →Video Trainings: New Video Training (v2) Tag: Visual edit: Switched
- 14:02, 18 February 2021 diff hist +34 Maskless Aligner (Heidelberg MLA150) →Detailed Specifications: updated ALignment specs from FAT Tag: Visual edit
- 11:40, 17 February 2021 diff hist -3 E-Beam 1 (Sharon) changed "material tables" to "recipes" to be consistent with rest of site. Tag: Visual edit
- 09:23, 17 February 2021 diff hist +178 Atomic Layer Deposition Recipes →Atomic Layer Deposition (Oxford FlexAL): note on plasma being faster Tag: Visual edit
- 08:55, 17 February 2021 diff hist +335 Template:Announcements ASML PM March 8th
- 10:03, 16 February 2021 diff hist +39 PECVD 2 (Advanced Vacuum) →Recipes: mention historical data Tag: Visual edit
- 04:50, 9 February 2021 diff hist +2 m MLA150 - Troubleshooting →Defocus: unable to enter ±25 full range: typo Tag: Visual edit
- 10:22, 8 February 2021 diff hist +38 Maskless Aligner (Heidelberg MLA150) →Detailed Specifications: added max write area Tag: Visual edit
- 12:27, 5 February 2021 diff hist +53 m MLA150 - Large Image GDS Generation Tag: Visual edit
- 12:05, 5 February 2021 diff hist +422 MLA150 - Troubleshooting added "Stage not centered" Tag: Visual edit
- 23:14, 2 February 2021 diff hist +248 ICP Etching Recipes →PlasmaTherm/SLR Fluorine Etcher: SiVertHF: note on removing Native SiO2 Tag: Visual edit
- 23:08, 2 February 2021 diff hist +73 ICP Etching Recipes added (Fluorine ICP Etcher) to titles Tag: Visual edit
- 17:18, 2 February 2021 diff hist 0 Stepper 3 (ASML DUV) corrected PanOpto video traing link Tag: Visual edit
- 18:11, 1 February 2021 diff hist +64 m Thermal Processing Recipes →Tystar 8300 Tag: Visual edit
- 18:08, 1 February 2021 diff hist +235 Tube Furnace (Tystar 8300) →Recipes: link to recipes page Tag: Visual edit
- 10:28, 1 February 2021 diff hist +255 Services →Request Remote Fabrication Services: separate "paperwork" section for Fab Svc Tag: Visual edit
- 10:22, 1 February 2021 diff hist +1,811 Services →Fabrication Services by NanoFab Staff: pasted Services text - same as the nanotech page. minor updates. Tag: Visual edit
- 10:13, 1 February 2021 diff hist 0 File:UCSB Service Agreement.pdf John d uploaded a new version of File:UCSB Service Agreement.pdf
- 10:09, 1 February 2021 diff hist +79 N Category:COVID description current Tag: Visual edit
- 11:08, 30 January 2021 diff hist +64 Process Group - Lab Stocking/Supplies Tasks Update: not needed. current Tag: Visual edit
- 11:07, 30 January 2021 diff hist +323 ASML Stepper 3 Dicing Guide Programming Update: state doesn’t work and workaround. current Tag: Visual edit
- 06:24, 27 January 2021 diff hist +964 ICP Etching Recipes →High Rate Bosch Etch (DSEIII): Bsoch PR selectivity, tips to reduce black silicon, edge bead removal process link Tag: Visual edit
- 06:21, 27 January 2021 diff hist +28 ASML DUV: Edge Bead Removal via Photolithography credits and date Tag: Visual edit
- 06:18, 27 January 2021 diff hist +138 ASML DUV: Edge Bead Removal via Photolithography note on I-line process Tag: Visual edit
- 14:59, 23 January 2021 diff hist +443 MLA150 - Troubleshooting →Known Bugs & Workarounds: added Exposure Log. Tag: Visual edit
- 13:46, 21 January 2021 diff hist +945 MLA150 - Troubleshooting added Focal Depth motor (contact staff) and Covert not launching Tag: Visual edit
- 13:32, 21 January 2021 diff hist +9 MLA150 - Troubleshooting moved TOC below summary
- 13:31, 21 January 2021 diff hist +1,787 N MLA150 - Troubleshooting added Defocus bug and Compuer Restart. Tag: Visual edit
- 11:32, 21 January 2021 diff hist +161 Maskless Aligner (Heidelberg MLA150) →Documentation: link to MLA150 - Troubleshoting Tag: Visual edit
- 00:40, 21 January 2021 diff hist +427 Oxygen Plasma System Recipes →Plasma Clean (YES EcoClean): guidelines added Tag: Visual edit
- 00:37, 21 January 2021 diff hist +5 m Oxygen Plasma System Recipes →O2 Ashing Tag: Visual edit
- 00:37, 21 January 2021 diff hist +538 Oxygen Plasma System Recipes →Ashers (Technics PEII): added O2 ashing recipes Tag: Visual edit
- 10:06, 20 January 2021 diff hist +186 Sputter 5 (AJA ATC 2200-V) link to recipes Tag: Visual edit
- 08:17, 20 January 2021 diff hist +85 Lift-Off with DUV Imaging + PMGI Underlayer →Suggested Process for Liftoff: ultrasonic note Tag: Visual edit
- 08:13, 20 January 2021 diff hist -1 m Calculators + Utilities →KLayout: reduced recommended number of polygon points Tag: Visual edit
- 08:10, 20 January 2021 diff hist +967 Calculators + Utilities →KLayout: handling large files Tag: Visual edit
- 07:50, 20 January 2021 diff hist 0 File:ASML Reticle Programming Params - MASKJAN2020 v1.xlsx John d uploaded a new version of File:ASML Reticle Programming Params - MyReticleBarCode v1.xlsx
- 07:42, 20 January 2021 diff hist +115 Nanofab Staff Internal Pages link to ASML dicing guide prog. Tag: Visual edit
- 06:33, 15 January 2021 diff hist -665 Template:Announcements deleted "new tool installs"
- 23:15, 12 January 2021 diff hist -2,647 GoPro Hero8 Black (Internal) link to Uploading instructions current Tag: Visual edit
- 23:14, 12 January 2021 diff hist +1,153 N Video Training: Uploading to GauchoCast/Panopto (Internal) pasted info from GoPro page Tag: Visual edit
- 18:31, 12 January 2021 diff hist +9 m ICP Etch 2 (Panasonic E626I) →Documentation: minor formatting Tag: Visual edit
- 18:24, 12 January 2021 diff hist +264 GoPro Hero8 Black (Internal) added photo of GoPro + Headstrap Tag: Visual edit
- 18:21, 12 January 2021 diff hist +62 N File:Photo - GoPro Black 8 and Headstrap.png current
- 10:49, 12 January 2021 diff hist 0 m Vacuum Deposition Recipes SPutt4: Ru: A-->R Tag: Visual edit
- 10:48, 12 January 2021 diff hist +50 Vacuum Deposition Recipes added link to APutter 4 : Ru ("A") Tag: Visual edit
- 10:47, 12 January 2021 diff hist +351 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V): added Ru ; link to SiO2 Etching with Ruthenium Hardmask doc. Tag: Visual edit
- 10:40, 12 January 2021 diff hist +67 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V): added Ru Tag: Visual edit
- 17:32, 11 January 2021 diff hist -46 m ICP Etching Recipes →SiO2 Etching: wrote bias variations Tag: Visual edit
- 17:48, 10 January 2021 diff hist +29 Template:Announcements →New Tool Installations: minor updates to tool status
- 17:46, 10 January 2021 diff hist -192 Template:Announcements deleted MLA maint.
- 18:08, 9 January 2021 diff hist +26 m Lithography Recipes →Holography Recipes: included XHRiC Tag: Visual edit
- 18:03, 9 January 2021 diff hist +5 m Lithography Recipes →Holography Recipes Tag: Visual edit
- 18:02, 9 January 2021 diff hist +80 m Lithography Recipes →Holography Recipes: mentione THMR usage Tag: Visual edit
- 12:27, 8 January 2021 diff hist 0 m Template:Announcements fixed indent
- 22:45, 7 January 2021 diff hist +58 MLA150 - Large Image GDS Generation pasted method Tag: Visual edit
- 22:43, 7 January 2021 diff hist +2,510 N MLA150 - Large Image GDS Generation pasted method Tag: Visual edit
- 22:12, 7 January 2021 diff hist +154 Maskless Aligner (Heidelberg MLA150) →Documentation: link to Large Image Patterning Tag: Visual edit
- 09:11, 6 January 2021 diff hist -105 Template:Announcements deleted annual shutdown, added MLA maint.
- 08:34, 5 January 2021 diff hist +120 m Calculators + Utilities →KLayout Tag: Visual edit
- 08:31, 5 January 2021 diff hist +225 Calculators + Utilities →KLayout: added Circles > PCell method Tag: Visual edit
- 09:21, 4 January 2021 diff hist +170 Direct-Write Lithography Recipes →Positive Resist (MLA150): note about HIMT design giving higher dose result Tag: Visual edit
- 21:28, 23 December 2020 diff hist +136 Frequently Asked Questions →How do I get my files from the NanoFab computers?: link to SUM email page Tag: Visual edit
- 10:06, 12 December 2020 diff hist +4 m Direct-Write Lithography Recipes →Negative Resist (MLA150) Tag: Visual edit
- 09:25, 11 December 2020 diff hist +302 Calculators + Utilities →KLayout: added how to show Origin Tag: Visual edit
- 13:16, 10 December 2020 diff hist +40 PECVD1 Wafer Coating Process corrected titles current Tag: Visual edit
- 13:08, 10 December 2020 diff hist +100 Video Training: Hosting with Zoom and GacuhoCast/Panopto how to locate video to playback current Tag: Visual edit
- 09:06, 9 December 2020 diff hist 0 File:Attachment A - UCSB Master Facilities Use Agreement Labs.pdf John d uploaded a new version of File:Attachment A - UCSB Master Facilities Use Agreement Labs.pdf current
- 17:07, 8 December 2020 diff hist +84 N File:CAD Tutorial for ASML Reticle v1 - screenshot Reticle Layout cell.png current
- 08:01, 8 December 2020 diff hist +22 m File:Facility-Use-MOU---Intercampus-UC-User.pdf cat. Services
- 08:01, 8 December 2020 diff hist +22 m File:UCSB Service Agreement.pdf cat. Services
- 08:01, 8 December 2020 diff hist +19 m File:User Protocols Coronavirus 2020-09-14-1.pdf cat. COVID
- 08:00, 8 December 2020 diff hist +19 m File:COVID Entering the CR and Gowning Protocols-USE THIS ONE v2.pdf cat. COVID current
- 08:00, 8 December 2020 diff hist +19 File:COVID19 ESB Building User Self Admittance Protocol v2.pdf cat COVID current
- 07:54, 8 December 2020 diff hist +23 File:Attachment A - UCSB Master Facilities Use Agreement Labs.pdf added category: services
- 07:54, 8 December 2020 diff hist +80 N Category:Services description added current
- 07:53, 8 December 2020 diff hist +22 Services added Category:Services
- 07:49, 8 December 2020 diff hist 0 File:Attachment A - UCSB Master Facilities Use Agreement Labs.pdf John d uploaded a new version of File:Attachment A - UCSB Master Facilities Use Agreement Labs.pdf
- 09:10, 7 December 2020 diff hist +2,681 N Process Group - Lab Stocking/Supplies Tasks pasted task list 2020-12-07 Tag: Visual edit
- 09:09, 7 December 2020 diff hist +147 Nanofab Staff Internal Pages added procgrp / las stocking/supplies link Tag: Visual edit
- 20:54, 3 December 2020 diff hist +114 m Nanofab Staff Internal Pages →Video Training procedures Tag: Visual edit
- 20:51, 3 December 2020 diff hist -2 Nanofab Staff Internal Pages →Video Training procedures Tag: Visual edit
- 20:43, 3 December 2020 diff hist +136 m Video Training: Hosting with Zoom and GacuhoCast/Panopto Tag: Visual edit
- 17:24, 3 December 2020 diff hist -15 m Nanofab Staff Internal Pages Tag: Visual edit
- 17:08, 3 December 2020 diff hist +2,099 N Video Training: Hosting with Zoom and GacuhoCast/Panopto pasted instructions from other wiki page Tag: Visual edit
- 17:00, 3 December 2020 diff hist +466 m GoPro Hero8 Black (Internal) →Uploading to the Web: minor updates Tag: Visual edit
- 16:39, 3 December 2020 diff hist +25 Direct-Write Lithography Recipes →Positive Resist (MLA150): added line-space for SPR 220-3 Tag: Visual edit
- 07:53, 30 November 2020 diff hist +44 Template:News →Raith Velion: FIB/SEM Installation: update date
- 07:51, 30 November 2020 diff hist -1 Template:Announcements changed thanksgiving --> XMas/NY's holiday clposue
- 06:29, 30 November 2020 diff hist +868 MLA150 - Design Guidelines →DXF: & →Greyscale: sections Tag: Visual edit
- 13:15, 28 November 2020 diff hist +9 Stocked Chemical List added Bromine water: = Br2 current Tag: Visual edit
- 07:24, 23 November 2020 diff hist +1,136 COVID-19 User Policies added weekly testing info Tag: Visual edit
- 07:21, 23 November 2020 diff hist 0 Template:Announcements move weekly testing below TGiving closure
- 07:20, 23 November 2020 diff hist +57 Template:Announcements signature on Weekly Testing, so it shows up in RSS
- 16:16, 20 November 2020 diff hist +30 m Template:Announcements →Weekly Testing strongly urged for UCSB Students/Staff
- 16:14, 20 November 2020 diff hist +1,123 Template:Announcements added free COVID testing rec.
- 10:13, 19 November 2020 diff hist +171 CAIBE (Oxford Ion Mill) →Detailed Specifications: added sample sizes/holders Tag: Visual edit
- 11:45, 16 November 2020 diff hist +703 GoPro Hero8 Black (Internal) →Editing Video: added some details Tag: Visual edit
- 11:32, 16 November 2020 diff hist +316 m GoPro Hero8 Black (Internal) →Outside the lab, before your training Tag: Visual edit
- 08:00, 16 November 2020 diff hist +101 COVID-19 User Policies →Announcements: staff not on weekends Tag: Visual edit
- 22:08, 14 November 2020 diff hist +233 Direct-Write Lithography Recipes →Positive Resist (MLA150): time/temp formatting, link to high-res Tag: Visual edit
- 22:02, 14 November 2020 diff hist +77 m Lithography Recipes →Photolithography Recipes: tidy up, split into separate rows Tag: Visual edit: Switched
- 21:57, 14 November 2020 diff hist +46 N Maskless Aligner Recipes John d moved page Maskless Aligner Recipes to Direct-Write Lithography Recipes: new title and catergory on SignupMonkey "Direct write litho" current Tag: New redirect
- 21:57, 14 November 2020 diff hist 0 m Direct-Write Lithography Recipes John d moved page Maskless Aligner Recipes to Direct-Write Lithography Recipes: new title and catergory on SignupMonkey "Direct write litho"
- 21:56, 14 November 2020 diff hist -123 Lithography Recipes →General Information: remove doubled TOC Tag: Visual edit: Switched
- 18:15, 13 November 2020 diff hist +1,343 N MLA150 - CAD Files and Templates placeholder for CAD file, alignment mark info Tag: Visual edit
- 18:02, 13 November 2020 diff hist +438 Direct-Write Lithography Recipes added notes/comments to each section Tag: Visual edit
- 22:36, 12 November 2020 diff hist +144 COVID-19 User Policies weekend staff updates Tag: Visual edit
- 22:34, 12 November 2020 diff hist +748 COVID-19 User Policies added winter jacket policy Tag: Visual edit
- 15:32, 12 November 2020 diff hist +775 m MLA150 - Design Guidelines Tag: Visual edit
- 15:21, 12 November 2020 diff hist +64 Maskless Aligner (Heidelberg MLA150) →Documentation: added Lee's SOP Tag: Visual edit
- 15:19, 12 November 2020 diff hist +99 N File:MLA150 SOP.pdf MLA150 (Heidelberg HIMT) Maskless Aligner - Operating Procedure - Rev E (Lee & Demis) current
- 12:28, 10 November 2020 diff hist +149 RIE 5 (PlasmaTherm) link to recipes Tag: Visual edit
- 10:23, 9 November 2020 diff hist +2 m Stepper Recipes →Other Lithography Porcess (ASML DUV): typo in heading Tag: Visual edit
- 10:23, 9 November 2020 diff hist +73 Stepper Recipes →Other Lithography Porcess (ASML DUV): linked to lift-off process Tag: Visual edit
- 10:22, 9 November 2020 diff hist +1,040 N ASML DUV: Edge Bead Removal via Photolithography pasted traveler Tag: Visual edit
- 10:16, 9 November 2020 diff hist +158 Stepper Recipes →Stepper 3 (ASML DUV): link to edge bead removal Tag: Visual edit
- 10:04, 9 November 2020 diff hist +249 Maskless Aligner (Heidelberg MLA150) →Detailed Specifications: Added mfg. options and details Tag: Visual edit
- 09:30, 6 November 2020 diff hist +5 m Stepper Recipes →Anti-Reflective Coatings: added BARC Tag: Visual edit
- 10:52, 5 November 2020 diff hist +20 E-Beam Lithography System (JEOL JBX-6300FS) added wafer load size Tag: Visual edit
- 10:26, 5 November 2020 diff hist +38 Tool List →Lithography: added "direct write" section Tag: Visual edit
- 10:16, 5 November 2020 diff hist +4 m MLA150 - Design Guidelines Tag: Visual edit
- 10:16, 5 November 2020 diff hist +278 MLA150 - Design Guidelines typoe, DRC for DXF open polygons Tag: Visual edit
- 10:13, 5 November 2020 diff hist +1,817 N MLA150 - Design Guidelines added conversion notes on each file type Tag: Visual edit
- 08:13, 5 November 2020 diff hist +344 ICP Etch 2 (Panasonic E626I) added link to online training video Tag: Visual edit
- 22:29, 4 November 2020 diff hist 0 m Maskless Aligner (Heidelberg MLA150) →Documentation from HIMT
- 18:10, 4 November 2020 diff hist -28 m Maskless Aligner (Heidelberg MLA150) →Documentation from HIMT Tag: Visual edit
- 18:09, 4 November 2020 diff hist +403 Maskless Aligner (Heidelberg MLA150) →Documentation: pic of spatial light modulator Tag: Visual edit
- 18:06, 4 November 2020 diff hist +66 N File:MLA150 Spatial Light Modulator Description.png current
- 17:47, 4 November 2020 diff hist +3 m Maskless Aligner (Heidelberg MLA150) →Video Training Tag: Visual edit
- 17:29, 4 November 2020 diff hist +97 Maskless Aligner (Heidelberg MLA150) →Video Trainings: link to online video Tag: Visual edit
- 09:16, 4 November 2020 diff hist +247 Maskless Aligner (Heidelberg MLA150) added tool id, HIMT URL, updated specs Tag: Visual edit: Switched
- 15:12, 30 October 2020 diff hist -3 Template:Announcements
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- 15:11, 30 October 2020 diff hist -1 m Template:Announcements deleted spacing
- 15:10, 30 October 2020 diff hist +1 Template:Announcements moved tool installs to bottom
- 15:10, 30 October 2020 diff hist -495 Template:Announcements deleted GCA PMs
- 09:28, 30 October 2020 diff hist 0 m GoPro Hero8 Black (Internal) moved editing to after saving Tag: Visual edit
- 09:27, 30 October 2020 diff hist +334 GoPro Hero8 Black (Internal) added gopro stitching Tag: Visual edit
- 09:10, 28 October 2020 diff hist -83 Template:Announcements →New Tool Installations: updated FIB, link to DanR's page
- 09:09, 28 October 2020 diff hist -8 Dan Read deleted Work In progress
- 09:06, 28 October 2020 diff hist -243 Template:Announcements deleted Unaxis Dep, moved GCA PM to top.
- 08:57, 28 October 2020 diff hist +158 m Frequently Asked Questions →Authorship on Publications: minor update Tag: Visual edit
- 16:56, 26 October 2020 diff hist +229 Maskless Aligner (Heidelberg MLA150) →Documentation: added redlinks for documentation Tag: Visual edit
- 07:14, 26 October 2020 diff hist +18 m Stepper 2 (AutoStep 200) minor formatting Tag: Visual edit
- 22:43, 24 October 2020 diff hist +533 Nanofab Staff Internal Pages updated TOC and links to eventual Video Training pages Tag: Visual edit
- 08:46, 23 October 2020 diff hist -169 m Template:Announcements Deleted PEii repair
- 04:58, 23 October 2020 diff hist +199 Stepper 3 (ASML DUV) →Process Information: added low-TTV Tag: Visual edit
- 04:54, 23 October 2020 diff hist +104 Stepper 3 (ASML DUV) →Online Video Trainings: added Video Training part 1 Tag: Visual edit
- 12:44, 22 October 2020 diff hist +252 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →Error Log full: updated procedures Tag: Visual edit
- 16:24, 19 October 2020 diff hist +82 MediaWiki:Common.css
- 16:08, 19 October 2020 diff hist +97 Chemical List updated wording Tag: Visual edit
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- 15:32, 19 October 2020 diff hist +99 MediaWiki:Common.css reorg, invisible Sidebar title
- 15:25, 19 October 2020 diff hist +4 MediaWiki:Sidebar
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- 15:19, 19 October 2020 diff hist -21 MediaWiki:Sidebar deleted search and navigation *'s
- 08:45, 14 October 2020 diff hist +732 DSEIII (PlasmaTherm/Deep Silicon Etcher) updated text, added Clamp text Tag: Visual edit
- 08:39, 14 October 2020 diff hist +52 N File:DSEIII.jpg Phoot of Plasma-Therm DSE-iii in Bay 2 current
- 07:13, 14 October 2020 diff hist +1 m Direct-Write Lithography Recipes updated THMR thickness Tag: Visual edit
- 07:12, 14 October 2020 diff hist +20 m COVID-19 User Policies →Policy Updates Tag: Visual edit
- 07:09, 14 October 2020 diff hist +73 COVID-19 User Policies →UCSB Flu Vaccination Mandate: updated vacc. logging Tag: Visual edit
- 19:47, 13 October 2020 diff hist +480 Template:Announcements added flu vaccine
- 19:43, 13 October 2020 diff hist +225 COVID-19 User Policies flu update
- 19:38, 13 October 2020 diff hist -7 m COVID-19 User Policies
- 19:38, 13 October 2020 diff hist +7 m COVID-19 User Policies
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- 19:37, 13 October 2020 diff hist +731 COVID-19 User Policies added flu vaccination mandate Tag: Visual edit
- 18:44, 10 October 2020 diff hist +143 Direct-Write Lithography Recipes →Positive Resist (MLA150): added THMR recipe Tag: Visual edit
- 21:52, 9 October 2020 diff hist +59 m Direct-Write Lithography Recipes "Exposure Time" → "Exposure Dose (mJ/cm2)" Tag: Visual edit
- 08:12, 9 October 2020 diff hist +484 Photoluminescence PL Setup (Custom) added more info Tag: Visual edit
- 08:06, 9 October 2020 diff hist +170 Holographic Lith/PL Setup (Custom) link to PL system page Tag: Visual edit
- 08:02, 9 October 2020 diff hist +81 m Holographic Lith/PL Setup (Custom) →About: added term "holography" for searching, changed PR to THMR and linked Tag: Visual edit: Switched
- 17:55, 7 October 2020 diff hist +154 Nanofab Staff Internal Pages added placeholders for other sections Tag: Visual edit
- 16:14, 6 October 2020 diff hist +104 Maskless Aligner (Heidelberg MLA150) →About: added some equip specs Tag: Visual edit
- 23:03, 2 October 2020 diff hist +9 m Direct-Write Lithography Recipes →Greyscale Lithography: added model to header title
- 22:49, 2 October 2020 diff hist +118 Maskless Aligner (Heidelberg MLA150) →About: minor updates Tag: Visual edit
- 16:29, 2 October 2020 diff hist +23 Maskless Aligner (Heidelberg MLA150) Added photo
- 16:28, 2 October 2020 diff hist +64 N File:MLA150 Heidelberg Bay 6 Photo.jpg Photo of Heidelberg MLA 150 in Bay 6 after install current
- 16:27, 2 October 2020 diff hist +876 Direct-Write Lithography Recipes Added PR's we are characterizing Tag: Visual edit: Switched
- 16:23, 2 October 2020 diff hist +4 Lithography Recipes →Photolithography Recipes: Added 4620 "A" on I-line tools Tag: Visual edit
- 16:07, 30 September 2020 diff hist +405 Goniometer (Rame-Hart A-100) - Operating Procedure added "Tile Angle" techique current Tag: Visual edit
- 16:03, 30 September 2020 diff hist 0 Film Stress (Tencor Flexus) moved to bay 1
- 14:35, 28 September 2020 diff hist +203 m Lithography Recipes →Photolithography Recipes: minor instructions/hints Tag: Visual edit
- 14:26, 28 September 2020 diff hist +720 Maskless Aligner (Heidelberg MLA150) →About: updated some specs Tag: Visual edit
- 23:14, 27 September 2020 diff hist +308 Template:Announcements links to Velion + MLA tool pages
- 23:11, 27 September 2020 diff hist -67 Lithography Recipes →Photolithography Recipes: deleted SPR 950-0.8 row Tag: Visual edit
- 23:11, 27 September 2020 diff hist +778 m Lithography Recipes "A" on MLA --> SU-8 2075 Tag: Visual edit
- 23:07, 27 September 2020 diff hist -290 Template:Announcements deleted ICP1 and IBD messages
- 15:51, 25 September 2020 diff hist +94 m Stepper 3 (ASML DUV) →Online Video Trainings: disclaimer about supervisor training Tag: Visual edit
- 15:48, 25 September 2020 diff hist +299 Stepper 3 (ASML DUV) →Operating Procedures: added Video Training: Part 2 Tag: Visual edit
- 00:54, 23 September 2020 diff hist +290 Template:Announcements added Pan2 & IBD
- 17:50, 22 September 2020 diff hist -200 Template:Announcements deleted lab shutdown notice
- 23:24, 21 September 2020 diff hist -219 Template:Announcements removed network issues
- 13:41, 21 September 2020 diff hist +44 m Template:Announcements →Lab Shutdown: Some tools still down
- 13:38, 21 September 2020 diff hist -40 Template:Announcements shutdown update
- 18:03, 18 September 2020 diff hist +1,059 Lithography Recipes →Photolithography Recipes: linked to all PR datasheets Tag: Visual edit
- 17:52, 18 September 2020 diff hist +57 Lithography Recipes →Chemicals Stocked + Datasheets: added Az 4620 Tag: Visual edit
- 17:51, 18 September 2020 diff hist +59 N File:Az p4620 photoresist data package.pdf info on Az 4620 photoresist, spin curves etc. current
- 17:43, 18 September 2020 diff hist +45 Lithography Recipes rename to "UV Optical Lithography" Tag: Visual edit
- 17:41, 18 September 2020 diff hist +103 Lithography Recipes rearrange manual TOC Tag: Visual edit
- 17:34, 18 September 2020 diff hist -3 Lithography Recipes →Lift-Off Techniques: changed to Liftoff Recipes Tag: Visual edit
- 22:37, 16 September 2020 diff hist -84 m COVID-19 User Policies →UCSB Wellness Survey: delete duplicate line Tag: Visual edit
- 19:07, 16 September 2020 diff hist +358 COVID-19 User Policies →UCSB Wellness Survey: added Online presentation link Tag: Visual edit
- 10:27, 15 September 2020 diff hist -53 Microscopes Updated scope locations in lab Tag: Visual edit
- 07:36, 15 September 2020 diff hist +415 Template:Announcements power outage Sept 19th
- 06:28, 15 September 2020 diff hist 0 m COVID-19 User Policies Tag: Visual edit
- 06:24, 15 September 2020 diff hist +84 COVID-19 User Policies →UCSB Wellness Survey: link to BrianT's contact info Tag: Visual edit
- 06:22, 15 September 2020 diff hist +168 Template:Nav link to COVID-19 User Policies current
- 06:18, 15 September 2020 diff hist +95 Template:Announcements link to COVID-19_User_Policies
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- 06:12, 15 September 2020 diff hist -2 m COVID-19 User Policies minor formatting Tag: Visual edit
- 06:11, 15 September 2020 diff hist +188 COVID-19 User Policies minor formatting, table for announcements Tag: Visual edit: Switched
- 20:27, 14 September 2020 diff hist +123 COVID-19 User Policies added annoucnemnts Tag: Visual edit
- 19:43, 14 September 2020 diff hist +31 m COVID-19 User Policies Tag: Visual edit
- 19:42, 14 September 2020 diff hist +249 COVID-19 User Policies →UCSB Wellness Survey: linked to uploaded ocs Tag: Visual edit
- 19:41, 14 September 2020 diff hist +126 N File:COVID Entering the CR and Gowning Protocols-USE THIS ONE v2.pdf COVID-19 Entering_the_CR_and_Gowning_Protocols-USE_THIS_ONE_v2.pdf self-entry protocol once inside the building
- 19:39, 14 September 2020 diff hist +113 N File:COVID19 ESB Building User Self Admittance Protocol v2.pdf COVID-19 ESB_Building_User_Self_Admittance_Protocol_v2.pdf self-entry doc for users, building entry
- 19:37, 14 September 2020 diff hist +108 N File:User Protocols Coronavirus 2020-09-14-1.pdf COVID-19 User Protocols Coronavirus 2020-09-14-1.pdf Full document of protocols, for lab users
- 15:36, 14 September 2020 diff hist -4 Lithography Recipes →Chemicals Stocked + Datasheets: added model of XHRIC-11 Tag: Visual edit
- 15:23, 14 September 2020 diff hist +37 Dry Etching Recipes link to Fluorine etcher Ru-masked SiO2 etch. Tag: Visual edit
- 11:44, 14 September 2020 diff hist +83 Template:News →Raith Velion: FIB/SEM Installation: link to Dan Read's page
- 11:41, 14 September 2020 diff hist +8 m Template:News →Heidelberg MLA-150: Delivery Scheduled for Sept.: update date
- 01:02, 14 September 2020 diff hist -4 m Staff List →Process Group: updated link for 'fab svc Tag: Visual edit
- 23:34, 13 September 2020 diff hist +547 m Direct-Write Lithography Recipes →Maskless Aligner (Heidelberg MLA150): greyscale Tag: Visual edit
- 23:33, 13 September 2020 diff hist +68 m Maskless Aligner (Heidelberg MLA150) →Recipes: corrected link Tag: Visual edit
- 23:32, 13 September 2020 diff hist +11 m Direct-Write Lithography Recipes link to tool page Tag: Visual edit
- 23:31, 13 September 2020 diff hist +8 m Direct-Write Lithography Recipes
- 23:28, 13 September 2020 diff hist +125 m Direct-Write Lithography Recipes Tag: Visual edit
- 23:25, 13 September 2020 diff hist +10 Template:LithRecipe Table correct Maskless aligner link current
- 23:24, 13 September 2020 diff hist 0 m Direct-Write Lithography Recipes John d moved page MLA150 Recipes to Maskless Aligner Recipes without leaving a redirect: higher level category
- 23:23, 13 September 2020 diff hist +22 m Direct-Write Lithography Recipes categories
- 23:22, 13 September 2020 diff hist +49 m Lithography Recipes categories
- 23:21, 13 September 2020 diff hist +24 Direct-Write Lithography Recipes caterbgory added
- 23:20, 13 September 2020 diff hist +26 Contact Alignment Recipes category added
- 23:20, 13 September 2020 diff hist +26 Stepper Recipes added category
- 23:17, 13 September 2020 diff hist +5 m Direct-Write Lithography Recipes Tag: Visual edit
- 23:16, 13 September 2020 diff hist +168 Template:LithRecipe Table added example visual
- 23:11, 13 September 2020 diff hist +94 m Template:LithRecipe Table
- 23:04, 13 September 2020 diff hist -389 Lithography Recipes →Photolithography Recipes: correcting row colors
- 22:41, 13 September 2020 diff hist -128 Lithography Recipes deleted erroneous columns Tag: Visual edit
- 22:38, 13 September 2020 diff hist +212 Lithography Recipes →Photolithography Recipes: added MLA150 to PhotoLith recipes table; table color formatting Tag: Visual edit: Switched
- 22:32, 13 September 2020 diff hist +191 Template:LithRecipe Table added MLA150, and NoInclude section, and added to Templates category
- 22:25, 13 September 2020 diff hist +142 Maskless Aligner (Heidelberg MLA150) link to MLA150 recipes Tag: Visual edit
- 22:24, 13 September 2020 diff hist +1,028 Direct-Write Lithography Recipes Table inserted to start Tag: Visual edit
- 22:23, 13 September 2020 diff hist +217 Direct-Write Lithography Recipes inital page
- 22:20, 13 September 2020 diff hist +73 N Direct-Write Lithography Recipes initial page Tag: Visual edit
- 22:10, 13 September 2020 diff hist +11 m Focused Ion-Beam Lithography (Raith Velion) →Recipes: formatting Tag: Visual edit
- 22:09, 13 September 2020 diff hist +4 m Suss Aligners (SUSS MJB-3) →Recipes: italics Tag: Visual edit
- 22:09, 13 September 2020 diff hist +230 Suss Aligners (SUSS MJB-3) link to recipes Tag: Visual edit
- 22:06, 13 September 2020 diff hist +1,114 N Maskless Aligner (Heidelberg MLA150) initial page with placeholders
- 21:56, 13 September 2020 diff hist +42 Tool List →Other Patterning Systems: Link to Maskless Aligner (Heidelberg MLA150) Tag: Visual edit
- 21:54, 13 September 2020 diff hist +51 Dan Read →Tools: Added Raith Velion Tag: Visual edit
- 21:40, 13 September 2020 diff hist +86 Template:Tool added Dan Read contact info
- 21:36, 13 September 2020 diff hist +12 Template:Tool →Arguments with Specific Values: added Dan Read
- 21:34, 13 September 2020 diff hist +126 Template:StaffInfo link to Tool template page for editing staff info
- 21:33, 13 September 2020 diff hist +187 Template:Staff link to Tool Tempalte in documentation current