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- 23:22, 13 September 2020 diff hist +49 m Lithography Recipes categories
- 23:21, 13 September 2020 diff hist +24 Direct-Write Lithography Recipes caterbgory added
- 23:20, 13 September 2020 diff hist +26 Contact Alignment Recipes category added
- 23:20, 13 September 2020 diff hist +26 Stepper Recipes added category
- 23:17, 13 September 2020 diff hist +5 m Direct-Write Lithography Recipes Tag: Visual edit
- 23:16, 13 September 2020 diff hist +168 Template:LithRecipe Table added example visual
- 23:11, 13 September 2020 diff hist +94 m Template:LithRecipe Table
- 23:04, 13 September 2020 diff hist -389 Lithography Recipes →Photolithography Recipes: correcting row colors
- 22:41, 13 September 2020 diff hist -128 Lithography Recipes deleted erroneous columns Tag: Visual edit
- 22:38, 13 September 2020 diff hist +212 Lithography Recipes →Photolithography Recipes: added MLA150 to PhotoLith recipes table; table color formatting Tag: Visual edit: Switched
- 22:32, 13 September 2020 diff hist +191 Template:LithRecipe Table added MLA150, and NoInclude section, and added to Templates category
- 22:25, 13 September 2020 diff hist +142 Maskless Aligner (Heidelberg MLA150) link to MLA150 recipes Tag: Visual edit
- 22:24, 13 September 2020 diff hist +1,028 Direct-Write Lithography Recipes Table inserted to start Tag: Visual edit
- 22:23, 13 September 2020 diff hist +217 Direct-Write Lithography Recipes inital page
- 22:20, 13 September 2020 diff hist +73 N Direct-Write Lithography Recipes initial page Tag: Visual edit
- 22:10, 13 September 2020 diff hist +11 m Focused Ion-Beam Lithography (Raith Velion) →Recipes: formatting Tag: Visual edit
- 22:09, 13 September 2020 diff hist +4 m Suss Aligners (SUSS MJB-3) →Recipes: italics Tag: Visual edit
- 22:09, 13 September 2020 diff hist +230 Suss Aligners (SUSS MJB-3) link to recipes Tag: Visual edit
- 22:06, 13 September 2020 diff hist +1,114 N Maskless Aligner (Heidelberg MLA150) initial page with placeholders
- 21:56, 13 September 2020 diff hist +42 Tool List →Other Patterning Systems: Link to Maskless Aligner (Heidelberg MLA150) Tag: Visual edit
- 21:54, 13 September 2020 diff hist +51 Dan Read →Tools: Added Raith Velion Tag: Visual edit
- 21:40, 13 September 2020 diff hist +86 Template:Tool added Dan Read contact info
- 21:36, 13 September 2020 diff hist +12 Template:Tool →Arguments with Specific Values: added Dan Read
- 21:34, 13 September 2020 diff hist +126 Template:StaffInfo link to Tool template page for editing staff info
- 21:33, 13 September 2020 diff hist +187 Template:Staff link to Tool Tempalte in documentation current
- 21:25, 13 September 2020 diff hist +169 Lithography Recipes linked to tools in header titles Tag: Visual edit
- 21:15, 13 September 2020 diff hist +137 Focused Ion-Beam Lithography (Raith Velion) linked to Recipes page Tag: Visual edit
- 21:14, 13 September 2020 diff hist +80 Lithography Recipes added Raith Velion section, added model to EBL section title Tag: Visual edit
- 21:12, 13 September 2020 diff hist +1,794 N Focused Ion-Beam Lithography (Raith Velion) initial page, copy/pasted the JEOL EBL page
- 21:08, 13 September 2020 diff hist -35 m E-Beam Lithography System (JEOL JBX-6300FS) deleted erroneous fiels in {tool} template
- 21:06, 13 September 2020 diff hist +49 Tool List →Other Patterning Systems: Added Raith Velion link Tag: Visual edit
- 21:05, 13 September 2020 diff hist +81 Tool List →Lithography: added FEI Sirion Nabity Tag: Visual edit
- 15:39, 13 September 2020 diff hist +1,147 COVID-19 User Policies Initial links for files - files not uploaded yet Tag: Visual edit
- 14:43, 13 September 2020 diff hist +192 N COVID-19 User Policies Initial page Tag: Visual edit
- 10:42, 8 September 2020 diff hist +1 m PECVD 1 (PlasmaTherm 790) →Recipes & Process Data Tag: Visual edit
- 10:41, 8 September 2020 diff hist -7 m PECVD 1 (PlasmaTherm 790) →Recipes & Process Information: change to Process Data Tag: Visual edit
- 10:41, 8 September 2020 diff hist +206 PECVD 1 (PlasmaTherm 790) link to recipes and data Tag: Visual edit
- 10:34, 8 September 2020 diff hist -129 m Template:Announcements removed labor day
- 14:27, 1 September 2020 diff hist 0 File:UCSB Service Agreement.pdf John d uploaded a new version of File:UCSB Service Agreement.pdf
- 14:21, 1 September 2020 diff hist 0 File:Facility-Use-MOU---Intercampus-UC-User.pdf John d uploaded a new version of File:Facility-Use-MOU---Intercampus-UC-User.pdf
- 21:30, 31 August 2020 diff hist +129 Template:Announcements labor day closure
- 11:47, 26 August 2020 diff hist +453 N S-Cubed Flexi - Operating Procedure initial secitons, draft only Tag: Visual edit
- 11:42, 26 August 2020 diff hist +238 Automated Coat/Develop System (S-Cubed Flexi) added link to SOP Tag: Visual edit
- 13:33, 24 August 2020 diff hist -551 m Template:Announcements deleted lab shutdown
- 12:17, 20 August 2020 diff hist +325 ICP Etch 1 (Panasonic E646V) link to recipes page Tag: Visual edit
- 14:23, 19 August 2020 diff hist +348 Services added Agreement "Attachment A" Tag: Visual edit
- 14:22, 19 August 2020 diff hist +87 N File:Attachment A - UCSB Master Facilities Use Agreement Labs.pdf Facilities/Service Agreement - attachment listing UCSB facilities covered
- 06:51, 19 August 2020 diff hist +386 Template:Announcements addd lab shutdown, remove ASML
- 15:06, 18 August 2020 diff hist +6 m CAIBE (Oxford Ion Mill) →Recipes: bolded recipe page li nk Tag: Visual edit
- 12:27, 18 August 2020 diff hist +45 Contact Alignment Recipes →Negative Resist (MA-6): update MA-6 NegPR flood expose Tag: Visual edit
- 12:24, 18 August 2020 diff hist +303 Contact Alignment Recipes updated powers again Tag: Visual edit
- 07:42, 18 August 2020 diff hist +224 Contact Alignment Recipes →Suss Aligners (SUSS MJB-3): updated Channel powers according ot LeeS Tag: Visual edit
- 21:29, 12 August 2020 diff hist -32 m Unaxis wafer coating procedure typos in units (nm/µm/mm), minor formatting current Tag: Visual edit
- 11:23, 11 August 2020 diff hist +86 Logitech WBS7 - Procedure for Wax Mounting with bulk Crystalbond Stick clean glass plate if wax present Tag: Visual edit
- 11:21, 11 August 2020 diff hist +421 Logitech WBS7 - Procedure for Wax Mounting with bulk Crystalbond Stick updated open/close procedure Tag: Visual edit
- 10:09, 11 August 2020 diff hist +45 m Logitech WBS7 - Procedure for Wax Mounting with bulk Crystalbond Stick unload step Tag: Visual edit
- 09:24, 11 August 2020 diff hist -14 Logitech WBS7 - Procedure for Wax Mounting with bulk Crystalbond Stick formatting to match tool menus Tag: Visual edit
- 08:12, 11 August 2020 diff hist +108 m Logitech WBS7 - Procedure for Wax Mounting with Spin-On Crystalbond attributed to Don Freeborn current Tag: Visual edit
- 07:26, 9 August 2020 diff hist +3 m Probe Station: I-V Curves with Keithley 2400 and Python Script image adjust
- 07:23, 9 August 2020 diff hist -30 m Probe Station: I-V Curves with Keithley 2400 and Python Script image adjustments Tag: Visual edit
- 07:22, 9 August 2020 diff hist +492 Probe Station: I-V Curves with Keithley 2400 and Python Script added screenshots Tag: Visual edit
- 07:21, 9 August 2020 diff hist +45 N File:Python Keithley I-V Sweep v3 icon.png current
- 07:19, 9 August 2020 diff hist +26 N File:Python Spyder - Run Button.png current
- 07:18, 9 August 2020 diff hist +44 N File:Python Keithely I-V - user settings lines.png current
- 07:16, 9 August 2020 diff hist +30 N File:Python Spyder 3.7 (anacoda) icon.png current
- 07:14, 9 August 2020 diff hist +1 m Probe Station: I-V Curves with Keithley 2400 and Python Script
- 07:14, 9 August 2020 diff hist -1 Probe Station: I-V Curves with Keithley 2400 and Python Script
- 07:14, 9 August 2020 diff hist +2,079 N Probe Station: I-V Curves with Keithley 2400 and Python Script initial procedure for Python I-V curves Tag: Visual edit
- 06:37, 9 August 2020 diff hist +143 Probe Station & Curve Tracer →Operation Procedures & Manuals: link to Python I-V Curves Tag: Visual edit
- 17:10, 29 July 2020 diff hist -16 m Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) →Detailed Specifications: update LEP description Tag: Visual edit
- 17:09, 29 July 2020 diff hist 0 m Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) →Recipes: spelling Tag: Visual edit
- 17:08, 29 July 2020 diff hist +6 m Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) →Recipes: bolded Tag: Visual edit
- 16:00, 27 July 2020 diff hist +6 m Staff List highlight director, like other groups Tag: Visual edit
- 09:23, 27 July 2020 diff hist +30 m Goniometer (Rame-Hart A-100) - Operating Procedure →Measurement Procedure: image caption Tag: Visual edit
- 09:23, 27 July 2020 diff hist +2 m Goniometer (Rame-Hart A-100) - Operating Procedure →Measurement Procedure: indent, spacing
- 09:21, 27 July 2020 diff hist -28 Goniometer (Rame-Hart A-100) - Operating Procedure image sizing Tag: Visual edit
- 09:20, 27 July 2020 diff hist +821 N Goniometer (Rame-Hart A-100) - Operating Procedure initial page, mostly copied from "NRL Contact Angle Goniometer - Owners Manual.pdf" Tag: Visual edit
- 09:18, 27 July 2020 diff hist +33 N File:Goniometer - Reflective Sample Illustration.png current
- 09:08, 27 July 2020 diff hist +101 N File:Goniometer (Rame-Hart A-100) - Steps for Measuring v1.png current
- 08:55, 27 July 2020 diff hist +54 N File:Goniometer (Rame-Hart A-100) - Annotated Photo.png current
- 13:38, 26 July 2020 diff hist +29 m MVD - Wafer Coating - Process Traveler →Removal: of FDTS Coating: added PEii etch params current Tag: Visual edit
- 13:37, 26 July 2020 diff hist +29 MVD - Wafer Coating - Process Traveler link to new goniometer page Tag: Visual edit
- 13:36, 26 July 2020 diff hist +29 m Thermal Processing Recipes link to new goniometer page Tag: Visual edit
- 13:36, 26 July 2020 diff hist +55 Tool List →Inspection, Test and Characterization: link to new goniometer page Tag: Visual edit
- 13:35, 26 July 2020 diff hist +42 N Goniometer John d moved page Goniometer to Goniometer (Rame-Hart A-100): added mfg./model into name, like other tools current Tag: New redirect
- 20:55, 25 July 2020 diff hist +22 m ASML Stepper 3 Standard Operating Procedure →Reticle Unloading and Loading Tag: Visual edit
- 20:52, 25 July 2020 diff hist +181 m ASML Stepper 3 Standard Operating Procedure →Running a Job – Normal operation: added unload reticle Tag: Visual edit
- 06:45, 25 July 2020 diff hist +60 m ICP Etching Recipes →Recipe Variations: description of slanted etching doc Tag: Visual edit
- 22:13, 24 July 2020 diff hist +25 ICP Etching Recipes →SiO2 Etching: added credit for Bill Mitchell Tag: Visual edit
- 10:27, 24 July 2020 diff hist +205 ICP Etching Recipes →DSEIII_(PlasmaTherm/Deep_Silicon_Etcher): added actual Recipe names from teh tool Tag: Visual edit
- 09:22, 24 July 2020 diff hist +7 Lithography Recipes →Chemicals Stocked + Datasheets: clarified THMR PR documents Tag: Visual edit
- 07:54, 24 July 2020 diff hist +1 m ICP Etch 2 (Panasonic E626I) put ICP2 recipes first Tag: Visual edit
- 06:56, 24 July 2020 diff hist +27 m ICP Etching Recipes →DSEIII_(PlasmaTherm/Deep_Silicon_Etcher) Tag: Visual edit
- 06:55, 24 July 2020 diff hist +434 ICP Etching Recipes →High Rate Bosch Etch (DSEIII): added descriptions to the two recipes Tag: Visual edit
- 10:20, 23 July 2020 diff hist +717 N MVD - Wafer Coating - Process Traveler added procedure from BrianT's PDF Tag: Visual edit
- 10:15, 23 July 2020 diff hist +77 Molecular Vapor Deposition →Recipes: link to new process traveler Tag: Visual edit
- 10:08, 23 July 2020 diff hist +6 DSEIII (PlasmaTherm/Deep Silicon Etcher) →Documentation: bolded Tag: Visual edit
- 10:08, 23 July 2020 diff hist +260 DSEIII (PlasmaTherm/Deep Silicon Etcher) added allowed materisl: Al2O3, Al, Crystalbond wax, wafer size and clamp Tag: Visual edit
- 08:53, 21 July 2020 diff hist +8 m Dicing Saw (ADT) →Recipes: minor formatting Tag: Visual edit
- 19:22, 20 July 2020 diff hist +316 Template:Publications added Warren's paper
- 11:55, 20 July 2020 diff hist +528 m Frequently Asked Questions →Cell Phone Calls: Section on forcing calls through Wifi, not Cellular. Tag: Visual edit
- 16:35, 19 July 2020 diff hist 0 m Template:Announcements corrected date, COVID on top
- 14:50, 19 July 2020 diff hist +166 Template:Announcements asml maint
- 13:33, 18 July 2020 diff hist +100 m Chemical List →Material Safety Datasheets: minor comment Tag: Visual edit
- 13:25, 18 July 2020 diff hist -34 m Chemical List →Inventory List: updated photolith cehmicals URL Tag: Visual edit
- 00:20, 16 July 2020 diff hist +175 Unaxis wafer coating procedure link to recipes page Tag: Visual edit
- 00:18, 16 July 2020 diff hist -12 m Unaxis wafer coating procedure →Unaxis SiN LS @250°C deposition: unbold
- 00:17, 16 July 2020 diff hist +309 m Unaxis wafer coating procedure only edit dep. time Tag: Visual edit
- 00:13, 16 July 2020 diff hist +477 Unaxis wafer coating procedure notes about 0.5µm max. dep, and particle counting Tag: Visual edit
- 00:08, 16 July 2020 diff hist +111 ICP-PECVD (Unaxis VLR) →Documentation: redlink the SOP, explain the purpose of the "procedure" Tag: Visual edit
- 09:57, 14 July 2020 diff hist +338 m GoPro Hero8 Black (Internal) →Saving the Video to your computer: how to delete files Tag: Visual edit
- 09:55, 14 July 2020 diff hist +27 N File:Forward Delete Button.png current
- 09:52, 14 July 2020 diff hist +46 N File:GoPro HERO8 Black Instructions - Mac save to computer 2.png current
- 09:14, 14 July 2020 diff hist -25 m GoPro Hero8 Black (Internal) →Saving the Video to your computer: simplified Mac instrucitons Tag: Visual edit
- 09:12, 14 July 2020 diff hist +224 GoPro Hero8 Black (Internal) →Saving the Video to your computer: added windows insturctions, TBD on "Upload to Web" Tag: Visual edit
- 15:29, 6 July 2020 diff hist -198 Template:Announcements deleted 4th July
- 16:35, 5 July 2020 diff hist +174 m Stepper 3 (ASML DUV) →Operating Procedures: link to FEM sub-section Tag: Visual edit
- 16:10, 5 July 2020 diff hist +80 m GoPro Hero8 Black (Internal) →In the Lab: Recording your video: caption formatting Tag: Visual edit
- 16:00, 5 July 2020 diff hist +69 m GoPro Hero8 Black (Internal) →In the Lab: Recording your video: image caption Tag: Visual edit
- 14:56, 4 July 2020 diff hist +680 GoPro Hero8 Black (Internal) →Trainings via Webmeeting (Zoom): updates Tag: Visual edit
- 14:49, 4 July 2020 diff hist +270 m GoPro Hero8 Black (Internal) view videos - mentioned "My Media" section Tag: Visual edit
- 14:44, 4 July 2020 diff hist +75 m GoPro Hero8 Black (Internal) caption on GoPro app store img Tag: Visual edit
- 14:33, 4 July 2020 diff hist +253 GoPro Hero8 Black (Internal) minor formatting
- 14:19, 4 July 2020 diff hist +3,896 GoPro Hero8 Black (Internal) all sections added, TBA's inserted Tag: Visual edit
- 13:52, 4 July 2020 diff hist +64 N File:GoPro Hero8 Black - Video record button - IMG 2764.png current
- 13:49, 4 July 2020 diff hist +635 GoPro Hero8 Black (Internal) video and settings menu Tag: Visual edit
- 13:46, 4 July 2020 diff hist +63 N File:GoPro Hero8 Black - Presets 3 - settings IMG 2768.png current
- 13:45, 4 July 2020 diff hist +62 N File:GoPro Hero8 Black - Presets 2 - various IMG 2767.jpg current
- 13:44, 4 July 2020 diff hist +54 N File:GoPro Hero8 Black - Presets 1 - IMG 2765.jpg current
- 13:44, 4 July 2020 diff hist +58 N File:GoPro Hero8 Black - Choose video - IMG 2771.jpg current
- 13:41, 4 July 2020 diff hist +1,582 GoPro Hero8 Black (Internal) →In the lab: enable live perview screenshots Tag: Visual edit
- 13:40, 4 July 2020 diff hist 0 m File:GoPro Hero8 Black - Enable preview 4 - live view IMG 2763.png John d moved page File:Enable preview 4 - live view IMG 2763.png to File:GoPro Hero8 Black - Enable preview 4 - live view IMG 2763.png without leaving a redirect: added gopro name for searching current
- 13:39, 4 July 2020 diff hist +51 N File:GoPro Hero8 Black - Enable preview 4 - live view IMG 2763.png
- 13:37, 4 July 2020 diff hist +79 N File:GoPro Hero8 Black - Enable preview 3 - join wifi network IMG 2770.jpg current
- 13:37, 4 July 2020 diff hist +72 N File:Gopro Hero8 Black - Enable preview 2 - use wifi IMG 2769.jpg current
- 13:35, 4 July 2020 diff hist +61 N File:GoPro Hero8 Black - Enable preview 1 - IMG 2766.jpg current
- 21:43, 2 July 2020 diff hist +146 GoPro Hero8 Black (Internal) draft update Tag: Visual edit
- 20:20, 2 July 2020 diff hist +1,849 N GoPro Hero8 Black (Internal) initial draft of instructions Tag: Visual edit
- 20:02, 2 July 2020 diff hist +32 N File:GoPro H8b training - Smartphone App.jpg current
- 19:52, 2 July 2020 diff hist +148 N Nanofab Staff Internal Pages created page, added GoPro Hero 8 redlink Tag: Visual edit
- 07:22, 2 July 2020 diff hist +198 Template:Announcements July 4th holiday
- 18:07, 1 July 2020 diff hist +676 PECVD Recipes →SiN LS 250C Deposition (Unaxis VLR): notes about SiD4, new procedures Tag: Visual edit
- 18:00, 1 July 2020 diff hist +177 Vacuum Deposition Recipes Corrected Unaxis Dep links. New row: low-stress Nitride. Tag: Visual edit
- 07:58, 1 July 2020 diff hist 0 CAIBE (Oxford Ion Mill) corrected cluster chamber--> metal/dielectric designation Tag: Visual edit
- 07:57, 1 July 2020 diff hist +2 Atomic Layer Deposition (Oxford FlexAL) corrected chamber --> metal/dielectric designation Tag: Visual edit
- 18:03, 24 June 2020 diff hist 0 m Lift-Off with DUV Imaging + PMGI Underlayer →Suggested Process for Liftoff Tag: Visual edit
- 18:03, 24 June 2020 diff hist +73 Lift-Off with DUV Imaging + PMGI Underlayer annotated image caption Tag: Visual edit
- 17:59, 24 June 2020 diff hist +124 Lift-Off with DUV Imaging + PMGI Underlayer separated Process Limits into separate section Tag: Visual edit
- 11:51, 22 June 2020 diff hist +307 Services added Fab Services note at bottom Tag: Visual edit
- 11:01, 22 June 2020 diff hist +95 Atomic Layer Deposition Recipes →Pt deposition (ALD CHAMBER 1): added Pt recipe name for O* plasma Tag: Visual edit
- 10:57, 22 June 2020 diff hist +8 m Atomic Layer Deposition (Oxford FlexAL) →ALD Recipes: bolded recipes page Tag: Visual edit
- 10:22, 18 June 2020 diff hist -61 m Demis D. John fixed URL current Tag: Visual edit
- 10:21, 18 June 2020 diff hist +139 Demis D. John moved 'Contact If...' to the top
- 14:56, 17 June 2020 diff hist +9 Main Page mod remove top spacing current
- 14:45, 17 June 2020 diff hist +1,830 N Main Page mod pasted Main_Page code
- 14:06, 17 June 2020 diff hist -9 m Lithography Recipes →Chemicals Stocked + Datasheets: delete whitespace
- 14:05, 17 June 2020 diff hist -43 m Lithography Recipes →Lift-Off Techniques: deleted redlink Tag: Visual edit
- 14:04, 17 June 2020 diff hist -9 m Lithography Recipes →Chemicals Stocked + Datasheets Tag: Visual edit
- 14:01, 17 June 2020 diff hist +461 Lithography Recipes Converted wall-of-text list into indented table of contents Tag: Visual edit
- 13:38, 17 June 2020 diff hist +14 m Stepper 3 (ASML DUV) →Recipes: corrected link text Tag: Visual edit
- 13:37, 17 June 2020 diff hist +252 Stepper 3 (ASML DUV) →Design & Fabrication Tools: updated Job-creator options Tag: Visual edit
- 11:11, 16 June 2020 diff hist +26 m Demis D. John →Contact If...: updated Tag: Visual edit
- 11:10, 16 June 2020 diff hist +35 m Demis D. John →External Professional Websites: url update Tag: Visual edit
- 14:37, 12 June 2020 diff hist +36 Autostep 200 Mask Making Guidance fixed title, added WIP and mask ordering section Tag: Visual edit
- 12:01, 9 June 2020 diff hist 0 File:SiO2 Etch, Ru HardMask - Fluorine ICP Etch Process - Ning Cao 2019-06.pdf John d uploaded a new version of File:SiO2 Etch, Ru HardMask - Fluorine ICP Etch Process - Ning Cao 2019-06.pdf current
- 11:56, 9 June 2020 diff hist 0 File:SiO2 Etch, Ru HardMask - Fluorine ICP Etch Process - Ning Cao 2019-06.pdf John d uploaded a new version of File:SiO2 Etch, Ru HardMask - Fluorine ICP Etch Process - Ning Cao 2019-06.pdf
- 11:42, 9 June 2020 diff hist +494 ICP Etching Recipes →SiO2 Etching: added Ning's Ru-masked SiO2 etch Tag: Visual edit
- 11:29, 9 June 2020 diff hist +117 N File:SiO2 Etch, Ru HardMask - Fluorine ICP Etch Process - Ning Cao 2019-06.pdf Procedure for SiO2 deep etching on Plasma-Therm SLR Fluorine Etcher, using Sputtered Ruthenium hardmask
- 19:18, 8 June 2020 diff hist -1 m Template:Announcements
- 19:18, 8 June 2020 diff hist +3 m Template:Announcements
- 19:17, 8 June 2020 diff hist +23 m Template:Announcements
- 19:17, 8 June 2020 diff hist -120 Template:Announcements updated COVID response
- 18:12, 8 June 2020 diff hist -142 Template:Announcements →NanoFab Closure: update to "COVID Response"
- 18:08, 8 June 2020 diff hist 0 m Template:News →Raith Velion: FIB/SEM Installation: minor update
- 18:08, 8 June 2020 diff hist +9 m Template:News RAITH minor spelling
- 11:18, 8 June 2020 diff hist +321 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) link to lase rmonitor pages Tag: Visual edit
- 11:17, 8 June 2020 diff hist +93 ICP Etch 2 (Panasonic E626I) link to laser monitor pages Tag: Visual edit
- 11:16, 8 June 2020 diff hist +368 ICP Etch 1 (Panasonic E646V) link to laser etch monitor pages Tag: Visual edit
- 11:14, 8 June 2020 diff hist +306 DSEIII (PlasmaTherm/Deep Silicon Etcher) links to laser monitor pages Tag: Visual edit
- 11:11, 8 June 2020 diff hist +422 N Intellemetrics Laser Etch Monitor Procedure for Plasma-Therm Etchers basic description, point to General Procedure page. current Tag: Visual edit
- 08:04, 5 June 2020 diff hist +95 XeF2 Etch (Xetch) →About: added wafer size Tag: Visual edit
- 23:29, 2 June 2020 diff hist 0 m Template:Announcements grammar
- 17:56, 2 June 2020 diff hist +63 m Template:WIP current
- 17:55, 2 June 2020 diff hist +89 Template:WIP link to WIP category
- 17:54, 2 June 2020 diff hist +133 N Category:WIP Created page with "The following pages have a "Work In Progress" label and Image inserted in them. See the WIP template for more info." current
- 17:52, 2 June 2020 diff hist +7 m Dan Read added work in progress sign Tag: Visual edit
- 17:51, 2 June 2020 diff hist +189 N Dan Read initial page
- 17:50, 2 June 2020 diff hist +43 Staff List →Process Group: added link to Dan Read Tag: Visual edit
- 17:48, 2 June 2020 diff hist 0 m Template:Announcements modify post date so closure is at top
- 17:48, 2 June 2020 diff hist +281 Template:Announcements New tool installs - points to NEWS articles
- 17:43, 2 June 2020 diff hist +1,382 Template:News article for Raith Velion & Heidleberg MLA150
- 13:00, 30 May 2020 diff hist +215 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →IQC (Image Quality Control) Calibration Check: added screenshot of IQC results screen Tag: Visual edit
- 12:58, 30 May 2020 diff hist +114 N File:ASML IQC Focus Mean Correction screenshot.jpg
- 16:50, 28 May 2020 diff hist +562 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →Error Log full: added Laser refill warning Tag: Visual edit
- 16:45, 28 May 2020 diff hist +259 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →IQC (Image Quality Control) Calibration Check: added brief description of utility Tag: Visual edit
- 16:14, 28 May 2020 diff hist +6 m ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →IQC (Image Quality Control) Calibration Check: bolded button Tag: Visual edit
- 16:14, 28 May 2020 diff hist +172 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →IQC (Image Quality Control) Calibration Check: added to record in logbook Tag: Visual edit
- 10:52, 22 May 2020 diff hist +357 CAIBE (Oxford Ion Mill) linked to Cluster operating instructions Tag: Visual edit
- 10:48, 22 May 2020 diff hist +9 m Tool List →Inspection, Test and Characterization: renaming of sections Tag: Visual edit
- 09:27, 19 May 2020 diff hist +83 m Thermal Evap 2 (Solder) →About Tag: Visual edit
- 09:26, 19 May 2020 diff hist +35 Thermal Evap 2 (Solder) fixed link to recipes, removed duplicate link Tag: Visual edit
- 08:56, 18 May 2020 diff hist +189 m Lift-Off with DUV Imaging + PMGI Underlayer convert process to table, more like a "traveler" Tag: Visual edit
- 10:12, 15 May 2020 diff hist +1,701 Atomic Layer Deposition Recipes →Al2O3 deposition (ALD CHAMBER 3): added all Chamber 3 recipes I could find Tag: Visual edit
- 13:52, 13 May 2020 diff hist 0 m MediaWiki:Common.css retry
- 13:51, 13 May 2020 diff hist -1 MediaWiki:Common.css retry
- 13:50, 13 May 2020 diff hist +3 MediaWiki:Common.css retry
- 13:49, 13 May 2020 diff hist +1 m MediaWiki:Common.css retry
- 13:46, 13 May 2020 diff hist +84 MediaWiki:Common.css disable discussion link
- 07:22, 13 May 2020 diff hist +66 m Frequently Asked Questions →Can I take supplies from the Nanofab?: tone down the wording Tag: Visual edit
- 15:52, 12 May 2020 diff hist +42 m MediaWiki:Common.css added comment line
- 15:50, 12 May 2020 diff hist +9 m MediaWiki:Common.css retry h6
- 15:25, 12 May 2020 diff hist +50 MediaWiki:Common.css italicized Heading 4 (h6)
- 15:21, 12 May 2020 diff hist +152 Tool List →Inspection, Test and Characterization: reorganized optical tools Tag: Visual edit
- 20:40, 6 May 2020 diff hist +8 m Stepper 3 (ASML DUV) reduce Heading levels to "heading" not "Page title" Tag: Visual edit
- 17:55, 6 May 2020 diff hist +341 Stepper 3 (ASML DUV) added link to stepper recipes Tag: Visual edit
- 08:50, 29 April 2020 diff hist +51 Template:Announcements bumped COVID closure post, link to BThibeault page
- 10:14, 23 April 2020 diff hist +14 Atomic Layer Deposition (Oxford FlexAL) →Procedures & Documentation: changed to "ask tool supervisor" instead of BillM Tag: Visual edit
- 10:13, 23 April 2020 diff hist +28 Atomic Layer Deposition Recipes →Atomic Layer Deposition (Oxford FlexAL): changed to "ask Tool Supervisor" instead of BillM Tag: Visual edit
- 09:58, 23 April 2020 diff hist -3 Sputtering Recipes →Al Deposition (Sputter 2): changed Heading level for Sputter 2 to "page title" to match others Tag: Visual edit
- 09:14, 23 April 2020 diff hist -19 m Test Data of etching SiO2 with CHF3/CF4-ICP1 minor format Tag: Visual edit
- 09:12, 23 April 2020 diff hist +3 Test Data of etching SiO2 with CHF3/CF4-ICP1 Tag: Visual edit
- 09:11, 23 April 2020 diff hist +43 m Test Data of etching SiO2 with CHF3/CF4-ICP1 formatting Tag: Visual edit
- 09:10, 23 April 2020 diff hist +6 m Test Data of etching SiO2 with CHF3/CF4-ICP1 minor formatting Tag: Visual edit
- 09:10, 23 April 2020 diff hist +84 Test Data of etching SiO2 with CHF3/CF4-ICP1 comments on sidewall angle Tag: Visual edit
- 16:18, 22 April 2020 diff hist +495 Measurements and Imaging with Amscope Camera - Quickstart Usage Guide updated to indicate the 2 methods of choosing cals Tag: Visual edit
- 15:44, 22 April 2020 diff hist +1,432 N Measurements and Imaging with Amscope Camera - Quickstart Usage Guide copy/pasted BrianT's email from Jul 26, 2019 Tag: Visual edit
- 15:36, 22 April 2020 diff hist +37 Microscopes →Image Analysis Software: link to Amscope Quickstart Tag: Visual edit
- 12:26, 22 April 2020 diff hist +98 N File:UCSB Service Agreement.pdf UCSB Service Agreement, for Remote Fabrication Services section of Nanotech website.
- 14:45, 21 April 2020 diff hist +291 PECVD Recipes →Cleaning Recipes (PECVD #2): changed Clean recipe to link to the screenshot instead of embedding in recipes page. added description of the clean Tag: Visual edit
- 14:42, 21 April 2020 diff hist +228 PECVD Recipes →Cleaning Recipes (PECVD #1): changed cleaning recipe image to Link to image, instead of embedded in page. Small description of the recipe. Tag: Visual edit
- 14:37, 21 April 2020 diff hist +20 m File:PECVD1-cleaning.png description update current
- 18:06, 13 April 2020 diff hist +204 Services formatting/clarify Tag: Visual edit
- 18:02, 13 April 2020 diff hist +62 Template:Links updated remote work/lab access links
- 11:54, 8 April 2020 diff hist +46 m Wafer scanning process traveler added author and spelling Tag: Visual edit
- 11:49, 8 April 2020 diff hist +128 Wafer scanning process traveler added wafers to use section and summary at top
- 09:06, 8 April 2020 diff hist +5 Stocked Chemical List added "IPA" to propanol names/notes Tag: Visual edit
- 08:59, 8 April 2020 diff hist +31 Stocked Chemical List added BHF % concentration Tag: Visual edit
- 12:45, 4 April 2020 diff hist +148 Stepper 3 (ASML DUV) →Design & Fabrication Tools: link to template + CAD files Tag: Visual edit
- 15:49, 30 March 2020 diff hist +12 ICP Etching Recipes →Al Etch (Panasonic 1) Tag: Visual edit
- 15:48, 30 March 2020 diff hist +6 ICP Etching Recipes →Al Etch (Panasonic 2)
- 10:42, 30 March 2020 diff hist +6 ICP-PECVD (Unaxis VLR) →Documentation: fixed link
- 10:21, 30 March 2020 diff hist +4 m Stepper 2 (AutoStep 200) →Staff Procedures Tag: Visual edit
- 10:13, 30 March 2020 diff hist -4,103 Autostep 200 Troubleshooting and Recovery moved system restarting procedure to own page
- 10:11, 30 March 2020 diff hist +193 Stepper 2 (AutoStep 200) added shutartup-shutdown link Tag: Visual edit
- 15:05, 26 March 2020 diff hist +92 Mike Day added Tools > PEii ashers current Tag: Visual edit
- 15:04, 26 March 2020 diff hist -80 Staff List →Equipment Group: Deleted TomR from Equip. group (also in Facilities) Tag: Visual edit
- 15:03, 26 March 2020 diff hist +16 Biljana Stamenic Added "Tools" heading Tag: Visual edit
- 15:01, 26 March 2020 diff hist -1 m Tom Reynolds changed to May 2018 Tag: Visual edit
- 14:53, 26 March 2020 diff hist +77 N File:ASML Reticle Programming Params - DEM-2020-03 v1.xlsx CAD Tutorial - example programming spreadsheet for ASML Stepper current
- 14:48, 26 March 2020 diff hist +83 N File:Example Mask order form (UCSB ASML 5500) - DEM-2020-03.pdf CAD Tutorial - Example Mask order form (UCSB ASML 5500) - DEM-2020-03 current