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- 00:09, 16 December 2021 diff hist -12,460 PECVD Recipes pasted NastaziaM's new data links
- 00:07, 16 December 2021 diff hist +167 Deposition Data - temporary 2021-12-15 →Standard Cleaning Procedure (IBD): cleaning current Tag: Visual edit
- 00:05, 16 December 2021 diff hist +575 Deposition Data - temporary 2021-12-15 →Ion Beam Deposition (Veeco NEXUS): pasted SiOxNy data
- 00:03, 16 December 2021 diff hist +2,234 Deposition Data - temporary 2021-12-15 →Ion Beam Deposition (Veeco NEXUS): updated IBD Tag: Visual edit
- 23:49, 15 December 2021 diff hist +1,751 Deposition Data - temporary 2021-12-15 New data links Tag: Visual edit
- 07:35, 15 December 2021 diff hist +24,157 N Old Deposition Data - 2021-12-15 Created page with "OLD Data: Copied on 2021-12-14 {{recipes|Vacuum Deposition}} =PECVD 1 (PlasmaTherm 790)= ====Historical Particulate Data==== *[https://docs.google.com/spreadsheets/d..." Tag: Visual edit: Switched
- 07:35, 15 December 2021 diff hist +107 Nanofab Staff Internal Pages →Old / Defunct Tag: Visual edit
- 07:32, 15 December 2021 diff hist -11,328 Deposition Data - temporary 2021-12-15
- 07:31, 15 December 2021 diff hist +26 Deposition Data - temporary 2021-12-15 Tag: Visual edit
- 07:31, 15 December 2021 diff hist +24,158 N Deposition Data - temporary 2021-12-15 pasted old data
- 07:30, 15 December 2021 diff hist +83 Nanofab Staff Internal Pages →Old / Defunct: temp. link to dep data Tag: Visual edit
- 06:10, 15 December 2021 diff hist +1,908 MLA150 - Troubleshooting →Out Of Focus Exposures: Debugging section Tag: Visual edit
- 09:31, 14 December 2021 diff hist +598 Old Deposition Data - NastaziaM 2021-11-22 modified PECVD1 and PECVD 1 for same titles as old data current Tag: Visual edit
- 09:20, 14 December 2021 diff hist +24,230 Old Deposition Data - NastaziaM 2021-11-22 pasted all old data from https://wiki.nanotech.ucsb.edu/wiki/PECVD_Recipes Tag: Visual edit
- 09:02, 14 December 2021 diff hist +10 m Nanofab Staff Internal Pages Tag: Visual edit
- 09:21, 11 December 2021 diff hist +115 m ICP Etching Recipes →Si Deep RIE (PlasmaTherm/Bosch Etch): linnks to new DSE & FL_ICP recipes Tag: Visual edit
- 09:20, 11 December 2021 diff hist +331 ICP Etching Recipes →Oxford ICP Etcher (PlasmaPro 100 Cobra): links for GaAs, GaSb Tag: Visual edit
- 12:16, 8 December 2021 diff hist +504 N MA6 Backside Alignment - Allowed Mark Locations 100-mm BSA chuck with cutouts measurements current Tag: Visual edit
- 12:15, 8 December 2021 diff hist +67 N File:MA-6 4-inch BSA chuck - 2631 - measurements.jpg current
- 12:12, 8 December 2021 diff hist +53 Contact Aligner (SUSS MA-6) →Documentation: link to "backside alignment - allowed mark locations" Tag: Visual edit
- 12:10, 8 December 2021 diff hist +2 m Contact Aligner (SUSS MA-6) minor wording Tag: Visual edit
- 12:11, 7 December 2021 diff hist 0 m Template:Announcements →New COVID Protocols: minor formatting
- 12:10, 7 December 2021 diff hist -1,191 Template:Announcements delete old Weekly-Testing & COVID-Protocols & OxfordICP messages
- 11:01, 1 December 2021 diff hist +439 DSEIII (PlasmaTherm/Deep Silicon Etcher) added section for Edge-Bead removal of PR etc Tag: Visual edit
- 11:27, 24 November 2021 diff hist +164 m Photolithography - Improving Adhesion Photoresist Adhesion mentioned lift-off delam Tag: Visual edit
- 11:25, 24 November 2021 diff hist +26 m Lithography Recipes →General Photolithography Techniques Tag: Visual edit
- 11:24, 24 November 2021 diff hist +180 Lithography Recipes added General Photolitho section to TOC Tag: Visual edit
- 11:22, 24 November 2021 diff hist +1,309 N Photolithography - Manual Edge-Bead Removal Techniques added razor, EBR100 and lithographic methods Tag: Visual edit
- 11:12, 24 November 2021 diff hist 0 m Lithography Recipes →General Photolithography Techniques: changed linked page title Tag: Visual edit
- 11:12, 24 November 2021 diff hist 0 m Photolithography - Improving Adhesion Photoresist Adhesion John d moved page Photolithography - HMDS Process for Improving Adhesion to Photolithography - Improving Adhesion Photoresist Adhesion without leaving a redirect: more generalized page title
- 11:11, 24 November 2021 diff hist +1,119 N Photolithography - Improving Adhesion Photoresist Adhesion added Underlayers for PR adhesion Tag: Visual edit
- 11:05, 24 November 2021 diff hist +447 Lithography Recipes Added "General Photlith techniques" section and links to 2 pages Tag: Visual edit
- 21:43, 22 November 2021 diff hist +938 Process Group - Billing Instructions added "Billing rates" section current Tag: Visual edit
- 13:45, 22 November 2021 diff hist +7 N Old Deposition Data - NastaziaM 2021-11-22 Created page with "Testing" Tag: Visual edit
- 13:45, 22 November 2021 diff hist +31 Nanofab Staff Internal Pages →Process Group: link to old dep data Tag: Visual edit
- 15:09, 18 November 2021 diff hist +527 Surface Analysis (KLA/Tencor Surfscan) added exmaple of low particle count Tag: Visual edit
- 15:07, 18 November 2021 diff hist +44 N File:Surfscan Low-Particle Example - G2.png current
- 15:05, 18 November 2021 diff hist +44 N File:Surfscan Low-Particle Example - G4.png current
- 14:35, 15 November 2021 diff hist +207 Logitech WBS7 - Procedure for Wax Mounting with bulk Crystalbond Stick added POLOS cleaning step Tag: Visual edit
- 14:33, 15 November 2021 diff hist +172 Logitech WBS7 - Procedure for Wax Mounting with bulk Crystalbond Stick link to Logitech Wafer Bonder Tag: Visual edit
- 08:43, 12 November 2021 diff hist +379 KLayout Design Tips force TOC at top, minor updates
- 08:29, 12 November 2021 diff hist +338 Maskless Aligner (Heidelberg MLA150) "updates to training video" links below video training Tag: Visual edit
- 12:23, 11 November 2021 diff hist +1,060 ASML Stepper 3 Standard Operating Procedure →Running a focus and/or exposure matrix: discussion of "process window" and "tolerance" Tag: Visual edit
- 16:47, 4 November 2021 diff hist -181 Template:Announcements Removed fl-icp
- 11:17, 4 November 2021 diff hist +377 PECVD Recipes →Cleaning Recipes (PECVD #2): added cleaning times Tag: Visual edit
- 11:04, 4 November 2021 diff hist +91 m PECVD 2 (Advanced Vacuum) →About: link to LSNitride data Tag: Visual edit
- 11:03, 4 November 2021 diff hist +179 PECVD 2 (Advanced Vacuum) →About: separated specs into sub-sections Tag: Visual edit
- 10:53, 4 November 2021 diff hist -1 m Template:Announcements
- 10:53, 4 November 2021 diff hist +181 Template:Announcements FL-ICP down
- 10:45, 4 November 2021 diff hist +90 Stepper 3 (ASML DUV) →Process Information: added Max wafer thickness Tag: Visual edit
- 12:08, 1 November 2021 diff hist +63 Resistivity Mapper (CDE RESMAP) added CSV export Tag: Visual edit
- 08:58, 1 November 2021 diff hist +392 MLA150 - Troubleshooting →Unexpected Behavior: moved to top. Added Reconverting CAD file. Tag: Visual edit
- 08:51, 1 November 2021 diff hist 0 File:MLA Quarter-Wafer Alignment.jpg John d uploaded a new version of File:MLA Quarter-Wafer Alignment.jpg current
- 11:21, 28 October 2021 diff hist +213 Lift-Off with DUV Imaging + PMGI Underlayer →Process Limits: suggest LOL, PMGI double-spin etc. Tag: Visual edit
- 21:51, 27 October 2021 diff hist -5 m ASML Stepper 3 Error Recovery, Troubleshooting and Calibration corrected max. expansion to 200pm (current machine setting) Tag: Visual edit
- 21:49, 27 October 2021 diff hist +837 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration added Wafer Expansion workaround Tag: Visual edit
- 12:15, 22 October 2021 diff hist +229 N Template:StaffInfoSecondary DJ Copy of NickL's "StaffInfoSecondary" template
- 12:13, 22 October 2021 diff hist +10,286 N Template:Tool2 copy of NickL's "Tool2" template
- 12:12, 22 October 2021 diff hist +659 N Template:StaffInfo DJ copy of original StaffInfo tempalte
- 11:42, 22 October 2021 diff hist +183 Template:StaffInfo added descriptive info about this template. current
- 11:20, 22 October 2021 diff hist +193 Services →Important Info on Fabrication Services: added link to publications policy Tag: Visual edit
- 17:01, 21 October 2021 diff hist -359 Template:Announcements deleted wifi maint.
- 07:22, 19 October 2021 diff hist +359 Template:Announcements wifi maint. oct 21 6a
- 16:25, 12 October 2021 diff hist +567 Digital Microscope (Olympus DSX1000) updated description Tag: Visual edit
- 11:50, 12 October 2021 diff hist +250 Wet Benches →Wafer Toxic Corrosive Benches: added photo of the various wafer holders Tag: Visual edit
- 11:49, 12 October 2021 diff hist +75 N File:Bay 4 toxic Corrosive - wafer sample holders - IMG 4243.jpg current
- 09:21, 12 October 2021 diff hist -1 m Template:Announcements
- 09:20, 12 October 2021 diff hist -235 Template:Announcements deleted Microscope service
- 17:33, 11 October 2021 diff hist +39 COVID-19 User Policies →NanoFab Policies: mentioned that masks are provided, for Thermo-Fischer vendor Tag: Visual edit
- 14:01, 8 October 2021 diff hist +293 ICP Etching Recipes →InP Ridge Etch (Oxford ICP Etcher): links to PDFs of etch characterizations Tag: Visual edit
- 13:59, 8 October 2021 diff hist +111 N File:Oxford Etcher - InP Ridge Etch using Oxford PlasmaPro 100 Cobra - 2021-09-08.pdf Oxford Etcher - InP Ridge Etch using Oxford PlasmaPro 100 Cobra - 2021-09-08 Ning Cao, 2021-09-08
- 13:55, 8 October 2021 diff hist +93 N File:Oxford Etcher - InP Grating Etch at 20 C - Oxford Cobra 300 2021-08-26.pdf Oxford Etcher - InP Grating Etch at 20 C - Oxford Cobra 300 2021-08-26 Ning Cao
- 13:53, 8 October 2021 diff hist +128 Dry Etching Recipes link to Oxford InP/PnGaAsP recipes Tag: Visual edit
- 16:23, 7 October 2021 diff hist +253 Template:Announcements microscopy tech service
- 09:54, 7 October 2021 diff hist 0 m Stepper 3 (ASML DUV) →Design & Fabrication Tools: fix indent Tag: Visual edit: Switched
- 09:53, 7 October 2021 diff hist +132 Stepper 3 (ASML DUV) →Operating Procedures: added Mask Making to "Design/Fab tools" Tag: Visual edit
- 09:36, 7 October 2021 diff hist +45 Calculators + Utilities →Python Scripts: "pythonXY" --> "Spyder" Tag: Visual edit
- 10:39, 4 October 2021 diff hist -264 Template:Announcements deleted ASML PM
- 17:13, 1 October 2021 diff hist +7 m Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) →Detailed Specifications Tag: Visual edit
- 17:12, 1 October 2021 diff hist +318 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) →Detailed Specifications: mentioned 5mm exlcusion & wafers breaking Tag: Visual edit
- 17:10, 1 October 2021 diff hist +289 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) added small-sample mounting notes Tag: Visual edit
- 17:07, 1 October 2021 diff hist -941 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) deleted old mounting/Bosch process info Tag: Visual edit
- 08:00, 30 September 2021 diff hist -1 m Template:Announcements
- 08:00, 30 September 2021 diff hist -122 Template:Announcements Oxford ICP
- 21:30, 29 September 2021 diff hist -7 m Template:News →Oxford PlasmaPro ICP Etcher Cobra installed
- 21:29, 29 September 2021 diff hist -10 m Template:News
- 16:09, 29 September 2021 diff hist -23 m Maskless Aligner (Heidelberg MLA150) fixed HIMT link Tag: Visual edit
- 12:13, 29 September 2021 diff hist +22 m ICP Etching Recipes →SiO2 Etching (Fluorine ICP Etcher): listed etch gasses used Tag: Visual edit
- 11:59, 29 September 2021 diff hist +143 Oxford ICP Etcher (PlasmaPro 100 Cobra) →Detailed Specifications: updated ICP/RF powers Tag: Visual edit
- 11:27, 29 September 2021 diff hist +475 Template:News ADDED OXFROD ICP etch
- 11:19, 29 September 2021 diff hist +24 Oxford ICP Etcher (PlasmaPro 100 Cobra) updates to allowed materials Tag: Visual edit
- 10:45, 29 September 2021 diff hist +124 Oxford ICP Etcher (PlasmaPro 100 Cobra) →Detailed Specifications: added image, notes on substrate materials "discuss with staff" Tag: Visual edit
- 10:42, 29 September 2021 diff hist 0 File:OxfordPlasmaPro.jpg John d uploaded a new version of File:OxfordPlasmaPro.jpg current
- 10:41, 29 September 2021 diff hist +36 N File:OxfordPlasmaPro.jpg Photo from User Manual
- 19:19, 28 September 2021 diff hist +15 m MLA150 - Troubleshooting →Aligning to a quarter-wafer Tag: Visual edit
- 19:18, 28 September 2021 diff hist +182 MLA150 - Troubleshooting →Aligning to a quarter-wafer: inserted schematic Tag: Visual edit
- 19:16, 28 September 2021 diff hist +68 N File:MLA Quarter-Wafer Alignment.jpg
- 19:01, 28 September 2021 diff hist +183 MLA150 - Troubleshooting →Aligning to a quarter-wafer: minor description update Tag: Visual edit
- 18:57, 28 September 2021 diff hist +2,034 MLA150 - Troubleshooting added ALigning to a Quarter Wafer Tag: Visual edit
- 21:39, 27 September 2021 diff hist +2 m MLA150 - CAD Files and Templates Tag: Visual edit
- 21:39, 27 September 2021 diff hist +23 m MLA150 - CAD Files and Templates →Resolution and Calibration Patterns Tag: Visual edit
- 21:37, 27 September 2021 diff hist -1 m Maskless Aligner (Heidelberg MLA150) →Troubleshooting & Known Bugs
- 21:36, 27 September 2021 diff hist +37 m Maskless Aligner (Heidelberg MLA150) →Detailed Specifications Tag: Visual edit
- 21:35, 27 September 2021 diff hist +105 Maskless Aligner (Heidelberg MLA150) →Design Tools/Info: renaming/reorg for clarify Tag: Visual edit: Switched
- 17:02, 27 September 2021 diff hist +60 ICP Etching Recipes →Photoresist & ARC (Fluorine ICP Etcher): subheadings for BARC and PR strip Tag: Visual edit
- 22:10, 23 September 2021 diff hist -44 Template:Publications →Highly Selective and Vertical Etch of Silicon Dioxide using Ruthenium Films as an Etch Mask: fixed FL-ICP link
- 15:57, 23 September 2021 diff hist +91 Template:Announcements wifi update
- 10:26, 23 September 2021 diff hist -83 Dicing Saw (ADT) →Detailed Specifications: deleted old SOP, Lee's SOP only Tag: Visual edit
- 10:14, 23 September 2021 diff hist -64 Dicing Saw (ADT) →Recipes: corrected link to recipes Tag: Visual edit
- 10:11, 23 September 2021 diff hist +17 Packaging Recipes →Dicing Saw Recipes (ADT 7100): link to Thermocarbon website Tag: Visual edit
- 17:25, 21 September 2021 diff hist +68 Calculators + Utilities →Example CAD File: GDS version of CAD Tutorial Tag: Visual edit
- 17:23, 21 September 2021 diff hist +27 N File:CAD Tutorial for ASML Reticle v1 GDS.gds current
- 17:21, 21 September 2021 diff hist -1,195 Calculators + Utilities →KLayout: moved KLayout tips to separate Klayout tips page Tag: Visual edit
- 17:20, 21 September 2021 diff hist +1,952 KLayout Design Tips pasted more tips from Calc+Utilities page Tag: Visual edit
- 17:08, 21 September 2021 diff hist +374 Calculators + Utilities →Material Parameters: added Lesker links Tag: Visual edit
- 17:04, 21 September 2021 diff hist +302 Calculators + Utilities →KLayout: minor updates to KLayout / Circles Tag: Visual edit
- 16:02, 21 September 2021 diff hist -168 Calculators + Utilities →L-Edit: updated to ECE's license Tag: Visual edit
- 17:32, 20 September 2021 diff hist +23 m Template:Announcements
- 17:32, 20 September 2021 diff hist +253 Template:Announcements UCSB netowrk problems
- 14:18, 11 September 2021 diff hist +1 Dry Etching Recipes FL-ICP: SiN = A Tag: Visual edit
- 21:44, 10 September 2021 diff hist +381 Sputter 5 (AJA ATC 2200-V) link to sputter 3/4 procedures, link to SUM page for targets, and ToolInfo toolID added Tag: Visual edit
- 21:36, 10 September 2021 diff hist +62 m Sputter 3 (AJA ATC 2000-F) →Materials Table: minor cleanup Tag: Visual edit
- 21:34, 10 September 2021 diff hist +290 Sputter 4 (AJA ATC 2200-V) link to recipes page, rearranged specs, materials at bottom Tag: Visual edit
- 17:07, 9 September 2021 diff hist +1,173 Stepper Recipes linked to PR datasheets Tag: Visual edit
- 15:59, 9 September 2021 diff hist +67 Stepper 2 (AutoStep 200) move mask-making to "process info" Tag: Visual edit
- 15:40, 9 September 2021 diff hist +687 Stepper 2 (AutoStep 200) →Process Information: aded CAD files section Tag: Visual edit
- 15:38, 9 September 2021 diff hist +68 N File:GCA Local Alignment Mark Dotted.gds current
- 15:36, 9 September 2021 diff hist +48 N File:GCA Local Alignment Mark.gds current
- 15:31, 9 September 2021 diff hist +12 Stepper 1 (GCA 6300) →Process Information: added CAD Files heading Tag: Visual edit
- 15:29, 9 September 2021 diff hist +522 Stepper 1 (GCA 6300) →Process Information: links to Photomask & Alignment CAD files Tag: Visual edit
- 15:27, 9 September 2021 diff hist +46 N File:GCA Global Mark.gds current
- 15:19, 8 September 2021 diff hist +650 Template:Announcements added MikeS's Stepper 1+2 PM's
- 22:39, 7 September 2021 diff hist +54 Template:Announcements →New COVID Protocols: link to full policies
- 16:13, 7 September 2021 diff hist +156 Stepper 3 (ASML DUV) reorganization Tag: Visual edit
- 16:04, 7 September 2021 diff hist +380 Template:Announcements Aidan's fire alarm email
- 16:03, 7 September 2021 diff hist +270 Template:Announcements ASML PM Feb March 8th
- 15:00, 3 September 2021 diff hist -28 Oxford ICP Etcher (PlasmaPro 100 Cobra) →Recipes: corrected link to recipes Tag: Visual edit
- 14:12, 3 September 2021 diff hist +48 Dry Etching Recipes corrected Oxford link Tag: Visual edit
- 14:10, 3 September 2021 diff hist +705 ICP Etching Recipes Added Oxfrod ICP section and placeholder recipes Tag: Visual edit
- 14:04, 3 September 2021 diff hist +360 m Dry Etching Recipes corrected Row Bg colors
- 13:58, 3 September 2021 diff hist +973 Dry Etching Recipes Updated formatting- smaller font for model #, header colors
- 13:41, 3 September 2021 diff hist +231 Dry Etching Recipes inserted Oxford ICP column Tag: Visual edit
- 13:38, 3 September 2021 diff hist +2,774 N Oxford ICP Etcher (PlasmaPro 100 Cobra) first attempt at page
- 13:33, 3 September 2021 diff hist -4 m DSEIII (PlasmaTherm/Deep Silicon Etcher) corrected header level Tag: Visual edit
- 13:14, 3 September 2021 diff hist +359 Laser Etch Monitoring →Specific Procedures: Added Oxford Laser Mon Tag: Visual edit
- 13:13, 3 September 2021 diff hist +40 Tool List →ICP-RIE: link to Oxford ICP new page Tag: Visual edit
- 12:55, 3 September 2021 diff hist 0 File:Annotated PR etch - Om1000 03 - ARC + Cl + PR etch v1.jpg John d uploaded a new version of File:Annotated PR etch - Om1000 03 - ARC + Cl + PR etch v1.jpg current
- 09:35, 30 August 2021 diff hist -729 Template:Announcements deleted aidan's announcements
- 14:47, 27 August 2021 diff hist +299 Microscopes added Filmetrics F40-UV Tag: Visual edit
- 14:43, 27 August 2021 diff hist +139 Microscopes →Procedures & Tools: General-Use vs. Training-Required sections Tag: Visual edit
- 10:25, 26 August 2021 diff hist +1 m Services →Other U.C. Campuses: indent Attachment A
- 10:25, 26 August 2021 diff hist 0 m Services →Other U.C. Campuses: indent Attachment A
- 10:24, 26 August 2021 diff hist -8 m Services →Other U.C> Campuses: removed redlink to questionnaire, →Fabrication Services by NanoFab Staff: minor wording/formatting Tag: Visual edit
- 08:34, 26 August 2021 diff hist +135 Process Group - Remote Fabrication Jobs direct link to Fab Svc wall Tag: Visual edit
- 08:21, 26 August 2021 diff hist +143 Services →Fabrication Services by NanoFab Staff: formatting updates Tag: Visual edit: Switched
- 14:47, 24 August 2021 diff hist +30 PECVD 2 (Advanced Vacuum) moved recipes to bottom (like other pages) Tag: Visual edit
- 14:46, 24 August 2021 diff hist +8 PECVD 1 (PlasmaTherm 790) →Recipes & Process Data: renamed to Recipes and Historical Tag: Visual edit
- 14:45, 24 August 2021 diff hist +40 PECVD 2 (Advanced Vacuum) →Recipes: renamed to Recipes & Historical Tag: Visual edit
- 15:05, 23 August 2021 diff hist +81 Template:Announcements slashes on users
- 15:03, 23 August 2021 diff hist +6 m Template:Announcements changed CDA to Aidan
- 15:03, 23 August 2021 diff hist +365 Template:Announcements CDA repair closures
- 09:20, 7 August 2021 diff hist +157 Contact Aligner (SUSS MA-6) link to recipes Tag: Visual edit
- 14:18, 4 August 2021 diff hist +362 Autostep 200 Mask Making Guidance →Photomask Ordering Info: updated Photomask pordering info, added GDS template file Tag: Visual edit
- 14:15, 4 August 2021 diff hist +194 N File:GCA Stepper MaskPlate Master-DarkField 5x.gds GCA Stepper (Autostep 200 or 6300) Photomask template. Darkfield, at Reticle-scale (5x magnification already applied). Insert your design as Instances with 5x up-scaling applied. current
- 12:16, 3 August 2021 diff hist +263 MLA150 - Troubleshooting →Known Bugs & Workarounds: Stage bot centered - note about Small / OV camera Tag: Visual edit
- 09:50, 3 August 2021 diff hist +38 Test Data of etching SiO2 with CHF3/CF4 Comment on 7/22 check. Tag: Visual edit
- 12:05, 2 August 2021 diff hist +77 Template:Announcements SEM2 update from Aidan
- 12:04, 2 August 2021 diff hist -1 m Template:Announcements corrected timestamp
- 12:03, 2 August 2021 diff hist +39 Template:Announcements corrected timestamp
- 10:31, 30 July 2021 diff hist +113 Template:Announcements Sem 2 down
- 10:58, 27 July 2021 diff hist -10 m Stepper Recipes →DUV-42P-6: updated spin speed / noted mistake Tag: Visual edit
- 10:19, 27 July 2021 diff hist +991 Process Group - Remote Fabrication Jobs Links ot OnDema pages for each employee Tag: Visual edit
- 10:15, 27 July 2021 diff hist -13 Nanofab Staff Internal Pages →Process Group: minor rename Tag: Visual edit
- 11:58, 20 July 2021 diff hist +169 MLA150 - Troubleshooting →Defocus: unable to enter ±25 full range: Added name of recent Resist tempalte "General-Focus" Tag: Visual edit
- 10:50, 15 July 2021 diff hist +583 MLA150 - Design Guidelines →Alignment Marks: comment on mark placement across wafer Tag: Visual edit
- 10:42, 15 July 2021 diff hist +145 MLA150 - Design Guidelines →Automatic Alignment: added Reduced Detection area Tag: Visual edit
- 10:03, 15 July 2021 diff hist +663 MLA150 - Design Guidelines added alignment marks Tag: Visual edit
- 10:53, 14 July 2021 diff hist +65 ICP Etching Recipes →PlasmaTherm/SLR Fluorine Etcher: section header for Cleaning Recipes / TBA Tag: Visual edit
- 10:01, 14 July 2021 diff hist -47 Wet Etching Recipes →The Master Table of Wet Etching (Include All Materials): deleted 2nd "Extra Notes" column, combined date into "Verified by" Tag: Visual edit
- 08:19, 14 July 2021 diff hist +69 Wet Etching Recipes →The Master Table of Wet Etching (Include All Materials): KOH > linked to KOH bath Tag: Visual edit
- 10:46, 13 July 2021 diff hist +41 N File:200um square v1.gds TESTING only - please delte current
- 13:47, 12 July 2021 diff hist +48 m Stepper Recipes →DUV-42P-6: updated etching links Tag: Visual edit
- 13:43, 12 July 2021 diff hist +16 m ICP Etching Recipes →Photoresist and ARC Etching (Panasonic 1): fixed URL link Tag: Visual edit
- 14:19, 9 July 2021 diff hist +928 Atomic Layer Deposition Recipes →Atomic Layer Deposition (Oxford FlexAL): Recipe info on Plasma, Ratios Tag: Visual edit
- 11:49, 9 July 2021 diff hist -2 Services →Other U.C. Campuses: corrected broken email link
- 16:50, 8 July 2021 diff hist +40 Autostep 200 Mask Making Guidance added magnification Tag: Visual edit
- 16:48, 8 July 2021 diff hist +5 Autostep 200 Mask Making Guidance corercted dimensions to 5x5x0.090 Tag: Visual edit
- 16:44, 8 July 2021 diff hist +163 Autostep 200 Mask Making Guidance added Plate materials/dimensions Tag: Visual edit
- 11:20, 7 July 2021 diff hist +88 Nanofab Staff Internal Pages →Process Group: added link to Supplies Costs Tag: Visual edit
- 12:55, 2 July 2021 diff hist +91 Process Group - Billing Instructions →Supplies Costs: sotrage location in notes Tag: Visual edit
- 12:53, 2 July 2021 diff hist -2 m Process Group - Billing Instructions →Supplies Charges: --> Supplies Costs Tag: Visual edit
- 12:53, 2 July 2021 diff hist +51 Process Group - Billing Instructions force TOC
- 12:45, 2 July 2021 diff hist +16 Process Group - Billing Instructions →Supplies Charges: updated prices wafers Tag: Visual edit
- 12:44, 2 July 2021 diff hist +238 Process Group - Billing Instructions added wafer costs Tag: Visual edit
- 11:51, 2 July 2021 diff hist +24 m Process Group - Billing Instructions table title row Tag: Visual edit: Switched
- 11:48, 2 July 2021 diff hist +1,068 Process Group - Billing Instructions added shipping supplies table Tag: Visual edit: Switched
- 11:39, 2 July 2021 diff hist +1,637 N Process Group - Billing Instructions added overhead charges, F&A rate etc. Tag: Visual edit
- 11:36, 2 July 2021 diff hist +27 N File:RechargeApp - 02 - F+A auto v2.png current
- 11:27, 2 July 2021 diff hist +25 N File:RechargeApp - 01 - line items for other charges.png current
- 11:21, 2 July 2021 diff hist +17 m Nanofab Staff Internal Pages Tag: Visual edit
- 11:21, 2 July 2021 diff hist +106 Nanofab Staff Internal Pages →Process Group: link to Billing Instructions Tag: Visual edit
- 23:32, 29 June 2021 diff hist +17 m Chemical List BT --> Lab Director Tag: Visual edit
- 23:31, 29 June 2021 diff hist +466 m Wet Etching Recipes KOH: added mention of "low-stress" SiN Tag: Visual edit
- 23:19, 29 June 2021 diff hist +218 Wet Etching Recipes link to Chemicals List Tag: Visual edit
- 23:09, 29 June 2021 diff hist +33 m Mechanical Polisher (Allied) recipes TBD Tag: Visual edit
- 23:04, 29 June 2021 diff hist -51 Flip-Chip Bonder (Finetech) remove incorrect phone/email tags from Tool template
- 20:35, 23 June 2021 diff hist -801 Process Group - Remote Fabrication Jobs deleted Trello, updated OnDema Tag: Visual edit
- 10:22, 23 June 2021 diff hist +904 Plasma Clean (YES EcoClean) added etch method & applications Tag: Visual edit
- 10:16, 23 June 2021 diff hist +742 Ashers (Technics PEII) →About: applicaitons section Tag: Visual edit
- 09:47, 21 June 2021 diff hist +12 Stepper Recipes →DUV-42P: corrected to 2500rpm for 60nm thick, DUV42P-6 formulation Tag: Visual edit
- 11:30, 17 June 2021 diff hist 0 m Vacuum Deposition Recipes changed IBD SiON A --> R Tag: Visual edit
- 13:46, 14 June 2021 diff hist -293 Template:Announcements ISO spray updat,e deleted ASML maint.
- 10:02, 14 June 2021 diff hist -1 m RIE Etching Recipes →Photoresist and ARC (RIE 5) current Tag: Visual edit
- 10:02, 14 June 2021 diff hist +121 Dry Etching Recipes corrected links to PR & ARC etching Tag: Visual edit
- 10:01, 14 June 2021 diff hist +256 RIE Etching Recipes →Photoresist and ARC: added tool name to header title Tag: Visual edit
- 09:59, 14 June 2021 diff hist +28 ICP Etching Recipes →ICP Etch 1 (Panasonic E626I): corrected header titles to include "(Pan 1/2" Tag: Visual edit
- 10:41, 7 June 2021 diff hist +47 m MLA150 - Troubleshooting →Workaround Tag: Visual edit
- 10:40, 7 June 2021 diff hist +58 m MLA150 - Troubleshooting →Workaround: link to reboot prcedure
- 10:38, 7 June 2021 diff hist +1,997 MLA150 - Troubleshooting Out of Focus exposures - problem + solutions Tag: Visual edit
- 12:12, 3 June 2021 diff hist +175 Vacuum Oven (YES) added info from Brian Lingg current Tag: Visual edit
- 12:09, 3 June 2021 diff hist +114 Ovens - Overview of All Lab Ovens added YES info Tag: Visual edit
- 13:32, 2 June 2021 diff hist +25 m Stepper 3 (ASML DUV) added Model field in Tool templ.
- 13:24, 2 June 2021 diff hist +35 m Vacuum Deposition Recipes BG color of "SiN- Low stress"
- 14:13, 28 May 2021 diff hist +96 Atomic Layer Deposition Recipes →Oxford FlexAL Chamber #3: Dielectrics: started historical data seciton Tag: Visual edit
- 08:34, 27 May 2021 diff hist -2 m Editing Tutorials Tag: Visual edit
- 08:34, 27 May 2021 diff hist +831 Editing Tutorials Updating a file version Tag: Visual edit
- 08:32, 27 May 2021 diff hist 0 File:UCSB-Facilities-Use-Agreement.pdf John d uploaded a new version of File:UCSB-Facilities-Use-Agreement.pdf
- 08:32, 27 May 2021 diff hist 0 File:UCSB Service Agreement.pdf John d uploaded a new version of File:UCSB Service Agreement.pdf
- 08:25, 27 May 2021 diff hist +106 m Frequently Asked Questions →How do I get a login to the wiki?: link to Wiki admin contact page Tag: Visual edit
- 08:07, 27 May 2021 diff hist +19 Template:News →SiO2 etching, High-Aspect Ratio
- 08:05, 27 May 2021 diff hist +51 m Template:News added date to SiO2 etch article
- 08:01, 27 May 2021 diff hist +253 ICP Etching Recipes →SiO2 Etching (Fluorine ICP Etcher): link to publication Tag: Visual edit
- 07:58, 27 May 2021 diff hist +36 ICP Etching Recipes →Ru (Ruthenium) Etch (Panasonic 2): link to pub Tag: Visual edit
- 07:56, 27 May 2021 diff hist +905 Template:News Added info about Bill's SiO2 etching paper
- 07:41, 27 May 2021 diff hist +536 Template:Publications link to Bill's Ru-masked SiO2 paper
- 12:35, 26 May 2021 diff hist +149 Direct-Write Lithography Recipes →Maskless Aligner (Heidelberg MLA150): mention that any I-Line PR will work. Tag: Visual edit
- 13:26, 21 May 2021 diff hist +42 m Template:Announcements
- 13:25, 21 May 2021 diff hist +27 m Template:Announcements
- 13:24, 21 May 2021 diff hist -31 m Template:Announcements linked to new policies directly
- 13:22, 21 May 2021 diff hist +24 m COVID-19 User Policies summary at top of annoucnements Tag: Visual edit
- 15:57, 17 May 2021 diff hist 0 File:Nanofabrication Facility Project Description.xlsx John d uploaded a new version of File:Nanofabrication Facility Project Description.xlsx
- 13:06, 17 May 2021 diff hist +155 Stepper Recipes →DUV-42P: link to FL-ICP and Technics for BARC etches Tag: Visual edit
- 13:04, 17 May 2021 diff hist +526 ICP Etching Recipes →PlasmaTherm/SLR Fluorine Etcher: added BARC and PR etches Tag: Visual edit
- 12:55, 17 May 2021 diff hist +8 m Stepper Recipes →DUV-42P-6: comments on corrected spin speed Tag: Visual edit
- 12:53, 17 May 2021 diff hist +4 Stepper Recipes →DUV-42P: aDDED "-6" to the DUV42P part number Tag: Visual edit
- 12:52, 17 May 2021 diff hist +3 Lithography Recipes →Chemicals Stocked + Datasheets: corrected part number for DUV42P (added "-6") Tag: Visual edit
- 06:17, 17 May 2021 diff hist +8 Nanofab Staff Internal Pages →Process Group: moved lab Stocking to "Old" section Tag: Visual edit
- 06:15, 17 May 2021 diff hist +218 Process Group - Remote Fabrication Jobs link to OnDema.io NanoFab Workspace Tag: Visual edit
- 12:09, 11 May 2021 diff hist +4 Template:News →Wafer Polisher available: link to Lingg's page
- 12:08, 11 May 2021 diff hist +57 m Template:News →Wafer Polisher added to tool list: link to polisher wiki page
- 11:38, 11 May 2021 diff hist +34 Tool List →Wet Processing: link to Mechanical_Polisher_(Allied) Tag: Visual edit
- 11:36, 11 May 2021 diff hist +96 N File:AlliedPolisher10-1110.jpg Photo of Allied Polisher model 10-1110 ; Initial photo - cropped and color boosted current
- 11:33, 11 May 2021 diff hist +620 N Mechanical Polisher (Allied) initial Page
- 16:49, 10 May 2021 diff hist +203 Template:News Added allied polisher
- 06:56, 6 May 2021 diff hist +62 Process Group - Remote Fabrication Jobs link to Trello: UCSB Nanofab Tag: Visual edit
- 06:51, 6 May 2021 diff hist +30 m Process Group - Remote Fabrication Jobs Tag: Visual edit
- 06:50, 6 May 2021 diff hist +10 Process Group - Remote Fabrication Jobs Tag: Visual edit
- 06:50, 6 May 2021 diff hist -43 Process Group - Remote Fabrication Jobs Tag: Visual edit
- 21:34, 5 May 2021 diff hist +920 N Process Group - Remote Fabrication Jobs Trello -filter your own jobs Tag: Visual edit
- 21:33, 5 May 2021 diff hist +46 N File:Board - Search Cards - Select User.png current
- 21:30, 5 May 2021 diff hist +46 N File:Trello - Board - Search Cards.png current
- 21:27, 5 May 2021 diff hist +40 N File:Trello - Board - Show Menu.png current
- 21:22, 5 May 2021 diff hist +136 Nanofab Staff Internal Pages →Process Group: link to Remote Job Tracking Tag: Visual edit
- 09:59, 4 May 2021 diff hist +96 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) →Recipes: mention historical data Tag: Visual edit
- 09:56, 4 May 2021 diff hist +118 ICP Etch 1 (Panasonic E646V) →Recipes: mention historical data Tag: Visual edit
- 09:55, 4 May 2021 diff hist +96 ICP Etch 2 (Panasonic E626I) →Recipes: mentioned historical data Tag: Visual edit
- 06:51, 30 April 2021 diff hist -250 Template:Announcements deleted MLA
- 23:13, 28 April 2021 diff hist -1 m Main Page minor updates
- 23:10, 28 April 2021 diff hist -600 Template:FeaturedArticle current
- 23:06, 28 April 2021 diff hist +23 Editing Tutorials →Editing an Existing Page: link to how to get a login Tag: Visual edit
- 22:56, 28 April 2021 diff hist +443 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →Common Warnings: updated warnings Tag: Visual edit
- 22:44, 28 April 2021 diff hist -22 Template:Announcements deleted ASML 4/26, added HIMT 4/29
- 12:54, 21 April 2021 diff hist +30 Laser Etch Monitor Simulation in Python author credits. current Tag: Visual edit
- 08:11, 20 April 2021 diff hist -765 Template:Announcements deleted Flu Season notice, shortened Weekly Testing article
- 08:07, 20 April 2021 diff hist +272 Template:Announcements asml service Apr 26th 2021
- 07:32, 20 April 2021 diff hist +390 Template:Announcements ASML May service
- 19:55, 16 April 2021 diff hist +175 Frequently Asked Questions →Authorship on Publications: note on process discusssions Tag: Visual edit
- 18:32, 16 April 2021 diff hist +364 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F): Reduced Heading Levels below "Page Title" Tag: Visual edit
- 15:53, 16 April 2021 diff hist -190 Template:Announcements deleted "lab shutdown"
- 09:36, 16 April 2021 diff hist +84 ICP Etching Recipes →SiO2 Etching (Fluorine ICP Etcher): added ER and Sel for 50W & 200W bias Tag: Visual edit
- 11:14, 12 April 2021 diff hist 0 File:ASML Reticle Programming Params - MASKJAN2020 v1.xlsx John d uploaded a new version of File:ASML Reticle Programming Params - MyReticleBarCode v1.xlsx
- 16:13, 9 April 2021 diff hist +1 m Template:News →Digital Microscope: Olympus DSX-1000: correct model in text
- 11:35, 9 April 2021 diff hist +820 Microscopes Added Scope7: Olympus DSX1000 Tag: Visual edit
- 11:29, 9 April 2021 diff hist -2,040 Digital Microscope (Olympus DSX1000) initial updates
- 11:29, 9 April 2021 diff hist +2,040 Laser Scanning Confocal M-scope (Olympus LEXT) revert back to TonyB's April 2020 revision.
- 11:25, 9 April 2021 diff hist -2,040 Laser Scanning Confocal M-scope (Olympus LEXT) initial page
- 11:20, 9 April 2021 diff hist +2,720 N Digital Microscope (Olympus DSX1000) pasted LEXT page source
- 11:19, 9 April 2021 diff hist +82 Tool List →Inspection, Test and Characterization: Link to Olympus DSX1000 page Tag: Visual edit
- 11:14, 9 April 2021 diff hist +1 m Template:News →Digital Microscope: Olympus DX-1000: Corrected model number to DSX
- 13:49, 8 April 2021 diff hist +337 Template:News Olympus DX-1000 announcemnet
- 20:50, 6 April 2021 diff hist +109 m Lithography Recipes →Photolithography Recipes: corrected row colors, link to XHRiC
- 20:47, 6 April 2021 diff hist +37 Lithography Recipes →Photolithography Recipes: added XHRiC BARC to table, and "A" for many PR's previouly blank on MLA150 Tag: Visual edit
- 20:44, 6 April 2021 diff hist +38 m Lithography Recipes TOC formatting Tag: Visual edit
- 20:39, 6 April 2021 diff hist +780 Lithography Recipes linked to each page of litho recipes Tag: Visual edit: Switched
- 09:19, 31 March 2021 diff hist +1,520 N KLayout Design Tips copied from parent page, and added non-orthogonal arrays issue Tag: Visual edit
- 09:15, 31 March 2021 diff hist +53 N File:KLayout - Non-Orthogonal Arrays.png current
- 09:13, 31 March 2021 diff hist +148 Calculators + Utilities →KLayout: link to KLayout Design Tips page Tag: Visual edit
- 15:58, 25 March 2021 diff hist +2 Template:Announcements moved GCA items into main RSS section
- 08:19, 20 March 2021 diff hist -361 Template:Announcements Delete MLA & ASML
- 15:00, 19 March 2021 diff hist +204 MLA150 - Troubleshooting →Nanofiles folder not showing up on SFTP: link to FAQ on Nanofiles FTP Tag: Visual edit
- 14:59, 19 March 2021 diff hist +596 MLA150 - Troubleshooting →Known Bugs & Workarounds: added "Nanofiles folder not showing up" Tag: Visual edit
- 14:55, 19 March 2021 diff hist +331 MLA150 - Troubleshooting →Defocus: unable to enter ±25 full range: updated Tag: Visual edit
- 08:45, 16 March 2021 diff hist +3 m Frequently Asked Questions Tag: Visual edit
- 08:44, 16 March 2021 diff hist +14 m Frequently Asked Questions Tag: Visual edit
- 08:43, 16 March 2021 diff hist +127 Frequently Asked Questions added NanoFab@ece.ucsb.edu note at the top.
- 07:17, 16 March 2021 diff hist +186 Template:Announcements MLA maint.
- 09:56, 15 March 2021 diff hist +11 Focused Ion-Beam Lithography (Raith Velion) added toolid, removed WIP, Pt dep/writing current
- 09:42, 15 March 2021 diff hist +14 Template:Announcements asml calibrated/ready for use
- 07:23, 15 March 2021 diff hist 0 m Template:Announcements
- 06:29, 15 March 2021 diff hist +32 Template:Announcements ASML temp stable/cals
- 16:12, 11 March 2021 diff hist -443 Template:Announcements deleted compressor note, ASML Open for use
- 14:19, 10 March 2021 diff hist +235 Tube Furnace (Tystar 8300) →Process Information: added Gases Available Tag: Visual edit
- 10:13, 9 March 2021 diff hist +31 m Services →Request Remote Fabrication Services: minor emphasis Tag: Visual edit
- 10:11, 9 March 2021 diff hist +25 Services point to 'fab svc on this page instgead of Wix Tag: Visual edit
- 11:41, 5 March 2021 diff hist -4 m Calculators + Utilities →KLayout: large files comments Tag: Visual edit
- 12:54, 3 March 2021 diff hist +412 Services Remote Fab Svc: added UCSB & Inter-UC paperwork Tag: Visual edit
- 19:56, 1 March 2021 diff hist -13 Template:Announcements CR open, compressors
- 12:55, 1 March 2021 diff hist +74 Stepper Recipes →DUV-42P: added 2500rpm note Tag: Visual edit
- 06:23, 1 March 2021 diff hist -143 m Template:Announcements updated post time
- 06:21, 1 March 2021 diff hist +394 Template:Announcements cleanroom closed, compressor down
- 15:50, 26 February 2021 diff hist +386 Laser Etch Monitoring →Procedures: Linked to video training Tag: Visual edit
- 07:46, 26 February 2021 diff hist +31 Atomic Layer Deposition Recipes →Al2O3 deposition (ALD CHAMBER 3): rate on AlOx / O* ~2x faster Tag: Visual edit
- 18:54, 24 February 2021 diff hist +31 Lift-Off with DUV Imaging + PMGI Underlayer →Tips: changed to 2x underlayer thickness Tag: Visual edit
- 10:13, 23 February 2021 diff hist +13 Category:NOID current
- 10:12, 23 February 2021 diff hist +790 N ASML Stepper 3 - Substrates smaller than 100mm/4-inch initial topic placeholders current Tag: Visual edit
- 07:46, 23 February 2021 diff hist +109 Stepper 3 (ASML DUV) →Operating Procedures: link to "ASML Stepper 3 - Substrates smaller than 100mm/4-inch" Tag: Visual edit
- 23:57, 22 February 2021 diff hist +24 m Maskless Aligner (Heidelberg MLA150) Tag: Visual edit: Switched
- 23:56, 22 February 2021 diff hist -28 Maskless Aligner (Heidelberg MLA150) →Video Trainings: New Video Training (v2) Tag: Visual edit: Switched
- 14:02, 18 February 2021 diff hist +34 Maskless Aligner (Heidelberg MLA150) →Detailed Specifications: updated ALignment specs from FAT Tag: Visual edit
- 11:40, 17 February 2021 diff hist -3 E-Beam 1 (Sharon) changed "material tables" to "recipes" to be consistent with rest of site. Tag: Visual edit
- 09:23, 17 February 2021 diff hist +178 Atomic Layer Deposition Recipes →Atomic Layer Deposition (Oxford FlexAL): note on plasma being faster Tag: Visual edit
- 08:55, 17 February 2021 diff hist +335 Template:Announcements ASML PM March 8th
- 10:03, 16 February 2021 diff hist +39 PECVD 2 (Advanced Vacuum) →Recipes: mention historical data Tag: Visual edit
- 04:50, 9 February 2021 diff hist +2 m MLA150 - Troubleshooting →Defocus: unable to enter ±25 full range: typo Tag: Visual edit
- 10:22, 8 February 2021 diff hist +38 Maskless Aligner (Heidelberg MLA150) →Detailed Specifications: added max write area Tag: Visual edit
- 12:27, 5 February 2021 diff hist +53 m MLA150 - Large Image GDS Generation Tag: Visual edit
- 12:05, 5 February 2021 diff hist +422 MLA150 - Troubleshooting added "Stage not centered" Tag: Visual edit
- 23:14, 2 February 2021 diff hist +248 ICP Etching Recipes →PlasmaTherm/SLR Fluorine Etcher: SiVertHF: note on removing Native SiO2 Tag: Visual edit
- 23:08, 2 February 2021 diff hist +73 ICP Etching Recipes added (Fluorine ICP Etcher) to titles Tag: Visual edit
- 17:18, 2 February 2021 diff hist 0 Stepper 3 (ASML DUV) corrected PanOpto video traing link Tag: Visual edit
- 18:11, 1 February 2021 diff hist +64 m Thermal Processing Recipes →Tystar 8300 Tag: Visual edit
- 18:08, 1 February 2021 diff hist +235 Tube Furnace (Tystar 8300) →Recipes: link to recipes page Tag: Visual edit
- 10:28, 1 February 2021 diff hist +255 Services →Request Remote Fabrication Services: separate "paperwork" section for Fab Svc Tag: Visual edit
- 10:22, 1 February 2021 diff hist +1,811 Services →Fabrication Services by NanoFab Staff: pasted Services text - same as the nanotech page. minor updates. Tag: Visual edit
- 10:13, 1 February 2021 diff hist 0 File:UCSB Service Agreement.pdf John d uploaded a new version of File:UCSB Service Agreement.pdf
- 10:09, 1 February 2021 diff hist +79 N Category:COVID description current Tag: Visual edit
- 11:08, 30 January 2021 diff hist +64 Process Group - Lab Stocking/Supplies Tasks Update: not needed. current Tag: Visual edit
- 11:07, 30 January 2021 diff hist +323 ASML Stepper 3 Dicing Guide Programming Update: state doesn’t work and workaround. current Tag: Visual edit
- 06:24, 27 January 2021 diff hist +964 ICP Etching Recipes →High Rate Bosch Etch (DSEIII): Bsoch PR selectivity, tips to reduce black silicon, edge bead removal process link Tag: Visual edit
- 06:21, 27 January 2021 diff hist +28 ASML DUV: Edge Bead Removal via Photolithography credits and date Tag: Visual edit
- 06:18, 27 January 2021 diff hist +138 ASML DUV: Edge Bead Removal via Photolithography note on I-line process Tag: Visual edit
- 14:59, 23 January 2021 diff hist +443 MLA150 - Troubleshooting →Known Bugs & Workarounds: added Exposure Log. Tag: Visual edit
- 13:46, 21 January 2021 diff hist +945 MLA150 - Troubleshooting added Focal Depth motor (contact staff) and Covert not launching Tag: Visual edit
- 13:32, 21 January 2021 diff hist +9 MLA150 - Troubleshooting moved TOC below summary
- 13:31, 21 January 2021 diff hist +1,787 N MLA150 - Troubleshooting added Defocus bug and Compuer Restart. Tag: Visual edit
- 11:32, 21 January 2021 diff hist +161 Maskless Aligner (Heidelberg MLA150) →Documentation: link to MLA150 - Troubleshoting Tag: Visual edit
- 00:40, 21 January 2021 diff hist +427 Oxygen Plasma System Recipes →Plasma Clean (YES EcoClean): guidelines added Tag: Visual edit
- 00:37, 21 January 2021 diff hist +5 m Oxygen Plasma System Recipes →O2 Ashing Tag: Visual edit
- 00:37, 21 January 2021 diff hist +538 Oxygen Plasma System Recipes →Ashers (Technics PEII): added O2 ashing recipes Tag: Visual edit
- 10:06, 20 January 2021 diff hist +186 Sputter 5 (AJA ATC 2200-V) link to recipes Tag: Visual edit
- 08:17, 20 January 2021 diff hist +85 Lift-Off with DUV Imaging + PMGI Underlayer →Suggested Process for Liftoff: ultrasonic note Tag: Visual edit
- 08:13, 20 January 2021 diff hist -1 m Calculators + Utilities →KLayout: reduced recommended number of polygon points Tag: Visual edit
- 08:10, 20 January 2021 diff hist +967 Calculators + Utilities →KLayout: handling large files Tag: Visual edit
- 07:50, 20 January 2021 diff hist 0 File:ASML Reticle Programming Params - MASKJAN2020 v1.xlsx John d uploaded a new version of File:ASML Reticle Programming Params - MyReticleBarCode v1.xlsx
- 07:42, 20 January 2021 diff hist +115 Nanofab Staff Internal Pages link to ASML dicing guide prog. Tag: Visual edit
- 06:33, 15 January 2021 diff hist -665 Template:Announcements deleted "new tool installs"
- 23:15, 12 January 2021 diff hist -2,647 GoPro Hero8 Black (Internal) link to Uploading instructions current Tag: Visual edit
- 23:14, 12 January 2021 diff hist +1,153 N Video Training: Uploading to GauchoCast/Panopto (Internal) pasted info from GoPro page Tag: Visual edit
- 18:31, 12 January 2021 diff hist +9 m ICP Etch 2 (Panasonic E626I) →Documentation: minor formatting Tag: Visual edit
- 18:24, 12 January 2021 diff hist +264 GoPro Hero8 Black (Internal) added photo of GoPro + Headstrap Tag: Visual edit
- 18:21, 12 January 2021 diff hist +62 N File:Photo - GoPro Black 8 and Headstrap.png current
- 10:49, 12 January 2021 diff hist 0 m Vacuum Deposition Recipes SPutt4: Ru: A-->R Tag: Visual edit
- 10:48, 12 January 2021 diff hist +50 Vacuum Deposition Recipes added link to APutter 4 : Ru ("A") Tag: Visual edit
- 10:47, 12 January 2021 diff hist +351 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V): added Ru ; link to SiO2 Etching with Ruthenium Hardmask doc. Tag: Visual edit
- 10:40, 12 January 2021 diff hist +67 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V): added Ru Tag: Visual edit
- 17:32, 11 January 2021 diff hist -46 m ICP Etching Recipes →SiO2 Etching: wrote bias variations Tag: Visual edit
- 17:48, 10 January 2021 diff hist +29 Template:Announcements →New Tool Installations: minor updates to tool status
- 17:46, 10 January 2021 diff hist -192 Template:Announcements deleted MLA maint.
- 18:08, 9 January 2021 diff hist +26 m Lithography Recipes →Holography Recipes: included XHRiC Tag: Visual edit
- 18:03, 9 January 2021 diff hist +5 m Lithography Recipes →Holography Recipes Tag: Visual edit
- 18:02, 9 January 2021 diff hist +80 m Lithography Recipes →Holography Recipes: mentione THMR usage Tag: Visual edit
- 12:27, 8 January 2021 diff hist 0 m Template:Announcements fixed indent
- 22:45, 7 January 2021 diff hist +58 MLA150 - Large Image GDS Generation pasted method Tag: Visual edit
- 22:43, 7 January 2021 diff hist +2,510 N MLA150 - Large Image GDS Generation pasted method Tag: Visual edit
- 22:12, 7 January 2021 diff hist +154 Maskless Aligner (Heidelberg MLA150) →Documentation: link to Large Image Patterning Tag: Visual edit
- 09:11, 6 January 2021 diff hist -105 Template:Announcements deleted annual shutdown, added MLA maint.
- 08:34, 5 January 2021 diff hist +120 m Calculators + Utilities →KLayout Tag: Visual edit
- 08:31, 5 January 2021 diff hist +225 Calculators + Utilities →KLayout: added Circles > PCell method Tag: Visual edit
- 09:21, 4 January 2021 diff hist +170 Direct-Write Lithography Recipes →Positive Resist (MLA150): note about HIMT design giving higher dose result Tag: Visual edit
- 21:28, 23 December 2020 diff hist +136 Frequently Asked Questions →How do I get my files from the NanoFab computers?: link to SUM email page Tag: Visual edit
- 10:06, 12 December 2020 diff hist +4 m Direct-Write Lithography Recipes →Negative Resist (MLA150) Tag: Visual edit
- 09:25, 11 December 2020 diff hist +302 Calculators + Utilities →KLayout: added how to show Origin Tag: Visual edit
- 13:16, 10 December 2020 diff hist +40 PECVD1 Wafer Coating Process corrected titles current Tag: Visual edit
- 13:08, 10 December 2020 diff hist +100 Video Training: Hosting with Zoom and GacuhoCast/Panopto how to locate video to playback current Tag: Visual edit
- 09:06, 9 December 2020 diff hist 0 File:Attachment A - UCSB Master Facilities Use Agreement Labs.pdf John d uploaded a new version of File:Attachment A - UCSB Master Facilities Use Agreement Labs.pdf current
- 17:07, 8 December 2020 diff hist +84 N File:CAD Tutorial for ASML Reticle v1 - screenshot Reticle Layout cell.png current
- 08:01, 8 December 2020 diff hist +22 m File:Facility-Use-MOU---Intercampus-UC-User.pdf cat. Services
- 08:01, 8 December 2020 diff hist +22 m File:UCSB Service Agreement.pdf cat. Services
- 08:01, 8 December 2020 diff hist +19 m File:User Protocols Coronavirus 2020-09-14-1.pdf cat. COVID
- 08:00, 8 December 2020 diff hist +19 m File:COVID Entering the CR and Gowning Protocols-USE THIS ONE v2.pdf cat. COVID current
- 08:00, 8 December 2020 diff hist +19 File:COVID19 ESB Building User Self Admittance Protocol v2.pdf cat COVID current
- 07:54, 8 December 2020 diff hist +23 File:Attachment A - UCSB Master Facilities Use Agreement Labs.pdf added category: services
- 07:54, 8 December 2020 diff hist +80 N Category:Services description added current
- 07:53, 8 December 2020 diff hist +22 Services added Category:Services
- 07:49, 8 December 2020 diff hist 0 File:Attachment A - UCSB Master Facilities Use Agreement Labs.pdf John d uploaded a new version of File:Attachment A - UCSB Master Facilities Use Agreement Labs.pdf
- 09:10, 7 December 2020 diff hist +2,681 N Process Group - Lab Stocking/Supplies Tasks pasted task list 2020-12-07 Tag: Visual edit
- 09:09, 7 December 2020 diff hist +147 Nanofab Staff Internal Pages added procgrp / las stocking/supplies link Tag: Visual edit
- 20:54, 3 December 2020 diff hist +114 m Nanofab Staff Internal Pages →Video Training procedures Tag: Visual edit
- 20:51, 3 December 2020 diff hist -2 Nanofab Staff Internal Pages →Video Training procedures Tag: Visual edit
- 20:43, 3 December 2020 diff hist +136 m Video Training: Hosting with Zoom and GacuhoCast/Panopto Tag: Visual edit
- 17:24, 3 December 2020 diff hist -15 m Nanofab Staff Internal Pages Tag: Visual edit
- 17:08, 3 December 2020 diff hist +2,099 N Video Training: Hosting with Zoom and GacuhoCast/Panopto pasted instructions from other wiki page Tag: Visual edit
- 17:00, 3 December 2020 diff hist +466 m GoPro Hero8 Black (Internal) →Uploading to the Web: minor updates Tag: Visual edit
- 16:39, 3 December 2020 diff hist +25 Direct-Write Lithography Recipes →Positive Resist (MLA150): added line-space for SPR 220-3 Tag: Visual edit
- 07:53, 30 November 2020 diff hist +44 Template:News →Raith Velion: FIB/SEM Installation: update date
- 07:51, 30 November 2020 diff hist -1 Template:Announcements changed thanksgiving --> XMas/NY's holiday clposue
- 06:29, 30 November 2020 diff hist +868 MLA150 - Design Guidelines →DXF: & →Greyscale: sections Tag: Visual edit
- 13:15, 28 November 2020 diff hist +9 Stocked Chemical List added Bromine water: = Br2 current Tag: Visual edit
- 07:24, 23 November 2020 diff hist +1,136 COVID-19 User Policies added weekly testing info Tag: Visual edit
- 07:21, 23 November 2020 diff hist 0 Template:Announcements move weekly testing below TGiving closure
- 07:20, 23 November 2020 diff hist +57 Template:Announcements signature on Weekly Testing, so it shows up in RSS
- 16:16, 20 November 2020 diff hist +30 m Template:Announcements →Weekly Testing strongly urged for UCSB Students/Staff
- 16:14, 20 November 2020 diff hist +1,123 Template:Announcements added free COVID testing rec.
- 10:13, 19 November 2020 diff hist +171 CAIBE (Oxford Ion Mill) →Detailed Specifications: added sample sizes/holders Tag: Visual edit
- 11:45, 16 November 2020 diff hist +703 GoPro Hero8 Black (Internal) →Editing Video: added some details Tag: Visual edit
- 11:32, 16 November 2020 diff hist +316 m GoPro Hero8 Black (Internal) →Outside the lab, before your training Tag: Visual edit
- 08:00, 16 November 2020 diff hist +101 COVID-19 User Policies →Announcements: staff not on weekends Tag: Visual edit
- 22:08, 14 November 2020 diff hist +233 Direct-Write Lithography Recipes →Positive Resist (MLA150): time/temp formatting, link to high-res Tag: Visual edit
- 22:02, 14 November 2020 diff hist +77 m Lithography Recipes →Photolithography Recipes: tidy up, split into separate rows Tag: Visual edit: Switched
- 21:57, 14 November 2020 diff hist +46 N Maskless Aligner Recipes John d moved page Maskless Aligner Recipes to Direct-Write Lithography Recipes: new title and catergory on SignupMonkey "Direct write litho" current Tag: New redirect
- 21:57, 14 November 2020 diff hist 0 m Direct-Write Lithography Recipes John d moved page Maskless Aligner Recipes to Direct-Write Lithography Recipes: new title and catergory on SignupMonkey "Direct write litho"
- 21:56, 14 November 2020 diff hist -123 Lithography Recipes →General Information: remove doubled TOC Tag: Visual edit: Switched
- 18:15, 13 November 2020 diff hist +1,343 N MLA150 - CAD Files and Templates placeholder for CAD file, alignment mark info Tag: Visual edit
- 18:02, 13 November 2020 diff hist +438 Direct-Write Lithography Recipes added notes/comments to each section Tag: Visual edit
- 22:36, 12 November 2020 diff hist +144 COVID-19 User Policies weekend staff updates Tag: Visual edit
- 22:34, 12 November 2020 diff hist +748 COVID-19 User Policies added winter jacket policy Tag: Visual edit
- 15:32, 12 November 2020 diff hist +775 m MLA150 - Design Guidelines Tag: Visual edit
- 15:21, 12 November 2020 diff hist +64 Maskless Aligner (Heidelberg MLA150) →Documentation: added Lee's SOP Tag: Visual edit
- 15:19, 12 November 2020 diff hist +99 N File:MLA150 SOP.pdf MLA150 (Heidelberg HIMT) Maskless Aligner - Operating Procedure - Rev E (Lee & Demis) current
- 12:28, 10 November 2020 diff hist +149 RIE 5 (PlasmaTherm) link to recipes Tag: Visual edit
- 10:23, 9 November 2020 diff hist +2 m Stepper Recipes →Other Lithography Porcess (ASML DUV): typo in heading Tag: Visual edit
- 10:23, 9 November 2020 diff hist +73 Stepper Recipes →Other Lithography Porcess (ASML DUV): linked to lift-off process Tag: Visual edit
- 10:22, 9 November 2020 diff hist +1,040 N ASML DUV: Edge Bead Removal via Photolithography pasted traveler Tag: Visual edit
- 10:16, 9 November 2020 diff hist +158 Stepper Recipes →Stepper 3 (ASML DUV): link to edge bead removal Tag: Visual edit
- 10:04, 9 November 2020 diff hist +249 Maskless Aligner (Heidelberg MLA150) →Detailed Specifications: Added mfg. options and details Tag: Visual edit
- 09:30, 6 November 2020 diff hist +5 m Stepper Recipes →Anti-Reflective Coatings: added BARC Tag: Visual edit
- 10:52, 5 November 2020 diff hist +20 E-Beam Lithography System (JEOL JBX-6300FS) added wafer load size Tag: Visual edit
- 10:26, 5 November 2020 diff hist +38 Tool List →Lithography: added "direct write" section Tag: Visual edit
- 10:16, 5 November 2020 diff hist +4 m MLA150 - Design Guidelines Tag: Visual edit
- 10:16, 5 November 2020 diff hist +278 MLA150 - Design Guidelines typoe, DRC for DXF open polygons Tag: Visual edit
- 10:13, 5 November 2020 diff hist +1,817 N MLA150 - Design Guidelines added conversion notes on each file type Tag: Visual edit
- 08:13, 5 November 2020 diff hist +344 ICP Etch 2 (Panasonic E626I) added link to online training video Tag: Visual edit
- 22:29, 4 November 2020 diff hist 0 m Maskless Aligner (Heidelberg MLA150) →Documentation from HIMT
- 18:10, 4 November 2020 diff hist -28 m Maskless Aligner (Heidelberg MLA150) →Documentation from HIMT Tag: Visual edit
- 18:09, 4 November 2020 diff hist +403 Maskless Aligner (Heidelberg MLA150) →Documentation: pic of spatial light modulator Tag: Visual edit
- 18:06, 4 November 2020 diff hist +66 N File:MLA150 Spatial Light Modulator Description.png current
- 17:47, 4 November 2020 diff hist +3 m Maskless Aligner (Heidelberg MLA150) →Video Training Tag: Visual edit
- 17:29, 4 November 2020 diff hist +97 Maskless Aligner (Heidelberg MLA150) →Video Trainings: link to online video Tag: Visual edit
- 09:16, 4 November 2020 diff hist +247 Maskless Aligner (Heidelberg MLA150) added tool id, HIMT URL, updated specs Tag: Visual edit: Switched
- 15:12, 30 October 2020 diff hist -3 Template:Announcements
- 15:12, 30 October 2020 diff hist -1 m Template:Announcements
- 15:11, 30 October 2020 diff hist -1 m Template:Announcements deleted spacing
- 15:10, 30 October 2020 diff hist +1 Template:Announcements moved tool installs to bottom
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- 08:57, 28 October 2020 diff hist +158 m Frequently Asked Questions →Authorship on Publications: minor update Tag: Visual edit
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