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Combined display of all available logs of UCSB Nanofab Wiki. You can narrow down the view by selecting a log type, the username (case-sensitive), or the affected page (also case-sensitive).
(newest | oldest) View (newer 250 | older 250) (20 | 50 | 100 | 250 | 500)- 10:10, 27 May 2020 Biljana talk contribs uploaded File:SOP for Advanced Vacuum PECVD.pdf (5-27-2020 Biljana Stamenic)
- 09:36, 27 May 2020 Biljana talk contribs uploaded File:Advanced Vacuum PECVD.pdf
- 21:27, 4 May 2020 John d talk contribs changed group membership for Nplaviola from administrator to administrator (temporary, until 21:27, 4 May 2021)
- 21:27, 4 May 2020 John d talk contribs changed group membership for Nplaviola from (none) to administrator (to edit CSS style info)
- 21:16, 4 May 2020 User account Nplaviola talk contribs was created
- 12:26, 22 April 2020 John d talk contribs uploaded File:UCSB Service Agreement.pdf (UCSB Service Agreement, for Remote Fabrication Services section of Nanotech website.)
- 10:59, 21 April 2020 Biljana talk contribs uploaded a new version of File:Adv. PECVD2-STD SiO2.xlsx
- 10:08, 21 April 2020 Biljana talk contribs uploaded File:Adv. PECVD2- STD LSNitride2.xlsx
- 10:05, 21 April 2020 Biljana talk contribs uploaded File:Adv. PECVD2- STD Nitride2.xlsx
- 09:54, 21 April 2020 Biljana talk contribs uploaded File:Adv. PECVD2-STD SiO2.xlsx
- 14:36, 15 April 2020 Biljana talk contribs uploaded File:Single centered mask-Piece 1st litho AUTOSTEP 200.pptx
- 14:15, 15 April 2020 Biljana talk contribs uploaded File:Single centerd mask- Piece 1st litho AUTOSTEP 200-PIECES.pptx
- 14:15, 15 April 2020 Biljana talk contribs uploaded File:Single centered mask-Piece 2nd litho AUTOSTEP 200.pptx
- 14:14, 15 April 2020 Biljana talk contribs uploaded File:4 Quads mask plate Piece - 2nd litho AUTOSTEP 200.pptx
- 10:34, 10 April 2020 John d talk contribs deleted page COVID RSS (tested - not useful)
- 10:01, 8 April 2020 Biljana talk contribs uploaded File:AUTOSTEP 200-PIECES 1st litho BL and BR orientation.pptx
- 20:32, 7 April 2020 Biljana talk contribs uploaded File:AUTOSTEP 200-PIECES instruction 6-20-19.pptx
- 15:26, 7 April 2020 Biljana talk contribs uploaded File:Mask plate-Sign convention.png
- 15:22, 7 April 2020 Biljana talk contribs uploaded File:Alignment key offset Sign Convention.png
- 14:32, 7 April 2020 Biljana talk contribs uploaded File:PECVD2 photo for cleaning.png
- 14:24, 7 April 2020 Biljana talk contribs uploaded File:PECVD2 clean.png
- 14:21, 7 April 2020 Biljana talk contribs uploaded File:AdvPECVD2LSNdep2.jpg
- 14:14, 7 April 2020 Biljana talk contribs uploaded File:PECVD1-cleaning.png
- 11:23, 7 April 2020 Biljana talk contribs uploaded File:Glossary.docx
- 09:58, 7 April 2020 Biljana talk contribs deleted page File:Area from.png
- 09:50, 7 April 2020 Biljana talk contribs uploaded File:PECVD1 particulates in 2019.jpg
- 08:21, 7 April 2020 Biljana talk contribs uploaded File:UCSBTEST2 .png
- 08:19, 7 April 2020 Biljana talk contribs uploaded File:UCSBTEST1.png
- 11:24, 6 April 2020 Biljana talk contribs uploaded File:Area from 1.png
- 10:37, 6 April 2020 Biljana talk contribs uploaded File:Area from Equals Max size.png
- 10:30, 6 April 2020 Biljana talk contribs uploaded File:LPD Ranges.png
- 10:29, 6 April 2020 Biljana talk contribs uploaded File:Area from.png
- 17:17, 1 April 2020 Biljana talk contribs uploaded File:Recipe parameters.jpg
- 09:33, 1 April 2020 Biljana talk contribs uploaded File:UCSBTEST2.jpg
- 08:54, 1 April 2020 Biljana talk contribs uploaded File:UCSBTEST1Gain4.jpg (scan for gain4)
- 16:39, 30 March 2020 Biljana talk contribs uploaded File:PECVD.docx
- 12:02, 30 March 2020 Biljana talk contribs uploaded File:Unaxis SOP 3-30-2020.docx
- 10:15, 27 March 2020 Biljana talk contribs uploaded File:Unaxis SOP 3-27-2020.pdf
- 10:00, 27 March 2020 Biljana talk contribs uploaded File:Unaxis SOP 3-12-2020.docx
- 15:09, 26 March 2020 Biljana talk contribs uploaded File:Autostep 200 panel door.png
- 14:53, 26 March 2020 John d talk contribs uploaded File:ASML Reticle Programming Params - DEM-2020-03 v1.xlsx (CAD Tutorial - example programming spreadsheet for ASML Stepper)
- 14:49, 26 March 2020 John d talk contribs deleted page File:CAD Tutorial - ASML Reticle Programming Params - DEMISJAN2020 v1.xlsx (wrong file name)
- 14:48, 26 March 2020 John d talk contribs uploaded File:Example Mask order form (UCSB ASML 5500) - DEM-2020-03.pdf (CAD Tutorial - Example Mask order form (UCSB ASML 5500) - DEM-2020-03)
- 14:47, 26 March 2020 John d talk contribs deleted page File:Example Mask order form (UCSB ASML 5500) - DemisDJohn Template.pdf (wrong name)
- 14:46, 26 March 2020 John d talk contribs uploaded File:Example Mask order form (UCSB ASML 5500) - DemisDJohn Template.pdf (CAD Tutorial - example order for for photomask manufacturer)
- 14:27, 26 March 2020 John d talk contribs uploaded File:DEMISJAN2020 - Reticle Layout v1.GDS (CAD Tutorial - final GDS CAD file for submission to phootmask manufacturer)
- 12:31, 26 March 2020 John d talk contribs uploaded File:CAD Tutorial - ASML Reticle Programming Params - DEMISJAN2020 v1.xlsx (CAD Tutorial - ASML Reticle Programming Params spreadsheet with coordinates)
- 12:25, 26 March 2020 John d talk contribs uploaded File:CAD Tutorial for ASML Reticle v1 - screenshot Device Layout cell.png
- 11:50, 26 March 2020 John d talk contribs uploaded File:CAD Tutorial for ASML Reticle v1.OAS (Mask layout CAD tutorial for ASML Stepper reticle)
- 13:20, 24 March 2020 Biljana talk contribs uploaded File:RMS control.png
- 13:17, 24 March 2020 Biljana talk contribs uploaded File:Autostep stage control.png
- 13:15, 24 March 2020 Biljana talk contribs uploaded File:Autostep DSW.png
- 09:03, 24 March 2020 Biljana talk contribs uploaded File:Autostep main computer switch.png
- 09:01, 24 March 2020 Biljana talk contribs uploaded File:Autostep main computer -1.png
- 08:56, 24 March 2020 Biljana talk contribs uploaded File:Autostep Cabinet .png
- 08:48, 24 March 2020 Biljana talk contribs uploaded File:Computer-2 -smart set.png
- 08:35, 24 March 2020 Biljana talk contribs uploaded File:Lower keyboard.png
- 08:00, 24 March 2020 Biljana talk contribs uploaded File:Autostep 200 Upper keyboard.png
- 14:30, 23 March 2020 Biljana talk contribs uploaded File:Autostep200 Training Manual 3-23-2020.pdf
- 14:27, 23 March 2020 John d talk contribs uploaded File:Editing Tutorials - List of Uploaded Files - click the file title to get file page.png
- 14:11, 23 March 2020 Biljana talk contribs uploaded File:GCA 6300 Training Manual- 3-23-2020.pdf
- 14:05, 23 March 2020 Biljana talk contribs uploaded File:GCA 6300 Training Manual-3-23-2020.pdf
- 13:01, 23 March 2020 Freeborn d talk contribs uploaded File:EB-1 operation instructions.pdf (EB#1 operation instructions)
- 12:30, 23 March 2020 Freeborn d talk contribs uploaded File:Ebeam 1 operating instructions.pdf (New operating instructions.)
- 09:40, 23 March 2020 Biljana talk contribs uploaded File:GCA 6300 Stepper Training Manual- Full version 2020.pdf
- 09:00, 23 March 2020 Biljana talk contribs uploaded File:GCA 6300 Stepper Training Manual- Full version 2019.pdf
- 08:14, 23 March 2020 Biljana talk contribs uploaded File:GCA 6300 Reboot computers.docx
- 10:13, 18 March 2020 Lingg talk contribs deleted page Solaris SSI RTP (Duplicate)
- 13:13, 17 March 2020 John d talk contribs uploaded File:Facility-Use-MOU---Intercampus-UC-User.pdf (Intercampus U.C. User - Facility Use Memorandum of Understanding, for "Getting Lab Access")
- 13:04, 17 March 2020 John d talk contribs uploaded File:UCSB-Facilities-Use-Blanket-Waiver.pdf (Facilities Use - Blanket Waiver for "Getting Lab Access")
- 13:03, 17 March 2020 John d talk contribs uploaded File:UCSB-Facilities-Use-Agreement.pdf (Facilities Use Agreement, for "Getting Lab Access")
- 12:59, 17 March 2020 John d talk contribs uploaded File:SampleCOI.pdf (Sample Certificate of Insurance, for "Getting Access to Lab")
- 12:51, 17 March 2020 John d talk contribs uploaded File:Nanofabrication Facility Project Description.xlsx (NanoFab Remote Work "Project Description Form". Remote work users must fill this out and email to the appropriate NanoFab staff.)
- 11:12, 10 March 2020 Lingg talk contribs uploaded File:RTP-Solaris-150.jpg
- 11:08, 10 March 2020 Lingg talk contribs deleted page File:Photo of Solaris RTP.jpg (delete)
- 11:41, 9 March 2020 Lingg talk contribs uploaded File:Photo of Solaris RTP.jpg
- 17:33, 5 March 2020 Sawyer l talk contribs uploaded File:RIE 3 SOP Rev B.pdf
- 12:16, 3 March 2020 Ningcao talk contribs uploaded File:I1200415.pdf
- 15:41, 28 February 2020 Ningcao talk contribs uploaded File:I1200301.pdf
- 17:45, 24 February 2020 Sawyer l talk contribs uploaded File:IMG 5385.JPG
- 17:45, 24 February 2020 Sawyer l talk contribs uploaded File:IMG 5388.JPG
- 12:23, 24 February 2020 Bosch t talk contribs uploaded File:TBD.jpg
- 16:42, 21 February 2020 Thibeault talk contribs uploaded File:2000 pixel mkids.pdf
- 11:36, 17 February 2020 User account Nv1235377 talk contribs was created
- 18:06, 28 January 2020 John d talk contribs uploaded File:Microscope Training - UScope F-stop example annotated 1000px.png
- 15:36, 23 January 2020 Ningcao talk contribs uploaded File:I1200211.pdf
- 15:57, 17 January 2020 Ningcao talk contribs uploaded File:I1200107.pdf
- 15:46, 17 January 2020 Ningcao talk contribs uploaded File:I2200122.pdf
- 09:01, 7 January 2020 Sawyer l talk contribs uploaded File:EB2 SOP Rev B.pdf
- 12:50, 3 December 2019 John d talk contribs uploaded File:Olympus - BHM Microscope - Instruction Manual.pdf (Instruction user Manual for Olympus BMH* microscopes, scanned at Nanofab)
- 12:47, 3 December 2019 John d talk contribs uploaded File:Microscope 01 Olympus BHMJL crop.png
- 15:24, 27 November 2019 Thibeault talk contribs uploaded File:TechTalk20191205.jpg
- 01:43, 8 November 2019 John d talk contribs uploaded a new version of File:Digidat-Toppan Mask order form (UCSB ASML 5500).docx (added barcode in instructions)
- 01:37, 8 November 2019 John d talk contribs uploaded a new version of File:ASML Reticle Programming Params - MyReticleBarCode v1.xlsx (retry scrolling)
- 01:35, 8 November 2019 John d talk contribs uploaded a new version of File:ASML Reticle Programming Params - MyReticleBarCode v1.xlsx (scrolled properly, indicated scale of coordinates are 1x wafer-scale)
- 10:17, 5 November 2019 Sawyer l talk contribs uploaded File:YES SOP Rev B.pdf
- 15:16, 30 October 2019 Thibeault talk contribs uploaded File:N-Polar HEMTs mm-Wave.pdf
- 09:04, 24 October 2019 Thibeault talk contribs uploaded File:Bowers Group Highlights 2019.pdf
- 15:06, 21 October 2019 Thibeault talk contribs uploaded File:IR Imaging and Laser Sensing.pdf
- 17:40, 11 October 2019 John d talk contribs uploaded File:Visual Editor - switch to source mode - pen button.png
- 17:32, 11 October 2019 John d talk contribs uploaded a new version of File:Editing Tutorials 4b- file info right click URL.png (cropped)
- 17:23, 11 October 2019 John d talk contribs uploaded File:Editing Tutorials - 5- insert link into page.png
- 17:21, 11 October 2019 John d talk contribs uploaded File:Editing Tutorials 4b- file info right click URL.png
- 17:20, 11 October 2019 John d talk contribs uploaded File:Editing Tutorials 3c- modifications etc..png
- 14:14, 11 October 2019 Thibeault talk contribs uploaded File:On Chip Hybrid Silicon Quantum Dot Comb Laser With 14 Error Free Channels.pdf
- 14:00, 11 October 2019 Thibeault talk contribs uploaded File:Tunable Antenna-Coupled Intersubband Terahertz (TACIT) Mixer.pdf
- 15:17, 10 October 2019 Thibeault talk contribs uploaded File:Memory-Based Neuromorphic Hardware for Advanced Neural Network Models.pdf
- 14:15, 9 October 2019 Sawyer l talk contribs uploaded File:EVG Plasma Activation Recipe Copying.pdf
- 14:13, 9 October 2019 Sawyer l talk contribs uploaded File:EVG Plasma Activation SOP Rev B.pdf
- 10:09, 9 October 2019 Thibeault talk contribs uploaded File:High Power PICs for Free Space.pdf
- 16:40, 8 October 2019 John d talk contribs uploaded File:Editing Tutorials - Upload PDF - 3b- filename descript upload button.png
- 16:36, 8 October 2019 John d talk contribs uploaded File:Editing Tutorials - Upload PDF - 2- choose file.png
- 16:35, 8 October 2019 John d talk contribs uploaded File:Editing Tutorials - Upload PDF - 1- upload file.png
- 15:16, 8 October 2019 Thibeault talk contribs uploaded File:TechTalk20191010.jpg
- 12:11, 4 October 2019 John d talk contribs uploaded File:194 Ru Etch O2,Cl2.pdf (BillM - Pan2 Ru etch 2019-09-19)
- 11:59, 4 October 2019 John d talk contribs deleted page File:194 Ru Etch O2,Cl2.pdf (for tutorial)
- 11:58, 4 October 2019 John d talk contribs uploaded File:194 Ru Etch O2,Cl2.pdf (Pan2 Ru Etch (Bill Mitchell 2019-09-19))
- 09:39, 25 September 2019 John d talk contribs moved page Plamsa Clean (YES EcoClean) to Plasma Clean (YES EcoClean) without leaving a redirect (spelling)
- 07:58, 25 September 2019 Sawyer l talk contribs uploaded File:YES SOP.pdf
- 11:25, 20 September 2019 Sawyer l talk contribs uploaded File:EB2 SOP.pdf
- 17:28, 18 September 2019 Thibeault talk contribs uploaded File:YES-SPR220vsTemp.jpg
- 17:26, 18 September 2019 Thibeault talk contribs uploaded File:YES150CResists.jpg
- 20:55, 16 September 2019 Thibeault talk contribs uploaded File:TechTalk20190926.jpg
- 16:09, 16 September 2019 Thibeault talk contribs uploaded File:THz Transistors and Template Assisted Selective Epitaxy.pdf
- 16:08, 16 September 2019 Thibeault talk contribs uploaded File:Raith Velion and Ion Beam Lithography.pdf
- 14:37, 16 September 2019 Sawyer l talk contribs uploaded File:MJB 3 SOP.pdf
- 14:36, 16 September 2019 Sawyer l talk contribs deleted page File:MJB 3 Quick Start.pdf (No longer needed)
- 16:08, 11 September 2019 Sawyer l talk contribs uploaded File:MA-6 Exp Mode Visual Aid.pdf
- 16:05, 11 September 2019 Sawyer l talk contribs uploaded File:MA-6 SOP Rev B.pdf
- 15:24, 11 September 2019 Sawyer l talk contribs uploaded File:DUV Flood Expose SOP.pdf
- 15:20, 11 September 2019 Sawyer l talk contribs uploaded File:MJB 3 Quick Start.pdf
- 15:17, 11 September 2019 Sawyer l talk contribs uploaded File:MVD Standard Recipes.pdf
- 15:16, 11 September 2019 Sawyer l talk contribs uploaded File:MVD SOP.pdf
- 15:05, 11 September 2019 Sawyer l talk contribs uploaded File:RIE 3 SOP.pdf
- 15:01, 11 September 2019 Sawyer l talk contribs uploaded File:RIE 2 SOP.pdf
- 14:49, 11 September 2019 Sawyer l talk contribs uploaded File:Dis 0.2mbar Line2.JPG
- 14:48, 11 September 2019 Sawyer l talk contribs uploaded File:ExSitu 0.8mbar Line2.JPG
- 14:48, 11 September 2019 Sawyer l talk contribs uploaded File:ExSitu 0.8mbar.JPG
- 14:48, 11 September 2019 Sawyer l talk contribs uploaded File:ExSitu 0.4mbar Line2.JPG
- 14:48, 11 September 2019 Sawyer l talk contribs uploaded File:ExSitu 0.4mbar.JPG
- 14:33, 11 September 2019 Sawyer l talk contribs uploaded File:EVG Plasma Activation SOP.pdf
- 14:38, 9 September 2019 Ningcao talk contribs uploaded File:CompleteEASE Manual.pdf
- 11:24, 9 September 2019 John d talk contribs uploaded File:Annotated PR etch - Om1000 03 - ARC + Cl + PR etch v1.jpg
- 11:18, 9 September 2019 John d talk contribs uploaded File:ARC etch + Cr etch - UV6 at 2krpm (900nm) survived v2 - screenshot.jpg
- 21:42, 8 September 2019 Thibeault talk contribs uploaded File:TechTalk20190912.jpg
- 21:39, 8 September 2019 Thibeault talk contribs uploaded File:High Performance Lasers on Silicon Slides.pdf
- 21:37, 8 September 2019 Thibeault talk contribs uploaded File:Semiconductor Supermirrors.pdf
- 22:30, 6 September 2019 John d talk contribs uploaded File:PMGI+UV6 lift-off SEM - 2017-06-30 DJ.png
- 16:33, 5 September 2019 Thibeault talk contribs deleted page File:36-Medium-stress SiNx using Unaxis ICP deposition tool-a.pdf
- 16:33, 5 September 2019 Thibeault talk contribs deleted page File:40-Low-stress SiNx at 50 C using Unaxis ICP deposition tool.pdf
- 16:32, 5 September 2019 Thibeault talk contribs deleted page File:41-High-stress SiNx at 50 C using Unaxis ICP deposition tool.pdf
- 16:22, 29 August 2019 Thibeault talk contribs uploaded File:TechTalk20190905.jpg
- 11:51, 26 August 2019 User account Yuxi Huang talk contribs was created
- 15:35, 23 August 2019 John d talk contribs uploaded File:Demis UCSB-Photonics-Gif.gif
- 15:42, 20 August 2019 Silva talk contribs automatically marked revision 156623 of page Template:Announcements patrolled
- 13:55, 20 August 2019 Silva talk contribs automatically marked revision 156622 of page Template:Announcements patrolled
- 13:51, 20 August 2019 John d talk contribs automatically marked revision 156621 of page Template:Announcements patrolled
- 10:21, 20 August 2019 Sawyer l talk contribs automatically marked revision 156620 of page Plasma Activation (EVG 810) patrolled
- 10:19, 20 August 2019 Sawyer l talk contribs automatically marked revision 156619 of page E-Beam 2 (Custom) patrolled
- 08:53, 15 August 2019 John d talk contribs automatically marked revision 156618 of page Demis D. John patrolled
- 16:46, 14 August 2019 John d talk contribs automatically marked revision 156617 of page Demis D. John patrolled
- 14:01, 14 August 2019 John d talk contribs automatically marked revision 156616 of page Frequently Asked Questions patrolled
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- 09:33, 31 July 2019 Thibeault talk contribs automatically marked revision 156601 of page Microscopes patrolled
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- 10:44, 25 July 2019 Ningcao talk contribs automatically marked revision 156597 of page Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) patrolled
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- 10:41, 25 July 2019 Ningcao talk contribs uploaded File:I2190605.pdf
- 10:38, 25 July 2019 Ningcao talk contribs automatically marked revision 156595 of page Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) patrolled
- 13:16, 24 July 2019 John d talk contribs automatically marked revision 156594 of page Packaging Recipes patrolled
- 13:14, 24 July 2019 John d talk contribs automatically marked revision 156593 of page Dicing Saw (ADT) patrolled
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- 08:53, 21 July 2019 John d talk contribs automatically marked revision 156586 of page Logitech WBS7 - Procedure for Wax Mounting with Spin-On Crystalbond patrolled
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- 10:23, 19 July 2019 Freeborn d talk contribs uploaded File:Running a process on Plasma Therm SLR.pdf
- 09:58, 19 July 2019 Lingg talk contribs automatically marked revision 156576 of page Rapid Thermal Processor (SSI Solaris 150) patrolled
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