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- 12:30, 12 July 2012 diff hist +13 N File:Linberg.jpg {{toolimage}} current
- 12:29, 12 July 2012 diff hist +138 N Tube Furnace AlGaAs Oxidation (Lindberg) Created page with "{{tool|{{PAGENAME}} |picture=Linberg.jpg |type = Thermal Processing |super= Tony Bosch |location=Bay 4 |description =? |manufacturer =? }}"
- 12:28, 12 July 2012 diff hist +13 N File:Goniometer.jpg {{toolimage}} current
- 12:27, 12 July 2012 diff hist -54 ICP Etch 1 (Panasonic E646V)
- 12:25, 12 July 2012 diff hist +13 N File:Oven1&2.jpg {{toolimage}} current
- 12:25, 12 July 2012 diff hist +143 N Ovens 1, 2 & 3 (Labline) Created page with "{{tool|{{PAGENAME}} |picture=Oven1&2.jpg |type = Lithography |super= Adam Abrahamsen |location=Bay 6 |description =? |manufacturer = Labline }}"
- 12:24, 12 July 2012 diff hist -56 Sputter 4 (AJA ATC 2200-V)
- 12:24, 12 July 2012 diff hist +147 N Oven 4 (Thermo-Fisher HeraTherm) Created page with "{{tool|{{PAGENAME}} |picture=Oven4.jpg |type = Lithography |super= Tony Bosch |location=Bay 6 |description = ? |manufacturer = Fisher Scientific }}"
- 12:23, 12 July 2012 diff hist +13 N File:Oven4.jpg {{toolimage}}
- 12:19, 12 July 2012 diff hist +13 N File:Vacuum.jpg {{toolimage}} current
- 12:18, 12 July 2012 diff hist +145 N Vacuum Sealer Created page with "{{tool|{{PAGENAME}} |picture=Vacuum.jpg |type = Packaging |super= Aidan Hopkins |location=Bay 5 |description = ? |manufacturer = ? }} = About ="
- 12:17, 12 July 2012 diff hist +141 N UV Ozone Reactor Created page with "{{tool|{{PAGENAME}} |picture=Ozone.jpg |type = Dry Etch |super= Tony Bosch |location=Bay 5 |description = ? |manufacturer = ? }} = About ="
- 12:13, 12 July 2012 diff hist +13 N File:SpinRinse.jpg {{toolimage}} current
- 12:13, 12 July 2012 diff hist +148 N Spin Rinse Dryer (SemiTool) Created page with "{{tool|{{PAGENAME}} |picture=SpinRinse.jpg |type = Wet Processing |super= Don Freeborn |location=Bay 7 |description = ? |manufacturer = SemiTool }}"
- 11:56, 12 July 2012 diff hist 0 File:Nanometric.jpg uploaded a new version of "File:Nanometric.jpg" current
- 11:55, 12 July 2012 diff hist 0 File:Nanometric.jpg uploaded a new version of "File:Nanometric.jpg"
- 11:55, 12 July 2012 diff hist +13 N File:Filmmetrics.jpg {{toolimage}} current
- 11:53, 12 July 2012 diff hist 0 File:VeecoNanoman.jpg uploaded a new version of "File:VeecoNanoman.jpg"
- 11:53, 12 July 2012 diff hist +55 N Wafer Toxic Corrosive Bench Redirected page to Wet Benches#Wafer Toxic Corrosive Benches current
- 11:52, 12 July 2012 diff hist +255 Wet Benches
- 11:52, 12 July 2012 diff hist +13 N File:WaferToxicBench.jpg {{toolimage}} current
- 11:50, 12 July 2012 diff hist +13 N File:PlatingBench.jpg {{toolimage}} current
- 11:50, 12 July 2012 diff hist +13 N File:HFBench.jpg {{toolimage}} current
- 11:49, 12 July 2012 diff hist +13 N File:ToxicBench.jpg {{toolimage}} current
- 11:48, 12 July 2012 diff hist +13 N File:SpinBench.jpg {{toolimage}} current
- 10:17, 12 July 2012 diff hist 0 m Template:Tool Protected "Template:Tool" ([edit=sysop] (indefinite) [move=sysop] (indefinite))
- 10:17, 12 July 2012 diff hist 0 m Template:Nav2 Protected "Template:Nav2" ([edit=sysop] (indefinite) [move=sysop] (indefinite))
- 10:16, 12 July 2012 diff hist 0 m Main Page Changed protection level for "Main Page" ([edit=sysop] (indefinite) [move=sysop] (indefinite)) [cascading]
- 10:16, 12 July 2012 diff hist 0 m Template:Staff Protected "Template:Staff" ([edit=sysop] (indefinite) [move=sysop] (indefinite))
- 10:16, 12 July 2012 diff hist 0 m Template:FeaturedArticle Protected "Template:FeaturedArticle" ([edit=sysop] (indefinite) [move=sysop] (indefinite))
- 10:04, 12 July 2012 diff hist +41 MediaWiki:Loginprompt
- 10:02, 12 July 2012 diff hist +226 N MediaWiki:Loginprompt Created page with "Only those resisted with the UCSB Nanofab may login and edit the wiki.<br> If you are a registered user with the UCSB Nanofab but need your Wiki account created, please contact t…"
- 09:57, 12 July 2012 diff hist +82 m Editing Tutorials →Editing Restrictions
- 08:36, 12 July 2012 diff hist +75 XeF2 Etch (Xetch)
- 08:19, 12 July 2012 diff hist +57 Tool List →Wet Processing
- 08:18, 12 July 2012 diff hist +52 N HF/TMAH Processing Benches Redirected page to Wet Benches#HF.2FTMAH Processing Bench current
- 08:07, 12 July 2012 diff hist +42 Wet Benches →Detailed Specifications
- 08:06, 12 July 2012 diff hist +238 Wet Benches →Detailed Specifications
- 08:06, 12 July 2012 diff hist +144 Wet Benches
- 08:03, 12 July 2012 diff hist +1,636 Wet Benches →About
- 08:00, 12 July 2012 diff hist +52 N HF/TMAH Processing Bench Redirected page to Wet Benches#HF.2FTMAH Processing Bench current
- 08:00, 12 July 2012 diff hist +52 N HF Processing Bench Redirected page to Wet Benches#HF.2FTMAH Processing Bench current
- 08:00, 12 July 2012 diff hist +507 Wet Benches
- 07:57, 12 July 2012 diff hist +39 N Plating Bench Redirected page to Wet Benches#Plating Bench current
- 07:56, 12 July 2012 diff hist +2 Wet Benches →Detailed Specifications
- 07:56, 12 July 2012 diff hist +2 Wet Benches →About
- 07:56, 12 July 2012 diff hist -3 Wet Benches
- 07:56, 12 July 2012 diff hist +51 Wet Benches →Plating Bench
- 07:55, 12 July 2012 diff hist +204 Wet Benches
- 07:53, 12 July 2012 diff hist +49 N Toxic Corrosive Benches Redirected page to Wet Benches#Toxic Corrosive Benches current
- 07:53, 12 July 2012 diff hist +43 N Spin Coat Benches Redirected page to Wet Benches#Spin Coat Benches current
- 07:52, 12 July 2012 diff hist +41 N Develop Benches Redirected page to Wet Benches#Develop Benches current
- 07:50, 12 July 2012 diff hist +50 N Solvent Cleaning Benches Redirected page to Wet Benches#Solvent Cleaning Benches current
- 07:49, 12 July 2012 diff hist +16 Wet Benches →Toxic Corrosive Benches
- 07:46, 12 July 2012 diff hist +445 Wet Benches →Toxic Corrosive Benches
- 07:44, 12 July 2012 diff hist -1,687 Solvent Benches Redirected page to Wet Benches#Solvent Cleaning Benches current
- 07:43, 12 July 2012 diff hist +1,735 Wet Benches →Solvent Cleaning Benches
- 07:42, 12 July 2012 diff hist -1,708 Photoresist Spin Coat Benches Redirected page to Wet Benches#Spin Coat Benches current
- 07:42, 12 July 2012 diff hist -43 Wet Benches →Develop Benches
- 07:41, 12 July 2012 diff hist -44 Wet Benches →Spin Coat Benches
- 07:40, 12 July 2012 diff hist +1,795 Wet Benches →Spin Coat Benches
- 07:39, 12 July 2012 diff hist -1,363 Develop Wet Benches Redirected page to Wet Benches#Develop Benches current
- 07:39, 12 July 2012 diff hist +24 Wet Benches
- 07:38, 12 July 2012 diff hist +1,409 Wet Benches →Develop Benches
- 07:37, 12 July 2012 diff hist +429 N Wet Benches Created page with "In the lab we have a total of 16 wet benches. They are divided into the following 8 types: *4 Solvent Cleaning Benches *3 Develop Benches *3 Spin Coat Benches *2 [[T…"
- 07:32, 12 July 2012 diff hist +1 File:OxalicAcidDihydrateMSDS.pdf current
- 07:32, 12 July 2012 diff hist +1 File:SelenousAcidMSDS.pdf current
- 07:32, 12 July 2012 diff hist +1 File:HydroiodicAcidMSDS.pdf current
- 07:31, 12 July 2012 diff hist +1 File:LacticAcidMSDS.pdf current
- 07:31, 12 July 2012 diff hist +1 File:LacticAcidFractionalMSDS.pdf current
- 07:31, 12 July 2012 diff hist +1 File:MethacrylicAcidMSDS.pdf current
- 07:27, 12 July 2012 diff hist +10 N File:Xactic-XetchX3-System-Manual.pdf {{manual}} current
- 07:22, 12 July 2012 diff hist +323 Wire Saw (Takatori) →About current
- 07:21, 12 July 2012 diff hist +10 N File:Takatori-Wire-Saw-WSB-K2-Operation.pdf {{manual}} current
- 07:21, 12 July 2012 diff hist +10 N File:Takatori-Wire-Saw-WSD-K2-Instructions.pdf {{manual}} current
- 07:21, 12 July 2012 diff hist +10 N File:Takatori-Wire-Saw-Control-Data-Tranfer-Instructions.pdf {{manual}} current
- 07:17, 12 July 2012 diff hist +4 Tool List →Wet Processing
- 12:08, 11 July 2012 diff hist +13 N File:Microscopes.jpg {{toolimage}} current
- 12:07, 11 July 2012 diff hist +216 Microscopes →Nikon
- 12:05, 11 July 2012 diff hist +71 Microscopes →Olympus
- 12:05, 11 July 2012 diff hist +212 Microscopes
- 12:02, 11 July 2012 diff hist +266 Microscopes
- 12:02, 11 July 2012 diff hist 0 N File:Jenoptik-ProgRes-Manual.pdf current
- 12:01, 11 July 2012 diff hist 0 N File:Nikon-Microscope-OptiPhot-Manual.pdf current
- 12:00, 11 July 2012 diff hist 0 N File:Nikon-Microscope-Manual.pdf current
- 11:45, 11 July 2012 diff hist -1 Tool List →Inspection, Test and Characterization
- 11:45, 11 July 2012 diff hist -1 Tony Bosch →Tools
- 11:44, 11 July 2012 diff hist +45 N 4-Point Probe Resistivity Mapper moved 4-Point Probe Resistivity Mapper to Resistivity Mapper (CDE RESMAP) current
- 11:44, 11 July 2012 diff hist 0 m Resistivity Mapper (CDE RESMAP) moved 4-Point Probe Resistivity Mapper to Resistivity Mapper (CDE RESMAP)
- 11:12, 11 July 2012 diff hist +78 UCSB Nanofab Wiki:About
- 11:05, 11 July 2012 diff hist +2 Lab Rules OLD 2018 →Tools unavailable for intern use during Summer 2012:
- 11:05, 11 July 2012 diff hist +4 Lab Rules OLD 2018 →Tools unavailable for intern use during Summer 2012:
- 10:57, 11 July 2012 diff hist 0 Template:FeaturedArticle
- 10:56, 11 July 2012 diff hist 0 File:GowningRoom.jpg uploaded a new version of "File:GowningRoom.jpg" current
- 10:55, 11 July 2012 diff hist 0 Tool List →Packaging
- 10:53, 11 July 2012 diff hist +1 Surface Analysis (KLA/Tencor Surfscan)
- 10:51, 11 July 2012 diff hist +12 N File:KLA.jpg {{toolimage} current
- 10:51, 11 July 2012 diff hist +187 N Surface Analysis (KLA/Tencor Surfscan) Created page with "{{tool|{{PAGENAME}} |picture=KLA.jpg |type = Inspection, Test and Characterization |super= Adam Abrahamsen |location=Bay 3 |description = |manufacturer = Tencor |materials = |to…"
- 10:49, 11 July 2012 diff hist +16 Lab Rules OLD 2018 →Tools unavailable for intern use during Summer 2012:
- 10:40, 11 July 2012 diff hist +13 N File:CriticalPoint.jpg {{toolimage}} current
- 10:39, 11 July 2012 diff hist +209 N Critical Point Dryer Created page with "{{tool|{{PAGENAME}} |picture=CriticalPoint.jpg |type = Inspection, Test and Characterization |super= Luis Zuzunaga |location=Bay 5 |description = |manufacturer = Energy Beam Sci…"
- 10:37, 11 July 2012 diff hist +13 N File:UVOlympus.jpg {{toolimage}} current
- 10:37, 11 July 2012 diff hist +189 N Deep UV Optical Microscope (Olympus) Created page with "{{tool|{{PAGENAME}} |picture=UVOlympus.jpg |type = Inspection, Test and Characterization |super= Tony Bosch |location=Bay 7 |description = |manufacturer = Olympus |materials = …"
- 10:30, 11 July 2012 diff hist +13 N File:SEMSample.jpg {{toolimage}}
- 10:30, 11 July 2012 diff hist +188 N SEM Sample Coater (Hummer) Created page with "{{tool|{{PAGENAME}} |picture=SEMSample.jpg |type = Inspection, Test and Characterization |super= Tony Bosch |location=Bay 1 |description = |manufacturer = Hummer |materials = |…"
- 10:24, 11 July 2012 diff hist -51 Nano-Imprint (Nanonex NX2000)
- 10:21, 11 July 2012 diff hist +13 N File:Thermal2.jpg {{toolimage}} current
- 10:21, 11 July 2012 diff hist +171 N Thermal Evap 2 (Solder) Created page with "{{tool|{{PAGENAME}} |picture=Thermal2.jpg |type = Vacuum Deposition |super= Brian Lingg |location=Bay 3 |description = ? |manufacturer = Custom |materials = |toolid=12 }}"
- 10:20, 11 July 2012 diff hist +1 Template:Tool
- 10:20, 11 July 2012 diff hist -2 Template:Tool
- 10:18, 11 July 2012 diff hist -1 Template:Tool
- 10:16, 11 July 2012 diff hist +13 N File:Sputter5.jpg {{toolimage}}
- 10:15, 11 July 2012 diff hist +175 N Sputter 5 (AJA ATC 2200-V) Created page with "{{tool|{{PAGENAME}} |picture=Sputter5.jpg |type = Vacuum Deposition |super= Mike Silva |location=Bay 3 |description = ? |manufacturer = Kurt J Lesker |materials = |toolid= }}"
- 10:13, 11 July 2012 diff hist +8 Mike Silva →Tools
- 10:13, 11 July 2012 diff hist +13 N File:BlueMOven.jpg {{toolimage}} current
- 10:12, 11 July 2012 diff hist +193 N High Temp Oven (Blue M) Created page with "{{tool|{{PAGENAME}} |picture=BlueMOven.jpg |type = Lithography |super= Mike Silva |location=Bay 5 |description = High Temperature Oven |manufacturer = Blue M Electric |materials…"
- 10:11, 11 July 2012 diff hist +8 Tool List →Lithography
- 10:10, 11 July 2012 diff hist +13 N File:Vacuum Oven.jpg {{toolimage}} current
- 10:10, 11 July 2012 diff hist +202 N Vacuum Oven (YES) Created page with "{{tool|{{PAGENAME}} |picture=Vacuum Oven.jpg |type = Lithography |super= Tony Bosch |location=Bay 3 |description = Vacuum/Ammonia Oven |manufacturer = Yield Engineering Systems |…"
- 09:31, 11 July 2012 diff hist +2 Mike Silva →Tools
- 09:31, 11 July 2012 diff hist +2 Tool List →Inspection, Test and Characterization
- 09:31, 11 July 2012 diff hist +41 N Tencor Flexus Film Stress moved Tencor Flexus Film Stress to Film Stress (Tencor Flexus) current
- 09:31, 11 July 2012 diff hist 0 m Film Stress (Tencor Flexus) moved Tencor Flexus Film Stress to Film Stress (Tencor Flexus)
- 09:06, 11 July 2012 diff hist 0 Ning Cao
- 09:00, 11 July 2012 diff hist +4 Tony Bosch
- 09:00, 11 July 2012 diff hist +4 Adam Abrahamsen →Tools
- 08:59, 11 July 2012 diff hist +40 N Sputter 4 (ATC 2200-V) moved Sputter 4 (ATC 2200-V) to Sputter 4 (AJA ATC 2200-V) current
- 08:59, 11 July 2012 diff hist 0 m Sputter 4 (AJA ATC 2200-V) moved Sputter 4 (ATC 2200-V) to Sputter 4 (AJA ATC 2200-V)
- 08:59, 11 July 2012 diff hist +40 N Sputter 3 (ATC 2000-F) moved Sputter 3 (ATC 2000-F) to Sputter 3 (AJA ATC 2000-F) current
- 08:59, 11 July 2012 diff hist 0 m Sputter 3 (AJA ATC 2000-F) moved Sputter 3 (ATC 2000-F) to Sputter 3 (AJA ATC 2000-F)
- 08:58, 11 July 2012 diff hist +8 Tool List →Vacuum Deposition
- 07:51, 11 July 2012 diff hist +1 Tool List →Dry Etch
- 07:50, 11 July 2012 diff hist +4 Tony Bosch →Tools
- 07:50, 11 July 2012 diff hist +35 N Unaxis VLR ICP-Etch moved Unaxis VLR ICP-Etch to ICP-Etch (Unaxis VLR) current
- 07:50, 11 July 2012 diff hist 0 m ICP-Etch (Unaxis VLR) moved Unaxis VLR ICP-Etch to ICP-Etch (Unaxis VLR)
- 07:48, 11 July 2012 diff hist +2 Tool List →Vacuum Deposition
- 07:48, 11 July 2012 diff hist +36 N Unaxis VLR ICP-PECVD moved Unaxis VLR ICP-PECVD to ICP-PECVD (Unaxis VLR) current
- 07:48, 11 July 2012 diff hist 0 m ICP-PECVD (Unaxis VLR) moved Unaxis VLR ICP-PECVD to ICP-PECVD (Unaxis VLR)
- 07:32, 11 July 2012 diff hist +1 Bill Mitchell →Tools
- 07:31, 11 July 2012 diff hist +68 N Atomic Force Microsope (Dimension 3100/Nanoscope IVA) moved Atomic Force Microsope (Dimension 3100/Nanoscope IVA) to Atomic Force Microscope (Dimension 3100/Nanoscope IVA) current
- 07:31, 11 July 2012 diff hist 0 m Atomic Force Microscope (Bruker ICON) moved Atomic Force Microsope (Dimension 3100/Nanoscope IVA) to Atomic Force Microscope (Dimension 3100/Nanoscope IVA)
- 07:19, 11 July 2012 diff hist -48 Bill Mitchell →Tools
- 07:19, 11 July 2012 diff hist -33 Template:Tool
- 07:18, 11 July 2012 diff hist +33 Template:Tool
- 07:18, 11 July 2012 diff hist 0 Template:Tool
- 07:17, 11 July 2012 diff hist +59 Template:Tool
- 07:17, 11 July 2012 diff hist +12 Tube Furnace (Tystar 8300)
- 07:16, 11 July 2012 diff hist +6 Template:Tool
- 07:13, 11 July 2012 diff hist +37 Template:StaffInfo
- 07:09, 11 July 2012 diff hist +10 Laser Scanning Confocal M-scope (Olympus LEXT)
- 07:08, 11 July 2012 diff hist +10 Field Emission SEM 2 (JEOL IT800SHL)
- 07:07, 11 July 2012 diff hist +11 Gold Plating Bench
- 07:06, 11 July 2012 diff hist +11 Chemical-Mechanical Polisher (Logitech)
- 07:05, 11 July 2012 diff hist +11 Tube Furnace Wafer Bonding (Thermco)
- 07:05, 11 July 2012 diff hist +11 Rapid Thermal Processor (AET RX6)
- 07:04, 11 July 2012 diff hist +11 Wire Saw (Takatori)
- 07:04, 11 July 2012 diff hist +11 Dicing Saw (ADT)
- 07:03, 11 July 2012 diff hist +11 Flip-Chip Bonder (Finetech)
- 07:03, 11 July 2012 diff hist +11 Wafer Bonder (SUSS SB6-8E)
- 07:02, 11 July 2012 diff hist -2 Wafer Bonder (SUSS SB6-8E)
- 07:01, 11 July 2012 diff hist +33 Tool List →Packaging
- 07:01, 11 July 2012 diff hist -33 Tool List →Lithography
- 07:00, 11 July 2012 diff hist +4 Tool List →Lithography
- 07:00, 11 July 2012 diff hist +8 Adam Abrahamsen →Tools
- 06:59, 11 July 2012 diff hist +4 Lab Rules OLD 2018 →Tools unavailable for intern use during Summer 2012:
- 06:59, 11 July 2012 diff hist +4 ASML DUV Redirected page to Stepper 3 (ASML DUV) current
- 06:59, 11 July 2012 diff hist +34 N Stepper 3 (ASML) moved Stepper 3 (ASML) to Stepper 3 (ASML DUV) current
- 06:59, 11 July 2012 diff hist 0 m Stepper 3 (ASML DUV) moved Stepper 3 (ASML) to Stepper 3 (ASML DUV)
- 06:58, 11 July 2012 diff hist +11 Stepper 3 (ASML DUV)
- 06:58, 11 July 2012 diff hist +11 Stepper 2 (AutoStep 200)
- 06:58, 11 July 2012 diff hist +11 Stepper 1 (GCA 6300)
- 06:58, 11 July 2012 diff hist -5 Tool List →Lithography
- 06:57, 11 July 2012 diff hist -5 Tony Bosch
- 06:57, 11 July 2012 diff hist +43 N Nano-Imprint Tool (Nanonex NX2000) moved Nano-Imprint Tool (Nanonex NX2000) to Nano-Imprint (Nanonex NX2000) current
- 06:57, 11 July 2012 diff hist 0 m Nano-Imprint (Nanonex NX2000) moved Nano-Imprint Tool (Nanonex NX2000) to Nano-Imprint (Nanonex NX2000)
- 06:57, 11 July 2012 diff hist +11 Nano-Imprint (Nanonex NX2000)
- 06:56, 11 July 2012 diff hist +9 Lab Rules OLD 2018 →Tools unavailable for intern use during Summer 2012:
- 06:56, 11 July 2012 diff hist +9 Ning Cao →Tools
- 06:56, 11 July 2012 diff hist +9 Tool List →Lithography
- 06:56, 11 July 2012 diff hist +11 Holographic Lith/PL Setup (Custom)
- 06:55, 11 July 2012 diff hist +48 N Holographic Lith/PL Setup moved Holographic Lith/PL Setup to Holographic Lith/PL Setup (Custom) current
- 06:55, 11 July 2012 diff hist 0 m Holographic Lith/PL Setup (Custom) moved Holographic Lith/PL Setup to Holographic Lith/PL Setup (Custom)
- 06:55, 11 July 2012 diff hist +11 E-Beam Lithography System (JEOL JBX-6300FS)
- 06:52, 11 July 2012 diff hist +23 N Category:NOID Created page with "Tools with No ID added."
- 06:51, 11 July 2012 diff hist +18 Template:Tool
- 06:51, 11 July 2012 diff hist +11 IR Aligner (SUSS MJB-3 IR)
- 06:49, 11 July 2012 diff hist +11 Contact Aligner (SUSS MA-6)
- 06:48, 11 July 2012 diff hist +11 XeF2 Etch (Xetch)
- 06:48, 11 July 2012 diff hist +11 ICP Etch 2 (Panasonic E626I)
- 06:47, 11 July 2012 diff hist +11 ICP Etch 1 (Panasonic E646V)
- 06:47, 11 July 2012 diff hist +12 Lab Rules OLD 2018 →Tools unavailable for intern use during Summer 2012:
- 06:47, 11 July 2012 diff hist +12 Don Freeborn →Tools
- 06:46, 11 July 2012 diff hist +12 Tool List →Dry Etch
- 06:46, 11 July 2012 diff hist +50 N Si Deep RIE (Bosch Etch) moved Si Deep RIE (Bosch Etch) to Si Deep RIE (PlasmaTherm/Bosch Etch) current
- 06:46, 11 July 2012 diff hist 0 m Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) moved Si Deep RIE (Bosch Etch) to Si Deep RIE (PlasmaTherm/Bosch Etch)
- 06:46, 11 July 2012 diff hist +11 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP)
- 06:44, 11 July 2012 diff hist -4 Lab Rules OLD 2018 →Tools unavailable for intern use during Summer 2012:
- 06:44, 11 July 2012 diff hist -4 Don Freeborn
- 06:44, 11 July 2012 diff hist -4 Tool List →Dry Etch
- 06:43, 11 July 2012 diff hist +11 RIE 5 (PlasmaTherm)
- 06:43, 11 July 2012 diff hist +33 N RIE 5 (PlasmaTherm SLR) moved RIE 5 (PlasmaTherm SLR) to RIE 5 (PlasmaTherm) current
- 06:43, 11 July 2012 diff hist 0 m RIE 5 (PlasmaTherm) moved RIE 5 (PlasmaTherm SLR) to RIE 5 (PlasmaTherm)
- 06:43, 11 July 2012 diff hist +11 RIE 3 (MRC)
- 06:43, 11 July 2012 diff hist +11 RIE 2 (MRC)
- 06:43, 11 July 2012 diff hist +11 RIE 1 (Custom)
- 06:42, 11 July 2012 diff hist +11 Plasma Activation (EVG 810)
- 06:41, 11 July 2012 diff hist -5 Lab Rules OLD 2018 →Tools unavailable for intern use during Summer 2012:
- 06:41, 11 July 2012 diff hist -5 Aidan Hopkins →Tools
- 06:41, 11 July 2012 diff hist -5 Tool List →Dry Etch
- 06:40, 11 July 2012 diff hist +41 N Plasma Activation Tool (EVG 810) moved Plasma Activation Tool (EVG 810) to Plasma Activation (EVG 810) current
- 06:40, 11 July 2012 diff hist 0 m Plasma Activation (EVG 810) moved Plasma Activation Tool (EVG 810) to Plasma Activation (EVG 810)
- 19:27, 10 July 2012 diff hist 0 Tool List →Inspection, Test and Characterization
- 19:26, 10 July 2012 diff hist -48 Tool List →Inspection, Test and Characterization
- 17:06, 10 July 2012 diff hist +4 Template:Nav2
- 14:56, 10 July 2012 diff hist -9 Brian Lingg →Tools
- 14:55, 10 July 2012 diff hist +53 N Atomic Layer Deposision (Oxford FlexAL) moved Atomic Layer Deposision (Oxford FlexAL) to Atomic Layer Deposition (Oxford FlexAL) current
- 14:55, 10 July 2012 diff hist 0 m Atomic Layer Deposition (Oxford FlexAL) moved Atomic Layer Deposision (Oxford FlexAL) to Atomic Layer Deposition (Oxford FlexAL)
- 14:50, 10 July 2012 diff hist -79 Tool List →Wet Processing
- 14:50, 10 July 2012 diff hist -79 Aidan Hopkins →Tools
- 13:47, 10 July 2012 diff hist +1 Template:Tool
- 13:47, 10 July 2012 diff hist +23 Template:Tool
- 13:46, 10 July 2012 diff hist +24 Template:Tool
- 13:44, 10 July 2012 diff hist 0 Sputter 2 (SFI Endeavor)
- 13:43, 10 July 2012 diff hist 0 Sputter 3 (AJA ATC 2000-F)
- 13:43, 10 July 2012 diff hist +11 Sputter 4 (AJA ATC 2200-V)
- 13:43, 10 July 2012 diff hist +11 Sputter 3 (AJA ATC 2000-F)
- 13:43, 10 July 2012 diff hist +11 Sputter 2 (SFI Endeavor)
- 13:43, 10 July 2012 diff hist +11 Sputter 1 (Custom) current
- 13:41, 10 July 2012 diff hist +11 PECVD 2 (Advanced Vacuum)
- 13:41, 10 July 2012 diff hist +11 PECVD 1 (PlasmaTherm 790)
- 13:41, 10 July 2012 diff hist +11 Ion Beam Deposition (Veeco NEXUS)
- 13:40, 10 July 2012 diff hist +11 Thermal Evap 1
- 13:39, 10 July 2012 diff hist 0 E-Beam 2 (Custom)
- 13:39, 10 July 2012 diff hist +11 E-Beam 4 (CHA)
- 13:39, 10 July 2012 diff hist +10 E-Beam 3 (Temescal)
- 13:39, 10 July 2012 diff hist +10 E-Beam 2 (Custom)
- 13:38, 10 July 2012 diff hist +10 E-Beam 1 (Sharon)
- 13:37, 10 July 2012 diff hist +10 Atomic Layer Deposition (Oxford FlexAL)
- 13:36, 10 July 2012 diff hist +10 IR Thermal Microscope (QFI)
- 13:35, 10 July 2012 diff hist +11 Atomic Force Microscope (Bruker ICON)
- 13:34, 10 July 2012 diff hist +2 Atomic Force Microscope (Bruker ICON)
- 13:30, 10 July 2012 diff hist +11 ICP-Etch (Unaxis VLR)
- 13:29, 10 July 2012 diff hist +11 ICP-PECVD (Unaxis VLR)
- 13:28, 10 July 2012 diff hist +10 Template:Tool
- 13:27, 10 July 2012 diff hist +2 Template:Tool
- 13:26, 10 July 2012 diff hist +12 Template:Tool
- 13:26, 10 July 2012 diff hist +9 Template:Tool
- 13:12, 10 July 2012 diff hist +30 Template:Tool
- 13:11, 10 July 2012 diff hist +249 Template:Tool
- 13:03, 10 July 2012 diff hist +41 N Photo-emission & IR Microscope (QFI) moved Photo-emission & IR Microscope (QFI) to IR Thermal Microscope (QFI) current
- 13:03, 10 July 2012 diff hist 0 m IR Thermal Microscope (QFI) moved Photo-emission & IR Microscope (QFI) to IR Thermal Microscope (QFI)
- 13:01, 10 July 2012 diff hist +9 Brian Lingg
- 13:00, 10 July 2012 diff hist +9 Tool List →Vacuum Deposition
- 12:12, 10 July 2012 diff hist -1 Template:Tool
- 12:12, 10 July 2012 diff hist +1,419 Template:Tool
- 12:01, 10 July 2012 diff hist -17 Template:StaffInfo
- 12:01, 10 July 2012 diff hist +17 Template:StaffInfo
- 11:58, 10 July 2012 diff hist +98 Staff List
- 11:51, 10 July 2012 diff hist +28 Staff List
- 11:50, 10 July 2012 diff hist +73 Template:StaffInfo
- 11:49, 10 July 2012 diff hist +221 N Template:StaffInfo Created page with "{{!}}- !width=150{{!}}Supervisor !width=200{{!}}{{{1}}} {{!}}-valign="top" !width=150{{!}}Supervisor Phone !width=200{{!}}{{{2}}} {{!}}-valign="top" !width=150{{!}}Supervisor E-M…"
- 11:46, 10 July 2012 diff hist -12 Template:Tony Bosch current
- 11:44, 10 July 2012 diff hist +19 Template:Tony Bosch
- 11:44, 10 July 2012 diff hist -19 Template:Tony Bosch
- 11:43, 10 July 2012 diff hist -34 Template:Tony Bosch
- 11:38, 10 July 2012 diff hist -51 Template:Tool
- 11:37, 10 July 2012 diff hist +52 Template:Tony Bosch
- 11:36, 10 July 2012 diff hist +51 Template:Tool
- 11:34, 10 July 2012 diff hist +237 N Template:Tony Bosch Created page with "|-valign="top" !width=150|Supervisor !width=200|[[{{{super|NONE}}}]] |-valign="top" !width=150|Supervisor Phone !width=200|{{{phone|NONE}}} |-valign="top" !width=150|Supervisor E…"
- 11:12, 10 July 2012 diff hist +13 N File:CDEResmap.jpg {{toolimage}} current
- 11:11, 10 July 2012 diff hist +13 N File:Woollam.jpg {{toolimage}} current
- 11:11, 10 July 2012 diff hist +13 N File:Tencor.jpg {{toolimage}} current
- 11:09, 10 July 2012 diff hist +13 N File:ProbeStation.jpg {{toolimage}} current
- 11:06, 10 July 2012 diff hist +13 N File:JeolFesem.jpg {{toolimage}} current
- 11:06, 10 July 2012 diff hist +13 N File:SEM1.jpg {{toolimage}} current
- 11:05, 10 July 2012 diff hist +13 N File:WireSaw.jpg {{toolimage}} current
- 11:04, 10 July 2012 diff hist +13 N File:DevelopBench.jpg {{toolimage}} current
- 11:04, 10 July 2012 diff hist +13 N File:SolventBench.jpg {{toolimage}} current
- 11:02, 10 July 2012 diff hist +13 N File:GoldPlating.jpg {{toolimage}} current
- 11:01, 10 July 2012 diff hist +13 N File:XeF2.jpg {{toolimage}} current
- 11:01, 10 July 2012 diff hist +13 N File:Gasonics.jpg {{toolimage}} current
- 11:00, 10 July 2012 diff hist +13 N File:ICP2.jpg {{toolimage}} current
- 11:00, 10 July 2012 diff hist +13 N File:ICP1.jpg {{toolimage}} current
- 10:59, 10 July 2012 diff hist +13 N File:RIE5.jpg {{toolimage}} current
- 10:58, 10 July 2012 diff hist +13 N File:RIE1.jpg {{toolimage}} current
- 10:57, 10 July 2012 diff hist +1 ICP-Etch (Unaxis VLR)
- 10:56, 10 July 2012 diff hist +13 N File:UnaxisPECVD.jpg {{toolimage}} current
- 10:56, 10 July 2012 diff hist +13 N File:MVD.jpg {{toolimage}} current
- 10:55, 10 July 2012 diff hist +13 N File:IBD.jpg {{toolimage}} current
- 10:54, 10 July 2012 diff hist +13 N File:PECVD1.jpg {{toolimage}} current
- 10:54, 10 July 2012 diff hist 0 File:Thermal1.jpg uploaded a new version of "File:Thermal1.jpg" current
- 10:53, 10 July 2012 diff hist 0 File:Thermal1.jpg uploaded a new version of "File:Thermal1.jpg"
- 10:52, 10 July 2012 diff hist +13 N File:Thermal1.jpg {{toolimage}}
- 10:52, 10 July 2012 diff hist +13 N File:PECVD2.jpg {{toolimage}} current
- 10:51, 10 July 2012 diff hist +13 N File:Sputter2.jpg {{toolimage}} current
- 10:51, 10 July 2012 diff hist +13 N File:Sputter4.jpg {{toolimage}} current
- 10:51, 10 July 2012 diff hist +13 N File:Sputter3.jpg {{toolimage}} current
- 10:50, 10 July 2012 diff hist +13 N File:Sputter1.jpg {{toolimage}} current
- 10:49, 10 July 2012 diff hist +13 N File:ContactAligner.jpg {{toolimage}} current
- 10:48, 10 July 2012 diff hist +13 N File:Nanonex.jpg {{toolimage}} current
- 10:47, 10 July 2012 diff hist +13 N File:Stepper2.jpg {{toolimage}} current
- 10:47, 10 July 2012 diff hist +13 N File:Stepper1.jpg {{toolimage}} current
- 10:45, 10 July 2012 diff hist +13 N File:SussAlignerIR.jpg {{toolimage}} current
- 09:41, 10 July 2012 diff hist +13 Bill Mitchell →Tools
- 09:41, 10 July 2012 diff hist +60 Tool List →Inspection, Test and Characterization
- 09:41, 10 July 2012 diff hist -47 Tool List →Lithography
- 09:41, 10 July 2012 diff hist +67 N AFM-based Nanolithography Tool (NanoMan) moved AFM-based Nanolithography Tool (NanoMan) to Atomic Force Microsope (Dimension 3100/Nanoscope IVA) current
- 09:41, 10 July 2012 diff hist 0 m Atomic Force Microscope (Bruker ICON) moved AFM-based Nanolithography Tool (NanoMan) to Atomic Force Microsope (Dimension 3100/Nanoscope IVA)
- 09:40, 10 July 2012 diff hist -1 Atomic Force Microscope (Bruker ICON)
- 09:40, 10 July 2012 diff hist +27 Atomic Force Microscope (Bruker ICON)
- 09:37, 10 July 2012 diff hist +41 Lab Rules OLD 2018 →Tools unavailable for intern use during Summer 2012:
- 09:36, 10 July 2012 diff hist +6 Lab Rules OLD 2018 →Tools unavailable for intern use during Summer 2012:
- 09:35, 10 July 2012 diff hist +19 Lab Rules OLD 2018 →Tools unavailable for intern use during Summer 2012:
- 09:34, 10 July 2012 diff hist +43 Lab Rules OLD 2018 →Tools unavailable for intern use during Summer 2012:
- 09:32, 10 July 2012 diff hist -4 Lab Rules OLD 2018 →Tools unavailable for intern use during Summer 2012:
- 09:29, 10 July 2012 diff hist +15 Lab Rules OLD 2018 →Tools unavailable for intern use during Summer 2012:
- 09:27, 10 July 2012 diff hist -1 Lab Rules OLD 2018 →Tools unavailable for intern use during Summer 2012:
- 09:27, 10 July 2012 diff hist +11 Lab Rules OLD 2018 →Nanofab Wireless Access:
- 09:25, 10 July 2012 diff hist -24 MediaWiki:Sidebar
- 09:22, 10 July 2012 diff hist -250 Template:Nav
- 09:20, 10 July 2012 diff hist -557 Template:Nav
- 09:20, 10 July 2012 diff hist +556 N Template talk:Nav Created page with "<div align=center style="font-size:110%;">Tools</div> * Lithography * Vacuum Deposition * Dry Etch * Wet Processing * Thermal Processing * [[Pa…" current
- 09:17, 10 July 2012 diff hist +5 MediaWiki:Sidebar
- 08:37, 10 July 2012 diff hist +24 N UCSB Nanofab Wiki:Staff Redirected page to Staff List current
- 08:30, 10 July 2012 diff hist +29 Aidan Hopkins →Tools
- 08:29, 10 July 2012 diff hist -4 Tool List →Wet Processing
- 08:29, 10 July 2012 diff hist +1,404 N Develop Wet Benches Created page with "{{tool|{{PAGENAME}} |picture=DevelopBench.jpg |type = Wet Processing |super= Aidan Hopkins |phone=(805)839-3918x208 |location=? |email=hopkins@ece.ucsb.edu |description = Custom …"
- 08:28, 10 July 2012 diff hist -3 Photoresist Spin Coat Benches
- 08:27, 10 July 2012 diff hist -1 Photoresist Spin Coat Benches
- 08:27, 10 July 2012 diff hist +1,755 N Photoresist Spin Coat Benches Created page with "{{tool|{{PAGENAME}} |picture=SolventBench.jpg |type = Wet Processing |super= Aidan Hopkins |phone=(805)839-3918x208 |location=? |email=hopkins@ece.ucsb.edu |description = Custom …"
- 08:25, 10 July 2012 diff hist -15 Tool List →Wet Processing
- 08:21, 10 July 2012 diff hist -12 Tool List →Wet Processing
- 08:21, 10 July 2012 diff hist +251 Solvent Benches
- 08:20, 10 July 2012 diff hist -12 Molecular Vapor Deposition
- 08:19, 10 July 2012 diff hist +1,486 N Solvent Benches Created page with "=About= The facility contains 4 stainless steel solvent benches for general processing using organic solvents. All solvent waste (except for certain chemicals that are collected)…"
- 08:18, 10 July 2012 diff hist +22 Tool List →Wet Processing
- 08:12, 10 July 2012 diff hist 0 File:ICP-Etch-2-Operating-Manual.pdf uploaded a new version of "File:ICP-Etch-2-Operating-Manual.pdf" current
- 08:11, 10 July 2012 diff hist 0 N File:ICP-Etch-2-Operating-Manual.pdf
- 08:10, 10 July 2012 diff hist +88 ICP Etch 2 (Panasonic E626I)
- 08:09, 10 July 2012 diff hist +2,079 N ICP Etch 2 (Panasonic E626I) Created page with "{{tool|{{PAGENAME}} |picture=ICP2.jpg |type = Dry Etch |super= Mike Silva |phone=(805)839-3918x219 |location=Bay 2 |email=silva@ece.ucsb.edu |description = ? |manufacturer = Pana…"
- 08:06, 10 July 2012 diff hist +1,419 N ICP Etch 1 (Panasonic E646V) Created page with "{{tool|{{PAGENAME}} |picture=ICP1.jpg |type = Dry Etch |super= Don Freeborn |phone= 805-893-3918x216 |location=Bay 2 |email=freeborn@ece.ucsb.edu |description = ? |manufacturer =…"
- 08:02, 10 July 2012 diff hist +1 Sputter 1 (Custom)
- 08:02, 10 July 2012 diff hist +2,037 N Sputter 1 (Custom) Created page with "{{tool|{{PAGENAME}} |picture=Sputter1.jpg |type = Vacuum Deposition |super= Adam Abrahamsen |phone=(805)839-3918x213 |location=Bay 3 |email=abrahamsen@ece.ucsb.edu |description …"
- 08:00, 10 July 2012 diff hist +1,159 N Holographic Lith/PL Setup (Custom) Created page with "{{tool|{{PAGENAME}} |picture=Holograph.jpg |type = Lithography |super= Ning Cao |phone=(805) 839-5689 |location=Bay 6 |email=Ningcao@ece.ucsb.edu |description = Custom Built Int…"
- 07:56, 10 July 2012 diff hist -11 E-Beam 1 (Sharon)
- 07:56, 10 July 2012 diff hist -205 E-Beam 1 (Sharon) →Documentation
- 07:56, 10 July 2012 diff hist -195 E-Beam 1 (Sharon) →See Also
- 07:54, 10 July 2012 diff hist +34 MediaWiki:Sidebar
- 07:54, 10 July 2012 diff hist +41 Thermal Processing Recipes
- 07:54, 10 July 2012 diff hist +145 Wet Etching Recipes
- 07:49, 10 July 2012 diff hist -2 Brian Thibeault
- 07:49, 10 July 2012 diff hist +88 Brian Thibeault
- 07:48, 10 July 2012 diff hist +205 Aidan Hopkins →Tools
- 07:48, 10 July 2012 diff hist +85 Luis Zuzunaga
- 07:46, 10 July 2012 diff hist +60 Don Freeborn →Tools
- 07:45, 10 July 2012 diff hist +20 Brian Lingg →Tools
- 07:44, 10 July 2012 diff hist +90 Ning Cao →Current Work
- 07:44, 10 July 2012 diff hist +21 Mike Silva →Tools
- 07:43, 10 July 2012 diff hist +22 Mike Silva →Tools
- 07:34, 10 July 2012 diff hist -510 Brian Thibeault →Tools
- 07:34, 10 July 2012 diff hist +510 Brian Thibeault →Current Work
- 07:34, 10 July 2012 diff hist +26 Mike Silva →Tools
- 07:33, 10 July 2012 diff hist +423 Mike Silva →Tools
- 07:30, 10 July 2012 diff hist +244 Bill Mitchell
- 07:29, 10 July 2012 diff hist +106 Adam Abrahamsen →Tools
- 07:27, 10 July 2012 diff hist +1 Don Freeborn →Tools
- 07:26, 10 July 2012 diff hist +376 Don Freeborn →Tools
- 07:23, 10 July 2012 diff hist +26 Tony Bosch →Tools
- 07:22, 10 July 2012 diff hist +1 Aidan Hopkins →Tools
- 07:22, 10 July 2012 diff hist +172 Aidan Hopkins
- 07:20, 10 July 2012 diff hist +219 N Wire Saw (Takatori) Created page with "{{tool|{{PAGENAME}} |picture=WireSaw.jpg |type = Packaging |super= Aidan Hopkins |phone= 805-893-3918x208 |location=?? |email=hopkins@ece.ucsb.edu |description = ? |manufacturer …"
- 07:18, 10 July 2012 diff hist -21 Tool List →Inspection, Test and Characterization
- 07:17, 10 July 2012 diff hist +47 Tool List Undo revision 598 by Zwarburg (Talk)
- 07:16, 10 July 2012 diff hist +19 MediaWiki:Sidebar
- 07:16, 10 July 2012 diff hist 0 MediaWiki:Sidebar
- 07:16, 10 July 2012 diff hist +4 MediaWiki:Sidebar
- 15:31, 9 July 2012 diff hist -47 Tool List
- 15:21, 9 July 2012 diff hist +51 Vacuum Deposition Recipes →Table (This heading is temporary)
- 15:19, 9 July 2012 diff hist +777 Vacuum Deposition Recipes →SiN deposition (PECVD #1)
- 15:08, 9 July 2012 diff hist +2,401 N Sputter 3 (AJA ATC 2000-F) Created page with "{{tool|{{PAGENAME}} |picture=Sputter3.jpg |type = Vacuum Deposition |super= Tony Bosch |phone=(805)839-3918x217 |location=Bay 3 |email=bosch@ece.ucsb.edu |description = Six-Targ…"
- 15:05, 9 July 2012 diff hist +2,634 N Sputter 4 (AJA ATC 2200-V) Created page with "{{tool|{{PAGENAME}} |picture=Sputter4.jpg |type = Vacuum Deposition |super= Adam Abrahamsen |phone=(805)839-3918x213 |location=Bay 3 |email=abrahamsen@ece.ucsb.edu |description …"
- 15:02, 9 July 2012 diff hist -1 Stepper 1 (GCA 6300)
- 15:01, 9 July 2012 diff hist +2,298 N Thermal Evap 1 Created page with "{{tool|{{PAGENAME}} |picture=Thermal1.jpg |type = Vacuum Deposition |super= Mike Silva |phone=(805)839-3918x219 |location=Bay 3 |email=silva@ece.ucsb.edu |description = NRC 3117 …"
- 13:43, 9 July 2012 diff hist +642 Tony Bosch →Tools
- 13:38, 9 July 2012 diff hist +81 Brian Lingg
- 13:37, 9 July 2012 diff hist +211 Brian Lingg
- 13:32, 9 July 2012 diff hist +28 Vacuum Deposition Recipes →Table
- 13:32, 9 July 2012 diff hist -6 Vacuum Deposition Recipes
- 13:31, 9 July 2012 diff hist +3 Vacuum Deposition Recipes
- 13:31, 9 July 2012 diff hist +72 Vacuum Deposition Recipes
- 13:29, 9 July 2012 diff hist +668 Vacuum Deposition Recipes
- 13:26, 9 July 2012 diff hist +76 Vacuum Deposition Recipes →Table
- 13:24, 9 July 2012 diff hist +7 Vacuum Deposition Recipes
- 13:24, 9 July 2012 diff hist -47 Vacuum Deposition Recipes →Recipes
- 13:23, 9 July 2012 diff hist +664 Vacuum Deposition Recipes →Plasma Enhanced Chemical Vapor Deposition (PECVD)
- 13:16, 9 July 2012 diff hist +52 Vacuum Deposition Recipes
- 13:14, 9 July 2012 diff hist +26 Vacuum Deposition Recipes
- 13:14, 9 July 2012 diff hist +11 Tool List
- 13:11, 9 July 2012 diff hist +527 Vacuum Deposition Recipes
- 13:08, 9 July 2012 diff hist +560 Vacuum Deposition Recipes →Plasma Enhanced Chemical Vapor Deposition (PECVD)
- 12:13, 9 July 2012 diff hist +1 Tool List →Dry Etch
- 12:13, 9 July 2012 diff hist +14 Tool List →Vacuum Deposition
- 11:42, 9 July 2012 diff hist -43 Lab Rules OLD 2018 →Communications and Internet Access
- 10:56, 9 July 2012 diff hist -88 Lab Rules OLD 2018 →Preparing Equipment for Entry into the Nanofab
- 10:45, 9 July 2012 diff hist +25 Vacuum Deposition Recipes →Recipe 1
- 10:44, 9 July 2012 diff hist +40 Vacuum Deposition Recipes
- 10:44, 9 July 2012 diff hist +30 Vacuum Deposition Recipes →E-Beam Evaporation
- 10:42, 9 July 2012 diff hist -114 Lab Rules OLD 2018 →General Nanofab Information
- 10:36, 9 July 2012 diff hist -3 Biljana Stamenic
- 10:36, 9 July 2012 diff hist -32 Biljana Stamenic
- 10:34, 9 July 2012 diff hist -30 Lab Rules OLD 2018 →Film
- 10:33, 9 July 2012 diff hist +454 Lab Rules OLD 2018 →Nanofab Apparel and Gloves
- 10:28, 9 July 2012 diff hist -9 Lab Rules OLD 2018 →Chemical Waste Disposal
- 10:26, 9 July 2012 diff hist -234 Lab Rules OLD 2018
- 10:20, 9 July 2012 diff hist +34,117 N Lab Rules OLD 2018 Created page with "While working in the Nanofab, you are surrounded by dangerous and deadly chemicals, gases, high voltages, radiation, and mechanical systems. The responsibility lies with users a…"
- 18:50, 3 July 2012 diff hist +22 Biljana Stamenic
- 19:26, 2 July 2012 diff hist +30 Staff List
- 17:28, 2 July 2012 diff hist +2 ICP-PECVD (Unaxis VLR)
- 17:28, 2 July 2012 diff hist +1 ICP-Etch (Unaxis VLR)
- 17:25, 2 July 2012 diff hist 0 N File:UnaxisICPInstructions.pdf current
- 17:24, 2 July 2012 diff hist +77 ICP-Etch (Unaxis VLR) →Detailed Specifications
- 17:21, 2 July 2012 diff hist +98 ICP-Etch (Unaxis VLR)
- 17:19, 2 July 2012 diff hist +1,445 N ICP-Etch (Unaxis VLR) Created page with "{{tool|{{PAGENAME}} |picture=UnaxisICP.jpg |type = Dry Etch |super= Tony Bosch |phone=(805)839-3918x217 |location=Bay 1 |email=bosch@ece.ucsb.edu |description = ? |manufacturer =…"
- 16:22, 2 July 2012 diff hist +1 E-Beam 3 (Temescal)
- 11:52, 2 July 2012 diff hist +48 Template:Nav
- 11:50, 2 July 2012 diff hist -14 Template:Links
- 11:50, 2 July 2012 diff hist +13 N File:StripAnnealer.jpg {{toolimage}} current
- 11:49, 2 July 2012 diff hist +1,187 N Strip Annealer Created page with "{{tool|{{PAGENAME}} |picture=StripAnnealer.jpg |type = Thermal Processing |super= Tony Bosch |phone=(805)839-3918x217 |location=Bay 5 |email=bosch@ece.ucsb.edu |description = Str…"
- 11:44, 2 July 2012 diff hist -43 MediaWiki:Sidebar
- 11:43, 2 July 2012 diff hist +82 MediaWiki:Sidebar
- 11:42, 2 July 2012 diff hist +16 N Thermal Processing Recipes Created page with ".... =Recipes="
- 11:42, 2 July 2012 diff hist +16 N Wet Etching Recipes Created page with ".... =Recipes="
- 11:40, 2 July 2012 diff hist +248 N Lithography Recipes Created page with "{{WIP}} *ASML Recipes *GCA Stepper Recipes *Contact Lithography Recipes *Nanoimprint Recipes *Optical Bi-Layer Recipes *E-Beam Lithography Recipes …"
- 11:40, 2 July 2012 diff hist +79 MediaWiki:Sidebar
- 11:39, 2 July 2012 diff hist +3,822 N Dry Etching Recipes Created page with "{| border="1" class="collapsible wikitable" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" |-bgcolor="#D0E7FF" ! colspan=10 height…"
- 11:37, 2 July 2012 diff hist +2 Vacuum Deposition Recipes →Recipes
- 11:37, 2 July 2012 diff hist +49 Vacuum Deposition Recipes
- 11:36, 2 July 2012 diff hist +1 Vacuum Deposition Recipes →=E-Beam Evaporation
- 11:36, 2 July 2012 diff hist +220 Vacuum Deposition Recipes →Recipes
- 11:34, 2 July 2012 diff hist +20 Vacuum Deposition Recipes
- 11:34, 2 July 2012 diff hist +12,511 N Vacuum Deposition Recipes Created page with "{| border="1" class="collapsible wikitable" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center;" |-bgcolor="#D0E7FF" ! colspan=18 height=45 width=1575|…"
- 11:32, 2 July 2012 diff hist -30 MediaWiki:Sidebar
- 11:32, 2 July 2012 diff hist +1 MediaWiki:Sidebar
- 11:32, 2 July 2012 diff hist +29 MediaWiki:Sidebar
- 11:32, 2 July 2012 diff hist -66 MediaWiki:Sidebar
- 11:30, 2 July 2012 diff hist -44 MediaWiki:Sidebar
- 11:28, 2 July 2012 diff hist +288 Template:Nav
- 11:24, 2 July 2012 diff hist +13 N File:WaferThermco.jpg {{toolimage}} current
- 11:24, 2 July 2012 diff hist +1,067 N Tube Furnace Wafer Bonding (Thermco) Created page with "{{tool|{{PAGENAME}} |picture=WaferThermco.jpg |type = Thermal Processing |super= Mike Silva |phone=(805)839-3918x219 |location=Bay 4 |email=silva@ece.ucsb.edu |description = Wafe…"
- 07:52, 2 July 2012 diff hist +13 N File:RTP.jpg {{toolimage}} current
- 07:51, 2 July 2012 diff hist -3 Rapid Thermal Processor (AET RX6)
- 07:49, 2 July 2012 diff hist +2,079 Rapid Thermal Processor (AET RX6)
- 07:40, 2 July 2012 diff hist +1,035 N Probe Station & Curve Tracer Created page with "{{tool|{{PAGENAME}} |picture=ProbeStation.jpg |type = Inspection, Test and Characterization |super= Tony Bosch |phone=(805)839-3918x217 |location=Bay 4 |email=bosch@ece.ucsb.edu …"
- 07:38, 2 July 2012 diff hist +13 N File:Dektak6M.jpg {{toolimage}} current
- 07:37, 2 July 2012 diff hist +1,651 N Step Profilometer (DektakXT) Created page with "{{tool|{{PAGENAME}} |picture=Dektak6M.jpg |type = Inspection, Test and Characterization |super= Mike Silva |phone=(805)839-3918x219 |location=Bay 3 |email=silva@ece.ucsb.edu |des…"
- 13:14, 1 July 2012 diff hist +13 N File:Dektak2A.jpg {{toolimage}} current
- 12:16, 1 July 2012 diff hist +8 N File:TartaricAcidMSDS.pdf {{MSDS}} current
- 12:15, 1 July 2012 diff hist +8 N File:SulfuricAcidFuming.pdf {{MSDS}} current
- 12:15, 1 July 2012 diff hist +8 N File:SulfuricAcid93%MSDS.pdf {{MSDS}} current
- 12:15, 1 July 2012 diff hist +8 N File:SulfamicAcidMSDS.pdf {{MSDS}} current
- 12:15, 1 July 2012 diff hist +8 N File:SuccinicAcid99%MSDS.pdf {{MSDS}} current
- 12:15, 1 July 2012 diff hist +278 Chemical List - OLD 2018-09-05 →Acids
- 12:11, 1 July 2012 diff hist +7 N File:SelenousAcidMSDS.pdf {{MSDS}
- 12:11, 1 July 2012 diff hist +7 N File:OxalicAcidDihydrateMSDS.pdf {{MSDS}
- 12:11, 1 July 2012 diff hist +7 N File:MethacrylicAcidMSDS.pdf {{MSDS}
- 12:10, 1 July 2012 diff hist +7 N File:LacticAcidMSDS.pdf {{MSDS}
- 12:10, 1 July 2012 diff hist +7 N File:LacticAcidFractionalMSDS.pdf {{MSDS}
- 12:10, 1 July 2012 diff hist +7 N File:HydroiodicAcidMSDS.pdf {{MSDS}
- 12:09, 1 July 2012 diff hist +359 Chemical List - OLD 2018-09-05 →Acids
- 12:02, 1 July 2012 diff hist +8 N File:FormicAcidMSDS.pdf {{MSDS}} current
- 12:02, 1 July 2012 diff hist +8 N File:BoricAcidMSDS.pdf {{MSDS}} current
- 12:01, 1 July 2012 diff hist +96 Chemical List - OLD 2018-09-05 →Acids
- 11:33, 1 July 2012 diff hist +1,725 N Sputter 2 (SFI Endeavor) Created page with "{{tool|{{PAGENAME}} |picture=Sputter2.jpg |type = Vacuum Deposition |super= Brian Lingg |phone=(805)839-3918x210 |location=Bay 1 |email=lingg@ece.ucsb.edu |description = 3 chambe…"
- 11:25, 1 July 2012 diff hist +722 N Resistivity Mapper (CDE RESMAP) Created page with "{{tool|{{PAGENAME}} |picture=CDEResmap.jpg |type = Inspection, Test and Characterization |super= Tony Bosch |phone=(805)839-3918x217 |location=Bay ? |email=bosch@ece.ucsb.edu |de…"
- 11:19, 1 July 2012 diff hist +13 N File:VeecoNanoman.jpg {{toolimage}}
- 09:57, 1 July 2012 diff hist 0 Optical Film Thickness (Nanometric)
- 09:54, 1 July 2012 diff hist 0 Tool List →Inspection, Test and Characterization
- 09:54, 1 July 2012 diff hist +994 N Film Stress (Tencor Flexus) Created page with "{{tool|{{PAGENAME}} |picture=Tencor.jpg |type = Inspection, Test and Characterization |super=Mike Silva |phone=(805)839-3918x219 |location=Bay ? |email=silva@ece.ucsb.edu |descri…"
- 09:49, 1 July 2012 diff hist +1,087 N Optical Film Thickness (Filmetrics) Created page with "{{tool|{{PAGENAME}} |picture=Filmmetrics.jpg |type = Inspection, Test and Characterization |super= Tony Bosch |phone=(805)839-3918x217 |location=Bay ? |email=bosch@ece.ucsb.edu |…"
- 09:31, 1 July 2012 diff hist +1,055 N Ellipsometer (Woollam) Created page with "{{tool|{{PAGENAME}} |picture = Woollam.jpg |type = Inspection, Test and Characterization |super = Brian Thibeault |phone = (805)839-2268 |email = thibeault@ece.ucsb.edu |locatio…"
- 09:17, 1 July 2012 diff hist +16 Template:Tool
- 09:16, 1 July 2012 diff hist +84 Template:Tool
- 09:16, 1 July 2012 diff hist 0 File:OlympusLEXT.jpg uploaded a new version of "File:OlympusLEXT.jpg": removed border current
- 09:15, 1 July 2012 diff hist +13 N File:OlympusLEXT.jpg {{toolimage}}
- 09:15, 1 July 2012 diff hist +664 N Laser Scanning Confocal M-scope (Olympus LEXT) Created page with "{{tool|{{PAGENAME}} |picture=OlympusLEXT.jpg |type = Inspection, Test and Characterization |super= Tony Bosch |phone=(805)839-3918x217 |location=Bay 4 |email=bosch@ece.ucsb.edu |…"
- 09:13, 1 July 2012 diff hist +23 Optical Film Thickness (Nanometric)
- 09:13, 1 July 2012 diff hist -1 Optical Film Thickness (Nanometric)
- 09:12, 1 July 2012 diff hist +13 N File:Nanometric.jpg {{toolimage}}
- 09:12, 1 July 2012 diff hist +1,587 N Optical Film Thickness (Nanometric) Created page with "{{tool|{{PAGENAME}} |picture=Nanometric.jpg |type = Wet Processing |super= Tony Bosch |phone=(805)839-3918x217 |location=Bay ? |email=bosch@ece.ucsb.edu |description = Reflectome…"
- 08:37, 1 July 2012 diff hist +13 N File:QFI.jpg {{toolimage}} current
- 08:32, 1 July 2012 diff hist +1,582 N IR Thermal Microscope (QFI) Created page with "{{tool|{{PAGENAME}} |picture=QFI.jpg |type = Inspection, Test and Characterization |super= Brian Lingg |phone=(805)839-3918x210 |location=Bay 2 |email=lingg@ece.ucsb.edu |descrip…"
- 08:30, 1 July 2012 diff hist -1 PECVD 1 (PlasmaTherm 790)
- 08:29, 1 July 2012 diff hist +1,041 N Field Emission SEM 2 (JEOL IT800SHL) Created page with "{{tool|{{PAGENAME}} |picture=JeolFesem.jpg |type = Inspection, Test and Characterization |super= Bill Mitchell |phone= (805)893-4974 |location=Bay 1 |email=mitchell@ece.ucsb.edu …"
- 08:27, 1 July 2012 diff hist +1 Tool List →Inspection, Test and Characterization
- 08:23, 1 July 2012 diff hist +13 N File:Ellipsometer.jpg {{toolimage}} current
- 08:23, 1 July 2012 diff hist +1,101 N Ellipsometer (Rudolph) Created page with "{{tool|{{PAGENAME}} |picture=Ellipsometer.jpg |type = Inspection, Test and Characterization |super= Mike Silva |phone=(805)839-3918x219 |location=Bay ? |email=silva@ece.ucsb.edu …"
- 07:41, 1 July 2012 diff hist +13 N File:Ashers.jpg {{toolimage}} current
- 07:41, 1 July 2012 diff hist +1,349 N Ashers (Technics PEII) Created page with "{{tool|{{PAGENAME}} |picture=Ashers.jpg |type = Dry Etch |super= Adam Abrahamsen |phone=(805)839-3918x213 |location=Bay 5 |email=abrahamsen@ece.ucsb.edu |description = Plasma Etc…"
- 07:37, 1 July 2012 diff hist +887 N Plasma Clean (Gasonics 2000) Created page with "{{tool|{{PAGENAME}} |picture=Gasonics.jpg |type = Dry Etch |super= Mike Silva |phone=(805)839-3918x219 |location=Bay 5 |email=silva@ece.ucsb.edu |description = Aura 2000-LL Downs…"
- 07:35, 1 July 2012 diff hist +13 N File:EVG.jpg {{toolimage}} current