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- 11:08, 28 September 2023 diff hist +210 ICP Etching Recipes →Si Etching (Fluorine ICP Etcher): added proces snotes / 99% PR mask issue Tag: Visual edit
- 16:02, 27 September 2023 diff hist 0 m Usage Data and Statistics →Numbers of Annual Users Tag: Visual edit
- 11:46, 27 September 2023 diff hist 0 m Nanofab Staff Internal Pages Protected "Nanofab Staff Internal Pages" ([Edit=Allow only administrators] (indefinite) [Move=Allow only administrators] (indefinite))
- 09:37, 27 September 2023 diff hist +62 Nanofab New User Onboarding silva's corrections Tag: Visual edit
- 09:31, 27 September 2023 diff hist -82 Staff List moved Aidan --> Equip, deleted Lingg Tag: Visual edit
- 20:48, 26 September 2023 diff hist -22 Holographic Lith/PL Setup (Custom) cusotme system, updated supervisor current
- 20:45, 26 September 2023 diff hist +13 Photoluminescence PL Setup (Custom) current
- 20:45, 26 September 2023 diff hist +29 Photoluminescence PL Setup (Custom)
- 20:45, 26 September 2023 diff hist -45 Photoluminescence PL Setup (Custom) supervisor = Demis
- 20:43, 26 September 2023 diff hist +113 Holographic Lith/PL Setup (Custom) →Detailed Specifications: minor updates to specs Tag: Visual edit
- 11:51, 26 September 2023 diff hist +23 Nanofab Staff Internal Pages moved onboarding to new "administration" section Tag: Visual edit
- 15:41, 25 September 2023 diff hist +2,217 N Nanofab New User Onboarding inital page Tag: Visual edit
- 14:49, 25 September 2023 diff hist +56 Nanofab Job Postings all positions filled Tag: Visual edit
- 13:47, 25 September 2023 diff hist +226 Nanofab Staff Internal Pages →Useful UCSB Pages: link to New User Onboarding pages Tag: Visual edit
- 14:11, 22 September 2023 diff hist +19 m GCA 6300 Mask Making Guidance current
- 14:09, 22 September 2023 diff hist +15 m Autostep 200 Mask Making Guidance
- 14:08, 22 September 2023 diff hist +122 Contact Aligner (SUSS MA-6) →Documentation: link to UCSB mask ordering procedure current Tag: Visual edit
- 14:08, 22 September 2023 diff hist +122 Suss Aligners (SUSS MJB-3) →Documentation: link to mask ordering info for UCSB users Tag: Visual edit
- 14:06, 22 September 2023 diff hist +110 Autostep 200 Mask Making Guidance link to UCSB purchasing info Tag: Visual edit
- 14:06, 22 September 2023 diff hist +81 GCA 6300 Mask Making Guidance link to purchainf for UCSB users Tag: Visual edit
- 14:05, 22 September 2023 diff hist +941 N Photomask Ordering Procedure for UCSB Users pasted procedure from email current Tag: Visual edit
- 21:39, 21 September 2023 diff hist +21 IBD: Calibrating Optical Thickness added category Process
- 21:36, 21 September 2023 diff hist +145 Sputtering Recipes →Ion Beam Deposition (Veeco NEXUS) current Tag: Visual edit
- 21:33, 21 September 2023 diff hist +10 Ion Beam Deposition (Veeco NEXUS) →Recipes Tag: Visual edit
- 21:32, 21 September 2023 diff hist +12 Laser Etch Monitoring added CObra to location list Tag: Visual edit
- 21:32, 21 September 2023 diff hist +1,242 Laser Etch Monitoring added Limitations section Tag: Visual edit
- 18:32, 20 September 2023 diff hist 0 Template:News fixed links
- 18:31, 20 September 2023 diff hist +143 Template:News new JEOL SEM's
- 18:26, 20 September 2023 diff hist +1,829 N Homepage Draft1 pasted Main_Page source code
- 16:46, 20 September 2023 diff hist +308 Holographic Lith/PL Setup (Custom) header level set correctly, link to recipes page Tag: Visual edit
- 06:44, 19 September 2023 diff hist +22 Stepper Recipes →Positive Resist (ASML DUV): UV26 updates from data sheet Tag: Visual edit
- 17:15, 15 September 2023 diff hist +150 IBD: Calibrating Optical Thickness fixed formula newlines Tag: Visual edit: Switched
- 17:08, 15 September 2023 diff hist +105 IBD: Calibrating Optical Thickness formatting updates to equations Tag: Visual edit
- 17:03, 15 September 2023 diff hist +20 m IBD: Calibrating Optical Thickness Tag: Visual edit
- 17:03, 15 September 2023 diff hist +158 IBD: Calibrating Optical Thickness added publication policy Tag: Visual edit
- 15:16, 15 September 2023 diff hist +898 Calculators + Utilities →CAD Design Tips: minor updates, mentioend AutoCAD Tag: Visual edit
- 10:41, 15 September 2023 diff hist +513 ASML 5500: Recovering from an Error updated, linked to Error Logs section current Tag: Visual edit
- 10:36, 15 September 2023 diff hist +31 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →Error Logs: made name more descriptive current Tag: Visual edit
- 13:02, 13 September 2023 diff hist -12 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →Exposing with corrected Focus Offset from IQC Tag: Visual edit: Switched
- 12:59, 13 September 2023 diff hist +17 m ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →Important Warnings Tag: Visual edit
- 12:55, 13 September 2023 diff hist +52 m ASML Stepper 3 Error Recovery, Troubleshooting and Calibration explain software login Tag: Visual edit
- 12:54, 13 September 2023 diff hist +5 m ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →IQC (Image Quality Control) Calibration Check: indent image Tag: Visual edit: Switched
- 12:52, 13 September 2023 diff hist -3 m ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →IQC (Image Quality Control) Calibration Check: moved IQC screenshot up Tag: Visual edit
- 12:50, 13 September 2023 diff hist 0 File:ASML IQC Focus Mean Correction screenshot.jpg John d uploaded a new version of File:ASML IQC Focus Mean Correction screenshot.jpg current
- 12:46, 13 September 2023 diff hist +4 m Stepper 3 (ASML DUV) →Process Information Tag: Visual edit
- 12:45, 13 September 2023 diff hist +546 Stepper 3 (ASML DUV) →Process Information: Updated Wafer Bow requirements Tag: Visual edit
- 11:17, 13 September 2023 diff hist +1,395 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration added error log reading section Tag: Visual edit
- 11:09, 13 September 2023 diff hist +81 N File:ASML Stepper 3 - HELP button error log screenshot.png current
- 15:33, 12 September 2023 diff hist +14 Tool List →Electron Microscopy: renamed and fixed link for SEM2 Tag: Visual edit
- 15:32, 12 September 2023 diff hist -1,849 Field Emission SEM 2 (JEOL IT800SHL) copied page from SEM1, linked to SEM1 page.
- 15:20, 12 September 2023 diff hist +50 N Field Emission SEM 2 (JEOL 7600F) John d moved page Field Emission SEM 2 (JEOL 7600F) to Field Emission SEM 2 (JEOL IT800SHL): new tool., old tool replaced current Tag: New redirect
- 15:20, 12 September 2023 diff hist 0 m Field Emission SEM 2 (JEOL IT800SHL) John d moved page Field Emission SEM 2 (JEOL 7600F) to Field Emission SEM 2 (JEOL IT800SHL): new tool., old tool replaced
- 08:14, 12 September 2023 diff hist +45 m ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →Important Warnings Tag: Visual edit
- 16:46, 11 September 2023 diff hist +436 NanoFab Process Group Examples for Users section, with Links to Example Trello Job Board & example google drive folder. current Tag: Visual edit
- 10:08, 9 September 2023 diff hist +299 Oxygen Plasma System Recipes →N2/O2 Recipes: clarified recipe renaming, and hearing of wafers Tag: Visual edit
- 15:02, 6 September 2023 diff hist -14 m Template:Announcements →Dicing Saw (ADT) Upgrade 10/9 - PLEASE READ: deleted "PLEASE READ"
- 09:10, 2 September 2023 diff hist +951 KLayout Design Tips How to print text Tag: Visual edit
- 09:02, 2 September 2023 diff hist -25 m Calculators + Utilities →KLayout Tag: Visual edit
- 15:33, 28 August 2023 diff hist +42 Stepper 2 (AutoStep 200) Operating Procedures →Other Useful links for this system:: explained Quick vs Detailed Tag: Visual edit
- 14:53, 28 August 2023 diff hist +9 m ICP Etching Recipes →Through Silicon Via etch (DSEiii) Tag: Visual edit
- 14:52, 28 August 2023 diff hist +164 ICP Etching Recipes →Through Silicon Via etch (DSEiii): added link to publication policy Tag: Visual edit
- 14:43, 28 August 2023 diff hist +25 ICP Etching Recipes →Through Silicon Via etch (DSEiii): mention PR thickness requirement Tag: Visual edit
- 14:36, 28 August 2023 diff hist +26 Stepper 2 (AutoStep 200) Operating Procedures heading for useful links Tag: Visual edit
- 14:34, 28 August 2023 diff hist +251 Stepper 2 (AutoStep 200) Operating Procedures links to other pages at top Tag: Visual edit
- 17:16, 21 August 2023 diff hist +4 m Frequently Asked Questions →Authorship on Publications Tag: Visual edit
- 17:16, 21 August 2023 diff hist +149 Frequently Asked Questions →Publications acknowledging the Nanofab: link to LIGO papers with >1000 authors Tag: Visual edit
- 11:14, 20 August 2023 diff hist +84 Stepper 3 (ASML DUV) →Process Information: added maximu. Dose & disallowed EVL PR’s Tag: Visual edit
- 11:08, 20 August 2023 diff hist +177 Stepper 3 (ASML DUV) Added KrF and some more info on piece part, and removed unnecessary heading Tag: Visual edit
- 10:07, 15 August 2023 diff hist +10 MediaWiki:Sidebar Added link to process control data pages
- 10:04, 15 August 2023 diff hist +134 Process Group - Process Control Data move TOC below intro Tag: Visual edit: Switched
- 10:03, 15 August 2023 diff hist +139 Process Group - Process Control Data description of process control data
- 09:58, 15 August 2023 diff hist +61 MediaWiki:Sidebar Added link to process control data pages
- 09:56, 9 August 2023 diff hist +183 MLA150 - Troubleshooting →Greyscale Lithography Limitations: updated that X-Y alignment may work, just not rotation. Tag: Visual edit
- 07:14, 9 August 2023 diff hist -16 Oxygen Plasma System Recipes →O2-Only Recipes: removed "To be added", as these recipes are currently on the tool Tag: Visual edit
- 17:07, 8 August 2023 diff hist +443 Sputtering Recipes added Sputter 3 ignition issues Tag: Visual edit
- 20:42, 7 August 2023 diff hist +69 Maskless Aligner (Heidelberg MLA150) →Video Trainings: added training procedure Tag: Visual edit
- 12:50, 7 August 2023 diff hist +119 Stepper 3 (ASML DUV) added minimum wafer thickness Tag: Visual edit
- 12:47, 7 August 2023 diff hist +89 m Wafer Bonder (Logitech WBS7) →Recipes: minro note of what is in the recipe sections Tag: Visual edit
- 13:54, 4 August 2023 diff hist +67 Maskless Aligner (Heidelberg MLA150) →About: link to greyscale limitations page. Tag: Visual edit
- 15:40, 2 August 2023 diff hist +630 Template:Announcements mla150 annc
- 10:04, 1 August 2023 diff hist +146 Oxygen Plasma System Recipes →O2-Only Recipes: note on dim plasma Tag: Visual edit
- 14:32, 30 July 2023 diff hist +1,820 MLA150 - Troubleshooting Greyscale limitations Tag: Visual edit
- 15:57, 20 July 2023 diff hist +172 Maskless Aligner (Heidelberg MLA150) →Video Trainings: note on training proceudre Tag: Visual edit
- 16:50, 18 July 2023 diff hist +13 Field Emission SEM 2 (JEOL IT800SHL) →Operating Procedures: uplaoded SOP v08.12 from Mitchell Tag: Visual edit
- 16:49, 18 July 2023 diff hist +40 N File:JEOL 7600F UserManual.pdf v08.12, from Bill Mitchell current
- 16:09, 17 July 2023 diff hist -19 m Oxygen Plasma System Recipes →O2 Recipe Characterization Tag: Visual edit
- 16:02, 17 July 2023 diff hist +1,512 Oxygen Plasma System Recipes →Plasma Clean (YES EcoClean): updates, explained Gold oxidation etc. Placeholders for recipe names Tag: Visual edit
- 15:40, 17 July 2023 diff hist -8 Dry Etching Recipes deleted extra blank column, linked Technics & YES Ecoclean to recipes page. Tag: Visual edit
- 18:48, 8 July 2023 diff hist +155 Packaging Recipes →Photoresist: added to use squirt bottles. Tag: Visual edit
- 20:43, 7 July 2023 diff hist +18 UCSB NanoFab Microscope Training →Measurements Tag: Visual edit
- 05:29, 28 June 2023 diff hist +1 m ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →Exposing with corrected Focus Offset via IQC Tag: Visual edit
- 04:21, 28 June 2023 diff hist +220 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →Important Warnings: explain how to bring warnings window to front Tag: Visual edit
- 04:17, 28 June 2023 diff hist +160 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →IQC (Image Quality Control) Calibration Check: added subheading for “exposing with IQC correction” Tag: Visual edit
- 12:10, 23 June 2023 diff hist +202 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) →Documentation: link to Manual edge bead removal page Tag: Visual edit
- 12:08, 23 June 2023 diff hist +96 Photolithography - Manual Edge-Bead Removal Techniques →EBR100 Swabbing: minor description about ebr wicking / drying Tag: Visual edit
- 15:45, 21 June 2023 diff hist +64 Rapid Thermal Processor (SSI Solaris 150) Added “RTA” and abbreviations for searchability Tag: Visual edit
- 13:13, 20 June 2023 diff hist +6 m Photolithography - Manual Edge-Bead Removal Techniques →Lithographic Edge Bead Removal Tag: Visual edit
- 22:37, 15 June 2023 diff hist +346 m Wet Etching Recipes table: link to Piranha section Tag: Visual edit
- 22:32, 15 June 2023 diff hist -1,111 m Wet Etching Recipes →Organic removal: headings for Organics Removal section Tag: Visual edit
- 22:15, 15 June 2023 diff hist +6 Wet Etching Recipes →Table of Wet Etching Recipes: InGaAs exothermic comment Tag: Visual edit
- 22:14, 15 June 2023 diff hist +97 Wet Etching Recipes →Table of Wet Etching Recipes: Added InP & InGaAs selective etches for stop-etch Tag: Visual edit
- 21:33, 15 June 2023 diff hist -238 Wet Etching Recipes →Table of Wet Etching Recipes: added selective substrate removal recipes for GaAs/AlGaAs (from Garrett Cole), oxide removal dips for InP, GaAs (from memory) Tag: Visual edit
- 10:27, 15 June 2023 diff hist +153 Atomic Layer Deposition Recipes →Oxford FlexAL Chamber #1: Metals: added BDEAS recipe - needs more info current Tag: Visual edit
- 14:01, 14 June 2023 diff hist +944 Direct-Write Lithography Recipes →Greyscale Lithography (MLA150): adde dgresyscale starter process Tag: Visual edit
- 13:52, 14 June 2023 diff hist +232 Direct-Write Lithography Recipes →Positive Resist (MLA150): explain rehydration step Tag: Visual edit
- 13:38, 14 June 2023 diff hist +219 Direct-Write Lithography Recipes →Positive Resist (MLA150): added SPR220-7.0, from Lubin greyscale project Tag: Visual edit
- 13:23, 14 June 2023 diff hist +1 Template:Announcements →NanoFan Lab is UP: typo
- 16:05, 12 June 2023 diff hist +61 Wet Benches added NEVER heat: ISO, Toluene etc. Tag: Visual edit
- 11:42, 12 June 2023 diff hist +106 Wet Benches →Detailed Specifications: minor updates, clarified that NMP can be heated, ACE can not Tag: Visual edit
- 08:08, 8 June 2023 diff hist +258 Microscopes →Microscope #7: Olympus DSX1000 Digital Microscope (Bay 4): minor updates to specs Tag: Visual edit
- 23:37, 5 June 2023 diff hist +113 Surface Analysis (KLA/Tencor Surfscan) added high-particles images Tag: Visual edit
- 23:36, 5 June 2023 diff hist +38 N File:Surfscan 230113A7G2 after low particles.jpg current
- 23:35, 5 June 2023 diff hist +39 N File:Surfscan - 230113A7 Gain4 high particles.jpg current
- 12:08, 2 June 2023 diff hist 0 File:PECVD1 SiN Stress vs. N2 plot.jpg John d uploaded a new version of File:PECVD1 SiN Stress vs. N2 plot.jpg current
- 11:55, 2 June 2023 diff hist -130 PECVD Recipes →Low Stress Si3N4 (PECVD#1): deleted process control data link Tag: Visual edit
- 11:55, 2 June 2023 diff hist +1 m PECVD Recipes →Low Stress Si3N4 (PECVD#1): indent image Tag: Visual edit: Switched
- 11:54, 2 June 2023 diff hist +428 PECVD Recipes →SiOxNy deposition (PECVD #1): added SiN stress vs. N2 plot Tag: Visual edit
- 11:52, 2 June 2023 diff hist +209 N File:PECVD1 SiN Stress vs. N2 plot.jpg
- 11:30, 1 June 2023 diff hist -64 Oxygen Plasma System Recipes →Plasma Clean (YES EcoClean): deleted false link Tag: Visual edit
- 11:29, 1 June 2023 diff hist +277 Oxygen Plasma System Recipes →Plasma Clean (YES EcoClean): added sub headings to N2/O2, link to new page Tag: Visual edit
- 10:28, 27 May 2023 diff hist +68 Calculators + Utilities →General CAD files for Litho: added authorship to some CAD files Tag: Visual edit
- 11:33, 25 May 2023 diff hist +118 Stepper 3 (ASML DUV) →Resists Used: mnetiuon EBL compatibility Tag: Visual edit
- 11:31, 25 May 2023 diff hist +35 Stepper 3 (ASML DUV) →About: separated "resist info" to it's own heading Tag: Visual edit
- 10:35, 23 May 2023 diff hist +220 ICP-PECVD (Unaxis VLR) added Process Control Data section current Tag: Visual edit
- 16:41, 18 May 2023 diff hist +813 Process Group - Process Control Data →Stepper #3 (ASML DUV): included example images
- 16:40, 18 May 2023 diff hist +1 m Stepper 3 (ASML DUV) →Process Control Data Tag: Visual edit
- 16:40, 18 May 2023 diff hist -1 m Stepper 3 (ASML DUV) →Process Control Data
- 16:39, 18 May 2023 diff hist +254 m Stepper 3 (ASML DUV) →Process Control Data Tag: Visual edit
- 16:37, 18 May 2023 diff hist +209 m Stepper 3 (ASML DUV) →Process Control Data: images link to data now
- 16:35, 18 May 2023 diff hist +360 Stepper 3 (ASML DUV) →Process Control Data: added example images of Process Control Data Tag: Visual edit: Switched
- 16:30, 18 May 2023 diff hist +39 N File:ASML CD Cals - Example Plot.jpg current
- 16:28, 18 May 2023 diff hist +46 N File:ASML CD Cals - Example Table.jpg current
- 15:13, 18 May 2023 diff hist +32 Direct-Write Lithography Recipes →Positive Resist (MLA150) Tag: Visual edit
- 10:34, 15 May 2023 diff hist -408 PECVD Recipes →ICP-PECVD (Unaxis VLR): moved "old recipe" links, fixred gDrive sharing settings Tag: Visual edit
- 22:05, 10 May 2023 diff hist +44 N File:SEM1 JEOL IT800HSL.jpg photo of SEM #1, JEOL IT800HSL current
- 22:01, 10 May 2023 diff hist +178 Microscopes →Microscope #8: AmScope Wide Field of View Stereoscope (Bay 4): added photo Tag: Visual edit: Switched
- 21:58, 10 May 2023 diff hist +45 N File:Amscope Stereoscope Photo.jpg current
- 21:51, 10 May 2023 diff hist +32 N File:DektakXT.jpg image of Dektak XT current
- 21:51, 10 May 2023 diff hist +40 Step Profilometer (DektakXT) changed image, linked to mfg. current Tag: Visual edit: Switched
- 12:35, 10 May 2023 diff hist +5 SEM 1 (JEOL IT800SHL) →Imaging
- 12:34, 10 May 2023 diff hist +14 SEM 1 (JEOL IT800SHL) cahnged tool pic
- 12:34, 10 May 2023 diff hist +2,712 N SEM 1 (JEOL IT800SHL) iniital page copied from SEM2 Tag: Visual edit: Switched
- 12:25, 10 May 2023 diff hist +7 Tool List →Electron Microscopy: changed links to just "SEM 1/2" and included model number of SEM1, and link to new SEM1 page. Tag: Visual edit
- 23:33, 4 May 2023 diff hist +93 Oxford ICP Etcher (PlasmaPro 100 Cobra) →Documentation: mentioend travelers for etches current Tag: Visual edit
- 11:18, 28 April 2023 diff hist +205 Contact Aligner (SUSS MA-6) →About: explained BSA a bit more. Tag: Visual edit
- 11:16, 28 April 2023 diff hist +163 Contact Aligner (SUSS MA-6) mentioned motorized systems Tag: Visual edit
- 11:15, 28 April 2023 diff hist +101 Suss Aligners (SUSS MJB-3) mentioned that systems are manual, not motorizd. Tag: Visual edit
- 11:13, 28 April 2023 diff hist +30 Tool List →Contact Aligners (Optical Exposure): changed "suss aligners" --> "contact aligners" Tag: Visual edit
- 10:02, 28 April 2023 diff hist +254 Calculators + Utilities →General CAD files for Litho: added schematics Tag: Visual edit
- 10:00, 28 April 2023 diff hist +35 N File:Vented font screnshot.jpg current
- 09:57, 28 April 2023 diff hist +45 N File:Vernier Template v2 screenshot.jpg current
- 09:54, 28 April 2023 diff hist 0 File:Vernier Template.gds John d uploaded a new version of File:Vernier Template.gds
- 09:52, 28 April 2023 diff hist +35 File:Vernier Template.gds →Summary: update date Tag: Visual edit
- 09:51, 28 April 2023 diff hist 0 File:Vernier Template.gds John d uploaded a new version of File:Vernier Template.gds
- 14:52, 27 April 2023 diff hist +225 Stepper 3 (ASML DUV) →Design Tools: CAD files links Tag: Visual edit
- 14:49, 27 April 2023 diff hist +191 Stepper 2 (AutoStep 200) →CAD Files: link to general CAD files Tag: Visual edit
- 14:48, 27 April 2023 diff hist +190 Stepper 1 (GCA 6300) →CAD Files: link to general CAD tempaltes Tag: Visual edit
- 14:47, 27 April 2023 diff hist +101 Calculators + Utilities →CAD Files & Templates: Added heading for general files, description for verniers Tag: Visual edit
- 14:46, 27 April 2023 diff hist +223 MLA150 - CAD Files and Templates link to general CAD file templates Tag: Visual edit
- 14:11, 26 April 2023 diff hist -13 m Frequently Asked Questions →Authorship on Publications Tag: Visual edit
- 12:44, 26 April 2023 diff hist +1,284 N Ellipsometer (Woollam) - Measuring thin dielectrics with Native Oxide pre-measurement added basic description & steps referring to for details, Measuring_thin_metals_with_oxide_pre-measurement current Tag: Visual edit
- 12:37, 26 April 2023 diff hist +205 Ellipsometer (Woollam) →Operating Procedures: link to thin dielectric meas, pre-meas NatOx Tag: Visual edit
- 10:52, 26 April 2023 diff hist +640 Logitech WBS7 - Procedure for Wax Mounting with bulk Crystalbond Stick updated to 150°C, quantity of wax for 4-inch wafers, and place both wafers in contact on hotplate, not on Logitech. current Tag: Visual edit
- 10:36, 26 April 2023 diff hist +413 Logitech WBS7 - Procedure for Wax Mounting with bulk Crystalbond Stick comment about wax on filter paper Tag: Visual edit
- 09:16, 26 April 2023 diff hist +349 ICP Etching Recipes →Through Silicon Via etch (DSEiii): wax mounting warnings + updates Tag: Visual edit
- 09:10, 26 April 2023 diff hist +272 ICP Etching Recipes →Through Silicon Via etch (DSEiii): publication policy on TSV process Tag: Visual edit
- 23:28, 25 April 2023 diff hist +355 Ion Beam Deposition (Veeco NEXUS) added schematic of ion beam Tag: Visual edit
- 23:27, 25 April 2023 diff hist 0 File:IBD Schematic.jpg John d uploaded a new version of File:IBD Schematic.jpg current
- 23:23, 25 April 2023 diff hist +33 N File:IBD Schematic.jpg
- 13:59, 23 April 2023 diff hist +242 ASML Stepper 3 Standard Operating Procedure →Running a focus and/or exposure matrix: new heading for schematics current Tag: Visual edit
- 14:52, 19 April 2023 diff hist +373 Template:News amscope entry
- 14:51, 19 April 2023 diff hist -10 Microscopes →Microscope #6: AmScope Wide Field of View Stereoscope (Bay 4): changed to Scope #8 Tag: Visual edit
- 14:50, 19 April 2023 diff hist +520 Microscopes Scope #6 initial entry - needs updating Tag: Visual edit
- 14:51, 17 April 2023 diff hist 0 File:Vented font DDJ.gds John d uploaded a new version of File:Vented font DDJ.gds current
- 14:50, 17 April 2023 diff hist +138 Calculators + Utilities →CAD Files & Templates: added instructions for vented font installation Tag: Visual edit
- 09:42, 16 April 2023 diff hist 0 Template:News moved new SEM 1 week earlier
- 09:41, 16 April 2023 diff hist +601 Template:News New SEM and New Scribe+Break
- 20:11, 14 April 2023 diff hist +811 N Automated Wafer Cleaver (Loomis LSD-155LT) initial page Tag: Visual edit: Switched
- 20:06, 14 April 2023 diff hist +55 Tool List →Die Singulation / Down-sizing: link to new Loomis Wafer Cleaver page Tag: Visual edit
- 15:37, 4 April 2023 diff hist +64 Aidan Hopkins →Tools: fixed DSE & wafer bench links
- 15:35, 4 April 2023 diff hist 0 Aidan Hopkins →Tools: fixed wafer bonder link
- 15:35, 4 April 2023 diff hist +6 Aidan Hopkins →Tools: fixed SEM#2 link
- 15:33, 4 April 2023 diff hist +74 E-Beam Lithography Recipes changed SEM#1 link and Nabity title in prep for new SEM current
- 00:52, 3 April 2023 diff hist +323 MLA150 - CAD Files and Templates →Resolution and Calibration Patterns: details on CAD files available on MLA150 computer Tag: Visual edit
- 00:45, 3 April 2023 diff hist +488 Calculators + Utilities →CAD Files & Templates: Added Verniers link & linked to MEMs-exchange, EPFL, and Tag: Visual edit
- 10:32, 2 April 2023 diff hist +1,343 Calculators + Utilities →Example CAD File: links to various lithography system CAD files, vented fonts etc. Tag: Visual edit
- 10:07, 2 April 2023 diff hist +85 N File:Vented font DDJ.gds Vented Font - a font good for liftoff (no enclosed holes), GDS CAD file
- 13:10, 21 March 2023 diff hist +385 Wafer scanning process traveler →Wafers to Use: mention regular prime grade Tag: Visual edit
- 13:07, 21 March 2023 diff hist +21 m Wafer scanning process traveler Tag: Visual edit
- 13:07, 21 March 2023 diff hist +1,043 Wafer scanning process traveler →Data Recording: updated surfscan photos, added examples of before/after and high particle photos. Tag: Visual edit
- 13:03, 21 March 2023 diff hist +57 N File:Surfscan P1 SiN 221208Z5G4 after.jpg current
- 12:59, 21 March 2023 diff hist +37 N File:Surfscan G4 before example - P1 230317E7G4 before.jpg current
- 12:56, 21 March 2023 diff hist 0 File:UCSBTEST1.png John d uploaded a new version of File:UCSBTEST1.png current
- 12:55, 21 March 2023 diff hist 0 File:UCSBTEST2 .png John d uploaded a new version of File:UCSBTEST2 .png current
- 16:24, 20 March 2023 diff hist +122 Calculators + Utilities →KLayout: like to U. waterloo KLayout vids Tag: Visual edit
- 16:05, 20 March 2023 diff hist +1,728 N Oxford Etcher - Sample Size Effect on Etch Rate pasted from old Process Control Dataa: Oxford_ICP_Etcher_-_Process_Control_Data current Tag: Visual edit: Switched
- 16:05, 20 March 2023 diff hist +179 ICP Etching Recipes →Process Control Data (Oxford ICP Etcher): link to Sample Size effect on ER Tag: Visual edit
- 16:02, 20 March 2023 diff hist +41 m Template:News link to all data
- 11:04, 20 March 2023 diff hist +3 Template:Announcements corected SEM #2 --> SEM#1
- 22:01, 18 March 2023 diff hist +27 N User:Mehalana v redirects to Vraj's correct staff page current Tags: New redirect Visual edit: Switched
- 10:27, 16 March 2023 diff hist -8 Stepper 3 (ASML DUV) →Operating Procedures: moved training procedure above Tag: Visual edit
- 12:22, 15 March 2023 diff hist +19 GCA 6300 Mask Making Guidance link to Autostep 200 mask page
- 12:21, 15 March 2023 diff hist +97 GCA 6300 Mask Making Guidance
- 12:16, 15 March 2023 diff hist 0 m Stepper 2 (AutoStep 200) →Process Information Tag: Visual edit
- 12:16, 15 March 2023 diff hist +25 m Stepper 2 (AutoStep 200) →Process Information Tag: Visual edit
- 12:15, 15 March 2023 diff hist +180 Stepper 2 (AutoStep 200) copied Mask making link to SOP section as well, minor formatting elsewhere. Tag: Visual edit
- 10:31, 15 March 2023 diff hist +2,035 Autostep 200 Mask Making Guidance addded Submission Details section Tag: Visual edit
- 16:23, 13 March 2023 diff hist 0 File:Single centered mask-Piece 2nd litho AUTOSTEP 200.pptx John d uploaded a new version of File:Single centered mask-Piece 2nd litho AUTOSTEP 200.pptx current
- 14:09, 10 March 2023 diff hist +643 Stepper Recipes →Stepper 3 (ASML DUV): added Process Control Data section
- 14:07, 10 March 2023 diff hist +45 m Process Group - Process Control Data Litho to Top of page, link to ASML recipes page
- 14:04, 10 March 2023 diff hist +738 Process Group - Process Control Data New Litho section + Stepper3 ASML section with links to process control data Tag: Visual edit: Switched
- 14:01, 10 March 2023 diff hist +1,321 Stepper 3 (ASML DUV) link to Process Control Data Tag: Visual edit
- 15:36, 5 March 2023 diff hist +114 XeF2 Etch (Xetch) Link to recipes oage Tag: Visual edit
- 00:17, 26 February 2023 diff hist +14 Template:Announcements →Flip-Chip Bonder repair
- 20:12, 25 February 2023 diff hist -16 Template:Announcements FCB update
- 10:17, 25 February 2023 diff hist +8 m Step Profilometer (DektakXT) added date of replacement Tag: Visual edit
- 16:00, 23 February 2023 diff hist +797 PECVD Recipes →ICP-PECVD (Unaxis VLR): cleaned up process control section, and added 800nm max SiO2 thickness before cleaning Tag: Visual edit
- 15:01, 21 February 2023 diff hist -51 Probe Station: I-V Curves with Keithley 2400 and Python Script anaconda inzstruction current Tag: Visual edit
- 09:53, 20 February 2023 diff hist +56 ICP Etching Recipes →Process Control Data (Oxford ICP Etcher): linked to new google sheets data Tag: Visual edit
- 21:45, 16 February 2023 diff hist +37 Photolithography - Manual Edge-Bead Removal Techniques →Lithographic Edge Bead Removal: link to DUV FLood exposure Tag: Visual edit
- 21:43, 16 February 2023 diff hist +2 m Lithography Recipes fixed link Tag: Visual edit
- 21:42, 16 February 2023 diff hist +2 m Lithography Recipes remove TOC again
- 21:42, 16 February 2023 diff hist +36 Lithography Recipes →General Photolithography Techniques: made each section a linkable header level Tag: Visual edit
- 21:40, 16 February 2023 diff hist -2 m Lithography Recipes add TOC to get header link
- 12:36, 14 February 2023 diff hist +995 Frequently Asked Questions →General NanoFab Questions: added "what supplies do i need to bring?" Tag: Visual edit
- 12:21, 14 February 2023 diff hist -1 m Template:Announcements
- 18:31, 13 February 2023 diff hist -86 Template:Announcements FCB update
- 10:35, 13 February 2023 diff hist +323 Template:Announcements Unaxis Etch Down
- 10:34, 13 February 2023 diff hist +121 Template:Announcements FCB update
- 13:23, 10 February 2023 diff hist +168 Probe Station & Curve Tracer →Operation Procedures & Manuals: linked to probe station usage rules current Tag: Visual edit
- 09:28, 10 February 2023 diff hist -9 m Tool List →Electrical Analysis: fix QFI link Tag: Visual edit
- 00:25, 8 February 2023 diff hist +247 Maskless Aligner (Heidelberg MLA150) →Documentation: link to FEM tips Tag: Visual edit
- 16:32, 7 February 2023 diff hist +250 MLA150 - Design Guidelines →Greyscale Lithography: addded more info Tag: Visual edit
- 16:28, 7 February 2023 diff hist +833 ASML Stepper 3 Standard Operating Procedure →Running a focus and/or exposure matrix: added "general process" for FEMs Tag: Visual edit
- 11:08, 7 February 2023 diff hist +6 Template:Announcements updated Dektak XT, link for training available
- 11:06, 7 February 2023 diff hist -54 Step Profilometer (DektakXT) updated that tool is availabel for training. Tag: Visual edit
- 11:37, 6 February 2023 diff hist +202 Template:Announcements added back the "ENDFEED" lines and updated comment to indicate not to delete this.
- 11:24, 1 February 2023 diff hist -28 m Foong Fatt current
- 11:24, 1 February 2023 diff hist -8 m Foong Fatt
- 11:19, 1 February 2023 diff hist +296 N Foong Fatt initial page copied from Demis D John Tag: Visual edit: Switched
- 11:17, 1 February 2023 diff hist -7 Staff List Afdded Foong Tag: Visual edit
- 14:56, 30 January 2023 diff hist +200 ICP Etching Recipes →PlasmaTherm/SLR Fluorine Etcher: added recipe tips, RF 1/RF 2/ignition tips. Tag: Visual edit
- 07:49, 30 January 2023 diff hist -4 Nanofab Job Postings deleted Process Engineer, added Undergrad process technician Tag: Visual edit
- 20:04, 29 January 2023 diff hist +314 Template:Announcements jeol sem down
- 16:05, 27 January 2023 diff hist +247 Template:Announcements FCB update
- 16:03, 27 January 2023 diff hist -21 Template:Announcements Oxford etcher update
- 14:48, 27 January 2023 diff hist +315 Template:Announcements SB6 down
- 14:46, 27 January 2023 diff hist +429 Template:Announcements MLA downtime Mon 2023-01-30 5:30pm
- 01:54, 27 January 2023 diff hist -549 Template:Announcements deleted GCA maintenance
- 01:52, 27 January 2023 diff hist -36 Template:Announcements blue-m oven UP
- 11:04, 26 January 2023 diff hist +21 m Template:Announcements blue m update
- 10:50, 26 January 2023 diff hist +206 Template:Announcements updated oxford
- 11:42, 25 January 2023 diff hist +3 Template:News →Wafer Polisher available: updated to Millerski
- 11:41, 25 January 2023 diff hist +243 Template:News dektak xt announcement
- 11:39, 25 January 2023 diff hist +249 Template:Announcements dektak xt notice
- 14:12, 24 January 2023 diff hist +18 Suss Aligners (SUSS MJB-3) →Optical Spectrum with No Filter: added "exposure" to clairfy which optical spectrum Tag: Visual edit
- 14:09, 24 January 2023 diff hist +38 m Suss Aligners (SUSS MJB-3) →IR Aligner Tag: Visual edit
- 14:51, 23 January 2023 diff hist +87 Wafer scanning process traveler Tag: Visual edit
- 14:46, 23 January 2023 diff hist +111 Step Profilometer (DektakXT) note about 6M --> XT upgrade Tag: Visual edit
- 11:29, 23 January 2023 diff hist +157 Wafer scanning process traveler →Selecting a Haze range: added example Tag: Visual edit
- 11:27, 23 January 2023 diff hist -5,719 Wafer scanning process traveler deleted claibration and SPC sections (not installed) Tag: Visual edit
- 11:26, 23 January 2023 diff hist +14 m Wafer scanning process traveler Tag: Visual edit
- 11:24, 23 January 2023 diff hist +335 Wafer scanning process traveler →Scanning procedure for 4" Si wafers ( right indexer): added "run process step" section Tag: Visual edit
- 09:12, 23 January 2023 diff hist +339 Suss Aligners (SUSS MJB-3) added info on IR Aligner Tag: Visual edit
- 13:00, 20 January 2023 diff hist +101 ICP Etching Recipes →Process Control Data (Panasonic 2): header for Sio2 etch data Tag: Visual edit
- 12:59, 20 January 2023 diff hist +149 ICP Etching Recipes →Oxford ICP Etcher (PlasmaPro 100 Cobra): added placeholder for cleaning recipes Tag: Visual edit
- 12:56, 20 January 2023 diff hist +157 Process Group - Process Control Data increased all heading levels to get HR's between Dep/Etch sections Tag: Visual edit: Switched
- 12:50, 20 January 2023 diff hist +969 Process Group - Process Control Data →Oxford PlasmaPro Cobra Etcher: link to new Google sheets data (ND's) Tag: Visual edit: Switched
- 12:49, 20 January 2023 diff hist +831 ICP Etching Recipes →Oxford ICP Etcher (PlasmaPro 100 Cobra): link to ND's new Google sheets SPC data, removed "old" data, added example SPC image with link to gSheets Tag: Visual edit: Switched
- 12:46, 20 January 2023 diff hist +39 N File:Oxford-ICP-Etch Process Control Data Example.jpg current
- 12:39, 20 January 2023 diff hist +713 Process Group - Process Control Data →Panasonic ICP#2: lins to new google sheets data Tag: Visual edit: Switched
- 12:37, 20 January 2023 diff hist +551 ICP Etching Recipes →ICP Etch 2 (Panasonic E640): link to google sheets SPC, added example plot w/ link to sheets, removed "Old data" Tag: Visual edit: Switched
- 12:34, 20 January 2023 diff hist +38 N File:ICP2 Process Control Data Example.jpg current
- 12:30, 20 January 2023 diff hist +46 m ICP Etching Recipes →ICP Etch 1 (Panasonic E626I): added CLeaning recipes "to be added" Tag: Visual edit
- 12:29, 20 January 2023 diff hist -2 m ICP Etching Recipes →Process Control Data (Panasonic 1)
- 12:29, 20 January 2023 diff hist -2 m Process Group - Process Control Data →Panasonic ICP #1
- 12:28, 20 January 2023 diff hist +1,189 Process Group - Process Control Data →Etching (Process Control Data): FL-ICP example chart with link to live charts Tag: Visual edit: Switched
- 12:26, 20 January 2023 diff hist +214 ICP Etching Recipes →Process Control Data (Fluorine ICP Etcher): re-added example chart with links to charts
- 12:21, 20 January 2023 diff hist +2 ICP Etching Recipes →SiO2 Etch with CHF3/CF4 - Process Control Data (Panasonic 1): fixed links
- 12:20, 20 January 2023 diff hist -4 m ICP Etching Recipes →Process Control Data (Panasonic 1) Tag: Visual edit
- 12:19, 20 January 2023 diff hist +109 ICP Etching Recipes →Process Control Data (Panasonic 1): added `link=` URL to gsheets plots
- 12:18, 20 January 2023 diff hist +486 ICP Etching Recipes →Process Control Data (Panasonic 1): lin to ND's google sheets data, added example image of SPC chart Tag: Visual edit
- 12:16, 20 January 2023 diff hist +47 N File:ICP1 Process Control Data Example.jpg current
- 12:10, 20 January 2023 diff hist +92 ICP Etching Recipes →SiO2 Etching with CHF3/CF4 (Fluorine ICP Etcher): inserted example chart with link to data Tag: Visual edit
- 12:09, 20 January 2023 diff hist +29 Process Group - Process Control Data →Etching (Process Control Data): formatted OLD data Tag: Visual edit
- 12:06, 20 January 2023 diff hist +58 N File:FL-ICP Process Control Data Example.jpg current
- 12:03, 20 January 2023 diff hist +13 ICP Etching Recipes →SiO2 Etching with CHF3/CF4 (FL-ICP): corected toolname in header title Tag: Visual edit
- 12:00, 20 January 2023 diff hist -61 m Process Group - Process Control Data →PlasmaTherm SLR Fluorine Etcher: fixed link to plot Tag: Visual edit
- 12:00, 20 January 2023 diff hist +1 m ICP Etching Recipes →SiO2 Etching with CHF3/CF4 (FL-ICP): fixed plot link Tag: Visual edit
- 11:46, 20 January 2023 diff hist +411 Process Group - Process Control Data →Etching (Process Control Data): link to FL-ICP google sheets (noahD) Tag: Visual edit
- 11:45, 20 January 2023 diff hist +414 ICP Etching Recipes →Process Control Data (Fluorine ICP Etcher): linked to Noah's google sheets - plots & data Tag: Visual edit
- 16:37, 19 January 2023 diff hist +151 Template:Announcements blue-M oven down
- 16:35, 19 January 2023 diff hist +276 Template:Announcements stepper 2 maint.
- 16:01, 19 January 2023 diff hist +151 Template:Announcements stepper 1 PM
- 15:58, 18 January 2023 diff hist +1 m ICP Etch 2 (Panasonic E626I) →Online Training Video: Tag: Visual edit
- 15:57, 18 January 2023 diff hist +17 ICP Etch 2 (Panasonic E626I) Made "online training" into a section heading, so it's obvious in Table of Contents. Also change "page title" levels to "header" level. Tag: Visual edit
- 21:56, 12 January 2023 diff hist -113 Template:Announcements updated OPEN annc
- 15:38, 12 January 2023 diff hist +108 Oxford ICP Etcher - Process Control Data added chamber wet clean current Tag: Visual edit
- 08:33, 11 January 2023 diff hist -194 Template:Announcements nanofab open for LN2 delivery
- 16:28, 10 January 2023 diff hist +66 Template:Announcements LN2 closure
- 17:20, 6 January 2023 diff hist +7 Oxford ICP Etcher - Process Control Data →Etch Rate Dependence on Sample Size (Oxford ICP Etcher): changed name to emphasize Sampel Size effect Tag: Visual edit
- 11:28, 6 January 2023 diff hist +170 Process Group - Process Control Data →ICP-PECVD (Unaxis VLR Dep): link to SiO2/SiN plots separately Tag: Visual edit
- 17:07, 5 January 2023 diff hist +464 Template:News added info about process control data
- 10:43, 5 January 2023 diff hist +182 PECVD Recipes →ICP-PECVD (Unaxis VLR): added "geenral recipe notes" Tag: Visual edit
- 19:22, 3 January 2023 diff hist +126 Wet Benches →Develop Benches: added megasonic Tag: Visual edit
- 18:53, 3 January 2023 diff hist +66 Wafer Bonder (SUSS SB6-8E) →Detailed Specifications: link to MA6 Tag: Visual edit
- 17:41, 3 January 2023 diff hist -21 m Suss Aligners (SUSS MJB-3) →Optical Spectrum with Filter for i-line Exposure Tag: Visual edit
- 17:40, 3 January 2023 diff hist +170 Suss Aligners (SUSS MJB-3) added alignment marks GDS file, made optical spectra smaller. Tag: Visual edit
- 17:38, 3 January 2023 diff hist +135 Contact Aligner (SUSS MA-6) →Documentation: added link to alignment mark GDS file Tag: Visual edit
- 15:32, 3 January 2023 diff hist +481 ASML Stepper 3 - UCSB Test Reticles →Alignment Markers: added CAD files for alignment marks Tag: Visual edit
- 15:29, 3 January 2023 diff hist +72 N File:MA6-FrontBack AlignMarks only.gds CAD File for front/back alignment marks on Contact Aligner current
- 15:26, 3 January 2023 diff hist +90 N File:Contact-AlignFront.gds CAD file for contact alignment mark, as printed on ASML DUV Mask "UCSB-OPC1" current
- 15:25, 3 January 2023 diff hist +95 N File:EBL-GlobalMulti NEG.gds CAD file for EBL negative alignment mark, as printed on ASML DUV mask "UCSB-OPC1" current
- 15:23, 3 January 2023 diff hist +72 N File:EBL-GlobalMulti POS.gds EBL Alignment Mark as printed on ASML DUV Mask "UCSB-OPC1" current
- 15:22, 3 January 2023 diff hist +84 N File:GCA stepper align.gds GCA Stepper Alignment Mark as drawn on ASML DUV Mask Plate "UCSB-OPC1" current
- 11:06, 31 December 2022 diff hist -3 m Template:News →Raith Velion: FIB/SEM Installation
- 11:05, 31 December 2022 diff hist +42 Template:Announcements Lab open after Xmas shutdown
- 08:36, 22 December 2022 diff hist +33 Holographic Lith/PL Setup (Custom) →Detailed Specifications: added max sample size Tag: Visual edit
- 21:15, 21 December 2022 diff hist -393 Template:Announcements nanofab holiday closure
- 10:50, 21 December 2022 diff hist -12 m Stepper Recipes →Anti-Reflective Coatings: removed bold Tag: Visual edit
- 10:49, 21 December 2022 diff hist +19 m Stepper Recipes →Anti-Reflective Coatings Tag: Visual edit
- 10:48, 21 December 2022 diff hist +838 Stepper Recipes →Stepper 3 (ASML DUV): added TOC Tag: Visual edit
- 08:34, 19 December 2022 diff hist -8 m Dry Etching Recipes Tag: Visual edit
- 08:33, 19 December 2022 diff hist +9 Dry Etching Recipes fix Pan1/AlGaAs link Tag: Visual edit
- 00:23, 16 December 2022 diff hist +871 N E-Beam 5 (Plasys) inital page and descriptions Tag: Visual edit: Switched
- 15:58, 15 December 2022 diff hist +112 Stepper Recipes →DS-K101-304: changed spin speed to 2500rpm Tag: Visual edit
- 14:39, 15 December 2022 diff hist +23 Tool List →Thermal Evaporation: Added EBeam 5 (plasys) link to new page Tag: Visual edit
- 15:25, 14 December 2022 diff hist -66 Template:Announcements asml up
- 14:47, 14 December 2022 diff hist +101 Lithography Recipes →Automated Coat/Develop System Recipes (S-Cubed Flexi): note about DSK@220C equivalence to DUV42P Tag: Visual edit
- 07:57, 13 December 2022 diff hist -1 Wafer Cleaver (PELCO Flip-Scribe) changed room --> ESB 1111 current Tag: Visual edit
- 07:53, 13 December 2022 diff hist -48 Template:Announcements ASML Down: laser fail
- 11:17, 12 December 2022 diff hist +126 Microscopes →Microscope Training Guide: basic list of topics Tag: Visual edit
- 21:53, 11 December 2022 diff hist -1 m Template:Announcements
- 21:52, 11 December 2022 diff hist +5 m Template:Announcements
- 21:49, 11 December 2022 diff hist +17 Template:Announcements asml laser pm update
- 00:36, 10 December 2022 diff hist -899 Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher added comment about NP vs ND meas, deleted extraneous tables of old non-standard measurements Tag: Visual edit
- 00:28, 10 December 2022 diff hist +114 Frequently Asked Questions →How do I get my files from the NanoFab computers?: mentioned allowed folder names Tag: Visual edit
- 00:23, 10 December 2022 diff hist -3 m Autostep 200 Mask Making Guidance →CAD Files Tag: Visual edit
- 08:17, 9 December 2022 diff hist +33 m Other Dry Etching Recipes →CAIBE (Oxford Ion Mill): spelling correction current Tag: Visual edit
- 16:55, 6 December 2022 diff hist +13 Template:Announcements EB2 heater update
- 16:52, 6 December 2022 diff hist -550 Process Group - Remote Fabrication Jobs updated to Trello current Tag: Visual edit
- 13:49, 6 December 2022 diff hist +9 m Tube Furnace (Tystar 8300) →Gases Available Tag: Visual edit
- 13:47, 6 December 2022 diff hist -4 m Rapid Thermal Processor (SSI Solaris 150) →Detailed Specificiations: bullets Tag: Visual edit
- 11:34, 6 December 2022 diff hist +181 N File:UCSB ASML DUV Stepper - Programming Worksheet.pptx Similar to ASML programming spreadsheet, with Image coords/sizes, but also includes diagrams and wafer layout specs. More in depth version of prrogramming spreadsheet. current
- 11:19, 6 December 2022 diff hist +165 Stepper 3 (ASML DUV) →Design Tools: note about JobCreator outage Tag: Visual edit
- 17:16, 2 December 2022 diff hist +745 ICP Etching Recipes →Si Etching (Fluorine ICP Etcher): added Al2O3/SiO2 masking procedure Tag: Visual edit
- 17:09, 2 December 2022 diff hist +25 Dry Etching Recipes fixed FL-ICP: Si link Tag: Visual edit
- 12:23, 1 December 2022 diff hist +20 Direct-Write Lithography Recipes converted File links to Media links (open PDF directly) Tag: Visual edit
- 12:20, 1 December 2022 diff hist 0 Direct-Write Lithography Recipes testing File-->Media link
- 12:20, 1 December 2022 diff hist +443 Contact Alignment Recipes links to all PR datasheets current Tag: Visual edit
- 12:16, 1 December 2022 diff hist +17 Direct-Write Lithography Recipes linkto nLOF2020 Tag: Visual edit
- 12:14, 1 December 2022 diff hist 0 File:AXP4000pb-Datasheet.pdf John d uploaded a new version of File:AXP4000pb-Datasheet.pdf current
- 12:10, 1 December 2022 diff hist -42 Contact Alignment Recipes added some of the PR datasheet links Tag: Visual edit
- 00:12, 30 November 2022 diff hist +323 MLA150 - Design Guidelines →Greyscale Lithography: clarified levels and linked to GDSpy Tag: Visual edit
- 17:47, 28 November 2022 diff hist +206 Template:Announcements ASML Dec 12th Laser PM
- 10:54, 28 November 2022 diff hist +111 RIE 5 (PlasmaTherm) →Detailed Specifications: added laser monitor current Tag: Visual edit
- 16:29, 23 November 2022 diff hist +985 Maskless Aligner (Heidelberg MLA150) →Video Trainings: added old video training back Tag: Visual edit
- 11:41, 23 November 2022 diff hist +682 Wet Benches →Plating Bench: added basic info of what is/isn't provided. Tag: Visual edit
- 11:36, 23 November 2022 diff hist +67 Frequently Asked Questions →Bring a new chemical/material into the lab Tag: Visual edit
- 16:57, 22 November 2022 diff hist +42 IBD: Calibrating Optical Thickness minor corrections Tag: Visual edit
- 10:22, 22 November 2022 diff hist +616 Laser Etch Monitoring self-training allowed Tag: Visual edit
- 09:28, 22 November 2022 diff hist +243 ASML Stepper 3 Standard Operating Procedure →Running a focus and/or exposure matrix: added how to view/modufy exposure before exposing Tag: Visual edit
- 14:32, 20 November 2022 diff hist +11 Staff List added Vraj Tel# Tag: Visual edit
- 13:52, 20 November 2022 diff hist +351 N Vraj Mehalana Added contact info & basic info guesses Tag: Visual edit: Switched
- 13:48, 20 November 2022 diff hist +68 Staff List →Financial & Administrative: added Vraj M Tag: Visual edit
- 09:26, 20 November 2022 diff hist +132 Template:Announcements Lee's MA6 service
- 18:44, 15 November 2022 diff hist -553 Sputtering Recipes →Ion Beam Deposition (Veeco NEXUS): fixed links to Historical Data fro SiO/TaO Tag: Visual edit
- 18:14, 15 November 2022 diff hist -132 PECVD Recipes fixed links to pre-2022 historical data Tag: Visual edit
- 16:56, 15 November 2022 diff hist +120 Process Group - Process Control Data link to Old pre-2022 Dep data Tag: Visual edit
- 08:49, 15 November 2022 diff hist -164 Template:Announcements deleete veterans day
- 08:48, 15 November 2022 diff hist -126 Template:Announcements JEOL SEM UP
- 11:43, 14 November 2022 diff hist +173 Photolithography - Manual Edge-Bead Removal Techniques →Lithographic Edge Bead Removal: added location of EBR photo mask Tag: Visual edit
- 13:25, 11 November 2022 diff hist +37 m ICP Etching Recipes →Through Silicon Via etch (DSEiii): author credit Tag: Visual edit
- 13:23, 11 November 2022 diff hist +3,783 ICP Etching Recipes →DSEIII_(PlasmaTherm/Deep_Silicon_Etcher): added procedure for through-wafer etch Tag: Visual edit
- 13:14, 11 November 2022 diff hist +99 Packaging Recipes →Wafer Bonder (Logitech WBS7): reocmmandations on each Tag: Visual edit
- 13:06, 11 November 2022 diff hist -116 Ashers (Technics PEII) →Recipes: link to recipes page, deleted recipes form this page current Tag: Visual edit
- 13:05, 11 November 2022 diff hist -64 Oxygen Plasma System Recipes →Chamber Clean after CF4 Etching: deleted 300W recipe Tag: Visual edit
- 08:37, 11 November 2022 diff hist +16 m Template:Announcements
- 08:35, 11 November 2022 diff hist -822 Template:Announcements deleted ASML msgs, MLA150 msg
- 08:35, 11 November 2022 diff hist +148 Template:Announcements Vet day holiday
- 21:23, 10 November 2022 diff hist -5 m Wet Etching Recipes →Organic removal Tag: Visual edit
- 15:12, 9 November 2022 diff hist +182 Template:Announcements evg down
- 15:11, 9 November 2022 diff hist +32 m Stepper 3 (ASML DUV) →Training Procedure Tag: Visual edit
- 15:07, 9 November 2022 diff hist +497 Stepper 3 (ASML DUV) →Online Video Trainings: added "training procedure" section Tag: Visual edit
- 14:41, 8 November 2022 diff hist +1 m Automated Coat/Develop System (S-Cubed Flexi) →Recipes current Tag: Visual edit
- 14:41, 8 November 2022 diff hist -1 m Automated Coat/Develop System (S-Cubed Flexi)
- 14:41, 8 November 2022 diff hist +267 Automated Coat/Develop System (S-Cubed Flexi) link to recipes table Tag: Visual edit
- 14:39, 8 November 2022 diff hist +10 m S-Cubed Flexi - Operating Procedure current Tag: Visual edit
- 14:39, 8 November 2022 diff hist -541 S-Cubed Flexi - Operating Procedure →Allowed Recipes: link to recipes Tag: Visual edit
- 14:38, 8 November 2022 diff hist +128 Lithography Recipes link to Auto-coater recipes Tag: Visual edit
- 14:36, 8 November 2022 diff hist +2 m Lithography Recipes rmeove TOC
- 14:36, 8 November 2022 diff hist -2 Lithography Recipes add TOC tmeporarily
- 14:35, 8 November 2022 diff hist +3,162 Lithography Recipes →Automated Coat/Develop System Recipes (S-Cubed Flexi): added recipes table Tag: Visual edit
- 14:19, 8 November 2022 diff hist +256 Automated Coat/Develop System (S-Cubed Flexi) indicated which PR's/chems are availabelf for general use Tag: Visual edit
- 13:19, 8 November 2022 diff hist +199 Stepper Recipes →Positive Resist (ASML DUV): added UV26 Tag: Visual edit: Switched
- 13:25, 4 November 2022 diff hist -258 Template:Announcements ASML PM Complete
- 19:13, 3 November 2022 diff hist -410 Template:Announcements deleted JEOL talk
- 16:25, 1 November 2022 diff hist -3 Template:Announcements SEM#1 up
- 08:47, 29 October 2022 diff hist 0 Template:Announcements moved ASML maint higher and increased date
- 08:46, 29 October 2022 diff hist +410 Template:Announcements JEOL EBL Seminar
- 08:35, 29 October 2022 diff hist +85 ICP Etching Recipes →Photoresist and ARC etching (Panasonic 2): link to DUV42P and added thickness Tag: Visual edit
- 08:33, 29 October 2022 diff hist +4 Lithography Recipes →Photolithography Recipes: corrected DUV42p link Tag: Visual edit
- 16:01, 27 October 2022 diff hist +132 Template:Announcements SEM1 down
- 15:44, 27 October 2022 diff hist +291 Nanofab Job Postings added direct link to job posting Tag: Visual edit
- 15:21, 27 October 2022 diff hist +1 Ellipsometer (Woollam) corrected link Tag: Visual edit
- 15:21, 27 October 2022 diff hist 0 m Ellipsometer (Woollam) - Measuring thin metals with oxide pre-measurement John d moved page Ellipsometer (Woolam) - Measuring thin metals with oxide pre-measurement to Ellipsometer (Woollam) - Measuring thin metals with oxide pre-measurement without leaving a redirect: Woollam misspelled as "woolam"
- 15:20, 27 October 2022 diff hist +2,069 N Ellipsometer (Woollam) - Measuring thin metals with oxide pre-measurement pasted Demis' instructions Tag: Visual edit
- 15:17, 27 October 2022 diff hist +140 Ellipsometer (Woollam) →Operating Procedures: added link to oxide-pre-meas instructions Tag: Visual edit
- 08:48, 27 October 2022 diff hist +127 Template:Announcements Au Plating bench down
- 17:11, 26 October 2022 diff hist +62 ICP-PECVD (Unaxis VLR) →About: added SiO2 gap-fill note Tag: Visual edit
- 14:17, 25 October 2022 diff hist +43 Atomic Layer Deposition Recipes →SiO2 deposition (ALD CHAMBER 3): added temperature-variation/recipes avaialble on tool Tag: Visual edit
- 12:03, 25 October 2022 diff hist +60 E-Beam 2 (Custom) →Materials Table: fixed recipes link, bolded heating/oxygen Tag: Visual edit
- 11:59, 25 October 2022 diff hist +91 E-Beam Evaporation Recipes →Materials Table (E-Beam #2): note that data is outdated current Tag: Visual edit
- 11:44, 25 October 2022 diff hist +108 Wet Etching Recipes →Table of Wet Etching Recipes: added header row to bottom Tag: Visual edit: Switched
- 11:42, 25 October 2022 diff hist +141 Wet Etching Recipes move table to top, recipes to bottom, subheadings, added PureStrip info Tag: Visual edit
- 15:59, 24 October 2022 diff hist +4 Mechanical Polisher (Allied) update to {{tool2}}, set Room = 1111
- 01:14, 19 October 2022 diff hist +192 Template:Tool2 →Version: added todo, and newlines current
- 01:11, 19 October 2022 diff hist -4 DUMMY TOOL current
- 01:11, 19 October 2022 diff hist +84 DUMMY TOOL
- 01:10, 19 October 2022 diff hist +4 Template:Tool2 if no recipes, display "Recipes: N/A"
- 01:07, 19 October 2022 diff hist +185 Template:Tool2test current
- 01:06, 19 October 2022 diff hist +4 DUMMY TOOL
- 01:05, 19 October 2022 diff hist -4 DUMMY TOOL
- 01:03, 19 October 2022 diff hist -14 Template:Tool2 remove width=200
- 01:01, 19 October 2022 diff hist -25 Template:Tool2 remove if:recipes
- 00:58, 19 October 2022 diff hist +25 Template:Tool2
- 00:57, 19 October 2022 diff hist +3 Template:Tool2
- 00:55, 19 October 2022 diff hist 0 Template:Tool2
- 00:53, 19 October 2022 diff hist -22 Template:Tool2
- 00:51, 19 October 2022 diff hist +24 Template:Tool2 bolded "sign up for this tool"
- 00:47, 19 October 2022 diff hist +195 Template:Tool2 Made Mfg,Model,Description optional & italics, not bold
- 00:44, 19 October 2022 diff hist +4 Template:Tool2test
- 00:43, 19 October 2022 diff hist -2 Template:Tool2test
- 00:41, 19 October 2022 diff hist 0 Template:Tool2test
- 00:38, 19 October 2022 diff hist +9 Template:Tool2test
- 00:35, 19 October 2022 diff hist +8 DUMMY TOOL
- 00:34, 19 October 2022 diff hist +127 Template:Tool2test make mfg/model not bold and optional (in conditioanls
- 00:30, 19 October 2022 diff hist +37 DUMMY TOOL
- 00:28, 19 October 2022 diff hist +89 Wet Benches →Wafer Toxic Corrosive Benches: changed to tool2, added MikeDay as backup, added materials,mfg,description
- 00:23, 19 October 2022 diff hist +157 Template:Tool2 added "IF" conditional around "recipes" section.
- 00:21, 19 October 2022 diff hist 0 Template:Tool2test
- 00:20, 19 October 2022 diff hist 0 Template:Tool2test
- 00:18, 19 October 2022 diff hist 0 Template:Tool2test
- 00:17, 19 October 2022 diff hist +11 m DUMMY TOOL added type, to remove Category text
- 17:06, 18 October 2022 diff hist +25 Template:Tool2test
- 17:05, 18 October 2022 diff hist -83 DUMMY TOOL try with blank args
- 17:04, 18 October 2022 diff hist +4 DUMMY TOOL trying tool2 updates, tool2test
- 17:03, 18 October 2022 diff hist +7,182 N Template:Tool2test pasted from tool2
- 16:27, 17 October 2022 diff hist +180 Template:Announcements MLA150 software update notes
- 16:24, 17 October 2022 diff hist -229 Template:Announcements Therma Evap 1 up
- 16:23, 17 October 2022 diff hist +232 Template:Announcements ASML maint
- 16:01, 15 October 2022 diff hist +245 Stepper Recipes →Stepper 3 (ASML DUV): LinkedIn to Design Tools section Tag: Visual edit
- 21:53, 13 October 2022 diff hist +55 Lithography Recipes →Chemicals Stocked + Datasheets: added AZ4620 + link to datasheet Tag: Visual edit
- 21:50, 13 October 2022 diff hist -528 Lithography Recipes →General Photolithography Techniques: deleted EBR section, combined it into this section Tag: Visual edit
- 21:49, 13 October 2022 diff hist +451 Photolithography - Manual Edge-Bead Removal Techniques added reasons for EBR and TOC
- 21:43, 13 October 2022 diff hist +2 m Lithography Recipes delete TOC
- 21:42, 13 October 2022 diff hist -2 Lithography Recipes TEMP TOC to get link
- 21:42, 13 October 2022 diff hist +215 Lithography Recipes Other PR processes, added link to reflow info Tag: Visual edit
- 11:14, 8 October 2022 diff hist +37 m Frequently Asked Questions →Authorship on Publications: minor updates Tag: Visual edit
- 20:51, 6 October 2022 diff hist -29 Stepper 2 (AutoStep 200) removed "work in progress" for Mask Making page Tag: Visual edit
- 20:51, 6 October 2022 diff hist +441 Autostep 200 Mask Making Guidance →CAD Files: todo: missing 'reticle handbook" Tag: Visual edit: Switched
- 10:52, 6 October 2022 diff hist -565 Maskless Aligner (Heidelberg MLA150) →Video Trainings: deleted old video link, notice of re-recording Tag: Visual edit
- 23:55, 4 October 2022 diff hist +223 Template:Announcements added NanoFab job openings
- 23:52, 4 October 2022 diff hist -4 m Template:Announcements
- 23:42, 4 October 2022 diff hist 0 Staff List →Process Group: Ning Cao --> OPEN POSITION Tag: Visual edit
- 23:41, 4 October 2022 diff hist +1,071 N Nanofab Job Postings linked to UCSB Jobs pages, instructios, listed Process Technician position Tag: Visual edit
- 23:06, 4 October 2022 diff hist +70 ASML DUV: Edge Bead Removal via Photolithography current Tag: Visual edit
- 23:04, 4 October 2022 diff hist +171 Photolithography - Manual Edge-Bead Removal Techniques →EBR100 Tag: Visual edit
- 23:01, 4 October 2022 diff hist +12 m Lithography Recipes →Edge-Bead Removal: bolded Tag: Visual edit
- 23:00, 4 October 2022 diff hist +41 m Lithography Recipes remove TOC, fix EBR link Tag: Visual edit: Switched
- 22:58, 4 October 2022 diff hist -2 Lithography Recipes TEMP TOC force
- 22:58, 4 October 2022 diff hist +949 Lithography Recipes added edge-bead removal section Tag: Visual edit
- 22:50, 4 October 2022 diff hist -32 DSEIII (PlasmaTherm/Deep Silicon Etcher) fixed link to SOP Tag: Visual edit
- 22:49, 4 October 2022 diff hist +52 N File:Running a process.pdf John d moved page File:Running a process.pdf to File:PT-DSEiii - Running a process.pdf: added tool name to title current Tag: New redirect
- 22:49, 4 October 2022 diff hist 0 m File:PT-DSEiii - Running a process.pdf John d moved page File:Running a process.pdf to File:PT-DSEiii - Running a process.pdf: added tool name to title current
- 22:47, 4 October 2022 diff hist +186 Photolithography - Manual Edge-Bead Removal Techniques linked to DUV Litho EBR Tag: Visual edit
- 13:26, 4 October 2022 diff hist +2 Chemical List →Material Safety Datasheets current Tag: Visual edit
- 13:13, 4 October 2022 diff hist +252 ICP Etching Recipes →Edge-Bead Removal: link to manual RP removal Tag: Visual edit
- 17:08, 3 October 2022 diff hist -360 Template:Announcements deleted GCA's up
- 17:06, 3 October 2022 diff hist +229 Template:Announcements Thermal1 down
- 11:47, 3 October 2022 diff hist +252 m Calculators + Utilities →CAD Design Tips: minor updates Tag: Visual edit
- 10:30, 3 October 2022 diff hist +210 Wet Benches →About: note about HF apron PPE Tag: Visual edit
- 22:52, 1 October 2022 diff hist +76 Tool List →Wet Processing: link to Wafer_Toxic_Corrosive_Bench Tag: Visual edit
- 22:51, 1 October 2022 diff hist +210 Wet Benches →Detailed Specifications: linked KOH bath to SUM Tag: Visual edit
- 16:54, 29 September 2022 diff hist +22 m Dry Etching Recipes fix incorrect color header cell
- 16:47, 29 September 2022 diff hist +74 m Unaxis VLR Etch - Process Control Data bold + colored header row Tag: Visual edit: Switched
- 16:33, 29 September 2022 diff hist +113 ICP Etching Recipes →ICP-Etch (Unaxis VLR): added (empty) section for Unaxis Cleaning Recipes Tag: Visual edit
- 16:31, 29 September 2022 diff hist +186 ICP-Etch (Unaxis VLR) link to recipes, reduce headers to "heading level 1" (were "title" level) current Tag: Visual edit
- 15:44, 29 September 2022 diff hist -145 Template:Announcements ASML network update
- 15:43, 29 September 2022 diff hist -26 Template:Announcements GCA stepper 1 PM done
- 14:28, 29 September 2022 diff hist +245 Filmetrics F40-UV Microscope-Mounted →Good Curve-Fitting: explained reasonable vs. perfect curve fit current Tag: Visual edit
- 08:28, 28 September 2022 diff hist -155 Template:Announcements delete stepper 2 up
- 08:28, 28 September 2022 diff hist -48 Template:Announcements →GCA AutoStep Service: PM complete
- 10:54, 26 September 2022 diff hist -42 Template:Announcements AutoStep up.
- 07:34, 22 September 2022 diff hist +197 Template:Announcements corrected EB3 --> EB2, AUtostep down RMS
- 15:40, 21 September 2022 diff hist +122 Template:Announcements EB2 heater down
- 14:27, 21 September 2022 diff hist -8 Template:Announcements SEM#1 UP
- 08:33, 19 September 2022 diff hist +87 Template:Announcements GCA 6300 PM update
- 08:30, 19 September 2022 diff hist -11 Template:Announcements gca autostep 200 PM update
- 01:53, 17 September 2022 diff hist +77 Template:Announcements asml network update