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- 16:03, 27 January 2023 diff hist -21 Template:Announcements Oxford etcher update
- 14:48, 27 January 2023 diff hist +315 Template:Announcements SB6 down
- 14:46, 27 January 2023 diff hist +429 Template:Announcements MLA downtime Mon 2023-01-30 5:30pm
- 01:54, 27 January 2023 diff hist -549 Template:Announcements deleted GCA maintenance
- 01:52, 27 January 2023 diff hist -36 Template:Announcements blue-m oven UP
- 11:04, 26 January 2023 diff hist +21 m Template:Announcements blue m update
- 10:50, 26 January 2023 diff hist +206 Template:Announcements updated oxford
- 11:42, 25 January 2023 diff hist +3 Template:News →Wafer Polisher available: updated to Millerski
- 11:41, 25 January 2023 diff hist +243 Template:News dektak xt announcement
- 11:39, 25 January 2023 diff hist +249 Template:Announcements dektak xt notice
- 14:12, 24 January 2023 diff hist +18 Suss Aligners (SUSS MJB-3) →Optical Spectrum with No Filter: added "exposure" to clairfy which optical spectrum Tag: Visual edit
- 14:09, 24 January 2023 diff hist +38 m Suss Aligners (SUSS MJB-3) →IR Aligner Tag: Visual edit
- 14:51, 23 January 2023 diff hist +87 Wafer scanning process traveler Tag: Visual edit
- 14:46, 23 January 2023 diff hist +111 Step Profilometer (DektakXT) note about 6M --> XT upgrade Tag: Visual edit
- 11:29, 23 January 2023 diff hist +157 Wafer scanning process traveler →Selecting a Haze range: added example Tag: Visual edit
- 11:27, 23 January 2023 diff hist -5,719 Wafer scanning process traveler deleted claibration and SPC sections (not installed) Tag: Visual edit
- 11:26, 23 January 2023 diff hist +14 m Wafer scanning process traveler Tag: Visual edit
- 11:24, 23 January 2023 diff hist +335 Wafer scanning process traveler →Scanning procedure for 4" Si wafers ( right indexer): added "run process step" section Tag: Visual edit
- 09:12, 23 January 2023 diff hist +339 Suss Aligners (SUSS MJB-3) added info on IR Aligner Tag: Visual edit
- 13:00, 20 January 2023 diff hist +101 ICP Etching Recipes →Process Control Data (Panasonic 2): header for Sio2 etch data Tag: Visual edit
- 12:59, 20 January 2023 diff hist +149 ICP Etching Recipes →Oxford ICP Etcher (PlasmaPro 100 Cobra): added placeholder for cleaning recipes Tag: Visual edit
- 12:56, 20 January 2023 diff hist +157 Process Group - Process Control Data increased all heading levels to get HR's between Dep/Etch sections Tag: Visual edit: Switched
- 12:50, 20 January 2023 diff hist +969 Process Group - Process Control Data →Oxford PlasmaPro Cobra Etcher: link to new Google sheets data (ND's) Tag: Visual edit: Switched
- 12:49, 20 January 2023 diff hist +831 ICP Etching Recipes →Oxford ICP Etcher (PlasmaPro 100 Cobra): link to ND's new Google sheets SPC data, removed "old" data, added example SPC image with link to gSheets Tag: Visual edit: Switched
- 12:46, 20 January 2023 diff hist +39 N File:Oxford-ICP-Etch Process Control Data Example.jpg current
- 12:39, 20 January 2023 diff hist +713 Process Group - Process Control Data →Panasonic ICP#2: lins to new google sheets data Tag: Visual edit: Switched
- 12:37, 20 January 2023 diff hist +551 ICP Etching Recipes →ICP Etch 2 (Panasonic E640): link to google sheets SPC, added example plot w/ link to sheets, removed "Old data" Tag: Visual edit: Switched
- 12:34, 20 January 2023 diff hist +38 N File:ICP2 Process Control Data Example.jpg current
- 12:30, 20 January 2023 diff hist +46 m ICP Etching Recipes →ICP Etch 1 (Panasonic E626I): added CLeaning recipes "to be added" Tag: Visual edit
- 12:29, 20 January 2023 diff hist -2 m ICP Etching Recipes →Process Control Data (Panasonic 1)
- 12:29, 20 January 2023 diff hist -2 m Process Group - Process Control Data →Panasonic ICP #1
- 12:28, 20 January 2023 diff hist +1,189 Process Group - Process Control Data →Etching (Process Control Data): FL-ICP example chart with link to live charts Tag: Visual edit: Switched
- 12:26, 20 January 2023 diff hist +214 ICP Etching Recipes →Process Control Data (Fluorine ICP Etcher): re-added example chart with links to charts
- 12:21, 20 January 2023 diff hist +2 ICP Etching Recipes →SiO2 Etch with CHF3/CF4 - Process Control Data (Panasonic 1): fixed links
- 12:20, 20 January 2023 diff hist -4 m ICP Etching Recipes →Process Control Data (Panasonic 1) Tag: Visual edit
- 12:19, 20 January 2023 diff hist +109 ICP Etching Recipes →Process Control Data (Panasonic 1): added `link=` URL to gsheets plots
- 12:18, 20 January 2023 diff hist +486 ICP Etching Recipes →Process Control Data (Panasonic 1): lin to ND's google sheets data, added example image of SPC chart Tag: Visual edit
- 12:16, 20 January 2023 diff hist +47 N File:ICP1 Process Control Data Example.jpg current
- 12:10, 20 January 2023 diff hist +92 ICP Etching Recipes →SiO2 Etching with CHF3/CF4 (Fluorine ICP Etcher): inserted example chart with link to data Tag: Visual edit
- 12:09, 20 January 2023 diff hist +29 Process Group - Process Control Data →Etching (Process Control Data): formatted OLD data Tag: Visual edit
- 12:06, 20 January 2023 diff hist +58 N File:FL-ICP Process Control Data Example.jpg current
- 12:03, 20 January 2023 diff hist +13 ICP Etching Recipes →SiO2 Etching with CHF3/CF4 (FL-ICP): corected toolname in header title Tag: Visual edit
- 12:00, 20 January 2023 diff hist -61 m Process Group - Process Control Data →PlasmaTherm SLR Fluorine Etcher: fixed link to plot Tag: Visual edit
- 12:00, 20 January 2023 diff hist +1 m ICP Etching Recipes →SiO2 Etching with CHF3/CF4 (FL-ICP): fixed plot link Tag: Visual edit
- 11:46, 20 January 2023 diff hist +411 Process Group - Process Control Data →Etching (Process Control Data): link to FL-ICP google sheets (noahD) Tag: Visual edit
- 11:45, 20 January 2023 diff hist +414 ICP Etching Recipes →Process Control Data (Fluorine ICP Etcher): linked to Noah's google sheets - plots & data Tag: Visual edit
- 16:37, 19 January 2023 diff hist +151 Template:Announcements blue-M oven down
- 16:35, 19 January 2023 diff hist +276 Template:Announcements stepper 2 maint.
- 16:01, 19 January 2023 diff hist +151 Template:Announcements stepper 1 PM
- 15:58, 18 January 2023 diff hist +1 m ICP Etch 2 (Panasonic E626I) →Online Training Video: Tag: Visual edit
- 15:57, 18 January 2023 diff hist +17 ICP Etch 2 (Panasonic E626I) Made "online training" into a section heading, so it's obvious in Table of Contents. Also change "page title" levels to "header" level. Tag: Visual edit
- 21:56, 12 January 2023 diff hist -113 Template:Announcements updated OPEN annc
- 15:38, 12 January 2023 diff hist +108 Oxford ICP Etcher - Process Control Data added chamber wet clean current Tag: Visual edit
- 08:33, 11 January 2023 diff hist -194 Template:Announcements nanofab open for LN2 delivery
- 16:28, 10 January 2023 diff hist +66 Template:Announcements LN2 closure
- 17:20, 6 January 2023 diff hist +7 Oxford ICP Etcher - Process Control Data →Etch Rate Dependence on Sample Size (Oxford ICP Etcher): changed name to emphasize Sampel Size effect Tag: Visual edit
- 11:28, 6 January 2023 diff hist +170 Process Group - Process Control Data →ICP-PECVD (Unaxis VLR Dep): link to SiO2/SiN plots separately Tag: Visual edit
- 17:07, 5 January 2023 diff hist +464 Template:News added info about process control data
- 10:43, 5 January 2023 diff hist +182 PECVD Recipes →ICP-PECVD (Unaxis VLR): added "geenral recipe notes" Tag: Visual edit
- 19:22, 3 January 2023 diff hist +126 Wet Benches →Develop Benches: added megasonic Tag: Visual edit
- 18:53, 3 January 2023 diff hist +66 Wafer Bonder (SUSS SB6-8E) →Detailed Specifications: link to MA6 Tag: Visual edit
- 17:41, 3 January 2023 diff hist -21 m Suss Aligners (SUSS MJB-3) →Optical Spectrum with Filter for i-line Exposure Tag: Visual edit
- 17:40, 3 January 2023 diff hist +170 Suss Aligners (SUSS MJB-3) added alignment marks GDS file, made optical spectra smaller. Tag: Visual edit
- 17:38, 3 January 2023 diff hist +135 Contact Aligner (SUSS MA-6) →Documentation: added link to alignment mark GDS file Tag: Visual edit
- 15:32, 3 January 2023 diff hist +481 ASML Stepper 3 - UCSB Test Reticles →Alignment Markers: added CAD files for alignment marks Tag: Visual edit
- 15:29, 3 January 2023 diff hist +72 N File:MA6-FrontBack AlignMarks only.gds CAD File for front/back alignment marks on Contact Aligner current
- 15:26, 3 January 2023 diff hist +90 N File:Contact-AlignFront.gds CAD file for contact alignment mark, as printed on ASML DUV Mask "UCSB-OPC1" current
- 15:25, 3 January 2023 diff hist +95 N File:EBL-GlobalMulti NEG.gds CAD file for EBL negative alignment mark, as printed on ASML DUV mask "UCSB-OPC1" current
- 15:23, 3 January 2023 diff hist +72 N File:EBL-GlobalMulti POS.gds EBL Alignment Mark as printed on ASML DUV Mask "UCSB-OPC1" current
- 15:22, 3 January 2023 diff hist +84 N File:GCA stepper align.gds GCA Stepper Alignment Mark as drawn on ASML DUV Mask Plate "UCSB-OPC1" current
- 11:06, 31 December 2022 diff hist -3 m Template:News →Raith Velion: FIB/SEM Installation
- 11:05, 31 December 2022 diff hist +42 Template:Announcements Lab open after Xmas shutdown
- 08:36, 22 December 2022 diff hist +33 Holographic Lith/PL Setup (Custom) →Detailed Specifications: added max sample size Tag: Visual edit
- 21:15, 21 December 2022 diff hist -393 Template:Announcements nanofab holiday closure
- 10:50, 21 December 2022 diff hist -12 m Stepper Recipes →Anti-Reflective Coatings: removed bold Tag: Visual edit
- 10:49, 21 December 2022 diff hist +19 m Stepper Recipes →Anti-Reflective Coatings Tag: Visual edit
- 10:48, 21 December 2022 diff hist +838 Stepper Recipes →Stepper 3 (ASML DUV): added TOC Tag: Visual edit
- 08:34, 19 December 2022 diff hist -8 m Dry Etching Recipes Tag: Visual edit
- 08:33, 19 December 2022 diff hist +9 Dry Etching Recipes fix Pan1/AlGaAs link Tag: Visual edit
- 00:23, 16 December 2022 diff hist +871 N E-Beam 5 (Plasys) inital page and descriptions Tag: Visual edit: Switched
- 15:58, 15 December 2022 diff hist +112 Stepper Recipes →DS-K101-304: changed spin speed to 2500rpm Tag: Visual edit
- 14:39, 15 December 2022 diff hist +23 Tool List →Thermal Evaporation: Added EBeam 5 (plasys) link to new page Tag: Visual edit
- 15:25, 14 December 2022 diff hist -66 Template:Announcements asml up
- 14:47, 14 December 2022 diff hist +101 Lithography Recipes →Automated Coat/Develop System Recipes (S-Cubed Flexi): note about DSK@220C equivalence to DUV42P Tag: Visual edit
- 07:57, 13 December 2022 diff hist -1 Wafer Cleaver (PELCO Flip-Scribe) changed room --> ESB 1111 current Tag: Visual edit
- 07:53, 13 December 2022 diff hist -48 Template:Announcements ASML Down: laser fail
- 11:17, 12 December 2022 diff hist +126 Microscopes →Microscope Training Guide: basic list of topics Tag: Visual edit
- 21:53, 11 December 2022 diff hist -1 m Template:Announcements
- 21:52, 11 December 2022 diff hist +5 m Template:Announcements
- 21:49, 11 December 2022 diff hist +17 Template:Announcements asml laser pm update
- 00:36, 10 December 2022 diff hist -899 Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher added comment about NP vs ND meas, deleted extraneous tables of old non-standard measurements Tag: Visual edit
- 00:28, 10 December 2022 diff hist +114 Frequently Asked Questions →How do I get my files from the NanoFab computers?: mentioned allowed folder names Tag: Visual edit
- 00:23, 10 December 2022 diff hist -3 m Autostep 200 Mask Making Guidance →CAD Files Tag: Visual edit
- 08:17, 9 December 2022 diff hist +33 m Other Dry Etching Recipes →CAIBE (Oxford Ion Mill): spelling correction current Tag: Visual edit
- 16:55, 6 December 2022 diff hist +13 Template:Announcements EB2 heater update
- 16:52, 6 December 2022 diff hist -550 Process Group - Remote Fabrication Jobs updated to Trello current Tag: Visual edit
- 13:49, 6 December 2022 diff hist +9 m Tube Furnace (Tystar 8300) →Gases Available Tag: Visual edit
- 13:47, 6 December 2022 diff hist -4 m Rapid Thermal Processor (SSI Solaris 150) →Detailed Specificiations: bullets Tag: Visual edit
- 11:34, 6 December 2022 diff hist +181 N File:UCSB ASML DUV Stepper - Programming Worksheet.pptx Similar to ASML programming spreadsheet, with Image coords/sizes, but also includes diagrams and wafer layout specs. More in depth version of prrogramming spreadsheet. current
- 11:19, 6 December 2022 diff hist +165 Stepper 3 (ASML DUV) →Design Tools: note about JobCreator outage Tag: Visual edit
- 17:16, 2 December 2022 diff hist +745 ICP Etching Recipes →Si Etching (Fluorine ICP Etcher): added Al2O3/SiO2 masking procedure Tag: Visual edit
- 17:09, 2 December 2022 diff hist +25 Dry Etching Recipes fixed FL-ICP: Si link Tag: Visual edit
- 12:23, 1 December 2022 diff hist +20 Direct-Write Lithography Recipes converted File links to Media links (open PDF directly) Tag: Visual edit
- 12:20, 1 December 2022 diff hist 0 Direct-Write Lithography Recipes testing File-->Media link
- 12:20, 1 December 2022 diff hist +443 Contact Alignment Recipes links to all PR datasheets current Tag: Visual edit
- 12:16, 1 December 2022 diff hist +17 Direct-Write Lithography Recipes linkto nLOF2020 Tag: Visual edit
- 12:14, 1 December 2022 diff hist 0 File:AXP4000pb-Datasheet.pdf John d uploaded a new version of File:AXP4000pb-Datasheet.pdf current
- 12:10, 1 December 2022 diff hist -42 Contact Alignment Recipes added some of the PR datasheet links Tag: Visual edit
- 00:12, 30 November 2022 diff hist +323 MLA150 - Design Guidelines →Greyscale Lithography: clarified levels and linked to GDSpy Tag: Visual edit
- 17:47, 28 November 2022 diff hist +206 Template:Announcements ASML Dec 12th Laser PM
- 10:54, 28 November 2022 diff hist +111 RIE 5 (PlasmaTherm) →Detailed Specifications: added laser monitor current Tag: Visual edit
- 16:29, 23 November 2022 diff hist +985 Maskless Aligner (Heidelberg MLA150) →Video Trainings: added old video training back Tag: Visual edit
- 11:41, 23 November 2022 diff hist +682 Wet Benches →Plating Bench: added basic info of what is/isn't provided. Tag: Visual edit
- 11:36, 23 November 2022 diff hist +67 Frequently Asked Questions →Bring a new chemical/material into the lab Tag: Visual edit
- 16:57, 22 November 2022 diff hist +42 IBD: Calibrating Optical Thickness minor corrections Tag: Visual edit
- 10:22, 22 November 2022 diff hist +616 Laser Etch Monitoring self-training allowed Tag: Visual edit
- 09:28, 22 November 2022 diff hist +243 ASML Stepper 3 Standard Operating Procedure →Running a focus and/or exposure matrix: added how to view/modufy exposure before exposing Tag: Visual edit
- 14:32, 20 November 2022 diff hist +11 Staff List added Vraj Tel# Tag: Visual edit
- 13:52, 20 November 2022 diff hist +351 N Vraj Mehalana Added contact info & basic info guesses Tag: Visual edit: Switched
- 13:48, 20 November 2022 diff hist +68 Staff List →Financial & Administrative: added Vraj M Tag: Visual edit
- 09:26, 20 November 2022 diff hist +132 Template:Announcements Lee's MA6 service
- 18:44, 15 November 2022 diff hist -553 Sputtering Recipes →Ion Beam Deposition (Veeco NEXUS): fixed links to Historical Data fro SiO/TaO Tag: Visual edit
- 18:14, 15 November 2022 diff hist -132 PECVD Recipes fixed links to pre-2022 historical data Tag: Visual edit
- 16:56, 15 November 2022 diff hist +120 Process Group - Process Control Data link to Old pre-2022 Dep data Tag: Visual edit
- 08:49, 15 November 2022 diff hist -164 Template:Announcements deleete veterans day
- 08:48, 15 November 2022 diff hist -126 Template:Announcements JEOL SEM UP
- 11:43, 14 November 2022 diff hist +173 Photolithography - Manual Edge-Bead Removal Techniques →Lithographic Edge Bead Removal: added location of EBR photo mask Tag: Visual edit
- 13:25, 11 November 2022 diff hist +37 m ICP Etching Recipes →Through Silicon Via etch (DSEiii): author credit Tag: Visual edit
- 13:23, 11 November 2022 diff hist +3,783 ICP Etching Recipes →DSEIII_(PlasmaTherm/Deep_Silicon_Etcher): added procedure for through-wafer etch Tag: Visual edit
- 13:14, 11 November 2022 diff hist +99 Packaging Recipes →Wafer Bonder (Logitech WBS7): reocmmandations on each Tag: Visual edit
- 13:06, 11 November 2022 diff hist -116 Ashers (Technics PEII) →Recipes: link to recipes page, deleted recipes form this page current Tag: Visual edit
- 13:05, 11 November 2022 diff hist -64 Oxygen Plasma System Recipes →Chamber Clean after CF4 Etching: deleted 300W recipe Tag: Visual edit
- 08:37, 11 November 2022 diff hist +16 m Template:Announcements
- 08:35, 11 November 2022 diff hist -822 Template:Announcements deleted ASML msgs, MLA150 msg
- 08:35, 11 November 2022 diff hist +148 Template:Announcements Vet day holiday
- 21:23, 10 November 2022 diff hist -5 m Wet Etching Recipes →Organic removal Tag: Visual edit
- 15:12, 9 November 2022 diff hist +182 Template:Announcements evg down
- 15:11, 9 November 2022 diff hist +32 m Stepper 3 (ASML DUV) →Training Procedure Tag: Visual edit
- 15:07, 9 November 2022 diff hist +497 Stepper 3 (ASML DUV) →Online Video Trainings: added "training procedure" section Tag: Visual edit
- 14:41, 8 November 2022 diff hist +1 m Automated Coat/Develop System (S-Cubed Flexi) →Recipes current Tag: Visual edit
- 14:41, 8 November 2022 diff hist -1 m Automated Coat/Develop System (S-Cubed Flexi)
- 14:41, 8 November 2022 diff hist +267 Automated Coat/Develop System (S-Cubed Flexi) link to recipes table Tag: Visual edit
- 14:39, 8 November 2022 diff hist +10 m S-Cubed Flexi - Operating Procedure current Tag: Visual edit
- 14:39, 8 November 2022 diff hist -541 S-Cubed Flexi - Operating Procedure →Allowed Recipes: link to recipes Tag: Visual edit
- 14:38, 8 November 2022 diff hist +128 Lithography Recipes link to Auto-coater recipes Tag: Visual edit
- 14:36, 8 November 2022 diff hist +2 m Lithography Recipes rmeove TOC
- 14:36, 8 November 2022 diff hist -2 Lithography Recipes add TOC tmeporarily
- 14:35, 8 November 2022 diff hist +3,162 Lithography Recipes →Automated Coat/Develop System Recipes (S-Cubed Flexi): added recipes table Tag: Visual edit
- 14:19, 8 November 2022 diff hist +256 Automated Coat/Develop System (S-Cubed Flexi) indicated which PR's/chems are availabelf for general use Tag: Visual edit
- 13:19, 8 November 2022 diff hist +199 Stepper Recipes →Positive Resist (ASML DUV): added UV26 Tag: Visual edit: Switched
- 13:25, 4 November 2022 diff hist -258 Template:Announcements ASML PM Complete
- 19:13, 3 November 2022 diff hist -410 Template:Announcements deleted JEOL talk
- 16:25, 1 November 2022 diff hist -3 Template:Announcements SEM#1 up
- 08:47, 29 October 2022 diff hist 0 Template:Announcements moved ASML maint higher and increased date
- 08:46, 29 October 2022 diff hist +410 Template:Announcements JEOL EBL Seminar
- 08:35, 29 October 2022 diff hist +85 ICP Etching Recipes →Photoresist and ARC etching (Panasonic 2): link to DUV42P and added thickness Tag: Visual edit
- 08:33, 29 October 2022 diff hist +4 Lithography Recipes →Photolithography Recipes: corrected DUV42p link Tag: Visual edit
- 16:01, 27 October 2022 diff hist +132 Template:Announcements SEM1 down
- 15:44, 27 October 2022 diff hist +291 Nanofab Job Postings added direct link to job posting Tag: Visual edit
- 15:21, 27 October 2022 diff hist +1 Ellipsometer (Woollam) corrected link Tag: Visual edit
- 15:21, 27 October 2022 diff hist 0 m Ellipsometer (Woollam) - Measuring thin metals with oxide pre-measurement John d moved page Ellipsometer (Woolam) - Measuring thin metals with oxide pre-measurement to Ellipsometer (Woollam) - Measuring thin metals with oxide pre-measurement without leaving a redirect: Woollam misspelled as "woolam"
- 15:20, 27 October 2022 diff hist +2,069 N Ellipsometer (Woollam) - Measuring thin metals with oxide pre-measurement pasted Demis' instructions Tag: Visual edit
- 15:17, 27 October 2022 diff hist +140 Ellipsometer (Woollam) →Operating Procedures: added link to oxide-pre-meas instructions Tag: Visual edit
- 08:48, 27 October 2022 diff hist +127 Template:Announcements Au Plating bench down
- 17:11, 26 October 2022 diff hist +62 ICP-PECVD (Unaxis VLR) →About: added SiO2 gap-fill note Tag: Visual edit
- 14:17, 25 October 2022 diff hist +43 Atomic Layer Deposition Recipes →SiO2 deposition (ALD CHAMBER 3): added temperature-variation/recipes avaialble on tool Tag: Visual edit
- 12:03, 25 October 2022 diff hist +60 E-Beam 2 (Custom) →Materials Table: fixed recipes link, bolded heating/oxygen Tag: Visual edit
- 11:59, 25 October 2022 diff hist +91 E-Beam Evaporation Recipes →Materials Table (E-Beam #2): note that data is outdated current Tag: Visual edit
- 11:44, 25 October 2022 diff hist +108 Wet Etching Recipes →Table of Wet Etching Recipes: added header row to bottom Tag: Visual edit: Switched
- 11:42, 25 October 2022 diff hist +141 Wet Etching Recipes move table to top, recipes to bottom, subheadings, added PureStrip info Tag: Visual edit
- 15:59, 24 October 2022 diff hist +4 Mechanical Polisher (Allied) update to {{tool2}}, set Room = 1111
- 01:14, 19 October 2022 diff hist +192 Template:Tool2 →Version: added todo, and newlines current
- 01:11, 19 October 2022 diff hist -4 DUMMY TOOL current
- 01:11, 19 October 2022 diff hist +84 DUMMY TOOL
- 01:10, 19 October 2022 diff hist +4 Template:Tool2 if no recipes, display "Recipes: N/A"
- 01:07, 19 October 2022 diff hist +185 Template:Tool2test current
- 01:06, 19 October 2022 diff hist +4 DUMMY TOOL
- 01:05, 19 October 2022 diff hist -4 DUMMY TOOL
- 01:03, 19 October 2022 diff hist -14 Template:Tool2 remove width=200
- 01:01, 19 October 2022 diff hist -25 Template:Tool2 remove if:recipes
- 00:58, 19 October 2022 diff hist +25 Template:Tool2
- 00:57, 19 October 2022 diff hist +3 Template:Tool2
- 00:55, 19 October 2022 diff hist 0 Template:Tool2
- 00:53, 19 October 2022 diff hist -22 Template:Tool2
- 00:51, 19 October 2022 diff hist +24 Template:Tool2 bolded "sign up for this tool"
- 00:47, 19 October 2022 diff hist +195 Template:Tool2 Made Mfg,Model,Description optional & italics, not bold
- 00:44, 19 October 2022 diff hist +4 Template:Tool2test
- 00:43, 19 October 2022 diff hist -2 Template:Tool2test
- 00:41, 19 October 2022 diff hist 0 Template:Tool2test
- 00:38, 19 October 2022 diff hist +9 Template:Tool2test
- 00:35, 19 October 2022 diff hist +8 DUMMY TOOL
- 00:34, 19 October 2022 diff hist +127 Template:Tool2test make mfg/model not bold and optional (in conditioanls
- 00:30, 19 October 2022 diff hist +37 DUMMY TOOL
- 00:28, 19 October 2022 diff hist +89 Wet Benches →Wafer Toxic Corrosive Benches: changed to tool2, added MikeDay as backup, added materials,mfg,description
- 00:23, 19 October 2022 diff hist +157 Template:Tool2 added "IF" conditional around "recipes" section.
- 00:21, 19 October 2022 diff hist 0 Template:Tool2test
- 00:20, 19 October 2022 diff hist 0 Template:Tool2test
- 00:18, 19 October 2022 diff hist 0 Template:Tool2test
- 00:17, 19 October 2022 diff hist +11 m DUMMY TOOL added type, to remove Category text
- 17:06, 18 October 2022 diff hist +25 Template:Tool2test
- 17:05, 18 October 2022 diff hist -83 DUMMY TOOL try with blank args
- 17:04, 18 October 2022 diff hist +4 DUMMY TOOL trying tool2 updates, tool2test
- 17:03, 18 October 2022 diff hist +7,182 N Template:Tool2test pasted from tool2
- 16:27, 17 October 2022 diff hist +180 Template:Announcements MLA150 software update notes
- 16:24, 17 October 2022 diff hist -229 Template:Announcements Therma Evap 1 up
- 16:23, 17 October 2022 diff hist +232 Template:Announcements ASML maint
- 16:01, 15 October 2022 diff hist +245 Stepper Recipes →Stepper 3 (ASML DUV): LinkedIn to Design Tools section Tag: Visual edit
- 21:53, 13 October 2022 diff hist +55 Lithography Recipes →Chemicals Stocked + Datasheets: added AZ4620 + link to datasheet Tag: Visual edit
- 21:50, 13 October 2022 diff hist -528 Lithography Recipes →General Photolithography Techniques: deleted EBR section, combined it into this section Tag: Visual edit
- 21:49, 13 October 2022 diff hist +451 Photolithography - Manual Edge-Bead Removal Techniques added reasons for EBR and TOC
- 21:43, 13 October 2022 diff hist +2 m Lithography Recipes delete TOC
- 21:42, 13 October 2022 diff hist -2 Lithography Recipes TEMP TOC to get link
- 21:42, 13 October 2022 diff hist +215 Lithography Recipes Other PR processes, added link to reflow info Tag: Visual edit
- 11:14, 8 October 2022 diff hist +37 m Frequently Asked Questions →Authorship on Publications: minor updates Tag: Visual edit
- 20:51, 6 October 2022 diff hist -29 Stepper 2 (AutoStep 200) removed "work in progress" for Mask Making page Tag: Visual edit
- 20:51, 6 October 2022 diff hist +441 Autostep 200 Mask Making Guidance →CAD Files: todo: missing 'reticle handbook" Tag: Visual edit: Switched
- 10:52, 6 October 2022 diff hist -565 Maskless Aligner (Heidelberg MLA150) →Video Trainings: deleted old video link, notice of re-recording Tag: Visual edit
- 23:55, 4 October 2022 diff hist +223 Template:Announcements added NanoFab job openings
- 23:52, 4 October 2022 diff hist -4 m Template:Announcements
- 23:42, 4 October 2022 diff hist 0 Staff List →Process Group: Ning Cao --> OPEN POSITION Tag: Visual edit
- 23:41, 4 October 2022 diff hist +1,071 N Nanofab Job Postings linked to UCSB Jobs pages, instructios, listed Process Technician position Tag: Visual edit
- 23:06, 4 October 2022 diff hist +70 ASML DUV: Edge Bead Removal via Photolithography current Tag: Visual edit
- 23:04, 4 October 2022 diff hist +171 Photolithography - Manual Edge-Bead Removal Techniques →EBR100 Tag: Visual edit
- 23:01, 4 October 2022 diff hist +12 m Lithography Recipes →Edge-Bead Removal: bolded Tag: Visual edit
- 23:00, 4 October 2022 diff hist +41 m Lithography Recipes remove TOC, fix EBR link Tag: Visual edit: Switched
- 22:58, 4 October 2022 diff hist -2 Lithography Recipes TEMP TOC force
- 22:58, 4 October 2022 diff hist +949 Lithography Recipes added edge-bead removal section Tag: Visual edit
- 22:50, 4 October 2022 diff hist -32 DSEIII (PlasmaTherm/Deep Silicon Etcher) fixed link to SOP Tag: Visual edit
- 22:49, 4 October 2022 diff hist +52 N File:Running a process.pdf John d moved page File:Running a process.pdf to File:PT-DSEiii - Running a process.pdf: added tool name to title current Tag: New redirect
- 22:49, 4 October 2022 diff hist 0 m File:PT-DSEiii - Running a process.pdf John d moved page File:Running a process.pdf to File:PT-DSEiii - Running a process.pdf: added tool name to title current
- 22:47, 4 October 2022 diff hist +186 Photolithography - Manual Edge-Bead Removal Techniques linked to DUV Litho EBR Tag: Visual edit
- 13:26, 4 October 2022 diff hist +2 Chemical List →Material Safety Datasheets current Tag: Visual edit
- 13:13, 4 October 2022 diff hist +252 ICP Etching Recipes →Edge-Bead Removal: link to manual RP removal Tag: Visual edit
- 17:08, 3 October 2022 diff hist -360 Template:Announcements deleted GCA's up
- 17:06, 3 October 2022 diff hist +229 Template:Announcements Thermal1 down
- 11:47, 3 October 2022 diff hist +252 m Calculators + Utilities →CAD Design Tips: minor updates Tag: Visual edit
- 10:30, 3 October 2022 diff hist +210 Wet Benches →About: note about HF apron PPE Tag: Visual edit
- 22:52, 1 October 2022 diff hist +76 Tool List →Wet Processing: link to Wafer_Toxic_Corrosive_Bench Tag: Visual edit
- 22:51, 1 October 2022 diff hist +210 Wet Benches →Detailed Specifications: linked KOH bath to SUM Tag: Visual edit
- 16:54, 29 September 2022 diff hist +22 m Dry Etching Recipes fix incorrect color header cell
- 16:47, 29 September 2022 diff hist +74 m Unaxis VLR Etch - Process Control Data bold + colored header row Tag: Visual edit: Switched
- 16:33, 29 September 2022 diff hist +113 ICP Etching Recipes →ICP-Etch (Unaxis VLR): added (empty) section for Unaxis Cleaning Recipes Tag: Visual edit
- 16:31, 29 September 2022 diff hist +186 ICP-Etch (Unaxis VLR) link to recipes, reduce headers to "heading level 1" (were "title" level) current Tag: Visual edit
- 15:44, 29 September 2022 diff hist -145 Template:Announcements ASML network update
- 15:43, 29 September 2022 diff hist -26 Template:Announcements GCA stepper 1 PM done
- 14:28, 29 September 2022 diff hist +245 Filmetrics F40-UV Microscope-Mounted →Good Curve-Fitting: explained reasonable vs. perfect curve fit current Tag: Visual edit
- 08:28, 28 September 2022 diff hist -155 Template:Announcements delete stepper 2 up
- 08:28, 28 September 2022 diff hist -48 Template:Announcements →GCA AutoStep Service: PM complete
- 10:54, 26 September 2022 diff hist -42 Template:Announcements AutoStep up.
- 07:34, 22 September 2022 diff hist +197 Template:Announcements corrected EB3 --> EB2, AUtostep down RMS
- 15:40, 21 September 2022 diff hist +122 Template:Announcements EB2 heater down
- 14:27, 21 September 2022 diff hist -8 Template:Announcements SEM#1 UP
- 08:33, 19 September 2022 diff hist +87 Template:Announcements GCA 6300 PM update
- 08:30, 19 September 2022 diff hist -11 Template:Announcements gca autostep 200 PM update
- 01:53, 17 September 2022 diff hist +77 Template:Announcements asml network update
- 15:50, 16 September 2022 diff hist +85 Sputter 5 (AJA ATC 2200-V) Added detailed specs section & ion mill current Tag: Visual edit
- 09:49, 14 September 2022 diff hist -6 m Template:Announcements
- 13:00, 13 September 2022 diff hist +192 Template:Announcements SEM1 down
- 12:52, 13 September 2022 diff hist +41 Ellipsometer (Woollam) updated wafer size Tag: Visual edit
- 10:04, 13 September 2022 diff hist +86 Optical Film Spectra + Optical Properties (Filmetrics F10-RT-UVX) →Equipment Specifications: addded spot size and glass slides for small samples current Tag: Visual edit
- 10:03, 13 September 2022 diff hist +73 Optical Film Thickness & Wafer-Mapping (Filmetrics F50) Added meas spot size current Tag: Visual edit
- 10:02, 13 September 2022 diff hist +111 Filmetrics F40-UV Microscope-Mounted →Capabilities: added spot size and film thickness limits Tag: Visual edit
- 09:59, 13 September 2022 diff hist +46 Ellipsometer (Woollam) →Specifications: added sample size Tag: Visual edit
- 07:50, 13 September 2022 diff hist -148 Template:Announcements
- 07:50, 13 September 2022 diff hist -49 Template:Announcements aja 4 update
- 09:28, 12 September 2022 diff hist +156 Template:Announcements Sputter 4 down
- 11:05, 9 September 2022 diff hist +26 ICP Etching Recipes →Al2O3 Etching (Panasonic 2): convert to nm/min ER Tag: Visual edit
- 09:58, 9 September 2022 diff hist -683 CC-PRIME OnBoarding 2022-08 linked to QSF video/PDF, removed UCSBNetID requireemnts current Tag: Visual edit
- 09:58, 9 September 2022 diff hist +63 N File:QSF-SOP-020 Policy Guidelines and CHP Rev 2.022.pdf CC-PRIME Onboarding - safety training doc for QSF current
- 19:32, 7 September 2022 diff hist +123 KLayout Design Tips →File Types: Mentioned that MLA150 requires GDS Tag: Visual edit
- 19:30, 7 September 2022 diff hist +370 KLayout Design Tips →File Types: clarify OASIS GDS compatibility Tag: Visual edit
- 18:58, 7 September 2022 diff hist +215 KLayout Design Tips →How to draw circles: better method to convert all Cells to Static Cells Tag: Visual edit
- 18:55, 7 September 2022 diff hist +35 KLayout Design Tips added author credit Tag: Visual edit
- 10:03, 7 September 2022 diff hist -5 m Michael Barreraz current Tag: Visual edit
- 10:02, 7 September 2022 diff hist +4 m User:Barreraz current Tag: Visual edit
- 10:02, 7 September 2022 diff hist +32 N User:Barreraz linked to staff page Tag: Visual edit
- 08:37, 3 September 2022 diff hist -14 Microscopes →Microscope #1: Olympus BHMJL (removed temporarily): changed to Room 1111 Tag: Visual edit
- 08:35, 3 September 2022 diff hist +1,199 KLayout Design Tips link to QNFCF Youtube videos on Cells Tag: Visual edit
- 06:58, 2 September 2022 diff hist +289 Atomic Layer Deposition Recipes →Oxford FlexAL Chamber #1: Metals: added SiO2 recipes Tag: Visual edit
- 10:15, 1 September 2022 diff hist +250 Template:Announcements added GCA Autostep service (Millerski)
- 10:07, 1 September 2022 diff hist -9 Frequently Asked Questions →Who do I contact for an equipment problem or general NanoFab problem?: updated that it texts the supervisor Tag: Visual edit
- 15:01, 31 August 2022 diff hist 0 m Template:Announcements →Chlorine gasses available
- 14:58, 31 August 2022 diff hist +153 m Lift-Off with I-Line Imaging Resist + LOL2000 Underlayer added to gently DI rinse current Tag: Visual edit
- 10:57, 31 August 2022 diff hist -486 Template:Announcements Cl2 repair
- 14:36, 30 August 2022 diff hist 0 m Template:Announcements →All Chlorine gasses disabled
- 14:35, 30 August 2022 diff hist +66 Template:Announcements Cl2 update
- 08:43, 30 August 2022 diff hist -51 Laser Scanning Confocal M-scope (Olympus LEXT) Corrected name spelling, deleted email/phone
- 15:05, 28 August 2022 diff hist +120 Template:Announcements Updated that tools are up but gas is down
- 12:47, 28 August 2022 diff hist +445 Template:Announcements Cl2 down
- 13:04, 26 August 2022 diff hist +136 Measurements and Imaging with Amscope Camera - Quickstart Usage Guide →During live imaging Tag: Visual edit
- 12:59, 26 August 2022 diff hist +24 m UCSB NanoFab Microscope Training →Measurements Tag: Visual edit
- 12:58, 26 August 2022 diff hist +32 m Measurements and Imaging with Amscope Camera - Quickstart Usage Guide author credit Tag: Visual edit
- 12:57, 26 August 2022 diff hist +905 Measurements and Imaging with Amscope Camera - Quickstart Usage Guide section+screenshots for starting imaging, end session section Tag: Visual edit
- 12:54, 26 August 2022 diff hist +69 N File:Amscope 02 annot camera link.png current
- 12:50, 26 August 2022 diff hist +93 N File:Microscope 4 Nikon - camera shutter - IMG 6249 - right side knobs - camera shutter - 800px.png current
- 12:43, 26 August 2022 diff hist +31 N File:AmScope 01 AmScope Icon.png current
- 12:39, 26 August 2022 diff hist +131 Measurements and Imaging with Amscope Camera - Quickstart Usage Guide →Choosing the Calibration Tag: Visual edit
- 12:37, 26 August 2022 diff hist +672 Measurements and Imaging with Amscope Camera - Quickstart Usage Guide added screenshots Tag: Visual edit
- 12:34, 26 August 2022 diff hist +67 N File:AmScope - Layers Merge - annot.png current
- 12:30, 26 August 2022 diff hist +69 N File:AmScope - 06 chose mic2-150x annot.png current
- 12:27, 26 August 2022 diff hist +64 N File:AmScope - 02 annot.png current
- 12:23, 26 August 2022 diff hist +1,273 UCSB NanoFab Microscope Training measurements section, mostly copy/pasted from parent page Tag: Visual edit
- 12:17, 26 August 2022 diff hist -1 m Microscopes →Microscope Training Guide Tag: Visual edit
- 00:53, 26 August 2022 diff hist +1 Oxford ICP Etcher - Process Control Data added NH4OH dilution Tag: Visual edit
- 00:46, 26 August 2022 diff hist +44 Oxford ICP Etcher - Process Control Data cahnged headings and added TOC Tag: Visual edit
- 00:45, 26 August 2022 diff hist +8 Oxford ICP Etcher - Process Control Data forced TOC
- 09:55, 25 August 2022 diff hist +870 N Equipment Group - Video Training Procedures pasted video training from parent page current Tag: Visual edit
- 09:55, 25 August 2022 diff hist -754 Nanofab Staff Internal Pages moving Video Trianing to separate Equip Group pages Tag: Visual edit
- 16:35, 24 August 2022 diff hist +41 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration added software login Tag: Visual edit
- 16:34, 24 August 2022 diff hist +273 ASML 5500: Recovering from an Error addl info on unload wafers + reticles Tag: Visual edit
- 16:30, 24 August 2022 diff hist +12 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration Tag: Visual edit
- 16:28, 24 August 2022 diff hist -13 ASML Stepper 3: Wafer Handler Reset Procedure current Tag: Visual edit
- 16:27, 24 August 2022 diff hist +103 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration link to Log window full proc. Tag: Visual edit
- 16:26, 24 August 2022 diff hist +55 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →Important Warnings: minor updates Tag: Visual edit
- 16:26, 24 August 2022 diff hist +293 ASML Stepper 3 Standard Operating Procedure added to check Warnings window before starting Tag: Visual edit
- 16:21, 24 August 2022 diff hist +1,842 N ASML Stepper 3: Wafer Handler Reset Procedure pasted from gDocs Tag: Visual edit
- 16:18, 24 August 2022 diff hist +16 Stepper 3 (ASML DUV) →Operating Procedures Tag: Visual edit
- 16:17, 24 August 2022 diff hist -874 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration wafer handler reset - link to new page Tag: Visual edit
- 16:13, 24 August 2022 diff hist -626 ASML Stepper 3 Standard Operating Procedure pasted from Word Doc rev. 2022-08-23 DJ Tag: Visual edit
- 11:25, 23 August 2022 diff hist +11 Oven 4 (Thermo-Fisher HeraTherm) added toolid for SUM
- 08:44, 20 August 2022 diff hist +22 Dan Read current Tag: Visual edit
- 08:22, 20 August 2022 diff hist +6 Staff List →Facilities Group: bolded all managers/leads for each group Tag: Visual edit
- 09:36, 18 August 2022 diff hist +377 Template:Publications added Blumenthal: 250C Process for < 2dB/m Ultra-Low Loss Silicon Nitride Integrated Photonic Waveguides current
- 23:28, 14 August 2022 diff hist +4 E-Beam Lithography System (JEOL JBX-6300FS) added "JBX-" to model # current
- 18:01, 10 August 2022 diff hist +257 Frequently Asked Questions →I can't connect to the Nanofiles FTP server!: winscp - multipel settings locations Tag: Visual edit
- 11:35, 6 August 2022 diff hist -5 m Sputter 3 (AJA ATC 2000-F) changed Documentation --> procedures to match the other tools Tag: Visual edit
- 11:34, 6 August 2022 diff hist +5 Sputter 5 (AJA ATC 2200-V) →Procedures: made training video section linkable Tag: Visual edit
- 11:34, 6 August 2022 diff hist +9 Sputter 4 (AJA ATC 2200-V) →Procedures: made training video section linkable Tag: Visual edit
- 11:33, 6 August 2022 diff hist +7 Sputter 3 (AJA ATC 2000-F) →Documentation: made training video section linkable Tag: Visual edit
- 14:02, 5 August 2022 diff hist +240 Nanofab Staff Internal Pages added Useful UCSB Pages > Faciltiies work requests Tag: Visual edit
- 12:33, 3 August 2022 diff hist +214 CC-PRIME OnBoarding 2022-08 →Location & Parking: added map and gMaps link Tag: Visual edit
- 12:24, 3 August 2022 diff hist +44 N File:CC-PRIME - Parking Lot 10 and CNSI - Annotated.png current
- 11:59, 3 August 2022 diff hist +8 Sputtering Recipes →Materials Table (Sputter 3): specified Tilt is in mm, since tool has both In & mm listed. Tag: Visual edit
- 11:58, 3 August 2022 diff hist -18 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V) Tag: Visual edit
- 11:57, 3 August 2022 diff hist +54 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V): updated Au to 200W dep rate Tag: Visual edit
- 22:39, 2 August 2022 diff hist +7 DUMMY TOOL testing lenvik & Michael Barreraz
- 22:38, 2 August 2022 diff hist +54 Template:Tool2 added barreraz, millerksi, lenvik to allowed list (after updateing StaffContactInfo_DJ)
- 22:37, 2 August 2022 diff hist +357 Template:StaffContactInfo DJ added barreraz, millerski, lenvik current
- 22:27, 2 August 2022 diff hist +131 Template:Tool2 →Arguments with Specific Values: explanation where values come from
- 22:23, 2 August 2022 diff hist +125 Template:StaffContactInfo DJ added explanation
- 22:18, 2 August 2022 diff hist +509 Template:StaffContactInfo DJ added documentation, listing available staff names
- 22:04, 2 August 2022 diff hist +28 N Template:Tool2 DJ John d moved page Template:Tool2 DJ to Template:Tool2: make it the standard tool2 template current Tag: New redirect
- 22:04, 2 August 2022 diff hist 0 m Template:Tool2 John d moved page Template:Tool2 DJ to Template:Tool2: make it the standard tool2 template
- 21:59, 2 August 2022 diff hist -3 DUMMY TOOL change to tool2 tempalte
- 21:57, 2 August 2022 diff hist 0 m Template:Tool2 NLV John d moved page Template:Tool2 to Template:Tool2 NLV: deprecated old version current
- 15:58, 2 August 2022 diff hist +330 CC-PRIME OnBoarding 2022-08 art wafer photo Tag: Visual edit
- 15:56, 2 August 2022 diff hist +1,408 CC-PRIME OnBoarding 2022-08 Tag: Visual edit
- 08:52, 2 August 2022 diff hist +83 N File:Directions to NanoFab - ESB map + P10 parking - Geo MapDev.png current
- 13:28, 1 August 2022 diff hist +26 CC-PRIME OnBoarding 2022-08 →Attire for In-Person Cleanroom Access Tag: Visual edit
- 13:06, 1 August 2022 diff hist +506 CC-PRIME OnBoarding 2022-08 guesses of Attire Tag: Visual edit
- 13:02, 1 August 2022 diff hist +237 CC-PRIME OnBoarding 2022-08 directions/parking Tag: Visual edit
- 12:40, 1 August 2022 diff hist +821 CC-PRIME OnBoarding 2022-08 Tag: Visual edit
- 12:06, 1 August 2022 diff hist +328 CC-PRIME OnBoarding 2022-08 Tag: Visual edit
- 11:59, 1 August 2022 diff hist +692 N CC-PRIME OnBoarding 2022-08 Created page with "The tasks needed for signing up for CNSI's Technician Cleanroom Training class is below. Contact [mailto:demis@ucsb.edu;rlschoeppner@ucsb.edu?subject=CCPRIME%20Cleanroom%20Tr..." Tag: Visual edit
- 16:45, 29 July 2022 diff hist +197 MLA150 - Large Image GDS Generation updated formatting/numbered list current Tag: Visual edit
- 11:56, 29 July 2022 diff hist -29 Photoluminescence PL Setup (Custom) →Pump Lasers Available: added 532nm laser Tag: Visual edit
- 09:00, 22 July 2022 diff hist -116 Template:Announcements updated ASML note
- 06:11, 22 July 2022 diff hist +118 MLA150 - Troubleshooting →Solutions for small substrates: starting exp on uniform area. Tag: Visual edit
- 11:06, 20 July 2022 diff hist +4 m Template:Tool2
- 11:06, 20 July 2022 diff hist -3 Stepper 2 (AutoStep 200) update to Tool2: added Lee Sawyer as Super2
- 16:25, 19 July 2022 diff hist +22 m Ashers (Technics PEII) →Detailed Specifications Tag: Visual edit
- 11:50, 19 July 2022 diff hist +1 ICP Etching Recipes →SiO2 Etching (Fluorine ICP Etcher): added PR selectivity Tag: Visual edit
- 11:45, 19 July 2022 diff hist -3 m Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) →Recipes: updated Process Control Data text Tag: Visual edit
- 08:18, 17 July 2022 diff hist -17 m Probe Station & Curve Tracer →Operation Procedures & Manuals Tag: Visual edit
- 16:23, 9 July 2022 diff hist +43 ICP Etching Recipes →SiO2 Etching (Fluorine ICP Etcher): mentioned PR mask Tag: Visual edit
- 11:09, 8 July 2022 diff hist +148 Thermal Processing Recipes →Thermal Oxidation of Silicon - Calculating Oxidation Times: link to BYU ox calc Tag: Visual edit
- 16:00, 7 July 2022 diff hist -424 Template:Announcements deleted PureStrip bath, Unaxis Dep
- 15:59, 7 July 2022 diff hist +134 Dry Etching Recipes added LiNbO3, SU8, BCB Tag: Visual edit
- 15:50, 7 July 2022 diff hist +121 Template:Recipe Table Explanation note that this template is no longer used current
- 15:48, 7 July 2022 diff hist +159 Lithography Recipes →Photolithography Recipes: removed recipe table explanation template Tag: Visual edit
- 15:46, 7 July 2022 diff hist +158 Dry Etching Recipes smaller fonts to make table more obvious Tag: Visual edit
- 15:44, 7 July 2022 diff hist +17 m Vacuum Deposition Recipes →Process Control Data: smaller font current Tag: Visual edit
- 15:44, 7 July 2022 diff hist +157 Vacuum Deposition Recipes →Deposition Tools/Materials Table: removed tempalte for smaller table explanation Tag: Visual edit
- 10:35, 7 July 2022 diff hist -1 m Ellipsometer (Woollam)
- 10:34, 7 July 2022 diff hist -19 Ellipsometer (Woollam) updated to tool2, added Aidan + Demis as super/super2
- 16:58, 6 July 2022 diff hist +263 MLA150 - Troubleshooting →Solution for 3-4 inch wafers: added CAD reduction by ≥10mm Tag: Visual edit
- 16:05, 6 July 2022 diff hist +11 Wet Etching Recipes force TOC above link to Master Table
- 16:04, 6 July 2022 diff hist -192 Wet Etching Recipes moved and emphasized link to master table. Tag: Visual edit: Switched
- 11:52, 6 July 2022 diff hist +22 Maskless Aligner (Heidelberg MLA150) added 2nd supervisor via {{tool2}} template, Lee Sawyer
- 08:16, 6 July 2022 diff hist +2,838 UCSB NanoFab Microscope Training Added Optical Filters & DIC sections Tag: Visual edit
- 08:04, 6 July 2022 diff hist +46 N File:Microscopes - DIC filters and light path.png current
- 07:49, 6 July 2022 diff hist +52 N File:Microscopes - Filter Out position-detent.png current
- 10:18, 5 July 2022 diff hist -64 Template:Announcements updateD ASML
- 09:45, 5 July 2022 diff hist +61 DUMMY TOOL testing Tag: Visual edit
- 17:19, 4 July 2022 diff hist +49 m Packaging Recipes →Wax-Mounting to Carrier: writing creidts Tag: Visual edit
- 17:16, 4 July 2022 diff hist +2,819 Packaging Recipes →Mounting/Unmounting Samples: added “wax mounting to carrier” Tag: Visual edit
- 07:47, 1 July 2022 diff hist +69 Direct-Write Lithography Recipes →Maskless Aligner (Heidelberg MLA150): links to MJB/MA6 for Flood exp Tag: Visual edit
- 21:58, 30 June 2022 diff hist +211 Direct-Write Lithography Recipes →Positive Resist (MLA150): clarify “PEB” Tag: Visual edit
- 09:44, 28 June 2022 diff hist -179 Template:Announcements ASML update, system up, software fixed
- 18:59, 27 June 2022 diff hist +41 Template:Announcements asml UP, editing issue
- 03:09, 27 June 2022 diff hist +37 Template:Tool2 →Options
- 03:08, 27 June 2022 diff hist +148 Template:Tool2
- 03:06, 27 June 2022 diff hist +134 Template:Tool2 added example image
- 03:02, 27 June 2022 diff hist +41 N File:TOOL template - example image.png example of the tool infobox current
- 03:00, 27 June 2022 diff hist +21 Template:Tool2 added <includeonly>
- 02:56, 27 June 2022 diff hist +7 Template:StaffInfoSecondary DJ current
- 02:56, 27 June 2022 diff hist +15 Template:StaffInfo DJ current
- 02:55, 27 June 2022 diff hist +5 Template:StaffContactInfo DJ
- 02:55, 27 June 2022 diff hist 0 Template:StaffContactInfo DJ
- 02:54, 27 June 2022 diff hist +6 Template:StaffContactInfo DJ
- 02:54, 27 June 2022 diff hist -59 Template:StaffContactInfo DJ
- 02:54, 27 June 2022 diff hist +65 Template:StaffContactInfo DJ updated instructions
- 02:45, 27 June 2022 diff hist -1 DUMMY TOOL
- 02:44, 27 June 2022 diff hist +91 Template:Tool2 added classes to each table, for eventual CSS
- 02:41, 27 June 2022 diff hist 0 Template:Tool2
- 02:41, 27 June 2022 diff hist -38 Template:Tool2 Undo revision 160087 by John d (talk) Tag: Undo
- 02:40, 27 June 2022 diff hist +266 Template:Tool2 added row style="border-bottom: 1px solid grey"
- 02:38, 27 June 2022 diff hist +38 Template:Tool2 messing with tr borders
- 02:36, 27 June 2022 diff hist 0 Template:Tool2
- 02:35, 27 June 2022 diff hist +18 DUMMY TOOL
- 02:34, 27 June 2022 diff hist -18 DUMMY TOOL
- 02:34, 27 June 2022 diff hist -4 m Template:Tool2
- 02:33, 27 June 2022 diff hist +18 DUMMY TOOL added Super2=Ning Cao
- 02:32, 27 June 2022 diff hist +41 Template:Tool2 put "super2" into an {{if super2}}
- 02:31, 27 June 2022 diff hist -20 DUMMY TOOL remoed super2 to see what happens
- 02:28, 27 June 2022 diff hist -152 Template:StaffContactInfo DJ updated editing instructions
- 02:22, 27 June 2022 diff hist -183 m Template:StaffContactInfo DJ
- 02:17, 27 June 2022 diff hist 0 Template:Tool2 move table close to end
- 02:14, 27 June 2022 diff hist +10 Template:Tool2 add "SUM Link" col title
- 02:13, 27 June 2022 diff hist 0 Template:Tool2 testing: SUM width 200
- 02:11, 27 June 2022 diff hist -24 Template:Tool2 Undo revision 160071 by John d (talk) Tag: Undo
- 02:09, 27 June 2022 diff hist +3 Template:Tool2 Undo revision 160072 by John d (talk) Tag: Undo
- 02:09, 27 June 2022 diff hist -3 m Template:Tool2
- 02:06, 27 June 2022 diff hist +24 Template:Tool2 add SUM Link col title
- 02:05, 27 June 2022 diff hist -63 Template:Tool2 move SUM link out of table, use HR instead
- 02:03, 27 June 2022 diff hist +79 Template:Tool2 Undo revision 160068 by John d (talk) Tag: Undo
- 02:02, 27 June 2022 diff hist -79 Template:Tool2 SUM link in same table
- 02:01, 27 June 2022 diff hist 0 m Template:Tool2
- 02:01, 27 June 2022 diff hist -38 Template:Tool2 add col title for "recipes"
- 01:57, 27 June 2022 diff hist 0 m Template:Tool2
- 01:56, 27 June 2022 diff hist +8 m Template:Tool2
- 01:55, 27 June 2022 diff hist -2 m Template:Tool2
- 01:54, 27 June 2022 diff hist +6 m Template:Tool2
- 01:53, 27 June 2022 diff hist 0 Template:Tool2
- 01:53, 27 June 2022 diff hist +78 Template:Tool2 description: {{{{ IF ...}}} , and style smaller italics
- 01:48, 27 June 2022 diff hist -53 Template:StaffInfo DJ remove "phone" "email", make "primary supervisor" span 3 rows
- 01:46, 27 June 2022 diff hist -6 Template:StaffInfo DJ TESTING added "primary" supervisor
- 01:43, 27 June 2022 diff hist +13 DUMMY TOOL
- 01:42, 27 June 2022 diff hist 0 Template:Tool2 move Description, Mfg, Model above supervisors
- 01:40, 27 June 2022 diff hist -68 Template:Tool2 remove table split after supervisors, use HR instead
- 01:38, 27 June 2022 diff hist +18 m Template:Tool2
- 01:37, 27 June 2022 diff hist -86 Template:Tool2 try removing table break, use HR instead
- 01:34, 27 June 2022 diff hist -6 DUMMY TOOL
- 01:30, 27 June 2022 diff hist -28 m Template:Tool2
- 01:28, 27 June 2022 diff hist +27 m Template:Tool2
- 01:27, 27 June 2022 diff hist +1 m Template:Tool2
- 01:27, 27 June 2022 diff hist +18 Template:Tool2 combine super/super2 into one table
- 01:21, 27 June 2022 diff hist -26 Template:Tool2 Undo revision 160044 by John d (talk) Tag: Undo
- 01:20, 27 June 2022 diff hist -1 Template:Tool2 undo revision 157023 by John d (talk)
- 01:18, 27 June 2022 diff hist +1 m Template:Tool2
- 01:17, 27 June 2022 diff hist +26 Template:Tool2 tool info at top, then supervisors, then materials/categories
- 01:13, 27 June 2022 diff hist +131 m Template:StaffInfoSecondary DJ
- 01:12, 27 June 2022 diff hist +2 m Template:StaffInfo DJ
- 01:12, 27 June 2022 diff hist +32 Template:StaffInfo DJ
- 01:11, 27 June 2022 diff hist +1,132 Template:StaffContactInfo DJ updated docs on how to edit contact info
- 01:07, 27 June 2022 diff hist -566 Template:Tool2 updated documentation pointing to Template:StaffContactInfo_DJ
- 00:58, 27 June 2022 diff hist 0 m Template:StaffContactInfo DJ
- 00:58, 27 June 2022 diff hist +133 Template:StaffContactInfo DJ changed all {{{super}}}-->{{{1}}}, and added example sytax
- 00:54, 27 June 2022 diff hist -12 Template:StaffContactInfo DJ changed only Tony and Demis {{{super}}}--> {{{1}}}
- 00:52, 27 June 2022 diff hist +194 Template:StaffContactInfo DJ added includeonly & noinclude sections
- 00:51, 27 June 2022 diff hist +1,761 N Template:StaffContactInfo DJ copied #IFEQ section of "tool2_DJ"
- 00:50, 27 June 2022 diff hist -1,721 Template:Tool2 deleted Staff contact info {{ifeq}}, replaced with {{StaffContactInfo_DJ}}
- 00:40, 27 June 2022 diff hist +116 Template:Tool2
- 00:38, 27 June 2022 diff hist -6 Template:Tool2
- 00:38, 27 June 2022 diff hist -12 Template:StaffInfoSecondary DJ
- 00:34, 27 June 2022 diff hist +39 Template:StaffInfoSecondary DJ
- 00:26, 27 June 2022 diff hist +3 Template:Tool2
- 00:26, 27 June 2022 diff hist -3 Template:Tool2
- 00:26, 27 June 2022 diff hist 0 Template:Tool2
- 00:25, 27 June 2022 diff hist +3 Template:Tool2 new hr
- 00:23, 27 June 2022 diff hist +3 Template:Tool2 HR between super/super2
- 06:15, 25 June 2022 diff hist +7 Template:Announcements ASML update
- 21:08, 23 June 2022 diff hist -34 Template:Announcements asml update
- 07:50, 23 June 2022 diff hist +69 ICP Etching Recipes →Oxford ICP Etcher (PlasmaPro 100 Cobra): updated recipes, linked to SOP for travelers for each recipe Tag: Visual edit
- 07:42, 23 June 2022 diff hist +36 Oxford ICP Etcher (PlasmaPro 100 Cobra) →Detailed Specifications: updated recipes available Tag: Visual edit
- 07:52, 22 June 2022 diff hist 0 Template:Tool2
- 07:51, 22 June 2022 diff hist -59 Template:Tool2
- 07:50, 22 June 2022 diff hist +36 Template:Tool2
- 07:49, 22 June 2022 diff hist -40 Template:Tool2 try removing StaffInfoSecondary "ifeq"
- 07:46, 22 June 2022 diff hist -1,952 Template:Tool2
- 07:45, 22 June 2022 diff hist +49 Template:Tool2
- 07:23, 22 June 2022 diff hist -1 m Template:StaffInfo DJ →Versions
- 07:22, 22 June 2022 diff hist -1 m Template:StaffInfo DJ
- 07:21, 22 June 2022 diff hist +27 Template:StaffInfoSecondary DJ added includeonly tags
- 07:21, 22 June 2022 diff hist +27 Template:StaffInfo DJ added includeonly tags
- 07:19, 22 June 2022 diff hist +20 DUMMY TOOL
- 07:18, 22 June 2022 diff hist +3 DUMMY TOOL
- 07:18, 22 June 2022 diff hist +4 DUMMY TOOL switch to tool2_DJ
- 07:17, 22 June 2022 diff hist +74 DUMMY TOOL →About Tag: Visual edit
- 07:15, 22 June 2022 diff hist +1,957 N DUMMY TOOL pasted nanonex source
- 07:14, 22 June 2022 diff hist +58 Template:Tool2 added "super2" to the example
- 07:12, 22 June 2022 diff hist +171 Template:Tool2 removed 3rd args and switch to all _DJ templates
- 07:05, 22 June 2022 diff hist +72 Template:StaffInfo DJ removed extra argument
- 06:48, 22 June 2022 diff hist +1 SEM Sample Coater (Hummer) trying "tool2" template
- 06:46, 22 June 2022 diff hist +64 Tool List →Vacuum Deposition: Added SEM Hummer coater, adn Thermal Evap heading Tag: Visual edit
- 06:41, 22 June 2022 diff hist +2,046 N Hummer SEM Sample Coater - Techniques to reduce charging in SEMs added BillM's technique current Tag: Visual edit
- 06:23, 22 June 2022 diff hist +775 SEM Sample Coater (Hummer) added more info and placeholder for SOP and link to techniqures to reduce chargign Tag: Visual edit
- 06:16, 22 June 2022 diff hist +39 Field Emission SEM 2 (JEOL IT800SHL) →Mechanical: added limited 4-inch wf movemnt Tag: Visual edit
- 06:15, 22 June 2022 diff hist +1,483 Field Emission SEM 2 (JEOL IT800SHL) added specs from user maual, SOP section (empty) and link to Hummer ocater Tag: Visual edit
- 11:28, 21 June 2022 diff hist +595 Frequently Asked Questions →General NanoFab Questions: added "how can i access the lab" section Tag: Visual edit