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- 10:13, 5 November 2020 diff hist +1,817 N MLA150 - Design Guidelines added conversion notes on each file type Tag: Visual edit
- 08:13, 5 November 2020 diff hist +344 ICP Etch 2 (Panasonic E626I) added link to online training video Tag: Visual edit
- 22:29, 4 November 2020 diff hist 0 m Maskless Aligner (Heidelberg MLA150) →Documentation from HIMT
- 18:10, 4 November 2020 diff hist -28 m Maskless Aligner (Heidelberg MLA150) →Documentation from HIMT Tag: Visual edit
- 18:09, 4 November 2020 diff hist +403 Maskless Aligner (Heidelberg MLA150) →Documentation: pic of spatial light modulator Tag: Visual edit
- 18:06, 4 November 2020 diff hist +66 N File:MLA150 Spatial Light Modulator Description.png current
- 17:47, 4 November 2020 diff hist +3 m Maskless Aligner (Heidelberg MLA150) →Video Training Tag: Visual edit
- 17:29, 4 November 2020 diff hist +97 Maskless Aligner (Heidelberg MLA150) →Video Trainings: link to online video Tag: Visual edit
- 09:16, 4 November 2020 diff hist +247 Maskless Aligner (Heidelberg MLA150) added tool id, HIMT URL, updated specs Tag: Visual edit: Switched
- 15:12, 30 October 2020 diff hist -3 Template:Announcements
- 15:12, 30 October 2020 diff hist -1 m Template:Announcements
- 15:11, 30 October 2020 diff hist -1 m Template:Announcements deleted spacing
- 15:10, 30 October 2020 diff hist +1 Template:Announcements moved tool installs to bottom
- 15:10, 30 October 2020 diff hist -495 Template:Announcements deleted GCA PMs
- 09:28, 30 October 2020 diff hist 0 m GoPro Hero8 Black (Internal) moved editing to after saving Tag: Visual edit
- 09:27, 30 October 2020 diff hist +334 GoPro Hero8 Black (Internal) added gopro stitching Tag: Visual edit
- 09:10, 28 October 2020 diff hist -83 Template:Announcements →New Tool Installations: updated FIB, link to DanR's page
- 09:09, 28 October 2020 diff hist -8 Dan Read deleted Work In progress
- 09:06, 28 October 2020 diff hist -243 Template:Announcements deleted Unaxis Dep, moved GCA PM to top.
- 08:57, 28 October 2020 diff hist +158 m Frequently Asked Questions →Authorship on Publications: minor update Tag: Visual edit
- 16:56, 26 October 2020 diff hist +229 Maskless Aligner (Heidelberg MLA150) →Documentation: added redlinks for documentation Tag: Visual edit
- 07:14, 26 October 2020 diff hist +18 m Stepper 2 (AutoStep 200) minor formatting Tag: Visual edit
- 22:43, 24 October 2020 diff hist +533 Nanofab Staff Internal Pages updated TOC and links to eventual Video Training pages Tag: Visual edit
- 08:46, 23 October 2020 diff hist -169 m Template:Announcements Deleted PEii repair
- 04:58, 23 October 2020 diff hist +199 Stepper 3 (ASML DUV) →Process Information: added low-TTV Tag: Visual edit
- 04:54, 23 October 2020 diff hist +104 Stepper 3 (ASML DUV) →Online Video Trainings: added Video Training part 1 Tag: Visual edit
- 12:44, 22 October 2020 diff hist +252 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →Error Log full: updated procedures Tag: Visual edit
- 16:24, 19 October 2020 diff hist +82 MediaWiki:Common.css
- 16:08, 19 October 2020 diff hist +97 Chemical List updated wording Tag: Visual edit
- 16:05, 19 October 2020 diff hist +10 MediaWiki:Common.css
- 16:04, 19 October 2020 diff hist +10 MediaWiki:Sidebar
- 16:04, 19 October 2020 diff hist +134 MediaWiki:Common.css
- 16:01, 19 October 2020 diff hist -97 MediaWiki:Common.css
- 16:00, 19 October 2020 diff hist +4 MediaWiki:Common.css
- 15:59, 19 October 2020 diff hist +11 MediaWiki:Common.css
- 15:56, 19 October 2020 diff hist -61 MediaWiki:Common.css
- 15:55, 19 October 2020 diff hist -7 MediaWiki:Common.css
- 15:55, 19 October 2020 diff hist -7 MediaWiki:Common.css
- 15:53, 19 October 2020 diff hist -1 MediaWiki:Common.css
- 15:48, 19 October 2020 diff hist -2 MediaWiki:Common.css
- 15:46, 19 October 2020 diff hist +63 MediaWiki:Common.css
- 15:42, 19 October 2020 diff hist -12 MediaWiki:Common.css
- 15:42, 19 October 2020 diff hist +2 MediaWiki:Common.css
- 15:38, 19 October 2020 diff hist +14 MediaWiki:Common.css
- 15:37, 19 October 2020 diff hist +76 MediaWiki:Common.css
- 15:34, 19 October 2020 diff hist +10 MediaWiki:Common.css
- 15:32, 19 October 2020 diff hist +99 MediaWiki:Common.css reorg, invisible Sidebar title
- 15:25, 19 October 2020 diff hist +4 MediaWiki:Sidebar
- 15:25, 19 October 2020 diff hist +37 MediaWiki:Sidebar
- 15:23, 19 October 2020 diff hist 0 MediaWiki:Sidebar
- 15:23, 19 October 2020 diff hist -23 MediaWiki:Sidebar
- 15:20, 19 October 2020 diff hist +14 MediaWiki:Sidebar
- 15:20, 19 October 2020 diff hist -1 MediaWiki:Sidebar
- 15:19, 19 October 2020 diff hist -21 MediaWiki:Sidebar deleted search and navigation *'s
- 08:45, 14 October 2020 diff hist +732 DSEIII (PlasmaTherm/Deep Silicon Etcher) updated text, added Clamp text Tag: Visual edit
- 08:39, 14 October 2020 diff hist +52 N File:DSEIII.jpg Phoot of Plasma-Therm DSE-iii in Bay 2 current
- 07:13, 14 October 2020 diff hist +1 m Direct-Write Lithography Recipes updated THMR thickness Tag: Visual edit
- 07:12, 14 October 2020 diff hist +20 m COVID-19 User Policies →Policy Updates Tag: Visual edit
- 07:09, 14 October 2020 diff hist +73 COVID-19 User Policies →UCSB Flu Vaccination Mandate: updated vacc. logging Tag: Visual edit
- 19:47, 13 October 2020 diff hist +480 Template:Announcements added flu vaccine
- 19:43, 13 October 2020 diff hist +225 COVID-19 User Policies flu update
- 19:38, 13 October 2020 diff hist -7 m COVID-19 User Policies
- 19:38, 13 October 2020 diff hist +7 m COVID-19 User Policies
- 19:37, 13 October 2020 diff hist 0 m COVID-19 User Policies
- 19:37, 13 October 2020 diff hist +731 COVID-19 User Policies added flu vaccination mandate Tag: Visual edit
- 18:44, 10 October 2020 diff hist +143 Direct-Write Lithography Recipes →Positive Resist (MLA150): added THMR recipe Tag: Visual edit
- 21:52, 9 October 2020 diff hist +59 m Direct-Write Lithography Recipes "Exposure Time" → "Exposure Dose (mJ/cm2)" Tag: Visual edit
- 08:12, 9 October 2020 diff hist +484 Photoluminescence PL Setup (Custom) added more info Tag: Visual edit
- 08:06, 9 October 2020 diff hist +170 Holographic Lith/PL Setup (Custom) link to PL system page Tag: Visual edit
- 08:02, 9 October 2020 diff hist +81 m Holographic Lith/PL Setup (Custom) →About: added term "holography" for searching, changed PR to THMR and linked Tag: Visual edit: Switched
- 17:55, 7 October 2020 diff hist +154 Nanofab Staff Internal Pages added placeholders for other sections Tag: Visual edit
- 16:14, 6 October 2020 diff hist +104 Maskless Aligner (Heidelberg MLA150) →About: added some equip specs Tag: Visual edit
- 23:03, 2 October 2020 diff hist +9 m Direct-Write Lithography Recipes →Greyscale Lithography: added model to header title
- 22:49, 2 October 2020 diff hist +118 Maskless Aligner (Heidelberg MLA150) →About: minor updates Tag: Visual edit
- 16:29, 2 October 2020 diff hist +23 Maskless Aligner (Heidelberg MLA150) Added photo
- 16:28, 2 October 2020 diff hist +64 N File:MLA150 Heidelberg Bay 6 Photo.jpg Photo of Heidelberg MLA 150 in Bay 6 after install current
- 16:27, 2 October 2020 diff hist +876 Direct-Write Lithography Recipes Added PR's we are characterizing Tag: Visual edit: Switched
- 16:23, 2 October 2020 diff hist +4 Lithography Recipes →Photolithography Recipes: Added 4620 "A" on I-line tools Tag: Visual edit
- 16:07, 30 September 2020 diff hist +405 Goniometer (Rame-Hart A-100) - Operating Procedure added "Tile Angle" techique current Tag: Visual edit
- 16:03, 30 September 2020 diff hist 0 Film Stress (Tencor Flexus) moved to bay 1
- 14:35, 28 September 2020 diff hist +203 m Lithography Recipes →Photolithography Recipes: minor instructions/hints Tag: Visual edit
- 14:26, 28 September 2020 diff hist +720 Maskless Aligner (Heidelberg MLA150) →About: updated some specs Tag: Visual edit
- 23:14, 27 September 2020 diff hist +308 Template:Announcements links to Velion + MLA tool pages
- 23:11, 27 September 2020 diff hist -67 Lithography Recipes →Photolithography Recipes: deleted SPR 950-0.8 row Tag: Visual edit
- 23:11, 27 September 2020 diff hist +778 m Lithography Recipes "A" on MLA --> SU-8 2075 Tag: Visual edit
- 23:07, 27 September 2020 diff hist -290 Template:Announcements deleted ICP1 and IBD messages
- 15:51, 25 September 2020 diff hist +94 m Stepper 3 (ASML DUV) →Online Video Trainings: disclaimer about supervisor training Tag: Visual edit
- 15:48, 25 September 2020 diff hist +299 Stepper 3 (ASML DUV) →Operating Procedures: added Video Training: Part 2 Tag: Visual edit
- 00:54, 23 September 2020 diff hist +290 Template:Announcements added Pan2 & IBD
- 17:50, 22 September 2020 diff hist -200 Template:Announcements deleted lab shutdown notice
- 23:24, 21 September 2020 diff hist -219 Template:Announcements removed network issues
- 13:41, 21 September 2020 diff hist +44 m Template:Announcements →Lab Shutdown: Some tools still down
- 13:38, 21 September 2020 diff hist -40 Template:Announcements shutdown update
- 18:03, 18 September 2020 diff hist +1,059 Lithography Recipes →Photolithography Recipes: linked to all PR datasheets Tag: Visual edit
- 17:52, 18 September 2020 diff hist +57 Lithography Recipes →Chemicals Stocked + Datasheets: added Az 4620 Tag: Visual edit
- 17:51, 18 September 2020 diff hist +59 N File:Az p4620 photoresist data package.pdf info on Az 4620 photoresist, spin curves etc. current
- 17:43, 18 September 2020 diff hist +45 Lithography Recipes rename to "UV Optical Lithography" Tag: Visual edit
- 17:41, 18 September 2020 diff hist +103 Lithography Recipes rearrange manual TOC Tag: Visual edit
- 17:34, 18 September 2020 diff hist -3 Lithography Recipes →Lift-Off Techniques: changed to Liftoff Recipes Tag: Visual edit
- 22:37, 16 September 2020 diff hist -84 m COVID-19 User Policies →UCSB Wellness Survey: delete duplicate line Tag: Visual edit
- 19:07, 16 September 2020 diff hist +358 COVID-19 User Policies →UCSB Wellness Survey: added Online presentation link Tag: Visual edit
- 10:27, 15 September 2020 diff hist -53 Microscopes Updated scope locations in lab Tag: Visual edit
- 07:36, 15 September 2020 diff hist +415 Template:Announcements power outage Sept 19th
- 06:28, 15 September 2020 diff hist 0 m COVID-19 User Policies Tag: Visual edit
- 06:24, 15 September 2020 diff hist +84 COVID-19 User Policies →UCSB Wellness Survey: link to BrianT's contact info Tag: Visual edit
- 06:22, 15 September 2020 diff hist +168 Template:Nav link to COVID-19 User Policies current
- 06:18, 15 September 2020 diff hist +95 Template:Announcements link to COVID-19_User_Policies
- 06:14, 15 September 2020 diff hist +4 m COVID-19 User Policies →Policy Updates Tag: Visual edit
- 06:13, 15 September 2020 diff hist +21 m COVID-19 User Policies
- 06:12, 15 September 2020 diff hist -2 m COVID-19 User Policies minor formatting Tag: Visual edit
- 06:11, 15 September 2020 diff hist +188 COVID-19 User Policies minor formatting, table for announcements Tag: Visual edit: Switched
- 20:27, 14 September 2020 diff hist +123 COVID-19 User Policies added annoucnemnts Tag: Visual edit
- 19:43, 14 September 2020 diff hist +31 m COVID-19 User Policies Tag: Visual edit
- 19:42, 14 September 2020 diff hist +249 COVID-19 User Policies →UCSB Wellness Survey: linked to uploaded ocs Tag: Visual edit
- 19:41, 14 September 2020 diff hist +126 N File:COVID Entering the CR and Gowning Protocols-USE THIS ONE v2.pdf COVID-19 Entering_the_CR_and_Gowning_Protocols-USE_THIS_ONE_v2.pdf self-entry protocol once inside the building
- 19:39, 14 September 2020 diff hist +113 N File:COVID19 ESB Building User Self Admittance Protocol v2.pdf COVID-19 ESB_Building_User_Self_Admittance_Protocol_v2.pdf self-entry doc for users, building entry
- 19:37, 14 September 2020 diff hist +108 N File:User Protocols Coronavirus 2020-09-14-1.pdf COVID-19 User Protocols Coronavirus 2020-09-14-1.pdf Full document of protocols, for lab users
- 15:36, 14 September 2020 diff hist -4 Lithography Recipes →Chemicals Stocked + Datasheets: added model of XHRIC-11 Tag: Visual edit
- 15:23, 14 September 2020 diff hist +37 Dry Etching Recipes link to Fluorine etcher Ru-masked SiO2 etch. Tag: Visual edit
- 11:44, 14 September 2020 diff hist +83 Template:News →Raith Velion: FIB/SEM Installation: link to Dan Read's page
- 11:41, 14 September 2020 diff hist +8 m Template:News →Heidelberg MLA-150: Delivery Scheduled for Sept.: update date
- 01:02, 14 September 2020 diff hist -4 m Staff List →Process Group: updated link for 'fab svc Tag: Visual edit
- 23:34, 13 September 2020 diff hist +547 m Direct-Write Lithography Recipes →Maskless Aligner (Heidelberg MLA150): greyscale Tag: Visual edit
- 23:33, 13 September 2020 diff hist +68 m Maskless Aligner (Heidelberg MLA150) →Recipes: corrected link Tag: Visual edit
- 23:32, 13 September 2020 diff hist +11 m Direct-Write Lithography Recipes link to tool page Tag: Visual edit
- 23:31, 13 September 2020 diff hist +8 m Direct-Write Lithography Recipes
- 23:28, 13 September 2020 diff hist +125 m Direct-Write Lithography Recipes Tag: Visual edit
- 23:25, 13 September 2020 diff hist +10 Template:LithRecipe Table correct Maskless aligner link current
- 23:24, 13 September 2020 diff hist 0 m Direct-Write Lithography Recipes John d moved page MLA150 Recipes to Maskless Aligner Recipes without leaving a redirect: higher level category
- 23:23, 13 September 2020 diff hist +22 m Direct-Write Lithography Recipes categories
- 23:22, 13 September 2020 diff hist +49 m Lithography Recipes categories
- 23:21, 13 September 2020 diff hist +24 Direct-Write Lithography Recipes caterbgory added
- 23:20, 13 September 2020 diff hist +26 Contact Alignment Recipes category added
- 23:20, 13 September 2020 diff hist +26 Stepper Recipes added category
- 23:17, 13 September 2020 diff hist +5 m Direct-Write Lithography Recipes Tag: Visual edit
- 23:16, 13 September 2020 diff hist +168 Template:LithRecipe Table added example visual
- 23:11, 13 September 2020 diff hist +94 m Template:LithRecipe Table
- 23:04, 13 September 2020 diff hist -389 Lithography Recipes →Photolithography Recipes: correcting row colors
- 22:41, 13 September 2020 diff hist -128 Lithography Recipes deleted erroneous columns Tag: Visual edit
- 22:38, 13 September 2020 diff hist +212 Lithography Recipes →Photolithography Recipes: added MLA150 to PhotoLith recipes table; table color formatting Tag: Visual edit: Switched
- 22:32, 13 September 2020 diff hist +191 Template:LithRecipe Table added MLA150, and NoInclude section, and added to Templates category
- 22:25, 13 September 2020 diff hist +142 Maskless Aligner (Heidelberg MLA150) link to MLA150 recipes Tag: Visual edit
- 22:24, 13 September 2020 diff hist +1,028 Direct-Write Lithography Recipes Table inserted to start Tag: Visual edit
- 22:23, 13 September 2020 diff hist +217 Direct-Write Lithography Recipes inital page
- 22:20, 13 September 2020 diff hist +73 N Direct-Write Lithography Recipes initial page Tag: Visual edit
- 22:10, 13 September 2020 diff hist +11 m Focused Ion-Beam Lithography (Raith Velion) →Recipes: formatting Tag: Visual edit
- 22:09, 13 September 2020 diff hist +4 m Suss Aligners (SUSS MJB-3) →Recipes: italics Tag: Visual edit
- 22:09, 13 September 2020 diff hist +230 Suss Aligners (SUSS MJB-3) link to recipes Tag: Visual edit
- 22:06, 13 September 2020 diff hist +1,114 N Maskless Aligner (Heidelberg MLA150) initial page with placeholders
- 21:56, 13 September 2020 diff hist +42 Tool List →Other Patterning Systems: Link to Maskless Aligner (Heidelberg MLA150) Tag: Visual edit
- 21:54, 13 September 2020 diff hist +51 Dan Read →Tools: Added Raith Velion Tag: Visual edit
- 21:40, 13 September 2020 diff hist +86 Template:Tool added Dan Read contact info
- 21:36, 13 September 2020 diff hist +12 Template:Tool →Arguments with Specific Values: added Dan Read
- 21:34, 13 September 2020 diff hist +126 Template:StaffInfo link to Tool template page for editing staff info
- 21:33, 13 September 2020 diff hist +187 Template:Staff link to Tool Tempalte in documentation current
- 21:25, 13 September 2020 diff hist +169 Lithography Recipes linked to tools in header titles Tag: Visual edit
- 21:15, 13 September 2020 diff hist +137 Focused Ion-Beam Lithography (Raith Velion) linked to Recipes page Tag: Visual edit
- 21:14, 13 September 2020 diff hist +80 Lithography Recipes added Raith Velion section, added model to EBL section title Tag: Visual edit
- 21:12, 13 September 2020 diff hist +1,794 N Focused Ion-Beam Lithography (Raith Velion) initial page, copy/pasted the JEOL EBL page
- 21:08, 13 September 2020 diff hist -35 m E-Beam Lithography System (JEOL JBX-6300FS) deleted erroneous fiels in {tool} template
- 21:06, 13 September 2020 diff hist +49 Tool List →Other Patterning Systems: Added Raith Velion link Tag: Visual edit
- 21:05, 13 September 2020 diff hist +81 Tool List →Lithography: added FEI Sirion Nabity Tag: Visual edit
- 15:39, 13 September 2020 diff hist +1,147 COVID-19 User Policies Initial links for files - files not uploaded yet Tag: Visual edit
- 14:43, 13 September 2020 diff hist +192 N COVID-19 User Policies Initial page Tag: Visual edit
- 10:42, 8 September 2020 diff hist +1 m PECVD 1 (PlasmaTherm 790) →Recipes & Process Data Tag: Visual edit
- 10:41, 8 September 2020 diff hist -7 m PECVD 1 (PlasmaTherm 790) →Recipes & Process Information: change to Process Data Tag: Visual edit
- 10:41, 8 September 2020 diff hist +206 PECVD 1 (PlasmaTherm 790) link to recipes and data Tag: Visual edit
- 10:34, 8 September 2020 diff hist -129 m Template:Announcements removed labor day
- 14:27, 1 September 2020 diff hist 0 File:UCSB Service Agreement.pdf John d uploaded a new version of File:UCSB Service Agreement.pdf
- 14:21, 1 September 2020 diff hist 0 File:Facility-Use-MOU---Intercampus-UC-User.pdf John d uploaded a new version of File:Facility-Use-MOU---Intercampus-UC-User.pdf
- 21:30, 31 August 2020 diff hist +129 Template:Announcements labor day closure
- 11:47, 26 August 2020 diff hist +453 N S-Cubed Flexi - Operating Procedure initial secitons, draft only Tag: Visual edit
- 11:42, 26 August 2020 diff hist +238 Automated Coat/Develop System (S-Cubed Flexi) added link to SOP Tag: Visual edit
- 13:33, 24 August 2020 diff hist -551 m Template:Announcements deleted lab shutdown
- 12:17, 20 August 2020 diff hist +325 ICP Etch 1 (Panasonic E646V) link to recipes page Tag: Visual edit
- 14:23, 19 August 2020 diff hist +348 Services added Agreement "Attachment A" Tag: Visual edit
- 14:22, 19 August 2020 diff hist +87 N File:Attachment A - UCSB Master Facilities Use Agreement Labs.pdf Facilities/Service Agreement - attachment listing UCSB facilities covered
- 06:51, 19 August 2020 diff hist +386 Template:Announcements addd lab shutdown, remove ASML
- 15:06, 18 August 2020 diff hist +6 m CAIBE (Oxford Ion Mill) →Recipes: bolded recipe page li nk Tag: Visual edit
- 12:27, 18 August 2020 diff hist +45 Contact Alignment Recipes →Negative Resist (MA-6): update MA-6 NegPR flood expose Tag: Visual edit
- 12:24, 18 August 2020 diff hist +303 Contact Alignment Recipes updated powers again Tag: Visual edit
- 07:42, 18 August 2020 diff hist +224 Contact Alignment Recipes →Suss Aligners (SUSS MJB-3): updated Channel powers according ot LeeS Tag: Visual edit
- 21:29, 12 August 2020 diff hist -32 m Unaxis wafer coating procedure typos in units (nm/µm/mm), minor formatting current Tag: Visual edit
- 11:23, 11 August 2020 diff hist +86 Logitech WBS7 - Procedure for Wax Mounting with bulk Crystalbond Stick clean glass plate if wax present Tag: Visual edit
- 11:21, 11 August 2020 diff hist +421 Logitech WBS7 - Procedure for Wax Mounting with bulk Crystalbond Stick updated open/close procedure Tag: Visual edit
- 10:09, 11 August 2020 diff hist +45 m Logitech WBS7 - Procedure for Wax Mounting with bulk Crystalbond Stick unload step Tag: Visual edit
- 09:24, 11 August 2020 diff hist -14 Logitech WBS7 - Procedure for Wax Mounting with bulk Crystalbond Stick formatting to match tool menus Tag: Visual edit
- 08:12, 11 August 2020 diff hist +108 m Logitech WBS7 - Procedure for Wax Mounting with Spin-On Crystalbond attributed to Don Freeborn current Tag: Visual edit
- 07:26, 9 August 2020 diff hist +3 m Probe Station: I-V Curves with Keithley 2400 and Python Script image adjust
- 07:23, 9 August 2020 diff hist -30 m Probe Station: I-V Curves with Keithley 2400 and Python Script image adjustments Tag: Visual edit
- 07:22, 9 August 2020 diff hist +492 Probe Station: I-V Curves with Keithley 2400 and Python Script added screenshots Tag: Visual edit
- 07:21, 9 August 2020 diff hist +45 N File:Python Keithley I-V Sweep v3 icon.png current
- 07:19, 9 August 2020 diff hist +26 N File:Python Spyder - Run Button.png current
- 07:18, 9 August 2020 diff hist +44 N File:Python Keithely I-V - user settings lines.png current
- 07:16, 9 August 2020 diff hist +30 N File:Python Spyder 3.7 (anacoda) icon.png current
- 07:14, 9 August 2020 diff hist +1 m Probe Station: I-V Curves with Keithley 2400 and Python Script
- 07:14, 9 August 2020 diff hist -1 Probe Station: I-V Curves with Keithley 2400 and Python Script
- 07:14, 9 August 2020 diff hist +2,079 N Probe Station: I-V Curves with Keithley 2400 and Python Script initial procedure for Python I-V curves Tag: Visual edit
- 06:37, 9 August 2020 diff hist +143 Probe Station & Curve Tracer →Operation Procedures & Manuals: link to Python I-V Curves Tag: Visual edit
- 17:10, 29 July 2020 diff hist -16 m Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) →Detailed Specifications: update LEP description Tag: Visual edit
- 17:09, 29 July 2020 diff hist 0 m Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) →Recipes: spelling Tag: Visual edit
- 17:08, 29 July 2020 diff hist +6 m Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) →Recipes: bolded Tag: Visual edit
- 16:00, 27 July 2020 diff hist +6 m Staff List highlight director, like other groups Tag: Visual edit
- 09:23, 27 July 2020 diff hist +30 m Goniometer (Rame-Hart A-100) - Operating Procedure →Measurement Procedure: image caption Tag: Visual edit
- 09:23, 27 July 2020 diff hist +2 m Goniometer (Rame-Hart A-100) - Operating Procedure →Measurement Procedure: indent, spacing
- 09:21, 27 July 2020 diff hist -28 Goniometer (Rame-Hart A-100) - Operating Procedure image sizing Tag: Visual edit
- 09:20, 27 July 2020 diff hist +821 N Goniometer (Rame-Hart A-100) - Operating Procedure initial page, mostly copied from "NRL Contact Angle Goniometer - Owners Manual.pdf" Tag: Visual edit
- 09:18, 27 July 2020 diff hist +33 N File:Goniometer - Reflective Sample Illustration.png current
- 09:08, 27 July 2020 diff hist +101 N File:Goniometer (Rame-Hart A-100) - Steps for Measuring v1.png current
- 08:55, 27 July 2020 diff hist +54 N File:Goniometer (Rame-Hart A-100) - Annotated Photo.png current
- 13:38, 26 July 2020 diff hist +29 m MVD - Wafer Coating - Process Traveler →Removal: of FDTS Coating: added PEii etch params current Tag: Visual edit
- 13:37, 26 July 2020 diff hist +29 MVD - Wafer Coating - Process Traveler link to new goniometer page Tag: Visual edit
- 13:36, 26 July 2020 diff hist +29 m Thermal Processing Recipes link to new goniometer page Tag: Visual edit
- 13:36, 26 July 2020 diff hist +55 Tool List →Inspection, Test and Characterization: link to new goniometer page Tag: Visual edit
- 13:35, 26 July 2020 diff hist +42 N Goniometer John d moved page Goniometer to Goniometer (Rame-Hart A-100): added mfg./model into name, like other tools current Tag: New redirect
- 20:55, 25 July 2020 diff hist +22 m ASML Stepper 3 Standard Operating Procedure →Reticle Unloading and Loading Tag: Visual edit
- 20:52, 25 July 2020 diff hist +181 m ASML Stepper 3 Standard Operating Procedure →Running a Job – Normal operation: added unload reticle Tag: Visual edit
- 06:45, 25 July 2020 diff hist +60 m ICP Etching Recipes →Recipe Variations: description of slanted etching doc Tag: Visual edit
- 22:13, 24 July 2020 diff hist +25 ICP Etching Recipes →SiO2 Etching: added credit for Bill Mitchell Tag: Visual edit
- 10:27, 24 July 2020 diff hist +205 ICP Etching Recipes →DSEIII_(PlasmaTherm/Deep_Silicon_Etcher): added actual Recipe names from teh tool Tag: Visual edit
- 09:22, 24 July 2020 diff hist +7 Lithography Recipes →Chemicals Stocked + Datasheets: clarified THMR PR documents Tag: Visual edit
- 07:54, 24 July 2020 diff hist +1 m ICP Etch 2 (Panasonic E626I) put ICP2 recipes first Tag: Visual edit
- 06:56, 24 July 2020 diff hist +27 m ICP Etching Recipes →DSEIII_(PlasmaTherm/Deep_Silicon_Etcher) Tag: Visual edit
- 06:55, 24 July 2020 diff hist +434 ICP Etching Recipes →High Rate Bosch Etch (DSEIII): added descriptions to the two recipes Tag: Visual edit
- 10:20, 23 July 2020 diff hist +717 N MVD - Wafer Coating - Process Traveler added procedure from BrianT's PDF Tag: Visual edit
- 10:15, 23 July 2020 diff hist +77 Molecular Vapor Deposition →Recipes: link to new process traveler Tag: Visual edit
- 10:08, 23 July 2020 diff hist +6 DSEIII (PlasmaTherm/Deep Silicon Etcher) →Documentation: bolded Tag: Visual edit
- 10:08, 23 July 2020 diff hist +260 DSEIII (PlasmaTherm/Deep Silicon Etcher) added allowed materisl: Al2O3, Al, Crystalbond wax, wafer size and clamp Tag: Visual edit
- 08:53, 21 July 2020 diff hist +8 m Dicing Saw (ADT) →Recipes: minor formatting Tag: Visual edit
- 19:22, 20 July 2020 diff hist +316 Template:Publications added Warren's paper
- 11:55, 20 July 2020 diff hist +528 m Frequently Asked Questions →Cell Phone Calls: Section on forcing calls through Wifi, not Cellular. Tag: Visual edit
- 16:35, 19 July 2020 diff hist 0 m Template:Announcements corrected date, COVID on top
- 14:50, 19 July 2020 diff hist +166 Template:Announcements asml maint
- 13:33, 18 July 2020 diff hist +100 m Chemical List →Material Safety Datasheets: minor comment Tag: Visual edit
- 13:25, 18 July 2020 diff hist -34 m Chemical List →Inventory List: updated photolith cehmicals URL Tag: Visual edit
- 00:20, 16 July 2020 diff hist +175 Unaxis wafer coating procedure link to recipes page Tag: Visual edit
- 00:18, 16 July 2020 diff hist -12 m Unaxis wafer coating procedure →Unaxis SiN LS @250°C deposition: unbold
- 00:17, 16 July 2020 diff hist +309 m Unaxis wafer coating procedure only edit dep. time Tag: Visual edit
- 00:13, 16 July 2020 diff hist +477 Unaxis wafer coating procedure notes about 0.5µm max. dep, and particle counting Tag: Visual edit
- 00:08, 16 July 2020 diff hist +111 ICP-PECVD (Unaxis VLR) →Documentation: redlink the SOP, explain the purpose of the "procedure" Tag: Visual edit
- 09:57, 14 July 2020 diff hist +338 m GoPro Hero8 Black (Internal) →Saving the Video to your computer: how to delete files Tag: Visual edit
- 09:55, 14 July 2020 diff hist +27 N File:Forward Delete Button.png current
- 09:52, 14 July 2020 diff hist +46 N File:GoPro HERO8 Black Instructions - Mac save to computer 2.png current
- 09:14, 14 July 2020 diff hist -25 m GoPro Hero8 Black (Internal) →Saving the Video to your computer: simplified Mac instrucitons Tag: Visual edit
- 09:12, 14 July 2020 diff hist +224 GoPro Hero8 Black (Internal) →Saving the Video to your computer: added windows insturctions, TBD on "Upload to Web" Tag: Visual edit
- 15:29, 6 July 2020 diff hist -198 Template:Announcements deleted 4th July
- 16:35, 5 July 2020 diff hist +174 m Stepper 3 (ASML DUV) →Operating Procedures: link to FEM sub-section Tag: Visual edit
- 16:10, 5 July 2020 diff hist +80 m GoPro Hero8 Black (Internal) →In the Lab: Recording your video: caption formatting Tag: Visual edit
- 16:00, 5 July 2020 diff hist +69 m GoPro Hero8 Black (Internal) →In the Lab: Recording your video: image caption Tag: Visual edit
- 14:56, 4 July 2020 diff hist +680 GoPro Hero8 Black (Internal) →Trainings via Webmeeting (Zoom): updates Tag: Visual edit