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- 07:58, 1 July 2020 diff hist 0 CAIBE (Oxford Ion Mill) corrected cluster chamber--> metal/dielectric designation Tag: Visual edit
- 07:57, 1 July 2020 diff hist +2 Atomic Layer Deposition (Oxford FlexAL) corrected chamber --> metal/dielectric designation Tag: Visual edit
- 18:03, 24 June 2020 diff hist 0 m Lift-Off with DUV Imaging + PMGI Underlayer →Suggested Process for Liftoff Tag: Visual edit
- 18:03, 24 June 2020 diff hist +73 Lift-Off with DUV Imaging + PMGI Underlayer annotated image caption Tag: Visual edit
- 17:59, 24 June 2020 diff hist +124 Lift-Off with DUV Imaging + PMGI Underlayer separated Process Limits into separate section Tag: Visual edit
- 11:51, 22 June 2020 diff hist +307 Services added Fab Services note at bottom Tag: Visual edit
- 11:01, 22 June 2020 diff hist +95 Atomic Layer Deposition Recipes →Pt deposition (ALD CHAMBER 1): added Pt recipe name for O* plasma Tag: Visual edit
- 10:57, 22 June 2020 diff hist +8 m Atomic Layer Deposition (Oxford FlexAL) →ALD Recipes: bolded recipes page Tag: Visual edit
- 10:22, 18 June 2020 diff hist -61 m Demis D. John fixed URL current Tag: Visual edit
- 10:21, 18 June 2020 diff hist +139 Demis D. John moved 'Contact If...' to the top
- 14:56, 17 June 2020 diff hist +9 Main Page mod remove top spacing current
- 14:45, 17 June 2020 diff hist +1,830 N Main Page mod pasted Main_Page code
- 14:06, 17 June 2020 diff hist -9 m Lithography Recipes →Chemicals Stocked + Datasheets: delete whitespace
- 14:05, 17 June 2020 diff hist -43 m Lithography Recipes →Lift-Off Techniques: deleted redlink Tag: Visual edit
- 14:04, 17 June 2020 diff hist -9 m Lithography Recipes →Chemicals Stocked + Datasheets Tag: Visual edit
- 14:01, 17 June 2020 diff hist +461 Lithography Recipes Converted wall-of-text list into indented table of contents Tag: Visual edit
- 13:38, 17 June 2020 diff hist +14 m Stepper 3 (ASML DUV) →Recipes: corrected link text Tag: Visual edit
- 13:37, 17 June 2020 diff hist +252 Stepper 3 (ASML DUV) →Design & Fabrication Tools: updated Job-creator options Tag: Visual edit
- 11:11, 16 June 2020 diff hist +26 m Demis D. John →Contact If...: updated Tag: Visual edit
- 11:10, 16 June 2020 diff hist +35 m Demis D. John →External Professional Websites: url update Tag: Visual edit
- 14:37, 12 June 2020 diff hist +36 Autostep 200 Mask Making Guidance fixed title, added WIP and mask ordering section Tag: Visual edit
- 12:01, 9 June 2020 diff hist 0 File:SiO2 Etch, Ru HardMask - Fluorine ICP Etch Process - Ning Cao 2019-06.pdf John d uploaded a new version of File:SiO2 Etch, Ru HardMask - Fluorine ICP Etch Process - Ning Cao 2019-06.pdf current
- 11:56, 9 June 2020 diff hist 0 File:SiO2 Etch, Ru HardMask - Fluorine ICP Etch Process - Ning Cao 2019-06.pdf John d uploaded a new version of File:SiO2 Etch, Ru HardMask - Fluorine ICP Etch Process - Ning Cao 2019-06.pdf
- 11:42, 9 June 2020 diff hist +494 ICP Etching Recipes →SiO2 Etching: added Ning's Ru-masked SiO2 etch Tag: Visual edit
- 11:29, 9 June 2020 diff hist +117 N File:SiO2 Etch, Ru HardMask - Fluorine ICP Etch Process - Ning Cao 2019-06.pdf Procedure for SiO2 deep etching on Plasma-Therm SLR Fluorine Etcher, using Sputtered Ruthenium hardmask
- 19:18, 8 June 2020 diff hist -1 m Template:Announcements
- 19:18, 8 June 2020 diff hist +3 m Template:Announcements
- 19:17, 8 June 2020 diff hist +23 m Template:Announcements
- 19:17, 8 June 2020 diff hist -120 Template:Announcements updated COVID response
- 18:12, 8 June 2020 diff hist -142 Template:Announcements →NanoFab Closure: update to "COVID Response"
- 18:08, 8 June 2020 diff hist 0 m Template:News →Raith Velion: FIB/SEM Installation: minor update
- 18:08, 8 June 2020 diff hist +9 m Template:News RAITH minor spelling
- 11:18, 8 June 2020 diff hist +321 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) link to lase rmonitor pages Tag: Visual edit
- 11:17, 8 June 2020 diff hist +93 ICP Etch 2 (Panasonic E626I) link to laser monitor pages Tag: Visual edit
- 11:16, 8 June 2020 diff hist +368 ICP Etch 1 (Panasonic E646V) link to laser etch monitor pages Tag: Visual edit
- 11:14, 8 June 2020 diff hist +306 DSEIII (PlasmaTherm/Deep Silicon Etcher) links to laser monitor pages Tag: Visual edit
- 11:11, 8 June 2020 diff hist +422 N Intellemetrics Laser Etch Monitor Procedure for Plasma-Therm Etchers basic description, point to General Procedure page. current Tag: Visual edit
- 08:04, 5 June 2020 diff hist +95 XeF2 Etch (Xetch) →About: added wafer size Tag: Visual edit
- 23:29, 2 June 2020 diff hist 0 m Template:Announcements grammar
- 17:56, 2 June 2020 diff hist +63 m Template:WIP current
- 17:55, 2 June 2020 diff hist +89 Template:WIP link to WIP category
- 17:54, 2 June 2020 diff hist +133 N Category:WIP Created page with "The following pages have a "Work In Progress" label and Image inserted in them. See the WIP template for more info." current
- 17:52, 2 June 2020 diff hist +7 m Dan Read added work in progress sign Tag: Visual edit
- 17:51, 2 June 2020 diff hist +189 N Dan Read initial page
- 17:50, 2 June 2020 diff hist +43 Staff List →Process Group: added link to Dan Read Tag: Visual edit
- 17:48, 2 June 2020 diff hist 0 m Template:Announcements modify post date so closure is at top
- 17:48, 2 June 2020 diff hist +281 Template:Announcements New tool installs - points to NEWS articles
- 17:43, 2 June 2020 diff hist +1,382 Template:News article for Raith Velion & Heidleberg MLA150
- 13:00, 30 May 2020 diff hist +215 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →IQC (Image Quality Control) Calibration Check: added screenshot of IQC results screen Tag: Visual edit
- 12:58, 30 May 2020 diff hist +114 N File:ASML IQC Focus Mean Correction screenshot.jpg
- 16:50, 28 May 2020 diff hist +562 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →Error Log full: added Laser refill warning Tag: Visual edit
- 16:45, 28 May 2020 diff hist +259 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →IQC (Image Quality Control) Calibration Check: added brief description of utility Tag: Visual edit
- 16:14, 28 May 2020 diff hist +6 m ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →IQC (Image Quality Control) Calibration Check: bolded button Tag: Visual edit
- 16:14, 28 May 2020 diff hist +172 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →IQC (Image Quality Control) Calibration Check: added to record in logbook Tag: Visual edit
- 10:52, 22 May 2020 diff hist +357 CAIBE (Oxford Ion Mill) linked to Cluster operating instructions Tag: Visual edit
- 10:48, 22 May 2020 diff hist +9 m Tool List →Inspection, Test and Characterization: renaming of sections Tag: Visual edit
- 09:27, 19 May 2020 diff hist +83 m Thermal Evap 2 (Solder) →About Tag: Visual edit
- 09:26, 19 May 2020 diff hist +35 Thermal Evap 2 (Solder) fixed link to recipes, removed duplicate link Tag: Visual edit
- 08:56, 18 May 2020 diff hist +189 m Lift-Off with DUV Imaging + PMGI Underlayer convert process to table, more like a "traveler" Tag: Visual edit
- 10:12, 15 May 2020 diff hist +1,701 Atomic Layer Deposition Recipes →Al2O3 deposition (ALD CHAMBER 3): added all Chamber 3 recipes I could find Tag: Visual edit
- 13:52, 13 May 2020 diff hist 0 m MediaWiki:Common.css retry
- 13:51, 13 May 2020 diff hist -1 MediaWiki:Common.css retry
- 13:50, 13 May 2020 diff hist +3 MediaWiki:Common.css retry
- 13:49, 13 May 2020 diff hist +1 m MediaWiki:Common.css retry
- 13:46, 13 May 2020 diff hist +84 MediaWiki:Common.css disable discussion link
- 07:22, 13 May 2020 diff hist +66 m Frequently Asked Questions →Can I take supplies from the Nanofab?: tone down the wording Tag: Visual edit
- 15:52, 12 May 2020 diff hist +42 m MediaWiki:Common.css added comment line
- 15:50, 12 May 2020 diff hist +9 m MediaWiki:Common.css retry h6
- 15:25, 12 May 2020 diff hist +50 MediaWiki:Common.css italicized Heading 4 (h6)
- 15:21, 12 May 2020 diff hist +152 Tool List →Inspection, Test and Characterization: reorganized optical tools Tag: Visual edit
- 20:40, 6 May 2020 diff hist +8 m Stepper 3 (ASML DUV) reduce Heading levels to "heading" not "Page title" Tag: Visual edit
- 17:55, 6 May 2020 diff hist +341 Stepper 3 (ASML DUV) added link to stepper recipes Tag: Visual edit
- 08:50, 29 April 2020 diff hist +51 Template:Announcements bumped COVID closure post, link to BThibeault page
- 10:14, 23 April 2020 diff hist +14 Atomic Layer Deposition (Oxford FlexAL) →Procedures & Documentation: changed to "ask tool supervisor" instead of BillM Tag: Visual edit
- 10:13, 23 April 2020 diff hist +28 Atomic Layer Deposition Recipes →Atomic Layer Deposition (Oxford FlexAL): changed to "ask Tool Supervisor" instead of BillM Tag: Visual edit
- 09:58, 23 April 2020 diff hist -3 Sputtering Recipes →Al Deposition (Sputter 2): changed Heading level for Sputter 2 to "page title" to match others Tag: Visual edit
- 09:14, 23 April 2020 diff hist -19 m Test Data of etching SiO2 with CHF3/CF4-ICP1 minor format Tag: Visual edit
- 09:12, 23 April 2020 diff hist +3 Test Data of etching SiO2 with CHF3/CF4-ICP1 Tag: Visual edit
- 09:11, 23 April 2020 diff hist +43 m Test Data of etching SiO2 with CHF3/CF4-ICP1 formatting Tag: Visual edit
- 09:10, 23 April 2020 diff hist +6 m Test Data of etching SiO2 with CHF3/CF4-ICP1 minor formatting Tag: Visual edit
- 09:10, 23 April 2020 diff hist +84 Test Data of etching SiO2 with CHF3/CF4-ICP1 comments on sidewall angle Tag: Visual edit
- 16:18, 22 April 2020 diff hist +495 Measurements and Imaging with Amscope Camera - Quickstart Usage Guide updated to indicate the 2 methods of choosing cals Tag: Visual edit
- 15:44, 22 April 2020 diff hist +1,432 N Measurements and Imaging with Amscope Camera - Quickstart Usage Guide copy/pasted BrianT's email from Jul 26, 2019 Tag: Visual edit
- 15:36, 22 April 2020 diff hist +37 Microscopes →Image Analysis Software: link to Amscope Quickstart Tag: Visual edit
- 12:26, 22 April 2020 diff hist +98 N File:UCSB Service Agreement.pdf UCSB Service Agreement, for Remote Fabrication Services section of Nanotech website.
- 14:45, 21 April 2020 diff hist +291 PECVD Recipes →Cleaning Recipes (PECVD #2): changed Clean recipe to link to the screenshot instead of embedding in recipes page. added description of the clean Tag: Visual edit
- 14:42, 21 April 2020 diff hist +228 PECVD Recipes →Cleaning Recipes (PECVD #1): changed cleaning recipe image to Link to image, instead of embedded in page. Small description of the recipe. Tag: Visual edit
- 14:37, 21 April 2020 diff hist +20 m File:PECVD1-cleaning.png description update current
- 18:06, 13 April 2020 diff hist +204 Services formatting/clarify Tag: Visual edit
- 18:02, 13 April 2020 diff hist +62 Template:Links updated remote work/lab access links
- 11:54, 8 April 2020 diff hist +46 m Wafer scanning process traveler added author and spelling Tag: Visual edit
- 11:49, 8 April 2020 diff hist +128 Wafer scanning process traveler added wafers to use section and summary at top
- 09:06, 8 April 2020 diff hist +5 Stocked Chemical List added "IPA" to propanol names/notes Tag: Visual edit
- 08:59, 8 April 2020 diff hist +31 Stocked Chemical List added BHF % concentration Tag: Visual edit
- 12:45, 4 April 2020 diff hist +148 Stepper 3 (ASML DUV) →Design & Fabrication Tools: link to template + CAD files Tag: Visual edit
- 15:49, 30 March 2020 diff hist +12 ICP Etching Recipes →Al Etch (Panasonic 1) Tag: Visual edit
- 15:48, 30 March 2020 diff hist +6 ICP Etching Recipes →Al Etch (Panasonic 2)
- 10:42, 30 March 2020 diff hist +6 ICP-PECVD (Unaxis VLR) →Documentation: fixed link
- 10:21, 30 March 2020 diff hist +4 m Stepper 2 (AutoStep 200) →Staff Procedures Tag: Visual edit
- 10:13, 30 March 2020 diff hist -4,103 Autostep 200 Troubleshooting and Recovery moved system restarting procedure to own page
- 10:11, 30 March 2020 diff hist +193 Stepper 2 (AutoStep 200) added shutartup-shutdown link Tag: Visual edit
- 15:05, 26 March 2020 diff hist +92 Mike Day added Tools > PEii ashers current Tag: Visual edit
- 15:04, 26 March 2020 diff hist -80 Staff List →Equipment Group: Deleted TomR from Equip. group (also in Facilities) Tag: Visual edit
- 15:03, 26 March 2020 diff hist +16 Biljana Stamenic Added "Tools" heading Tag: Visual edit
- 15:01, 26 March 2020 diff hist -1 m Tom Reynolds changed to May 2018 Tag: Visual edit
- 14:53, 26 March 2020 diff hist +77 N File:ASML Reticle Programming Params - DEM-2020-03 v1.xlsx CAD Tutorial - example programming spreadsheet for ASML Stepper current
- 14:48, 26 March 2020 diff hist +83 N File:Example Mask order form (UCSB ASML 5500) - DEM-2020-03.pdf CAD Tutorial - Example Mask order form (UCSB ASML 5500) - DEM-2020-03 current
- 14:35, 26 March 2020 diff hist -24 m Calculators + Utilities →Example CAD File: fixed link Tag: Visual edit: Switched
- 14:29, 26 March 2020 diff hist +471 Calculators + Utilities →Example CAD File: link to ASML Example CAD file and Programming page Tag: Visual edit: Switched
- 14:27, 26 March 2020 diff hist +88 N File:DEMISJAN2020 - Reticle Layout v1.GDS CAD Tutorial - final GDS CAD file for submission to phootmask manufacturer current
- 12:31, 26 March 2020 diff hist +1,201 Calculators + Utilities →CAD Design Tips: added CAD tutorial - partial Tag: Visual edit
- 12:25, 26 March 2020 diff hist +78 N File:CAD Tutorial for ASML Reticle v1 - screenshot Device Layout cell.png current
- 11:50, 26 March 2020 diff hist +63 N File:CAD Tutorial for ASML Reticle v1.OAS Mask layout CAD tutorial for ASML Stepper reticle current
- 12:22, 24 March 2020 diff hist -37 Claudia Gutierrez initial stab at info. Tag: Visual edit
- 12:18, 24 March 2020 diff hist -9 m Ning Cao removed periods/spaces current Tag: Visual edit
- 14:33, 23 March 2020 diff hist -2 m E-Beam 1 (Sharon) removed link on "Documentation" heading
- 14:32, 23 March 2020 diff hist +769 Editing Tutorials →Linking to a PDF or other file: added "linking to an existing file", also corrected image indenting in Source Tag: Visual edit: Switched
- 14:27, 23 March 2020 diff hist +103 N File:Editing Tutorials - List of Uploaded Files - click the file title to get file page.png current
- 11:57, 23 March 2020 diff hist +548 Demis D. John added "COntact If..." section Tag: Visual edit
- 11:32, 23 March 2020 diff hist -1,215 Bill Mitchell deleted Lorem Ipsum current Tag: Visual edit
- 11:32, 23 March 2020 diff hist -1,215 Ning Cao deleted Lorem ipsum Tag: Visual edit
- 11:31, 23 March 2020 diff hist +1 Tom Reynolds moved Lab Manager text Tag: Visual edit: Switched
- 11:28, 23 March 2020 diff hist -1,216 Brian Lingg removed lorem ipsum Tag: Visual edit
- 11:27, 23 March 2020 diff hist -15 Don Freeborn removed text Tag: Visual edit
- 11:27, 23 March 2020 diff hist -1,215 Luis Zuzunaga removed lorem ipsum Tag: Visual edit
- 11:26, 23 March 2020 diff hist -1,216 Tino Sy removed lorem ipsum current Tag: Visual edit
- 11:13, 23 March 2020 diff hist +428 N Claudia Gutierrez added Claudia Staff info
- 11:10, 23 March 2020 diff hist +4 Staff List added Claudia Gutierrez link Tag: Visual edit
- 22:02, 21 March 2020 diff hist +115 Microscopes →Microscope Training Guide: reccomend in-person training Tag: Visual edit
- 22:00, 21 March 2020 diff hist +10 Demis D. John added link to process gorup and Optical Microscopes Tag: Visual edit
- 14:46, 17 March 2020 diff hist +79 ASML 5500: Recovering from an Error Remove reticle Tag: Visual edit
- 13:24, 17 March 2020 diff hist +712 Services →Industry and non-U.C. Academic Institutions: added missing URLs to forms, list formatting Tag: Visual edit: Switched
- 13:13, 17 March 2020 diff hist +104 N File:Facility-Use-MOU---Intercampus-UC-User.pdf Intercampus U.C. User - Facility Use Memorandum of Understanding, for "Getting Lab Access"
- 13:04, 17 March 2020 diff hist +70 N File:UCSB-Facilities-Use-Blanket-Waiver.pdf Facilities Use - Blanket Waiver for "Getting Lab Access" current
- 13:03, 17 March 2020 diff hist +64 N File:UCSB-Facilities-Use-Agreement.pdf Facilities Use Agreement, for "Getting Lab Access"
- 12:59, 17 March 2020 diff hist +74 N File:SampleCOI.pdf Sample Certificate of Insurance, for "Getting Access to Lab" current
- 12:51, 17 March 2020 diff hist +143 N File:Nanofabrication Facility Project Description.xlsx NanoFab Remote Work "Project Description Form". Remote work users must fill this out and email to the appropriate NanoFab staff.
- 11:42, 17 March 2020 diff hist +515 Template:Announcements added NanoFab closure
- 15:53, 13 March 2020 diff hist +1,211 Staff List split off Facilities group. Tag: Visual edit
- 15:42, 13 March 2020 diff hist +6 m Frequently Asked Questions →Specific Equipment Problem: minor bolding of "report tool issue" Tag: Visual edit
- 10:07, 13 March 2020 diff hist +239 PECVD Recipes →Cleaning Recipes (Unaxis VLR Dep): added clean times from SOP, and link to SOP Tag: Visual edit
- 08:18, 13 March 2020 diff hist +82 PECVD Recipes →PECVD 1 (PlasmaTherm 790): added placeholder for Cleaning recipes Tag: Visual edit
- 17:06, 9 March 2020 diff hist +15 Tom Reynolds changed to say "Previous lab manager" Tag: Visual edit
- 16:20, 5 March 2020 diff hist -13 Frequently Asked Questions →Publications acknowledging the Nanofab: less strong wording Tag: Visual edit
- 16:34, 4 March 2020 diff hist +102,378 N Publications - 2013-2014 pasted infor from Joomla current Tag: Visual edit
- 16:30, 4 March 2020 diff hist +481 N Older Publications added links for old pubs lists, 2014 and earlier (from Joomla nanotech website) current Tag: Visual edit
- 16:27, 4 March 2020 diff hist +50 Research →Publication Lists: link to "Earlier pubs" Tag: Visual edit
- 10:44, 3 March 2020 diff hist +160 Research added Select Publications Tag: Visual edit
- 16:12, 28 February 2020 diff hist +130 Test Data of etching SiO2 with CHF3/CF4-ICP1 added note about incorrect sidewall profile Tag: Visual edit: Switched
- 14:12, 28 February 2020 diff hist -1 m Lab Rules moved sub-title to top
- 14:10, 28 February 2020 diff hist +204 m Lab Rules additional note at top regarding searching/FAQ/TOC Tag: Visual edit: Switched
- 13:59, 28 February 2020 diff hist +517 Services updated titles and slight formatting Tag: Visual edit
- 12:30, 28 February 2020 diff hist +88 m Services instruciton before, TOC
- 12:23, 28 February 2020 diff hist +32 m Services
- 12:10, 28 February 2020 diff hist +89 Services added TOC manually, forced
- 12:08, 28 February 2020 diff hist +3,156 N Services initial page with copy/pasted precodures and 3 headings Tag: Visual edit
- 15:18, 26 February 2020 diff hist +259 Template:Publications added title URLs
- 19:06, 25 February 2020 diff hist +3 m Template:News →TechTalk: Dr. Renan Moreira & Grégoire Coiffard: minor slash
- 19:06, 25 February 2020 diff hist +52 m Template:News →TechTalk: Dr. Renan Moreira & Grégoire Coiffard: added date for RSS
- 19:04, 25 February 2020 diff hist +50 m Template:News →KLA Tencor Profilometer Installed: link to Brian Lingg's page
- 19:03, 25 February 2020 diff hist +13 m Template:News →Filmetrics Optical Measurement Systems: add link to Ning's page
- 19:02, 25 February 2020 diff hist -669 Template:News deleted Profilm3D article
- 19:01, 25 February 2020 diff hist -89 Tool List →Inspection, Test and Characterization: deleted Filmetrics Profilm3D link Tag: Visual edit
- 10:07, 25 February 2020 diff hist +301 m Calculators + Utilities →CAD Design Tips: added OASIS and "save session" note Tag: Visual edit
- 15:32, 21 February 2020 diff hist +194 Frequently Asked Questions →Publications acknowledging the Nanofab: added code citing info Tag: Visual edit
- 12:40, 19 February 2020 diff hist +170 m Frequently Asked Questions →Where do I get these supplies for my lab?: link to UCBS sotrerooms Tag: Visual edit
- 12:35, 19 February 2020 diff hist +164 m Wet Benches →Detailed Specifications: added temp. check, minor rearrange Tag: Visual edit
- 12:21, 19 February 2020 diff hist +79 Ovens - Overview of All Lab Ovens added heramtherm max temp Tag: Visual edit
- 12:16, 19 February 2020 diff hist +81 Ovens - Overview of All Lab Ovens added SUM link for HeraTherm Tag: Visual edit
- 15:00, 18 February 2020 diff hist -276 m Template:Announcements deleted SUM testing
- 11:49, 16 February 2020 diff hist +13 Brian Thibeault updated position title
- 11:58, 12 February 2020 diff hist +16 Template:Announcements moved N2 DryBox to top, since it's imminent
- 11:54, 12 February 2020 diff hist +11 m Template:Announcements →ASML Maintenance: March 30th: minor text
- 11:53, 12 February 2020 diff hist +82 Template:Announcements updated GCA posts to 5-equals instead of 4
- 11:52, 12 February 2020 diff hist +28 Template:Announcements →SignupMonkey Testing: Fri Feb 7th, 7am: updated to 17th
- 20:03, 10 February 2020 diff hist -18 Ashers (Technics PEII) added model to Tool panel
- 19:40, 10 February 2020 diff hist -40 RIE 5 (PlasmaTherm) added model to Tool panel
- 19:33, 10 February 2020 diff hist -26 CAIBE (Oxford Ion Mill) added model to Tool panel
- 13:05, 31 January 2020 diff hist +48 Frequently Asked Questions →Publications acknowledging the Nanofab: added "local UCSB researchers" Tag: Visual edit
- 00:04, 30 January 2020 diff hist +248 Template:Announcements SUM testing feb 7
- 18:14, 28 January 2020 diff hist +9 m UCSB NanoFab Microscope Training →General Focusing: reorg danger of crashing at top Tag: Visual edit
- 18:12, 28 January 2020 diff hist +79 m UCSB NanoFab Microscope Training →Focusing on a sample with no features (Focus Stop): caption update Tag: Visual edit
- 18:10, 28 January 2020 diff hist +229 UCSB NanoFab Microscope Training added F-stop image to table in the F-stop section Tag: Visual edit: Switched
- 18:06, 28 January 2020 diff hist +85 N File:Microscope Training - UScope F-stop example annotated 1000px.png current
- 11:38, 28 January 2020 diff hist +2 m ICP Etching Recipes →ARC Etching: DUV-42P or AR6: formatting Tag: Visual edit
- 11:36, 28 January 2020 diff hist +96 m ICP Etching Recipes →Photoresist and ARC etching: added names for contact for etch rates Tag: Visual edit
- 17:09, 27 January 2020 diff hist +125 Frequently Asked Questions →Bring a new chemical/material into the lab: clarified requiremnt to ask brianT Tag: Visual edit
- 08:30, 27 January 2020 diff hist -154 Template:Announcements shortened ASML
- 18:00, 23 January 2020 diff hist +139 Test Data of etching SiO2 with CHF3/CF4-ICP1 added row explaining chamber clean. Tag: Visual edit
- 20:51, 22 January 2020 diff hist +117 UCSB NanoFab Microscope Training →Shadow Iris/Aperture for Focusing: added technical term “focus stop” Tag: Visual edit
- 12:11, 22 January 2020 diff hist +1,235 Microscopes links to Amscope & FIJI Tag: Visual edit: Switched
- 10:48, 22 January 2020 diff hist +64 Filmetrics F40-UV Microscope-Mounted →About: add BHJML model Tag: Visual edit
- 01:48, 19 January 2020 diff hist +433 Calculators + Utilities →Analysis Programs: added AmScope calibration file Tag: Visual edit
- 13:55, 18 January 2020 diff hist +4 m Stepper 3 (ASML DUV) →Design & Fabrication Tools: link to github repo Tag: Visual edit
- 13:55, 18 January 2020 diff hist +10 Stepper 3 (ASML DUV) moved UCSB Test reticles to "Design & Fabrication Tools" section Tag: Visual edit: Switched
- 13:53, 18 January 2020 diff hist +198 Stepper 3 (ASML DUV) moved Mask Making Guidelines to "Design Tools" section Tag: Visual edit
- 09:03, 17 January 2020 diff hist +112 ICP Etching Recipes →ICP Etch 1 (Panasonic E626I): added section headings Tag: Visual edit
- 09:02, 17 January 2020 diff hist +166 ICP Etching Recipes →SiO2 Etching (Panasonic 2): added section headings Tag: Visual edit
- 08:59, 17 January 2020 diff hist +46 ICP Etching Recipes →SiO2 Etching (Panasonic 1): added historical data section Tag: Visual edit
- 17:25, 16 January 2020 diff hist -36 Template:Announcements asml PM moved
- 17:03, 14 January 2020 diff hist +247 Template:Announcements ASML PM Feb
- 10:27, 13 January 2020 diff hist +18 Template:Announcements ASML up
- 09:13, 13 January 2020 diff hist -3 Template:Announcements ASML down
- 23:36, 9 January 2020 diff hist +57 m Calculators + Utilities →Refractive Indices Tag: Visual edit
- 11:00, 9 January 2020 diff hist -102 Template:Announcements →ASML is DOWN: Repair Expected Monday: system up
- 15:14, 2 January 2020 diff hist -13 Template:Announcements asml update
- 13:33, 2 January 2020 diff hist +24 m Template:Announcements update ASML title
- 13:33, 2 January 2020 diff hist -118 Template:Announcements removed CR=OPEN, ASML update
- 18:57, 1 January 2020 diff hist +587 PECVD Recipes Added section sub-headings Tag: Visual edit
- 18:42, 1 January 2020 diff hist +405 PECVD 2 (Advanced Vacuum) link to recipes page Tag: Visual edit
- 18:33, 1 January 2020 diff hist +2 m Test Data of etching SiO2 with CHF3/CF4 shortened link text Tag: Visual edit: Switched
- 14:00, 30 December 2019 diff hist -5 m Template:Announcements Undo revision 157023 by John d (talk) Tag: Undo
- 14:00, 30 December 2019 diff hist +5 m Template:Announcements br
- 13:58, 30 December 2019 diff hist -2 m Template:Announcements removed whitespace
- 13:57, 30 December 2019 diff hist -5 m Template:Announcements title HR
- 13:56, 30 December 2019 diff hist +16 m Template:Announcements header level remove
- 11:57, 30 December 2019 diff hist -4 m Template:Announcements title heading level 2
- 11:57, 30 December 2019 diff hist +2 m Template:Announcements title heading level 4
- 11:56, 30 December 2019 diff hist +2 Template:Announcements title heading level
- 11:54, 30 December 2019 diff hist -50 Template:Announcements →ASML is DOWN: level sensor update
- 11:01, 30 December 2019 diff hist +68 Template:Announcements →ASML is DOWN: light bulb update
- 09:50, 28 December 2019 diff hist -29 Template:Announcements nanofab open, asml down
- 16:24, 19 December 2019 diff hist -625 Template:Publications updated notes to show how to make new post
- 16:15, 19 December 2019 diff hist +60 Template:Publications try URL in post title
- 16:13, 19 December 2019 diff hist +1,229 Template:Publications added some selected publications
- 15:56, 19 December 2019 diff hist +2,237 N Template:Publications dummy articles
- 11:06, 19 December 2019 diff hist +107 m Tool List →Lithography Support: link to POLOS section Tag: Visual edit
- 11:05, 19 December 2019 diff hist +279 Tool List →Lithography: added POLOS spinners Tag: Visual edit
- 11:02, 19 December 2019 diff hist -191 Wet Benches enabled automatic TOC
- 11:01, 19 December 2019 diff hist +1,501 Wet Benches Added POLOS section, reformatting headings to use correct level. Tag: Visual edit
- 10:25, 19 December 2019 diff hist -3 m ASML Stepper 3 Error Recovery, Troubleshooting and Calibration typo Tag: Visual edit
- 10:25, 19 December 2019 diff hist +192 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration added some common warnings Tag: Visual edit
- 10:22, 19 December 2019 diff hist +454 Stepper 3 (ASML DUV) →Operating Procedures: added Software options section Tag: Visual edit
- 14:48, 10 December 2019 diff hist +2 m Calculators + Utilities →Fabrication Processes & Converters: fixed BYU URL
- 11:03, 6 December 2019 diff hist +152 m Frequently Asked Questions →Specific Equipment Problem: update equipment problem reporting, added SUM contact info Tag: Visual edit
- 17:19, 3 December 2019 diff hist +778 Calculators + Utilities →CAD Layout Programs: added CAD tips re: Cells Tag: Visual edit
- 12:55, 3 December 2019 diff hist +46 Microscopes →Microscope #1: Olympus BHMJL (Char. Lab, Room 1111): added user manual Tag: Visual edit
- 12:49, 3 December 2019 diff hist +211 Microscopes corrected microscope 1 to olympus, afdded # 5, 6 to Olympus Flour/DUV scopes Tag: Visual edit
- 12:47, 3 December 2019 diff hist +63 N File:Microscope 01 Olympus BHMJL crop.png current
- 02:37, 30 November 2019 diff hist +22 m Lift-Off with DUV Imaging + PMGI Underlayer →Images / Examples: image acknowledgement Tag: Visual edit
- 02:31, 30 November 2019 diff hist +38 Lift-Off with DUV Imaging + PMGI Underlayer Acknowledge development by demis Tag: Visual edit
- 15:33, 27 November 2019 diff hist +42 Frequently Asked Questions →Authorship on Publications: added "if images/data included in paper" Tag: Visual edit
- 15:29, 27 November 2019 diff hist -128 Template:Announcements deleted ASML Down
- 15:26, 27 November 2019 diff hist +12 m ICP-PECVD (Unaxis VLR) →Cluster Configuration: bold Tag: Visual edit
- 15:26, 27 November 2019 diff hist +335 ICP-Etch (Unaxis VLR) added Cluster Config / oink to each modules tool page Tag: Visual edit
- 15:24, 27 November 2019 diff hist -32 m ICP-PECVD (Unaxis VLR) →Cluster Configuration: formatting Tag: Visual edit
- 15:23, 27 November 2019 diff hist +368 ICP-PECVD (Unaxis VLR) added cluster configuration / link to each chamber's tool page Tag: Visual edit
- 14:24, 26 November 2019 diff hist +129 m CAIBE (Oxford Ion Mill) added CAIBE acronym expansion to description, for google searchability Tag: Visual edit
- 14:14, 26 November 2019 diff hist +8 m Atomic Layer Deposition (Oxford FlexAL) added CAIBE acronym Tag: Visual edit
- 14:13, 26 November 2019 diff hist -72 m Atomic Layer Deposition (Oxford FlexAL) typo/grammar Tag: Visual edit
- 14:12, 26 November 2019 diff hist +287 CAIBE (Oxford Ion Mill) added cluster config section Tag: Visual edit
- 14:10, 26 November 2019 diff hist +198 Atomic Layer Deposition (Oxford FlexAL) added cluster config section Tag: Visual edit
- 12:32, 22 November 2019 diff hist +102 PECVD Recipes →SiN deposition (Unaxis VLR): SiN recipes under development Tag: Visual edit
- 17:34, 21 November 2019 diff hist +79 m Stepper 3 (ASML DUV) moved/updated "service provider" Tag: Visual edit
- 12:17, 19 November 2019 diff hist +234 m Stepper Recipes →Anti-Reflective Coatings: links to BARC datasheets Tag: Visual edit
- 12:15, 19 November 2019 diff hist +358 Lithography Recipes added ARC row with links to DSK & DUV42P Tag: Visual edit: Switched
- 18:47, 13 November 2019 diff hist +11 m Aidan Hopkins added whitespace in About so tools list shows up correctly. Tag: Visual edit: Switched
- 18:44, 13 November 2019 diff hist +1 m Template:Announcements moved CR shutdown to top
- 13:29, 13 November 2019 diff hist +1 Automated Coat/Develop System (S-Cubed Flexi) added ToolID (link to SUM)
- 17:34, 12 November 2019 diff hist +1 m Frequently Asked Questions →I can't connect to the Nanofiles FTP server!: saved pasword to end, not usually the culprit Tag: Visual edit
- 17:33, 12 November 2019 diff hist +198 m Frequently Asked Questions →I can't connect to the Nanofiles FTP server!: cyberduck setting Tag: Visual edit
- 01:43, 8 November 2019 diff hist 0 File:Digidat-Toppan Mask order form (UCSB ASML 5500).docx John d uploaded a new version of File:Digidat-Toppan Mask order form (UCSB ASML 5500).docx current
- 01:37, 8 November 2019 diff hist 0 File:ASML Reticle Programming Params - MASKJAN2020 v1.xlsx John d uploaded a new version of File:ASML Reticle Programming Params - MyReticleBarCode v1.xlsx
- 01:35, 8 November 2019 diff hist 0 File:ASML Reticle Programming Params - MASKJAN2020 v1.xlsx John d uploaded a new version of File:ASML Reticle Programming Params - MyReticleBarCode v1.xlsx
- 15:05, 25 October 2019 diff hist +231 Chemical List added photolith chemicals Tag: Visual edit
- 14:49, 25 October 2019 diff hist +51 m Rapid Thermal Processor (SSI Solaris 150) comment clarification Tag: Visual edit
- 14:48, 25 October 2019 diff hist +33 m Rapid Thermal Processor (AET RX6) →Detailed Specifications: "Temp" --> "maximum temp" Tag: Visual edit
- 14:30, 25 October 2019 diff hist -51 IR Thermal Microscope (QFI) deleted erroneous email + phone
- 14:30, 25 October 2019 diff hist -5 IR Thermal Microscope (QFI) →Capabilities: updated objectives: nIR --> Vis + nIR Tag: Visual edit
- 16:26, 17 October 2019 diff hist +673 Frequently Asked Questions →General NanoFab Questions: take suplies from Nanofab? Tag: Visual edit
- 17:42, 11 October 2019 diff hist +149 Editing Tutorials →It won't let me "Save" my changes!: added Edit Source mode info/image Tag: Visual edit
- 17:40, 11 October 2019 diff hist +31 N File:Visual Editor - switch to source mode - pen button.png current
- 17:33, 11 October 2019 diff hist +35 m Editing Tutorials →Linking to a PDF or other file: borders on images Tag: Visual edit
- 17:32, 11 October 2019 diff hist +7 m Editing Tutorials →Linking to a PDF or other file: border and cropped image size Tag: Visual edit
- 17:32, 11 October 2019 diff hist 0 File:Editing Tutorials 4b- file info right click URL.png John d uploaded a new version of File:Editing Tutorials 4b- file info right click URL.png current
- 17:30, 11 October 2019 diff hist +272 m Editing Tutorials →Linking to a PDF or other file: minor update Tag: Visual edit
- 17:23, 11 October 2019 diff hist +385 Editing Tutorials →Linking to a PDF or other file: inserted images Tag: Visual edit
- 17:23, 11 October 2019 diff hist +44 N File:Editing Tutorials - 5- insert link into page.png current
- 17:21, 11 October 2019 diff hist +47 N File:Editing Tutorials 4b- file info right click URL.png
- 17:20, 11 October 2019 diff hist +40 N File:Editing Tutorials 3c- modifications etc..png current
- 17:17, 11 October 2019 diff hist +767 Editing Tutorials →Linking to a PDF or other file: more upload PDF... Tag: Visual edit
- 17:10, 11 October 2019 diff hist +512 Editing Tutorials →Basic Editing: start of "insert PDF" section Tag: Visual edit
- 16:56, 11 October 2019 diff hist -245 Template:Announcements removed ASML
- 16:40, 8 October 2019 diff hist +45 N File:Editing Tutorials - Upload PDF - 3b- filename descript upload button.png current
- 16:36, 8 October 2019 diff hist +50 N File:Editing Tutorials - Upload PDF - 2- choose file.png current
- 16:35, 8 October 2019 diff hist +49 N File:Editing Tutorials - Upload PDF - 1- upload file.png current
- 16:30, 8 October 2019 diff hist +73 Template:Tool minor updates
- 16:25, 8 October 2019 diff hist -24 m Automated Coat/Develop System (S-Cubed Flexi) fixed ToolTemplate 'type' arg
- 16:18, 8 October 2019 diff hist +56 m Stepper 3 (ASML DUV) →Troubleshooting and Recovery: minor grammar Tag: Visual edit
- 16:17, 8 October 2019 diff hist +67 m Stepper 3 (ASML DUV) toolTemplate added Litho links
- 16:16, 8 October 2019 diff hist +50 m Automated Coat/Develop System (S-Cubed Flexi) ToolTemplate: model & mfg. link
- 16:09, 8 October 2019 diff hist +1 m Editing Tutorials move TOC
- 16:07, 8 October 2019 diff hist +125 m Lithography Recipes →Automated Coat/Develop System Recipes (S-Cubed Flexi): link to tool page Tag: Visual edit
- 16:05, 8 October 2019 diff hist +86 Tool List added S-Cubed Flexi to Wet processing tools as well Tag: Visual edit
- 16:04, 8 October 2019 diff hist -10 m Automated Coat/Develop System (S-Cubed Flexi) edit staff use notice Tag: Visual edit
- 16:03, 8 October 2019 diff hist +233 Automated Coat/Develop System (S-Cubed Flexi) added notice abotu staff use only Tag: Visual edit
- 16:00, 8 October 2019 diff hist +395 Automated Coat/Develop System (S-Cubed Flexi) added PR's and links to recipes Tag: Visual edit
- 15:49, 8 October 2019 diff hist +154 Lithography Recipes added S-Cubed coater section Tag: Visual edit
- 15:31, 8 October 2019 diff hist +49 Automated Coat/Develop System (S-Cubed Flexi) Added ToolTemplate - tool type and recepe
- 15:09, 8 October 2019 diff hist +397 N Automated Coat/Develop System (S-Cubed Flexi) initial page
- 15:07, 8 October 2019 diff hist -49 Stepper 1 (GCA 6300) delete email/phone
- 15:06, 8 October 2019 diff hist +86 Tool List →Lithography: link to S-Cubed Coater Tag: Visual edit
- 13:15, 4 October 2019 diff hist -12 Template:Announcements ASML down - TCU, minimal info
- 12:23, 4 October 2019 diff hist +1,487 ICP Etching Recipes →Ru (Ruthenium) Etch (Panasonic 2): Ru etch PDF Tag: Visual edit
- 12:11, 4 October 2019 diff hist +45 N File:194 Ru Etch O2,Cl2.pdf BillM - Pan2 Ru etch 2019-09-19 current
- 14:02, 2 October 2019 diff hist +122 DS-K101-304 Bake Temp. versus Develop Rate →Conditions: added 185*C current Tag: Visual edit
- 21:47, 27 September 2019 diff hist +19 m Gold Plating Bench added model
- 13:51, 25 September 2019 diff hist +52 Stepper Recipes →Positive Resist (ASML DUV): added Annular illum in notes Tag: Visual edit
- 10:54, 25 September 2019 diff hist +13 m Microscopes documentation -> procedures & documentation Tag: Visual edit
- 10:53, 25 September 2019 diff hist +395 Microscopes →Microscope #1: Olympus Optiphot-2 (Bay 3): renamed, moved to Nikon, added info, highlighted Microscope training Tag: Visual edit
- 09:46, 25 September 2019 diff hist +78 YES-150C-Various-Resists link to PR datasheets Tag: Visual edit
- 09:45, 25 September 2019 diff hist +52 YES-150C-Various-Resists Tag: Visual edit
- 09:44, 25 September 2019 diff hist +211 m YES-150C-Various-Resists description Tag: Visual edit
- 09:41, 25 September 2019 diff hist +10 m YES-SPR220-Various-Temps smaller figure Tag: Visual edit
- 09:41, 25 September 2019 diff hist -30 Oxygen Plasma System Recipes →Plasma Clean (YES EcoClean): correct YES EcoClean link Tag: Visual edit
- 09:40, 25 September 2019 diff hist -113 Tool List →Dry Etch: correct YES EcoClean link Tag: Visual edit
- 09:39, 25 September 2019 diff hist 0 m Plasma Clean (YES EcoClean) John d moved page Plamsa Clean (YES EcoClean) to Plasma Clean (YES EcoClean) without leaving a redirect: spelling
- 19:22, 21 September 2019 diff hist 0 m Demis D. John mnor gif tweak Tag: Visual edit
- 19:21, 21 September 2019 diff hist +10 m Demis D. John moved gif
- 19:20, 21 September 2019 diff hist -1 m Demis D. John moved gif
- 16:12, 19 September 2019 diff hist +25 Frequently Asked Questions →Wifi Access in the Nanofab: header for "cell phone calls " section Tag: Visual edit
- 15:59, 19 September 2019 diff hist +263 Frequently Asked Questions →I can't connect to the Nanofiles FTP server!: add'l info about winscp & filezilla blocking Tag: Visual edit
- 08:39, 18 September 2019 diff hist +256 Template:Announcements ASML PM
- 07:42, 17 September 2019 diff hist -29 DS-K101-304 Bake Temp. versus Develop Rate courtesy brian burkett (omit Google) Tag: Visual edit
- 07:37, 17 September 2019 diff hist +450 N DS-K101-304 Bake Temp. versus Develop Rate added data from email form Sean Demura Tag: Visual edit
- 07:31, 17 September 2019 diff hist -558 Stepper Recipes →DS-K101-304: link to bake temp vs. dev. rate Tag: Visual edit
- 11:59, 12 September 2019 diff hist +14 Frequently Asked Questions →Authorship Tag: Visual edit
- 09:31, 12 September 2019 diff hist +124 Lift-Off with DUV Imaging + PMGI Underlayer added PMGI dissolution rate Tag: Visual edit
- 09:17, 12 September 2019 diff hist +367 Frequently Asked Questions →Publications acknowledging the Nanofab: updated, added separate "authorship" sub-heading Tag: Visual edit
- 15:17, 11 September 2019 diff hist +146 Plasma Activation (EVG 810) link to recipes page, not yet fixed Tool info link Tag: Visual edit
- 08:52, 11 September 2019 diff hist +54 Template:Announcements →Logitech Wafer Bonder: Down: 3 week estiamte for repalcement part delivery
- 08:52, 11 September 2019 diff hist +530 Frequently Asked Questions →Processing/Fabrication Questions: user manuals section Tag: Visual edit
- 12:06, 9 September 2019 diff hist +216 m Laser Etch Monitoring →Monitoring Photoresist Etch Rate: minor caption formatting Tag: Visual edit
- 12:02, 9 September 2019 diff hist +56 Laser Etch Monitoring →Monitoring Photoresist Etch Rate: updated captions Tag: Visual edit
- 11:26, 9 September 2019 diff hist +1,138 Laser Etch Monitoring added examples of etch monitoring Tag: Visual edit
- 11:24, 9 September 2019 diff hist +40 N File:Annotated PR etch - Om1000 03 - ARC + Cl + PR etch v1.jpg
- 11:18, 9 September 2019 diff hist +51 N File:ARC etch + Cr etch - UV6 at 2krpm (900nm) survived v2 - screenshot.jpg current
- 08:35, 9 September 2019 diff hist -7 m Tech Talks Seminar Series rename subheading Tag: Visual edit
- 08:34, 9 September 2019 diff hist +45 Tech Talks Seminar Series sub-heading for slides Tag: Visual edit
- 20:22, 7 September 2019 diff hist +281 Lift-Off with DUV Imaging + PMGI Underlayer Minor updates to process Tag: Visual edit
- 22:31, 6 September 2019 diff hist +231 Lift-Off with DUV Imaging + PMGI Underlayer →Examples: insert SEM Tag: Visual edit
- 22:30, 6 September 2019 diff hist +84 N File:PMGI+UV6 lift-off SEM - 2017-06-30 DJ.png current
- 22:18, 6 September 2019 diff hist +1 m Lithography Recipes →Lift-Off Techniques: fixed link
- 22:15, 6 September 2019 diff hist +202 m Lift-Off with DUV Imaging + PMGI Underlayer Tag: Visual edit
- 21:45, 6 September 2019 diff hist +2,196 N Lift-Off with DUV Imaging + PMGI Underlayer initial process
- 18:35, 6 September 2019 diff hist -48 Probe Station & Curve Tracer Changed super to Demis
- 11:46, 6 September 2019 diff hist +137 Step Profilometer (KLA Tencor P-7) added placeholders for detailed specs Tag: Visual edit
- 10:30, 6 September 2019 diff hist -41 Lithography Recipes →Lift-Off Techniques: added links to wiki version of lift-off tutorial + DUV lift-off page Tag: Visual edit
- 21:18, 4 September 2019 diff hist -21 Optical Film Thickness & Wafer-Mapping (Filmetrics F50) Corrected wavelength range & model Tag: Visual edit
- 08:23, 30 August 2019 diff hist +67 Template:News Corrected info and titles
- 08:20, 30 August 2019 diff hist +60 m Template:News →TechTalk: Dr. Garett Cole & Songtao Liu
- 08:19, 30 August 2019 diff hist +277 Template:News Initial placeholder for tech talk
- 08:16, 30 August 2019 diff hist +51 Tech Talks Seminar Series Show table of contents for linking
- 13:33, 27 August 2019 diff hist -633 m Dry Etching Recipes fix ICP1 GaAs link Tag: Visual edit
- 15:36, 23 August 2019 diff hist +94 Demis D. John testing file upload Tag: Visual edit
- 15:35, 23 August 2019 diff hist +40 N File:Demis UCSB-Photonics-Gif.gif current
- 17:47, 22 August 2019 diff hist +365 Template:Announcements added Aidan's SCE outage email
- 15:18, 22 August 2019 diff hist +116 Demis D. John →About: testing editing Tag: Visual edit
- 00:32, 22 August 2019 diff hist +350 Laser Etch Monitoring listed which tools have which laser, added redlink to RIE5 lasermon procedure
- 13:51, 20 August 2019 diff hist +186 Template:Announcements added logitech bonder
- 08:53, 15 August 2019 diff hist +54 m Demis D. John →External Professional Websites: added phosoc Tag: Visual edit
- 16:46, 14 August 2019 diff hist +91 m Demis D. John website work Tag: Visual edit
- 14:01, 14 August 2019 diff hist 0 m Frequently Asked Questions →Bring a new chemical/material into the lab: emphasis Tag: Visual edit
- 14:00, 14 August 2019 diff hist +340 Frequently Asked Questions →Who do I contact for an equipment problem or general NanoFab problem?: added [Report Tool Issue] button Tag: Visual edit
- 13:44, 14 August 2019 diff hist -8 m Frequently Asked Questions →Wifi Access in the Nanofab: minor typo Tag: Visual edit
- 13:43, 14 August 2019 diff hist +161 Frequently Asked Questions →Wifi Access in the Nanofab: mention verizon repeaters Tag: Visual edit
- 11:06, 7 August 2019 diff hist +79 Template:News link to wiki page
- 11:03, 7 August 2019 diff hist +384 Template:News YES ASHER info
- 10:58, 7 August 2019 diff hist +767 Packaging Recipes →Surface Protection: Blue tape Tag: Visual edit
- 10:50, 7 August 2019 diff hist +20 Packaging Recipes →Surface Protection: UV release time Tag: Visual edit
- 13:16, 24 July 2019 diff hist +56 Packaging Recipes →Surface Protection: added details such as "remove from tape" Tag: Visual edit
- 13:14, 24 July 2019 diff hist +280 Dicing Saw (ADT) Corrected staff info infobox, added model number, added tape applicator model number, linked to recipes page
- 13:07, 24 July 2019 diff hist +61 m Packaging Recipes →Mounting/Unmounting Samples: link to nonexistent SOP for tape mounting Tag: Visual edit
- 13:04, 24 July 2019 diff hist +42 Packaging Recipes →Calculated Blade Exposures: 51mm unavailable Tag: Visual edit
- 10:42, 22 July 2019 diff hist +127 m KLA Tencor P7 - Basic profile instructions explain autromatic cals Tag: Visual edit
- 08:53, 21 July 2019 diff hist +8 Logitech WBS7 - Procedure for Wax Mounting with Spin-On Crystalbond added Work In Progress
- 08:53, 21 July 2019 diff hist -2 m Packaging Recipes →Wafer Bonder (Logitech WBS7): link to procedure Tag: Visual edit
- 08:51, 21 July 2019 diff hist +622 Logitech WBS7 - Procedure for Wax Mounting with bulk Crystalbond Stick pasted miguel's procedure Tag: Visual edit
- 16:34, 19 July 2019 diff hist -12 Vacuum Deposition Recipes corrected PECVD2 a-Si link Tag: Visual edit
- 15:32, 19 July 2019 diff hist -47 m Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) →Documentation: corrected link
- 15:32, 19 July 2019 diff hist +117 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) →Documentation: link to SOP & mention Cortex software
- 12:29, 18 July 2019 diff hist -2 Stepper 3 (ASML DUV) changes supervisor to Demis
- 12:27, 18 July 2019 diff hist -51 m Stepper 3 (ASML DUV) corrected supervisor template
- 12:24, 18 July 2019 diff hist +154 m Atomic Layer Deposition Recipes →Atomic Layer Deposition (Oxford FlexAL): 30nm max. thickness indicated Tag: Visual edit
- 22:48, 8 July 2019 diff hist +2 m Template:WIP
- 22:47, 8 July 2019 diff hist +584 GCA 6300 Mask Making Guidance added {{todo}} of corrections needed, delted photronics info
- 16:12, 8 July 2019 diff hist +14 m Stepper Recipes →DS-K101: approx. thickness Tag: Visual edit
- 16:10, 8 July 2019 diff hist +243 m Stepper Recipes →DS-K101: link to datasheet Tag: Visual edit
- 19:30, 7 July 2019 diff hist +343 Frequently Asked Questions →Publications acknowledging the Nanofab: add staff as author is novel process developed Tag: Visual edit
- 11:50, 5 July 2019 diff hist +4 Lithography Recipes →Chemicals Stocked + Datasheets: DSK-101 --> DSK-101-304 Tag: Visual edit
- 14:33, 3 July 2019 diff hist +18 IR Thermal Microscope (QFI) →Capabilities: update MIR camera type Tag: Visual edit
- 14:31, 3 July 2019 diff hist +326 IR Thermal Microscope (QFI) →About: moves MIR wavelength range to Capabilities + some more info about that Tag: Visual edit
- 10:46, 26 June 2019 diff hist +310 Deep UV Optical Microscope (Olympus) detailed specs - first pass Tag: Visual edit
- 10:59, 24 June 2019 diff hist +30 m Tool List corrected photo chemicals link, moved inside table for easier location Tag: Visual edit
- 13:38, 18 June 2019 diff hist +146 IR Thermal Microscope (QFI) added microscope objectives & cameras Tag: Visual edit
- 12:26, 18 June 2019 diff hist +186 IR Thermal Microscope (QFI) link to python script Tag: Visual edit
- 14:23, 13 June 2019 diff hist +587 m Intellemetrics Laser Etch Monitor Procedure for Panasonic ICP Etchers added sub headings, moved recipe edit current Tag: Visual edit
- 08:42, 12 June 2019 diff hist +98 m Stepper 3 (ASML DUV) Indicated that FEM is in SOP Tag: Visual edit
- 00:05, 12 June 2019 diff hist +611 ASML Stepper 3 Standard Operating Procedure →Running a focus and/or exposure matrix: added schematics for die ordering Tag: Visual edit
- 23:56, 11 June 2019 diff hist +32 N File:Stepper 3 - FEM Matrix Schematic.png current
- 23:55, 11 June 2019 diff hist +40 N File:Stepper 3 - FEM Energy Meander Schematic.png current
- 16:46, 11 June 2019 diff hist +612 Oven 4 (Thermo-Fisher HeraTherm) added info, needs verification Tag: Visual edit: Switched
- 16:31, 11 June 2019 diff hist 0 File:Oven4.jpg John d uploaded a new version of File:Oven4.jpg current
- 11:02, 10 June 2019 diff hist +1 m FIJI - Microscope Measurement Tools switch image example current
- 11:01, 10 June 2019 diff hist 0 File:MicroscopeMeasurementTools - FIJI draw measurement - line.png John d uploaded a new version of File:MicroscopeMeasurementTools - FIJI draw measurement - line.png current
- 11:00, 10 June 2019 diff hist +425 FIJI - Microscope Measurement Tools imge of calibrations list Tag: Visual edit
- 10:59, 10 June 2019 diff hist +71 N File:FIJI MMT UCSB-Fork Choose Microscope Calibration drop down.png current
- 10:53, 10 June 2019 diff hist -299 Calculators + Utilities →Analysis Programs: link to FIJI MMT installge/usage page Tag: Visual edit
- 10:49, 10 June 2019 diff hist 0 File:FIJI Install Directory - MacOS.png John d uploaded a new version of File:FIJI Install Directory - MacOS.png current
- 10:48, 10 June 2019 diff hist 0 m FIJI - Microscope Measurement Tools →Installation: image size Tag: Visual edit
- 10:47, 10 June 2019 diff hist +12 m FIJI - Microscope Measurement Tools image broder Tag: Visual edit
- 10:46, 10 June 2019 diff hist +5 m FIJI - Microscope Measurement Tools →Installation: spacing Tag: Visual edit
- 10:45, 10 June 2019 diff hist +3 m FIJI - Microscope Measurement Tools →Installation: tabs images Tag: Visual edit: Switched
- 10:40, 10 June 2019 diff hist +1,338 FIJI - Microscope Measurement Tools inserted images, corrections Tag: Visual edit
- 10:33, 10 June 2019 diff hist +55 N File:MicroscopeMeasurementTools - FIJI draw measurement - line.png
- 10:06, 10 June 2019 diff hist +69 N File:MicroscopeMeasurementTools - FIJI Install - Mac Show Package Contents.png current
- 10:05, 10 June 2019 diff hist +61 N File:MicroscopeMeasurementTools - FIJI Install Directory - WinXP.jpg current
- 10:03, 10 June 2019 diff hist +59 N File:FIJI Install Directory - MacOS.png
- 23:26, 6 June 2019 diff hist +2,910 N FIJI - Microscope Measurement Tools Initial instruction, no links
- 22:14, 6 June 2019 diff hist +46 Optical Film Spectra + Optical Properties (Filmetrics F10-RT-UVX) Changed tool info box name
- 21:39, 6 June 2019 diff hist +4 Optical Film Spectra + Optical Properties (Filmetrics F10-RT-UVX) Added photo
- 21:38, 6 June 2019 diff hist +48 N File:Filmetrics-F10-RT Photo.jpeg Photo of Filmetrics f10-RT-UVX Spectrophotometer current
- 13:01, 6 June 2019 diff hist 0 m Intellemetrics Laser Etch Monitor Procedure for Panasonic ICP Etchers move image
- 12:59, 6 June 2019 diff hist +4 m Intellemetrics Laser Etch Monitor Procedure for Panasonic ICP Etchers temp: manual box set to 300px Tag: Visual edit
- 12:40, 6 June 2019 diff hist 0 File:Filmetrics F40-UV - spectrum curve fit 07.jpg John d uploaded a new version of File:Filmetrics F40-UV - spectrum curve fit 07.jpg current
- 13:50, 4 June 2019 diff hist +121 m ASML Stepper 3 - UCSB Test Reticles →Alignment Markers: MA6 mark: contact Brian/Demis for GDS Tag: Visual edit
- 11:04, 4 June 2019 diff hist +75 Tool List →Thermal Processing: linked to new Ovens Overview page, reorganized ovens under this, removed Strip Annealer link (removed from lab) Tag: Visual edit
- 10:59, 4 June 2019 diff hist -169 Ovens - Overview of All Lab Ovens removed Tool Template - too cluttered and useless
- 10:58, 4 June 2019 diff hist +1,411 Ovens - Overview of All Lab Ovens inital page with some info filled in/guessed at Tag: Visual edit
- 10:55, 4 June 2019 diff hist +2 High Temp Oven (Blue M) tool id included for SUM link
- 10:47, 4 June 2019 diff hist +46 N Oven 4 (Fisher) John d moved page Oven 4 (Fisher) to Oven 4 (Thermo-Fisher HeraTherm): changed out for new oven current
- 10:47, 4 June 2019 diff hist 0 m Oven 4 (Thermo-Fisher HeraTherm) John d moved page Oven 4 (Fisher) to Oven 4 (Thermo-Fisher HeraTherm): changed out for new oven
- 10:44, 4 June 2019 diff hist +169 N Ovens - Overview of All Lab Ovens created page, generic Tool info
- 10:25, 4 June 2019 diff hist +74 Tool List →Thermal Processing for Photolithography: link to new Ovens Overview page Tag: Visual edit
- 11:23, 31 May 2019 diff hist -14 Filmetrics F40-UV Microscope-Mounted removed "screenshots" section --> "Examples" Tag: Visual edit
- 11:23, 31 May 2019 diff hist +1,293 Filmetrics F40-UV Microscope-Mounted →Screenshots + Examples: updated examples & confirming removal of SiO2 on Pt Tag: Visual edit
- 11:13, 31 May 2019 diff hist +19 m Filmetrics F40-UV Quick Start formatting current Tag: Visual edit
- 11:11, 31 May 2019 diff hist +131 Filmetrics F40-UV Quick Start →Sample Measurement: clarified good/bad fit & contatc Ning/Demis for help Tag: Visual edit: Switched
- 23:14, 30 May 2019 diff hist 0 m Template:Tool Removed spaces from filename in example.
- 23:10, 30 May 2019 diff hist +34 m Template:Tool →Options: no spaces in Picture filename
- 23:08, 30 May 2019 diff hist +20 m Template:Tool Typo in recipes thermalmproc
- 23:06, 30 May 2019 diff hist 0 m Rapid Thermal Processor (SSI Solaris 150) Corrected typo in recipe link
- 23:04, 30 May 2019 diff hist +14 m Thermal Processing Recipes More accurate description of how partial pressure derived Tag: Visual edit
- 23:00, 30 May 2019 diff hist +93 m Thermal Processing Recipes →Simulation Parameters: clarified partial pressure is from curve fitting Tag: Visual edit
- 22:56, 30 May 2019 diff hist +63 Tube Furnace (Tystar 8300) →About: specified tube 2: unprocessed, Tube3 processed is ok Tag: Visual edit
- 14:01, 30 May 2019 diff hist 0 m Tool List →Optical/Electron Microscopy: moved SEMs to bottom Tag: Visual edit
- 11:28, 30 May 2019 diff hist +565 Probe Station & Curve Tracer link to Keithley manuals etc. Tag: Visual edit
- 14:08, 28 May 2019 diff hist +114 m Thermal Processing Recipes linked to tool pages, minor updates, added HeraTherm for wafer bonding Tag: Visual edit
- 14:05, 28 May 2019 diff hist +1 m Tool List →Thermal Processing: corrected linberg --> lindberg over Tag: Visual edit
- 13:20, 28 May 2019 diff hist +972 Frequently Asked Questions new chemicals: include substrate materiasl Tag: Visual edit
- 13:10, 28 May 2019 diff hist +41 Frequently Asked Questions reordered by importance Tag: Visual edit
- 13:06, 28 May 2019 diff hist +89 m Frequently Asked Questions →Publications acknowledging the Nanofab: minor Tag: Visual edit
- 13:04, 28 May 2019 diff hist +575 Frequently Asked Questions →Wifi Access in the Nanofab: link to iOS/Android Wifi Calling instructions Tag: Visual edit
- 12:56, 28 May 2019 diff hist -217 Template:Announcements deleted Lab Open fan exhaust maintenance
- 12:55, 28 May 2019 diff hist +335 Template:Announcements ASMl PM
- 12:30, 28 May 2019 diff hist +87 Thermal Processing Recipes anned RTP Solaris section Tag: Visual edit: Switched
- 12:28, 28 May 2019 diff hist +1,043 Frequently Asked Questions publications and Wifi access/calling Tag: Visual edit
- 12:13, 28 May 2019 diff hist +522 N Rapid Thermal Processor (SSI Solaris 150) inital page with `todo` listed
- 12:05, 28 May 2019 diff hist +48 Tool List →Thermal Processing: link to RTP Solaris 150 Tag: Visual edit
- 12:04, 28 May 2019 diff hist +1 m Template:News →New Rapid Thermal Annealer Installation: spelling
- 12:03, 28 May 2019 diff hist +320 Template:News SSI RTP installation
- 09:41, 24 May 2019 diff hist +125 MediaWiki:Sidebar added Main Page: Force Refresh, clarified Tempaltes
- 09:37, 24 May 2019 diff hist -19 Template:Announcements lab open, deleted exhaust shutdown
- 00:03, 24 May 2019 diff hist 0 m Filmetrics F40-UV Microscope-Mounted punctiation of tool type
- 21:47, 23 May 2019 diff hist -59 m Filmetrics F40-UV Microscope-Mounted tool descr. update
- 21:44, 23 May 2019 diff hist +11 m Filmetrics F40-UV Microscope-Mounted updated tool description
- 21:39, 23 May 2019 diff hist +583 Filmetrics F40-UV Microscope-Mounted →Screenshots + Examples: Added example of inspecting for SiO2 dry-etch completion. Tag: Visual edit
- 21:36, 23 May 2019 diff hist +72 N File:Filmetrics F40-UV - 2018-11-08 - SiO Etch 4m+4m+1m - Fully Removed.png current
- 21:33, 23 May 2019 diff hist +51 N File:Filmetrics F40-UV - SiO Etch 4m+4m - Incomplete Etch.png current
- 23:33, 21 May 2019 diff hist +10 m Template:Tool showing spaces in photo filename
- 23:31, 21 May 2019 diff hist +78 m Template:Tool updated description
- 23:27, 21 May 2019 diff hist +312 Filmetrics F40-UV Microscope-Mounted added measurement screenshot
- 23:24, 21 May 2019 diff hist +147 N File:Filmetrics F40-UV - Measurement screenshot on metal pad 01.PNG Filmetrics F40-UV - Measurement screenshot on metal pad 01, showing icroscope view and resulting spectrum meas. + curve fitting and film thickness. current
- 23:19, 21 May 2019 diff hist +301 Filmetrics F40-UV Microscope-Mounted added Tool template instead of simple photo
- 12:35, 21 May 2019 diff hist -182 m Template:Tool →Arguments with Specific Values: cleanup options lists
- 12:11, 21 May 2019 diff hist +216 m Template:Tool →Arguments with Specific Values: clearified lists
- 12:07, 21 May 2019 diff hist +1,120 Template:Tool more info on editing supervisor info.
- 11:57, 21 May 2019 diff hist +1,995 Template:Tool info on each argument.
- 11:32, 16 May 2019 diff hist +81 Intellemetrics Laser Etch Monitor Procedure for Panasonic ICP Etchers pic of manual box
- 11:32, 16 May 2019 diff hist 0 File:Panasonic ICP1 Manual Box - annot v2.png John d uploaded a new version of File:Panasonic ICP1 Manual Box - annot v2.png current
- 11:26, 16 May 2019 diff hist +61 N File:Panasonic ICP1 Manual Box - annot v2.png Pan ICP1 Manual Box annotated to show RF Off & Ethcing Select
- 20:14, 15 May 2019 diff hist 0 m Demis D. John →Tools
- 20:12, 15 May 2019 diff hist +77 Demis D. John →Tools: added laser monitors Tag: Visual edit
- 20:11, 15 May 2019 diff hist +117 Intellemetrics Laser Etch Monitor Procedure for Panasonic ICP Etchers Notice that training required. Tag: Visual edit
- 19:32, 15 May 2019 diff hist +102 Intellemetrics Laser Etch Monitor Procedure for Panasonic ICP Etchers Added to press Enable buttons on Manual box. Tag: Visual edit
- 19:05, 15 May 2019 diff hist -22 m Laser Etch Monitoring Monor removed Intellemetrics text die to Horiba and custom system. Tag: Visual edit
- 18:57, 15 May 2019 diff hist +70 N File:Intellemetrics LEP500 Photo.jpg Photo of Intellemetrics LEP 500 laser etch monitor on Panasonic ICP #2 current
- 18:56, 15 May 2019 diff hist +271 Laser Etch Monitoring Added Intellemetrics tool info
- 00:51, 15 May 2019 diff hist +101 m Intellemetrics Laser Etch Monitor Procedure for Panasonic ICP Etchers manual box : etch select Tag: Visual edit
- 00:47, 15 May 2019 diff hist +131 m Intellemetrics Laser Etch Monitor Procedure for Panasonic ICP Etchers HR Tag: Visual edit
- 00:47, 15 May 2019 diff hist +59 m Intellemetrics Laser Etch Monitor Procedure for Panasonic ICP Etchers name and date Tag: Visual edit
- 00:39, 15 May 2019 diff hist +4,472 N Intellemetrics Laser Etch Monitor Procedure for Panasonic ICP Etchers INitial procedures for ICP1 & 2 Tag: Visual edit
- 00:00, 15 May 2019 diff hist +1,028 Laser Etch Monitoring →Procedures: general procedure Tag: Visual edit
- 23:50, 14 May 2019 diff hist +568 UCSB NanoFab Microscope Training inserted images for focus on edge, shadow iris, focus knob with gradations
- 23:43, 14 May 2019 diff hist 0 File:Nikon OptiPhot 200 - 6224 - field iris.jpg John d uploaded a new version of File:Nikon OptiPhot 200 - 6224 - field iris.jpg current
- 23:42, 14 May 2019 diff hist +47 N File:Nikon OptiPhot 200 - 6224 - field iris.jpg microscope knob for field aperture/focus shadow
- 23:39, 14 May 2019 diff hist +39 N File:Nikon OptiPhot 200 - 6219 - focus knob - .jpg Microscope - Focus Knob with Gradations current
- 23:29, 14 May 2019 diff hist +38 N File:Microscope Training - focus on edge crop - .jpg microscope - focusing on edge of wafer current
- 23:07, 14 May 2019 diff hist +63 m Fluorescence Microscope (Olympus MX51) included fluor. in description, mentioned calibations locked Tag: Visual edit
- 23:04, 14 May 2019 diff hist +307 m Microscopes update LEXT location, other minor updates