Difference between revisions of "Tool List"

From UCSB Nanofab Wiki
Jump to: navigation, search
(Inspection, Test and Characterization)
(Vacuum Deposition)
Line 38: Line 38:
 
* [[Sputter 5 (Lesker AXXIS)]]
 
* [[Sputter 5 (Lesker AXXIS)]]
 
|width=400|
 
|width=400|
* [[PECVD 1 (PlasmTherm 790)]]
+
* [[PECVD 1 (PlasmaTherm 790)]]
 
* [[PECVD 2 (Advanced Vacuum)]]
 
* [[PECVD 2 (Advanced Vacuum)]]
 
* [[Thermal Evap 1]]
 
* [[Thermal Evap 1]]

Revision as of 13:48, 28 June 2012

Lithography

Vacuum Deposition

Dry Etch

Wet Processing

Thermal Processing

Packaging

Inspection, Test and Characterization