Difference between revisions of "Tool List"

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(Wet Processing)
(Lithography)
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* [[Stepper 3 (ASML)]]
 
* [[Stepper 3 (ASML)]]
 
* [[E-Beam Lithography System (JEOL JBX-6300FS)]]
 
* [[E-Beam Lithography System (JEOL JBX-6300FS)]]
* [[AFM-based Nanolithography Tool (NanoMan)]]
 
 
* [[Nano-Imprint Tool (Nanonex NX2000)]]
 
* [[Nano-Imprint Tool (Nanonex NX2000)]]
 
* [[Contact Aligner (SUSS MA-6)]]
 
* [[Contact Aligner (SUSS MA-6)]]

Revision as of 09:41, 10 July 2012

Lithography

Vacuum Deposition

Dry Etch

Wet Processing

Thermal Processing

Packaging

Inspection, Test and Characterization