Difference between revisions of "Tool List"

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(Dry Etch)
(Inspection, Test and Characterization)
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* [[Field Emission SEM 1 (FEI Sirion)]]
 
* [[Field Emission SEM 1 (FEI Sirion)]]
* [[Field Emission SEM 2 (JEOL 7600F]]
+
* [[Field Emission SEM 2 (JEOL 7600F)]]
 
* [[Step Profile (Dektak IIA)]]
 
* [[Step Profile (Dektak IIA)]]
 
* [[Step Profilometer (Dektak 6M)]]
 
* [[Step Profilometer (Dektak 6M)]]

Revision as of 07:27, 1 July 2012

Lithography

Vacuum Deposition

Dry Etch

Wet Processing

Thermal Processing

Packaging

Inspection, Test and Characterization