Difference between revisions of "Tool List"

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(Dry Etch)
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* [[Stepper 1 (GCA 6300)]]
 
* [[Stepper 1 (GCA 6300)]]
* [[Stepper 2 (AutoStep 200)]]
+
* [[Stepper 2 (GCA AutoStep 200)]]
 
* [[Stepper 3 (ASML DUV)]]
 
* [[Stepper 3 (ASML DUV)]]
 
* [[E-Beam Lithography System (JEOL JBX-6300FS)]]
 
* [[E-Beam Lithography System (JEOL JBX-6300FS)]]

Revision as of 09:44, 1 April 2014

Lithography

Vacuum Deposition

Dry Etch

Wet Processing

Thermal Processing

Packaging

Inspection, Test and Characterization