All public logs
Jump to navigation
Jump to search
Combined display of all available logs of UCSB Nanofab Wiki. You can narrow down the view by selecting a log type, the username (case-sensitive), or the affected page (also case-sensitive).
(newest | oldest) View (newer 500 | older 500) (20 | 50 | 100 | 250 | 500)- 11:29, 20 April 2022 Pakala talk contribs created page File:Unaxis 01 45D 002.jpg
- 11:29, 20 April 2022 Pakala talk contribs uploaded File:Unaxis 01 45D 002.jpg
- 11:29, 20 April 2022 Pakala talk contribs created page File:Unaxis 01 CS 001.jpg
- 11:29, 20 April 2022 Pakala talk contribs uploaded File:Unaxis 01 CS 001.jpg
- 11:17, 20 April 2022 Pakala talk contribs created page File:Oxford 60c 06 45D 002.jpg
- 11:17, 20 April 2022 Pakala talk contribs uploaded File:Oxford 60c 06 45D 002.jpg
- 11:16, 20 April 2022 Pakala talk contribs created page File:Oxford 60c 06 CS 005.jpg
- 11:16, 20 April 2022 Pakala talk contribs uploaded File:Oxford 60c 06 CS 005.jpg
- 11:12, 20 April 2022 Pakala talk contribs created page File:SiO2 Fl 03 CS 004.jpg
- 11:12, 20 April 2022 Pakala talk contribs uploaded File:SiO2 Fl 03 CS 004.jpg
- 12:56, 19 April 2022 Pakala talk contribs created page File:SiO2 Fl 06 CS 002.jpg
- 12:56, 19 April 2022 Pakala talk contribs uploaded File:SiO2 Fl 06 CS 002.jpg
- 12:56, 19 April 2022 Pakala talk contribs created page File:SiO2 Fl 06 45D 002.jpg
- 12:56, 19 April 2022 Pakala talk contribs uploaded File:SiO2 Fl 06 45D 002.jpg
- 12:48, 19 April 2022 Pakala talk contribs created page File:Oxford 60c 05 CS 002.jpg
- 12:48, 19 April 2022 Pakala talk contribs uploaded File:Oxford 60c 05 CS 002.jpg
- 12:48, 19 April 2022 Pakala talk contribs created page File:Oxford 60c 05 45D 004.jpg
- 12:48, 19 April 2022 Pakala talk contribs uploaded File:Oxford 60c 05 45D 004.jpg
- 13:08, 15 April 2022 John d talk contribs created page Unaxis VLR Etch - Process Control Data (pasted table from Oxford ICP) Tag: Visual edit: Switched
- 10:30, 14 April 2022 Pakala talk contribs created page File:ICP2 004 CS 003.jpg
- 10:30, 14 April 2022 Pakala talk contribs uploaded File:ICP2 004 CS 003.jpg
- 10:29, 14 April 2022 Pakala talk contribs created page File:ICP2 004 45D 001.jpg
- 10:29, 14 April 2022 Pakala talk contribs uploaded File:ICP2 004 45D 001.jpg
- 10:25, 14 April 2022 Pakala talk contribs created page File:ICP1 004 CS 001.jpg
- 10:25, 14 April 2022 Pakala talk contribs uploaded File:ICP1 004 CS 001.jpg
- 10:25, 14 April 2022 Pakala talk contribs created page File:ICP1 004 45D 004.jpg
- 10:25, 14 April 2022 Pakala talk contribs uploaded File:ICP1 004 45D 004.jpg
- 08:23, 11 April 2022 User account Stevenwman talk contribs was created
- 21:08, 7 April 2022 John d talk contribs created page ASML Stepper 3 - Job Creator (initial description of usage and caveats) Tag: Visual edit
- 10:14, 4 April 2022 Thibeault talk contribs created page Michael Barreraz (Created page with "{{staff|{{PAGENAME}} |position = Equipment Engineer |room = 1109F |phone = (805) 893- 4147 |email = mikebarreraz@ece.ucsb.edu }} = About = . . . =Tools= {{PAGENAME}} is th...")
- 12:51, 31 March 2022 John d talk contribs uploaded a new version of File:IBD SiO-FP - long 1100nm - Reflectivity Spectrum (EMpy).png (fixed "110nm" to "1100nm")
- 12:49, 31 March 2022 John d talk contribs created page IBD: Calibrating Optical Thickness (initial version, full method described, images inserted.) Tag: Visual edit
- 12:43, 31 March 2022 John d talk contribs created page File:IBD 9-period DBR - Reflectivity Spectrum (EMpy).png
- 12:43, 31 March 2022 John d talk contribs uploaded File:IBD 9-period DBR - Reflectivity Spectrum (EMpy).png
- 12:36, 31 March 2022 John d talk contribs created page File:IBD SiO-FP - long 1100nm - Reflectivity Spectrum (EMpy).png
- 12:36, 31 March 2022 John d talk contribs uploaded File:IBD SiO-FP - long 1100nm - Reflectivity Spectrum (EMpy).png
- 08:45, 31 March 2022 Pakala talk contribs created page File:Oxford 60c 04 CS 004.jpg
- 08:45, 31 March 2022 Pakala talk contribs uploaded File:Oxford 60c 04 CS 004.jpg
- 08:44, 31 March 2022 Pakala talk contribs created page File:Oxford 60c 04 45D 001.jpg
- 08:44, 31 March 2022 Pakala talk contribs uploaded File:Oxford 60c 04 45D 001.jpg
- 10:26, 30 March 2022 Pakala talk contribs created page File:SiO2 Fl 05 CS 002.jpg
- 10:26, 30 March 2022 Pakala talk contribs uploaded File:SiO2 Fl 05 CS 002.jpg
- 10:25, 30 March 2022 Pakala talk contribs created page File:SiO2 Fl 03 45D 002.jpg
- 10:25, 30 March 2022 Pakala talk contribs uploaded File:SiO2 Fl 03 45D 002.jpg
- 10:16, 30 March 2022 Pakala talk contribs created page File:ICP2 03 45D 002.jpg
- 10:16, 30 March 2022 Pakala talk contribs uploaded File:ICP2 03 45D 002.jpg
- 10:15, 30 March 2022 Pakala talk contribs created page File:ICP2 03 CS 003.jpg
- 10:15, 30 March 2022 Pakala talk contribs uploaded File:ICP2 03 CS 003.jpg
- 10:02, 30 March 2022 Pakala talk contribs created page File:ICP1 03 CS 005.jpg
- 10:02, 30 March 2022 Pakala talk contribs uploaded File:ICP1 03 CS 005.jpg
- 10:01, 30 March 2022 Pakala talk contribs created page File:ICP1 03 45D 002.jpg
- 10:01, 30 March 2022 Pakala talk contribs uploaded File:ICP1 03 45D 002.jpg
- 11:28, 22 March 2022 Sawyer l talk contribs created page File:EB2 SOP Rev D.pdf
- 11:28, 22 March 2022 Sawyer l talk contribs uploaded File:EB2 SOP Rev D.pdf
- 13:48, 21 March 2022 Sawyer l talk contribs created page File:ADT SOP Rev E.pdf
- 13:48, 21 March 2022 Sawyer l talk contribs uploaded File:ADT SOP Rev E.pdf
- 16:53, 17 March 2022 Reynolds t talk contribs deleted page Goniometer (Rame-Hart A-100) (Equipment is not available anymore: removed by Tom Reynolds)
- 14:40, 16 March 2022 User account Lloyd b talk contribs was created
- 10:42, 9 March 2022 Pakala talk contribs created page File:ICP2 02 CS 004.jpg
- 10:42, 9 March 2022 Pakala talk contribs uploaded File:ICP2 02 CS 004.jpg
- 10:41, 9 March 2022 Pakala talk contribs created page File:ICP2 02 45D 001.jpg
- 10:41, 9 March 2022 Pakala talk contribs uploaded File:ICP2 02 45D 001.jpg
- 10:38, 9 March 2022 Pakala talk contribs created page File:ICP1 02 CS 002.jpg
- 10:38, 9 March 2022 Pakala talk contribs uploaded File:ICP1 02 CS 002.jpg
- 10:38, 9 March 2022 Pakala talk contribs created page File:ICP1 02 45D 001.jpg
- 10:38, 9 March 2022 Pakala talk contribs uploaded File:ICP1 02 45D 001.jpg
- 10:34, 9 March 2022 Pakala talk contribs created page File:SiO2 Fl 04 CS 005.jpg
- 10:34, 9 March 2022 Pakala talk contribs uploaded File:SiO2 Fl 04 CS 005.jpg
- 10:33, 9 March 2022 Pakala talk contribs created page File:SiO2 FL 04 45D 001.jpg
- 10:33, 9 March 2022 Pakala talk contribs uploaded File:SiO2 FL 04 45D 001.jpg
- 12:57, 8 March 2022 John d talk contribs changed group membership for Millerski w from (none) to staff (new staff added)
- 12:09, 8 March 2022 Pakala talk contribs created page File:ICP2 01 CS 007.jpg
- 12:09, 8 March 2022 Pakala talk contribs uploaded File:ICP2 01 CS 007.jpg
- 12:08, 8 March 2022 Pakala talk contribs created page File:ICP2 01 45D 002.jpg
- 12:08, 8 March 2022 Pakala talk contribs uploaded File:ICP2 01 45D 002.jpg
- 12:04, 8 March 2022 Pakala talk contribs created page File:ICP1 01 CS 003.jpg
- 12:04, 8 March 2022 Pakala talk contribs uploaded File:ICP1 01 CS 003.jpg
- 12:04, 8 March 2022 Pakala talk contribs created page File:ICP1 01 45D 001.jpg
- 12:04, 8 March 2022 Pakala talk contribs uploaded File:ICP1 01 45D 001.jpg
- 11:55, 8 March 2022 Pakala talk contribs created page File:SiO2 Fl 03 CS 001.jpg
- 11:55, 8 March 2022 Pakala talk contribs uploaded File:SiO2 Fl 03 CS 001.jpg
- 11:55, 8 March 2022 Pakala talk contribs created page File:SiO2 Fl 03 45D 001.jpg
- 11:55, 8 March 2022 Pakala talk contribs uploaded File:SiO2 Fl 03 45D 001.jpg
- 11:37, 8 March 2022 User account Millerski w talk contribs was created
- 12:28, 3 March 2022 John d talk contribs moved page PECVD2 Recipes to OLD - PECVD2 Recipes without leaving a redirect (this page is not linked anywhere, looks like 2014 data only)
- 10:57, 2 March 2022 Pakala talk contribs created page File:SiO2 Fl 01 45D 002.jpg
- 10:57, 2 March 2022 Pakala talk contribs uploaded File:SiO2 Fl 01 45D 002.jpg
- 10:55, 2 March 2022 Pakala talk contribs created page File:SiO2 Fl 02 CS 001.jpg
- 10:55, 2 March 2022 Pakala talk contribs uploaded File:SiO2 Fl 02 CS 001.jpg
- 10:55, 2 March 2022 Pakala talk contribs created page File:SiO2 Fl 02 45D 001.jpg
- 10:55, 2 March 2022 Pakala talk contribs uploaded File:SiO2 Fl 02 45D 001.jpg
- 15:06, 1 March 2022 John d talk contribs moved page Wafer Cleaver (PELCO LatticeAx) to Wafer Cleaver (PELCO Flip-Scribe) without leaving a redirect (wrong name)
- 09:35, 1 March 2022 John d talk contribs created page File:LatticeAx.jpg (Image of PELCO LAtticeAx tool)
- 09:35, 1 March 2022 John d talk contribs uploaded File:LatticeAx.jpg (Image of PELCO LAtticeAx tool)
- 09:27, 1 March 2022 John d talk contribs created page Wafer Cleaver (PELCO LatticeAx) (new tool page)
- 09:07, 22 February 2022 Lingg talk contribs created page File:EB-1 operation instructions rev2.pdf
- 09:07, 22 February 2022 Lingg talk contribs uploaded File:EB-1 operation instructions rev2.pdf
- 08:33, 15 February 2022 Pakala talk contribs created page File:Oxford Cal 01 26 22 New002 CS 002.jpg
- 08:33, 15 February 2022 Pakala talk contribs uploaded File:Oxford Cal 01 26 22 New002 CS 002.jpg
- 08:10, 15 February 2022 Pakala talk contribs created page File:Oxford Cal 01 26 22 031New CS 001.jpg
- 08:10, 15 February 2022 Pakala talk contribs uploaded File:Oxford Cal 01 26 22 031New CS 001.jpg
- 08:07, 15 February 2022 Pakala talk contribs created page File:Oxford Cal 01 26 22 003New 45d 001.jpg
- 08:07, 15 February 2022 Pakala talk contribs uploaded File:Oxford Cal 01 26 22 003New 45d 001.jpg
- 15:18, 14 February 2022 User account Etrageser talk contribs was created
- 11:48, 14 February 2022 John d talk contribs moved page File:ASML Reticle Programming Params - MyReticleBarCode v1.xlsx to File:ASML Reticle Programming Params - MASKJAN2020 v1.xlsx (Rename to include reticle barcode in filename)
- 11:47, 14 February 2022 John d talk contribs uploaded a new version of File:ASML Reticle Programming Params - MyReticleBarCode v1.xlsx (More comments to help users fill this out.)
- 13:22, 11 February 2022 John d talk contribs created page MediaWiki:Deletereason-dropdown (added common NanoFab reasons for deletion)
- 13:20, 11 February 2022 John d talk contribs deleted page Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Florine etch of the underneath layer) (pasted data into https://wiki.nanotech.ucsb.edu/wiki/Test_Data_of_etching_SiO2_with_CHF3/CF4-ICP1)
- 13:12, 11 February 2022 John d talk contribs deleted page SiO2 Etch Test using CF4/CHF3 (old FL-ICP data - consolidated into new page "https://wiki.nanotech.ucsb.edu/wiki/Test_Data_of_Etching_SiO2_with_CHF3/CF4-Fluorine_ICP_Etcher")
- 11:09, 8 February 2022 Pakala talk contribs created page File:Oxford Cal 1 26 22 003 CS007.jpg
- 11:09, 8 February 2022 Pakala talk contribs uploaded File:Oxford Cal 1 26 22 003 CS007.jpg
- 11:05, 8 February 2022 Pakala talk contribs created page File:Oxford Cal 1 26 22 001 CS 004.jpg
- 11:05, 8 February 2022 Pakala talk contribs uploaded File:Oxford Cal 1 26 22 001 CS 004.jpg
- 11:03, 8 February 2022 Pakala talk contribs created page File:Oxford Cal 1 26 22 003 45D 002.jpg
- 11:03, 8 February 2022 Pakala talk contribs uploaded File:Oxford Cal 1 26 22 003 45D 002.jpg
- 10:59, 8 February 2022 Pakala talk contribs created page File:Oxford Cal 1 26 22 001 45D 005.jpg
- 10:59, 8 February 2022 Pakala talk contribs uploaded File:Oxford Cal 1 26 22 001 45D 005.jpg
- 10:49, 3 February 2022 John d talk contribs moved page REMOVED - Optical Profilometer - White-Light/Phase-Shift Interference (Filmetrics Profilm3D) to UNAVAILABLE - Optical Profilometer - White-Light/Phase-Shift Interference (Filmetrics Profilm3D) without leaving a redirect (change title to "unavailable")
- 10:46, 3 February 2022 John d talk contribs moved page Optical Profilometer - White-Light/Phase-Shift Interference (Filmetrics Profilm3D) to REMOVED - Optical Profilometer - White-Light/Phase-Shift Interference (Filmetrics Profilm3D) without leaving a redirect (tool is removed from lab)
- 14:09, 2 February 2022 Sawyer l talk contribs created page File:MLA150 SOP Rev K (LS).pdf
- 14:09, 2 February 2022 Sawyer l talk contribs uploaded File:MLA150 SOP Rev K (LS).pdf
- 12:09, 1 February 2022 Pakala talk contribs created page File:Oxford Etch InP Cal SEM - quarter wafer - CS 005.jpg
- 12:09, 1 February 2022 Pakala talk contribs uploaded File:Oxford Etch InP Cal SEM - quarter wafer - CS 005.jpg
- 11:35, 1 February 2022 Pakala talk contribs created page File:Oxford InP Cal - SEM 45D 001.jpg
- 11:35, 1 February 2022 Pakala talk contribs uploaded File:Oxford InP Cal - SEM 45D 001.jpg
- 11:24, 1 February 2022 John d talk contribs changed group membership for Pakala from staff to staff (temporary, until 10:24, 1 August 2022)
- 11:24, 1 February 2022 John d talk contribs changed group membership for Pakala from (none) to staff (NanoFab undergrad staff)
- 11:23, 1 February 2022 User account Pakala talk contribs was created
- 09:37, 1 February 2022 John d talk contribs created page File:Vernier Template.gds (Vernier Registration/Alignment Test structure for lithography. Designed by Demis D. John, 2008.)
- 09:37, 1 February 2022 John d talk contribs uploaded File:Vernier Template.gds (Vernier Registration/Alignment Test structure for lithography. Designed by Demis D. John, 2008.)
- 16:44, 26 January 2022 Freeborn d talk contribs uploaded a new version of File:EB -3 OPERATING INSTRUCTIONS docx.pdf
- 23:03, 13 January 2022 John d talk contribs created page File:2022-01-12 Oxford InP Ridge Wiki Post - Cal03.pdf (Oxford ICP Etch Cals03)
- 23:03, 13 January 2022 John d talk contribs uploaded File:2022-01-12 Oxford InP Ridge Wiki Post - Cal03.pdf (Oxford ICP Etch Cals03)
- 22:55, 13 January 2022 John d talk contribs created page File:2022-01-12 Oxford InP Ridge Wiki Post - Cal02.pdf (Oxford ICP Cal SEMs)
- 22:55, 13 January 2022 John d talk contribs uploaded File:2022-01-12 Oxford InP Ridge Wiki Post - Cal02.pdf (Oxford ICP Cal SEMs)
- 22:51, 13 January 2022 John d talk contribs created page File:2022-01-11 Oxford InP Ridge Wiki Post - Cal01.pdf (Oxford ICP Etch Cal SEMs)
- 22:51, 13 January 2022 John d talk contribs uploaded File:2022-01-11 Oxford InP Ridge Wiki Post - Cal01.pdf (Oxford ICP Etch Cal SEMs)
- 14:21, 13 January 2022 John d talk contribs created page Oxford ICP Etcher - Process Control Data (pasted ICP2 data table) Tag: Visual edit: Switched
- 08:43, 7 January 2022 John d talk contribs created page Video Training - Introduction (Internal) (general methods - Demis) Tag: Visual edit
- 11:48, 6 January 2022 Freeborn d talk contribs created page File:EB -3 OPERATING INSTRUCTIONS docx.pdf
- 11:48, 6 January 2022 Freeborn d talk contribs uploaded File:EB -3 OPERATING INSTRUCTIONS docx.pdf
- 11:15, 5 January 2022 Sawyer l talk contribs created page File:MLA150 SOP Rev J (LS).docx.pdf
- 11:15, 5 January 2022 Sawyer l talk contribs uploaded File:MLA150 SOP Rev J (LS).docx.pdf
- 12:50, 4 January 2022 John d talk contribs created page File:ADT Dicing - Blade Exposure diagram.png
- 12:50, 4 January 2022 John d talk contribs uploaded File:ADT Dicing - Blade Exposure diagram.png
- 10:14, 4 January 2022 Bosch t talk contribs deleted page File:Oxford Plasma Pro Cobra 300 Operating Instructions.docx (Wouldn't open this file format)
- 10:12, 4 January 2022 Bosch t talk contribs created page File:Oxford Cobra 300 SOP v2021-12-14.pdf
- 10:12, 4 January 2022 Bosch t talk contribs uploaded File:Oxford Cobra 300 SOP v2021-12-14.pdf
- 09:41, 4 January 2022 Bosch t talk contribs created page File:Oxford Plasma Pro Cobra 300 Operating Instructions.docx
- 09:41, 4 January 2022 Bosch t talk contribs uploaded File:Oxford Plasma Pro Cobra 300 Operating Instructions.docx
- 15:21, 3 January 2022 User account Sunghoonkim talk contribs was created
- 10:58, 3 January 2022 Sawyer l talk contribs created page File:EB2 SOP Rev C.pdf
- 10:58, 3 January 2022 Sawyer l talk contribs uploaded File:EB2 SOP Rev C.pdf
- 10:24, 3 January 2022 Sawyer l talk contribs created page File:EVG Plasma Activation SOP Rev C.pdf
- 10:24, 3 January 2022 Sawyer l talk contribs uploaded File:EVG Plasma Activation SOP Rev C.pdf
- 16:10, 21 December 2021 John d talk contribs uploaded a new version of File:Out of Focus Exposures - Carl Peterson (Krisnamoorthy Group, 2021-12).png (Added scale bars 200µm)
- 11:50, 21 December 2021 John d talk contribs created page File:Out of Focus Exposures - Carl Peterson (Krisnamoorthy Group, 2021-12).png
- 11:50, 21 December 2021 John d talk contribs uploaded File:Out of Focus Exposures - Carl Peterson (Krisnamoorthy Group, 2021-12).png
- 14:26, 16 December 2021 User account Yjchoi talk contribs was created
- 07:35, 15 December 2021 John d talk contribs created page Old Deposition Data - 2021-12-15 (Created page with "OLD Data: Copied on 2021-12-14 {{recipes|Vacuum Deposition}} =PECVD 1 (PlasmaTherm 790)= ====Historical Particulate Data==== *[https://docs.google.com/spreadsheets/d...") Tag: Visual edit: Switched
- 07:31, 15 December 2021 John d talk contribs created page Deposition Data - temporary 2021-12-15 (pasted old data)
- 12:16, 8 December 2021 John d talk contribs created page MA6 Backside Alignment - Allowed Mark Locations (100-mm BSA chuck with cutouts measurements) Tag: Visual edit
- 12:15, 8 December 2021 John d talk contribs created page File:MA-6 4-inch BSA chuck - 2631 - measurements.jpg
- 12:15, 8 December 2021 John d talk contribs uploaded File:MA-6 4-inch BSA chuck - 2631 - measurements.jpg
- 09:57, 30 November 2021 Freeborn d talk contribs created page File:Cleaning Rules for Fluorine ICP Etch tool.pdf
- 09:57, 30 November 2021 Freeborn d talk contribs uploaded File:Cleaning Rules for Fluorine ICP Etch tool.pdf
- 09:51, 30 November 2021 Freeborn d talk contribs created page File:Editing a Recipe on Plasma.pdf
- 09:51, 30 November 2021 Freeborn d talk contribs uploaded File:Editing a Recipe on Plasma.pdf
- 11:22, 24 November 2021 John d talk contribs created page Photolithography - Manual Edge-Bead Removal Techniques (added razor, EBR100 and lithographic methods) Tag: Visual edit
- 11:12, 24 November 2021 John d talk contribs moved page Photolithography - HMDS Process for Improving Adhesion to Photolithography - Improving Adhesion Photoresist Adhesion without leaving a redirect (more generalized page title)
- 11:11, 24 November 2021 John d talk contribs created page Photolithography - HMDS Process for Improving Adhesion (added Underlayers for PR adhesion) Tag: Visual edit
- 13:45, 22 November 2021 John d talk contribs created page Old Deposition Data - NastaziaM 2021-11-22 (Created page with "Testing") Tag: Visual edit
- 13:39, 22 November 2021 John d talk contribs changed group membership for Nastazia from (none) to administrator (temporary, until 13:39, 22 November 2022) and staff (temporary, until 13:39, 22 November 2022)
- 15:07, 18 November 2021 John d talk contribs created page File:Surfscan Low-Particle Example - G2.png
- 15:07, 18 November 2021 John d talk contribs uploaded File:Surfscan Low-Particle Example - G2.png
- 15:05, 18 November 2021 John d talk contribs created page File:Surfscan Low-Particle Example - G4.png
- 15:05, 18 November 2021 John d talk contribs uploaded File:Surfscan Low-Particle Example - G4.png
- 15:26, 9 November 2021 Ningcao talk contribs created page SiO2 Etch Test using CF4/CHF3 (add a table) Tag: Visual edit
- 15:17, 9 November 2021 Ningcao talk contribs created page File:SOFL0103.pdf
- 15:17, 9 November 2021 Ningcao talk contribs uploaded File:SOFL0103.pdf
- 13:29, 9 November 2021 Ningcao talk contribs created page SiO2 Etching Test using CF4/CHF3 (add a table) Tag: Visual edit
- 17:59, 8 November 2021 Ningcao talk contribs created page File:IP210212.pdf
- 17:59, 8 November 2021 Ningcao talk contribs uploaded File:IP210212.pdf
- 17:56, 8 November 2021 Ningcao talk contribs created page File:IP210201.pdf
- 17:56, 8 November 2021 Ningcao talk contribs uploaded File:IP210201.pdf
- 08:51, 1 November 2021 John d talk contribs uploaded a new version of File:MLA Quarter-Wafer Alignment.jpg (Moved left AlMk to left corner, instead of along edge. User JeurgenM from FP said this is better.)
- 12:15, 22 October 2021 John d talk contribs created page Template:StaffInfoSecondary DJ (Copy of NickL's "StaffInfoSecondary" template)
- 12:13, 22 October 2021 John d talk contribs created page Template:Tool2 DJ (copy of NickL's "Tool2" template)
- 12:12, 22 October 2021 John d talk contribs created page Template:StaffInfo DJ (copy of original StaffInfo tempalte)
- 11:49, 12 October 2021 John d talk contribs created page File:Bay 4 toxic Corrosive - wafer sample holders - IMG 4243.jpg
- 11:49, 12 October 2021 John d talk contribs uploaded File:Bay 4 toxic Corrosive - wafer sample holders - IMG 4243.jpg
- 13:59, 8 October 2021 John d talk contribs created page File:Oxford Etcher - InP Ridge Etch using Oxford PlasmaPro 100 Cobra - 2021-09-08.pdf (Oxford Etcher - InP Ridge Etch using Oxford PlasmaPro 100 Cobra - 2021-09-08 Ning Cao, 2021-09-08)
- 13:59, 8 October 2021 John d talk contribs uploaded File:Oxford Etcher - InP Ridge Etch using Oxford PlasmaPro 100 Cobra - 2021-09-08.pdf (Oxford Etcher - InP Ridge Etch using Oxford PlasmaPro 100 Cobra - 2021-09-08 Ning Cao, 2021-09-08)
- 13:55, 8 October 2021 John d talk contribs created page File:Oxford Etcher - InP Grating Etch at 20 C - Oxford Cobra 300 2021-08-26.pdf (Oxford Etcher - InP Grating Etch at 20 C - Oxford Cobra 300 2021-08-26 Ning Cao)
- 13:55, 8 October 2021 John d talk contribs uploaded File:Oxford Etcher - InP Grating Etch at 20 C - Oxford Cobra 300 2021-08-26.pdf (Oxford Etcher - InP Grating Etch at 20 C - Oxford Cobra 300 2021-08-26 Ning Cao)
- 09:41, 5 October 2021 User account Cpivard talk contribs was created
- 10:42, 29 September 2021 John d talk contribs uploaded a new version of File:OxfordPlasmaPro.jpg (shrunk to 400px)
- 10:41, 29 September 2021 John d talk contribs created page File:OxfordPlasmaPro.jpg (Photo from User Manual)
- 10:41, 29 September 2021 John d talk contribs uploaded File:OxfordPlasmaPro.jpg (Photo from User Manual)
- 19:16, 28 September 2021 John d talk contribs created page File:MLA Quarter-Wafer Alignment.jpg
- 19:16, 28 September 2021 John d talk contribs uploaded File:MLA Quarter-Wafer Alignment.jpg
- 17:23, 21 September 2021 John d talk contribs created page File:CAD Tutorial for ASML Reticle v1 GDS.gds
- 17:23, 21 September 2021 John d talk contribs uploaded File:CAD Tutorial for ASML Reticle v1 GDS.gds
- 10:01, 14 September 2021 Thibeault talk contribs created page Bill Millerski (Add Page for Bill Millerski)
- 08:13, 11 September 2021 Sawyer l talk contribs deleted page GCA Autostep200 - Startup-Shutdown Procedure (Procedure was updated and is now a linked doc on the Wiki page)
- 11:28, 10 September 2021 Sawyer l talk contribs created page File:ICP -1 Rules & Important Notes.pdf
- 11:28, 10 September 2021 Sawyer l talk contribs uploaded File:ICP -1 Rules & Important Notes.pdf
- 11:27, 10 September 2021 Sawyer l talk contribs created page File:ICP -1 Gas Change N2-He-N2.pdf
- 11:27, 10 September 2021 Sawyer l talk contribs uploaded File:ICP -1 Gas Change N2-He-N2.pdf
- 11:27, 10 September 2021 Sawyer l talk contribs created page File:ICP -1 Gas Change CHF3-Ar-CHF3.pdf
- 11:27, 10 September 2021 Sawyer l talk contribs uploaded File:ICP -1 Gas Change CHF3-Ar-CHF3.pdf
- 11:26, 10 September 2021 Sawyer l talk contribs created page File:ICP -1 Gas Change CF4-SF6-CF4.pdf
- 11:26, 10 September 2021 Sawyer l talk contribs uploaded File:ICP -1 Gas Change CF4-SF6-CF4.pdf
- 15:38, 9 September 2021 John d talk contribs created page File:GCA Local Alignment Mark Dotted.gds
- 15:38, 9 September 2021 John d talk contribs uploaded File:GCA Local Alignment Mark Dotted.gds
- 15:36, 9 September 2021 John d talk contribs created page File:GCA Local Alignment Mark.gds
- 15:36, 9 September 2021 John d talk contribs uploaded File:GCA Local Alignment Mark.gds
- 15:27, 9 September 2021 John d talk contribs created page File:GCA Global Mark.gds
- 15:27, 9 September 2021 John d talk contribs uploaded File:GCA Global Mark.gds
- 12:39, 9 September 2021 Sawyer l talk contribs created page File:ADT SOP Rev D.pdf
- 12:39, 9 September 2021 Sawyer l talk contribs uploaded File:ADT SOP Rev D.pdf
- 13:38, 3 September 2021 John d talk contribs created page Oxford ICP Etcher (PlasmaPro 100 Cobra) (first attempt at page)
- 12:55, 3 September 2021 John d talk contribs uploaded a new version of File:Annotated PR etch - Om1000 03 - ARC + Cl + PR etch v1.jpg (v2 - indicated when PR was fully removed)
- 22:05, 31 August 2021 Nplaviola talk contribs created page Template:StaffDirectory (Created page with "{{#switch: {{{character|}}} | Tony Bosch = {{#switch: {{{trait|}}} | phone = (805) 893-3486 | email = bosch@ece.ucsb.edu }} | Ning Cao = {{#switch: {{{trait|}}} | phon...")
- 14:58, 31 August 2021 Thibeault talk contribs created page Template:News 20210831 (Created page with "<startfeed /> <!---feedBurner name="UCSBNanofab-NewsFeed" /--> <!-- Description of the RSS feed --> ''News from the U.C. Santa Barbara Nanofabrication Facility.'' <!-- these c...")
- 13:01, 27 August 2021 John d talk contribs changed group membership for Nplaviola from administrator (temporary, until 21:59, 23 August 2022) to administrator (temporary, until 13:01, 27 August 2022) and interface administrator (temporary, until 13:01, 27 August 2022) (wiki editing)
- 12:58, 27 August 2021 Jcrode talk contribs changed group membership for Dread from staff and administrator to staff, administrator and interface administrator
- 12:58, 27 August 2021 Jcrode talk contribs changed group membership for John d from bureaucrat, staff and administrator to bureaucrat, staff, administrator and interface administrator
- 12:54, 27 August 2021 Jcrode talk contribs changed group membership for Jcrode from bureaucrat and administrator to bureaucrat, administrator and interface administrator
- 21:58, 26 August 2021 Nplaviola talk contribs deleted page Template:StaffInfo2 (testing page)
- 21:59, 23 August 2021 John d talk contribs changed group membership for Nplaviola from (none) to administrator (temporary, until 21:59, 23 August 2022) (update StaffInfo & Tool templates to allow multiple supervisors)
- 14:08, 23 August 2021 Sawyer l talk contribs uploaded a new version of File:ADT Dicing Saw SOP Rev C.pdf
- 09:00, 20 August 2021 Sawyer l talk contribs uploaded File:ADT Dicing Saw SOP Rev C.pdf
- 14:08, 11 August 2021 Sawyer l talk contribs uploaded a new version of File:MA-6 Exp Mode Visual Aid.pdf
- 14:05, 11 August 2021 Sawyer l talk contribs uploaded File:BA6 SOP Rev A.pdf
- 18:45, 10 August 2021 Ningcao talk contribs uploaded File:I2210411.pdf
- 14:17, 10 August 2021 Sawyer l talk contribs uploaded File:ADT Dicing Saw SOP Rev B.pdf
- 19:24, 9 August 2021 Ningcao talk contribs uploaded File:I2210508.pdf
- 14:15, 4 August 2021 John d talk contribs uploaded File:GCA Stepper MaskPlate Master-DarkField 5x.gds (GCA Stepper (Autostep 200 or 6300) Photomask template. Darkfield, at Reticle-scale (5x magnification already applied). Insert your design as Instances with 5x up-scaling applied.)
- 11:59, 30 July 2021 User account Nastazia talk contribs was created
- 13:46, 23 July 2021 User account Ypetraitis talk contribs was created
- 18:27, 22 July 2021 Ningcao talk contribs uploaded File:I2210308.pdf
- 08:33, 20 July 2021 Sawyer l talk contribs uploaded File:Autostep 200 Restart SOP June 2021.pdf
- 13:18, 19 July 2021 Sawyer l talk contribs uploaded File:MLA150 Substrate Template Rules.pdf
- 10:46, 13 July 2021 John d talk contribs uploaded File:200um square v1.gds (TESTING only - please delte)
- 10:22, 13 July 2021 Sawyer l talk contribs uploaded File:MA-6 SOP Rev D.pdf
- 11:36, 2 July 2021 John d talk contribs uploaded File:RechargeApp - 02 - F+A auto v2.png
- 11:27, 2 July 2021 John d talk contribs uploaded File:RechargeApp - 01 - line items for other charges.png
- 14:02, 24 June 2021 Thibeault talk contribs uploaded a new version of File:User Protocols Coronavirus 2020-09-14-1.pdf
- 14:40, 18 June 2021 User account Taylor.morrison talk contribs was created
- 12:01, 15 June 2021 Thibeault talk contribs uploaded a new version of File:User Protocols Coronavirus 2020-09-14-1.pdf (update with reduced restrictions)
- 08:32, 27 May 2021 John d talk contribs uploaded a new version of File:UCSB-Facilities-Use-Agreement.pdf (Rev. 4.2021)
- 08:32, 27 May 2021 John d talk contribs uploaded a new version of File:UCSB Service Agreement.pdf (Rev. 4-2021)
- 13:09, 26 May 2021 Sawyer l talk contribs uploaded File:MLA150 SOP Rev I (LS).pdf
- 19:06, 19 May 2021 Ningcao talk contribs uploaded File:I2210214.pdf
- 15:57, 17 May 2021 John d talk contribs uploaded a new version of File:Nanofabrication Facility Project Description.xlsx (Corrected link to services)
- 15:19, 13 May 2021 Thibeault talk contribs uploaded a new version of File:User Protocols Coronavirus 2020-09-14-1.pdf
- 11:36, 11 May 2021 John d talk contribs uploaded File:AlliedPolisher10-1110.jpg (Photo of Allied Polisher model 10-1110 ; Initial photo - cropped and color boosted)
- 21:33, 5 May 2021 John d talk contribs uploaded File:Board - Search Cards - Select User.png
- 21:30, 5 May 2021 John d talk contribs uploaded File:Trello - Board - Search Cards.png
- 21:27, 5 May 2021 John d talk contribs uploaded File:Trello - Board - Show Menu.png
- 10:31, 19 April 2021 Sawyer l talk contribs uploaded File:Tencor FLX SOP Rev B.pdf
- 11:14, 12 April 2021 John d talk contribs uploaded a new version of File:ASML Reticle Programming Params - MyReticleBarCode v1.xlsx (mention optional params)
- 17:54, 8 April 2021 Ningcao talk contribs uploaded File:Holography Process for 1D-lines and 2D-dots (ARC-11 & THMR-IP3600HP-D)-updated-4-8-2021.pdf
- 09:15, 31 March 2021 John d talk contribs uploaded File:KLayout - Non-Orthogonal Arrays.png
- 16:40, 16 March 2021 User account Francisco e talk contribs was created
- 08:31, 16 March 2021 Sawyer l talk contribs uploaded File:MLA150 SOP Rev H (LS).pdf
- 11:28, 15 March 2021 Sawyer l talk contribs uploaded File:RIE 3 SOP Rev D.pdf
- 08:10, 12 March 2021 Dread talk contribs deleted page File:Raith Velion and Ion Beam Lithography.pdf
- 07:56, 12 March 2021 Dread talk contribs uploaded File:RaithVelion.jpg
- 10:29, 12 February 2021 Sawyer l talk contribs uploaded File:MLA150 SOP Rev G (LS).pdf
- 18:32, 3 February 2021 Ningcao talk contribs uploaded File:IP210119.pdf
- 18:31, 3 February 2021 Ningcao talk contribs uploaded File:IP210117.pdf
- 18:27, 2 February 2021 Ningcao talk contribs uploaded File:FE210206.pdf
- 10:13, 1 February 2021 John d talk contribs uploaded a new version of File:UCSB Service Agreement.pdf (removes Calli Price's name, instead just says "UCSB contracts")
- 07:50, 20 January 2021 John d talk contribs uploaded a new version of File:ASML Reticle Programming Params - MyReticleBarCode v1.xlsx (Added comments to make some sections clearer.)
- 18:21, 12 January 2021 John d talk contribs uploaded File:Photo - GoPro Black 8 and Headstrap.png
- 19:41, 8 January 2021 Ningcao talk contribs uploaded File:I2210102.pdf
- 19:37, 8 January 2021 Ningcao talk contribs uploaded File:I1210113.pdf
- 09:06, 9 December 2020 John d talk contribs uploaded a new version of File:Attachment A - UCSB Master Facilities Use Agreement Labs.pdf (Correction - removed FUA page. rev. 6/2019)
- 17:07, 8 December 2020 John d talk contribs uploaded File:CAD Tutorial for ASML Reticle v1 - screenshot Reticle Layout cell.png
- 07:49, 8 December 2020 John d talk contribs uploaded a new version of File:Attachment A - UCSB Master Facilities Use Agreement Labs.pdf (rev 9.2020 : replaces "NNIN" language)
- 18:01, 30 November 2020 User account Riapf talk contribs was created
- 12:18, 30 November 2020 Sawyer l talk contribs uploaded File:MA-6 SOP Rev C.pdf
- 12:18, 30 November 2020 Sawyer l talk contribs deleted page File:MA-6 SOP Rev C Int & PC Change.pdf (Temp SOP for intensity issue)
- 21:57, 14 November 2020 John d talk contribs moved page Maskless Aligner Recipes to Direct-Write Lithography Recipes (new title and catergory on SignupMonkey "Direct write litho")
- 15:19, 12 November 2020 John d talk contribs uploaded File:MLA150 SOP.pdf (MLA150 (Heidelberg HIMT) Maskless Aligner - Operating Procedure - Rev E (Lee & Demis))
- 12:13, 9 November 2020 Thibeault talk contribs uploaded a new version of File:COVID19 ESB Building User Self Admittance Protocol v2.pdf (Add New Jacket policy)
- 12:12, 9 November 2020 Thibeault talk contribs uploaded a new version of File:COVID Entering the CR and Gowning Protocols-USE THIS ONE v2.pdf (Occupancy change)
- 12:09, 9 November 2020 Thibeault talk contribs uploaded a new version of File:User Protocols Coronavirus 2020-09-14-1.pdf (Protocol changes to reflect occupancy, training, other small items.)
- 18:06, 4 November 2020 John d talk contribs uploaded File:MLA150 Spatial Light Modulator Description.png
- 08:12, 29 October 2020 Sawyer l talk contribs uploaded File:MA-6 SOP Rev C Int & PC Change.pdf
- 16:57, 26 October 2020 John d talk contribs deleted page MLA150 - Standard Operating Procedure (repalced with PDF version)
- 18:14, 25 October 2020 User account Rienzi talk contribs was created
- 13:53, 16 October 2020 User account Choquer m talk contribs was created
- 08:39, 14 October 2020 John d talk contribs uploaded File:DSEIII.jpg (Phoot of Plasma-Therm DSE-iii in Bay 2)
- 16:28, 2 October 2020 John d talk contribs uploaded File:MLA150 Heidelberg Bay 6 Photo.jpg (Photo of Heidelberg MLA 150 in Bay 6 after install)
- 09:22, 2 October 2020 Sawyer l talk contribs uploaded File:YES SOP Rev C.pdf
- 17:51, 18 September 2020 John d talk contribs uploaded File:Az p4620 photoresist data package.pdf (info on Az 4620 photoresist, spin curves etc.)
- 11:13, 17 September 2020 Thibeault talk contribs uploaded a new version of File:User Protocols Coronavirus 2020-09-14-1.pdf
- 19:41, 14 September 2020 John d talk contribs uploaded File:COVID Entering the CR and Gowning Protocols-USE THIS ONE v2.pdf (COVID-19 Entering_the_CR_and_Gowning_Protocols-USE_THIS_ONE_v2.pdf self-entry protocol once inside the building)
- 19:39, 14 September 2020 John d talk contribs uploaded File:COVID19 ESB Building User Self Admittance Protocol v2.pdf (COVID-19 ESB_Building_User_Self_Admittance_Protocol_v2.pdf self-entry doc for users, building entry)
- 19:37, 14 September 2020 John d talk contribs uploaded File:User Protocols Coronavirus 2020-09-14-1.pdf (COVID-19 User Protocols Coronavirus 2020-09-14-1.pdf Full document of protocols, for lab users)
- 23:40, 13 September 2020 John d talk contribs deleted page Other Dry Etcher Recipes (not used, instead use "Other Dry Etching Recipes")
- 23:24, 13 September 2020 John d talk contribs moved page MLA150 Recipes to Maskless Aligner Recipes without leaving a redirect (higher level category)
- 10:45, 13 September 2020 Sawyer l talk contribs uploaded File:RIE 2 SOP Rev B.pdf
- 14:27, 1 September 2020 John d talk contribs uploaded a new version of File:UCSB Service Agreement.pdf (corrected URLs, General UCSB Master Agreement (not specific to NanoFab))
- 14:21, 1 September 2020 John d talk contribs uploaded a new version of File:Facility-Use-MOU---Intercampus-UC-User.pdf (deleted the Attachment A page)
- 18:54, 30 August 2020 Ningcao talk contribs uploaded File:IP020104.pdf
- 14:22, 19 August 2020 John d talk contribs uploaded File:Attachment A - UCSB Master Facilities Use Agreement Labs.pdf (Facilities/Service Agreement - attachment listing UCSB facilities covered)
- 17:18, 10 August 2020 Ningcao talk contribs uploaded File:I2200203.pdf
- 07:21, 9 August 2020 John d talk contribs uploaded File:Python Keithley I-V Sweep v3 icon.png
- 07:19, 9 August 2020 John d talk contribs uploaded File:Python Spyder - Run Button.png
- 07:18, 9 August 2020 John d talk contribs uploaded File:Python Keithely I-V - user settings lines.png
- 07:16, 9 August 2020 John d talk contribs uploaded File:Python Spyder 3.7 (anacoda) icon.png
- 11:55, 7 August 2020 Sawyer l talk contribs uploaded File:MJB 3 IR Camera SOP Rev B.pdf
- 11:51, 7 August 2020 Sawyer l talk contribs uploaded a new version of File:MJB 3 IR Camera SOP.pdf
- 11:51, 7 August 2020 Sawyer l talk contribs restored page File:MJB 3 IR Camera SOP.pdf (1 revision and 1 file)
- 11:49, 7 August 2020 Sawyer l talk contribs deleted page File:MJB 3 IR Camera SOP.pdf (Uploading new file due to small edit)
- 09:55, 1 August 2020 Sawyer l talk contribs uploaded File:RIE 3 SOP Rev C.pdf
- 15:36, 31 July 2020 Ningcao talk contribs uploaded File:InP Etching result-CAIBE.pdf
- 15:28, 31 July 2020 Ningcao talk contribs deleted page File:InP Etching result-CAIBE.pdf
- 15:25, 31 July 2020 Ningcao talk contribs uploaded File:InP Etching result-CAIBE.pdf
- 15:25, 31 July 2020 Ningcao talk contribs deleted page File:InP Etching result-CAIBE.docx
- 15:10, 31 July 2020 Ningcao talk contribs uploaded File:InP Etching result-CAIBE.docx
- 09:18, 27 July 2020 John d talk contribs uploaded File:Goniometer - Reflective Sample Illustration.png
- 09:08, 27 July 2020 John d talk contribs uploaded File:Goniometer (Rame-Hart A-100) - Steps for Measuring v1.png
- 08:55, 27 July 2020 John d talk contribs uploaded File:Goniometer (Rame-Hart A-100) - Annotated Photo.png
- 13:35, 26 July 2020 John d talk contribs moved page Goniometer to Goniometer (Rame-Hart A-100) (added mfg./model into name, like other tools)
- 09:53, 16 July 2020 Sawyer l talk contribs uploaded File:MJB 3 IR Camera SOP.pdf
- 09:51, 16 July 2020 Sawyer l talk contribs uploaded File:MJB 3 IR Alignment Mode Conversion.pdf
- 09:55, 14 July 2020 John d talk contribs uploaded File:Forward Delete Button.png
- 09:52, 14 July 2020 John d talk contribs uploaded File:GoPro HERO8 Black Instructions - Mac save to computer 2.png
- 13:52, 4 July 2020 John d talk contribs uploaded File:GoPro Hero8 Black - Video record button - IMG 2764.png
- 13:46, 4 July 2020 John d talk contribs uploaded File:GoPro Hero8 Black - Presets 3 - settings IMG 2768.png
- 13:45, 4 July 2020 John d talk contribs uploaded File:GoPro Hero8 Black - Presets 2 - various IMG 2767.jpg
- 13:44, 4 July 2020 John d talk contribs uploaded File:GoPro Hero8 Black - Presets 1 - IMG 2765.jpg
- 13:44, 4 July 2020 John d talk contribs uploaded File:GoPro Hero8 Black - Choose video - IMG 2771.jpg
- 13:40, 4 July 2020 John d talk contribs moved page File:Enable preview 4 - live view IMG 2763.png to File:GoPro Hero8 Black - Enable preview 4 - live view IMG 2763.png without leaving a redirect (added gopro name for searching)
- 13:39, 4 July 2020 John d talk contribs uploaded File:Enable preview 4 - live view IMG 2763.png
- 13:37, 4 July 2020 John d talk contribs uploaded File:GoPro Hero8 Black - Enable preview 3 - join wifi network IMG 2770.jpg
- 13:37, 4 July 2020 John d talk contribs uploaded File:Gopro Hero8 Black - Enable preview 2 - use wifi IMG 2769.jpg
- 13:35, 4 July 2020 John d talk contribs uploaded File:GoPro Hero8 Black - Enable preview 1 - IMG 2766.jpg
- 20:02, 2 July 2020 John d talk contribs uploaded File:GoPro H8b training - Smartphone App.jpg
- 23:36, 11 June 2020 John d talk contribs changed group membership for Dread from (none) to administrator and staff (new NanoFab staff)
- 12:01, 9 June 2020 John d talk contribs uploaded a new version of File:SiO2 Etch, Ru HardMask - Fluorine ICP Etch Process - Ning Cao 2019-06.pdf (updated TOC and heading styles)
- 11:56, 9 June 2020 John d talk contribs uploaded a new version of File:SiO2 Etch, Ru HardMask - Fluorine ICP Etch Process - Ning Cao 2019-06.pdf (added TOC, minor formatting)
- 11:29, 9 June 2020 John d talk contribs uploaded File:SiO2 Etch, Ru HardMask - Fluorine ICP Etch Process - Ning Cao 2019-06.pdf (Procedure for SiO2 deep etching on Plasma-Therm SLR Fluorine Etcher, using Sputtered Ruthenium hardmask)
- 16:08, 4 June 2020 User account Dread talk contribs was created
- 12:58, 30 May 2020 John d talk contribs uploaded File:ASML IQC Focus Mean Correction screenshot.jpg
- 10:10, 27 May 2020 Biljana talk contribs uploaded File:SOP for Advanced Vacuum PECVD.pdf (5-27-2020 Biljana Stamenic)
- 09:36, 27 May 2020 Biljana talk contribs uploaded File:Advanced Vacuum PECVD.pdf
- 21:27, 4 May 2020 John d talk contribs changed group membership for Nplaviola from administrator to administrator (temporary, until 21:27, 4 May 2021)
- 21:27, 4 May 2020 John d talk contribs changed group membership for Nplaviola from (none) to administrator (to edit CSS style info)
- 21:16, 4 May 2020 User account Nplaviola talk contribs was created
- 12:26, 22 April 2020 John d talk contribs uploaded File:UCSB Service Agreement.pdf (UCSB Service Agreement, for Remote Fabrication Services section of Nanotech website.)
- 10:59, 21 April 2020 Biljana talk contribs uploaded a new version of File:Adv. PECVD2-STD SiO2.xlsx
- 10:08, 21 April 2020 Biljana talk contribs uploaded File:Adv. PECVD2- STD LSNitride2.xlsx
- 10:05, 21 April 2020 Biljana talk contribs uploaded File:Adv. PECVD2- STD Nitride2.xlsx
- 09:54, 21 April 2020 Biljana talk contribs uploaded File:Adv. PECVD2-STD SiO2.xlsx
- 14:36, 15 April 2020 Biljana talk contribs uploaded File:Single centered mask-Piece 1st litho AUTOSTEP 200.pptx
- 14:15, 15 April 2020 Biljana talk contribs uploaded File:Single centerd mask- Piece 1st litho AUTOSTEP 200-PIECES.pptx
- 14:15, 15 April 2020 Biljana talk contribs uploaded File:Single centered mask-Piece 2nd litho AUTOSTEP 200.pptx
- 14:14, 15 April 2020 Biljana talk contribs uploaded File:4 Quads mask plate Piece - 2nd litho AUTOSTEP 200.pptx
- 10:34, 10 April 2020 John d talk contribs deleted page COVID RSS (tested - not useful)
- 10:01, 8 April 2020 Biljana talk contribs uploaded File:AUTOSTEP 200-PIECES 1st litho BL and BR orientation.pptx
- 20:32, 7 April 2020 Biljana talk contribs uploaded File:AUTOSTEP 200-PIECES instruction 6-20-19.pptx
- 15:26, 7 April 2020 Biljana talk contribs uploaded File:Mask plate-Sign convention.png
- 15:22, 7 April 2020 Biljana talk contribs uploaded File:Alignment key offset Sign Convention.png
- 14:32, 7 April 2020 Biljana talk contribs uploaded File:PECVD2 photo for cleaning.png
- 14:24, 7 April 2020 Biljana talk contribs uploaded File:PECVD2 clean.png
- 14:21, 7 April 2020 Biljana talk contribs uploaded File:AdvPECVD2LSNdep2.jpg
- 14:14, 7 April 2020 Biljana talk contribs uploaded File:PECVD1-cleaning.png
- 11:23, 7 April 2020 Biljana talk contribs uploaded File:Glossary.docx
- 09:58, 7 April 2020 Biljana talk contribs deleted page File:Area from.png
- 09:50, 7 April 2020 Biljana talk contribs uploaded File:PECVD1 particulates in 2019.jpg
- 08:21, 7 April 2020 Biljana talk contribs uploaded File:UCSBTEST2 .png
- 08:19, 7 April 2020 Biljana talk contribs uploaded File:UCSBTEST1.png
- 11:24, 6 April 2020 Biljana talk contribs uploaded File:Area from 1.png
- 10:37, 6 April 2020 Biljana talk contribs uploaded File:Area from Equals Max size.png
- 10:30, 6 April 2020 Biljana talk contribs uploaded File:LPD Ranges.png
- 10:29, 6 April 2020 Biljana talk contribs uploaded File:Area from.png
- 17:17, 1 April 2020 Biljana talk contribs uploaded File:Recipe parameters.jpg
- 09:33, 1 April 2020 Biljana talk contribs uploaded File:UCSBTEST2.jpg
- 08:54, 1 April 2020 Biljana talk contribs uploaded File:UCSBTEST1Gain4.jpg (scan for gain4)
- 16:39, 30 March 2020 Biljana talk contribs uploaded File:PECVD.docx
- 12:02, 30 March 2020 Biljana talk contribs uploaded File:Unaxis SOP 3-30-2020.docx
- 10:15, 27 March 2020 Biljana talk contribs uploaded File:Unaxis SOP 3-27-2020.pdf
- 10:00, 27 March 2020 Biljana talk contribs uploaded File:Unaxis SOP 3-12-2020.docx
- 15:09, 26 March 2020 Biljana talk contribs uploaded File:Autostep 200 panel door.png
- 14:53, 26 March 2020 John d talk contribs uploaded File:ASML Reticle Programming Params - DEM-2020-03 v1.xlsx (CAD Tutorial - example programming spreadsheet for ASML Stepper)
- 14:49, 26 March 2020 John d talk contribs deleted page File:CAD Tutorial - ASML Reticle Programming Params - DEMISJAN2020 v1.xlsx (wrong file name)
- 14:48, 26 March 2020 John d talk contribs uploaded File:Example Mask order form (UCSB ASML 5500) - DEM-2020-03.pdf (CAD Tutorial - Example Mask order form (UCSB ASML 5500) - DEM-2020-03)
- 14:47, 26 March 2020 John d talk contribs deleted page File:Example Mask order form (UCSB ASML 5500) - DemisDJohn Template.pdf (wrong name)
- 14:46, 26 March 2020 John d talk contribs uploaded File:Example Mask order form (UCSB ASML 5500) - DemisDJohn Template.pdf (CAD Tutorial - example order for for photomask manufacturer)
- 14:27, 26 March 2020 John d talk contribs uploaded File:DEMISJAN2020 - Reticle Layout v1.GDS (CAD Tutorial - final GDS CAD file for submission to phootmask manufacturer)
- 12:31, 26 March 2020 John d talk contribs uploaded File:CAD Tutorial - ASML Reticle Programming Params - DEMISJAN2020 v1.xlsx (CAD Tutorial - ASML Reticle Programming Params spreadsheet with coordinates)
- 12:25, 26 March 2020 John d talk contribs uploaded File:CAD Tutorial for ASML Reticle v1 - screenshot Device Layout cell.png
- 11:50, 26 March 2020 John d talk contribs uploaded File:CAD Tutorial for ASML Reticle v1.OAS (Mask layout CAD tutorial for ASML Stepper reticle)
- 13:20, 24 March 2020 Biljana talk contribs uploaded File:RMS control.png
- 13:17, 24 March 2020 Biljana talk contribs uploaded File:Autostep stage control.png
- 13:15, 24 March 2020 Biljana talk contribs uploaded File:Autostep DSW.png
- 09:03, 24 March 2020 Biljana talk contribs uploaded File:Autostep main computer switch.png
- 09:01, 24 March 2020 Biljana talk contribs uploaded File:Autostep main computer -1.png
- 08:56, 24 March 2020 Biljana talk contribs uploaded File:Autostep Cabinet .png
- 08:48, 24 March 2020 Biljana talk contribs uploaded File:Computer-2 -smart set.png
- 08:35, 24 March 2020 Biljana talk contribs uploaded File:Lower keyboard.png
- 08:00, 24 March 2020 Biljana talk contribs uploaded File:Autostep 200 Upper keyboard.png
- 14:30, 23 March 2020 Biljana talk contribs uploaded File:Autostep200 Training Manual 3-23-2020.pdf
- 14:27, 23 March 2020 John d talk contribs uploaded File:Editing Tutorials - List of Uploaded Files - click the file title to get file page.png
- 14:11, 23 March 2020 Biljana talk contribs uploaded File:GCA 6300 Training Manual- 3-23-2020.pdf
- 14:05, 23 March 2020 Biljana talk contribs uploaded File:GCA 6300 Training Manual-3-23-2020.pdf
- 13:01, 23 March 2020 Freeborn d talk contribs uploaded File:EB-1 operation instructions.pdf (EB#1 operation instructions)
- 12:30, 23 March 2020 Freeborn d talk contribs uploaded File:Ebeam 1 operating instructions.pdf (New operating instructions.)
- 09:40, 23 March 2020 Biljana talk contribs uploaded File:GCA 6300 Stepper Training Manual- Full version 2020.pdf
- 09:00, 23 March 2020 Biljana talk contribs uploaded File:GCA 6300 Stepper Training Manual- Full version 2019.pdf
- 08:14, 23 March 2020 Biljana talk contribs uploaded File:GCA 6300 Reboot computers.docx
- 10:13, 18 March 2020 Lingg talk contribs deleted page Solaris SSI RTP (Duplicate)
- 13:13, 17 March 2020 John d talk contribs uploaded File:Facility-Use-MOU---Intercampus-UC-User.pdf (Intercampus U.C. User - Facility Use Memorandum of Understanding, for "Getting Lab Access")
- 13:04, 17 March 2020 John d talk contribs uploaded File:UCSB-Facilities-Use-Blanket-Waiver.pdf (Facilities Use - Blanket Waiver for "Getting Lab Access")
- 13:03, 17 March 2020 John d talk contribs uploaded File:UCSB-Facilities-Use-Agreement.pdf (Facilities Use Agreement, for "Getting Lab Access")
- 12:59, 17 March 2020 John d talk contribs uploaded File:SampleCOI.pdf (Sample Certificate of Insurance, for "Getting Access to Lab")
- 12:51, 17 March 2020 John d talk contribs uploaded File:Nanofabrication Facility Project Description.xlsx (NanoFab Remote Work "Project Description Form". Remote work users must fill this out and email to the appropriate NanoFab staff.)
- 11:12, 10 March 2020 Lingg talk contribs uploaded File:RTP-Solaris-150.jpg
- 11:08, 10 March 2020 Lingg talk contribs deleted page File:Photo of Solaris RTP.jpg (delete)
- 11:41, 9 March 2020 Lingg talk contribs uploaded File:Photo of Solaris RTP.jpg
- 17:33, 5 March 2020 Sawyer l talk contribs uploaded File:RIE 3 SOP Rev B.pdf
- 12:16, 3 March 2020 Ningcao talk contribs uploaded File:I1200415.pdf
- 15:41, 28 February 2020 Ningcao talk contribs uploaded File:I1200301.pdf
- 17:45, 24 February 2020 Sawyer l talk contribs uploaded File:IMG 5385.JPG
- 17:45, 24 February 2020 Sawyer l talk contribs uploaded File:IMG 5388.JPG
- 12:23, 24 February 2020 Bosch t talk contribs uploaded File:TBD.jpg
- 16:42, 21 February 2020 Thibeault talk contribs uploaded File:2000 pixel mkids.pdf
- 11:36, 17 February 2020 User account Nv1235377 talk contribs was created
- 18:06, 28 January 2020 John d talk contribs uploaded File:Microscope Training - UScope F-stop example annotated 1000px.png
- 15:36, 23 January 2020 Ningcao talk contribs uploaded File:I1200211.pdf
- 15:57, 17 January 2020 Ningcao talk contribs uploaded File:I1200107.pdf
- 15:46, 17 January 2020 Ningcao talk contribs uploaded File:I2200122.pdf
- 09:01, 7 January 2020 Sawyer l talk contribs uploaded File:EB2 SOP Rev B.pdf
- 12:50, 3 December 2019 John d talk contribs uploaded File:Olympus - BHM Microscope - Instruction Manual.pdf (Instruction user Manual for Olympus BMH* microscopes, scanned at Nanofab)
- 12:47, 3 December 2019 John d talk contribs uploaded File:Microscope 01 Olympus BHMJL crop.png
- 15:24, 27 November 2019 Thibeault talk contribs uploaded File:TechTalk20191205.jpg
- 01:43, 8 November 2019 John d talk contribs uploaded a new version of File:Digidat-Toppan Mask order form (UCSB ASML 5500).docx (added barcode in instructions)
- 01:37, 8 November 2019 John d talk contribs uploaded a new version of File:ASML Reticle Programming Params - MyReticleBarCode v1.xlsx (retry scrolling)
- 01:35, 8 November 2019 John d talk contribs uploaded a new version of File:ASML Reticle Programming Params - MyReticleBarCode v1.xlsx (scrolled properly, indicated scale of coordinates are 1x wafer-scale)
- 10:17, 5 November 2019 Sawyer l talk contribs uploaded File:YES SOP Rev B.pdf
- 15:16, 30 October 2019 Thibeault talk contribs uploaded File:N-Polar HEMTs mm-Wave.pdf
- 09:04, 24 October 2019 Thibeault talk contribs uploaded File:Bowers Group Highlights 2019.pdf
- 15:06, 21 October 2019 Thibeault talk contribs uploaded File:IR Imaging and Laser Sensing.pdf
- 17:40, 11 October 2019 John d talk contribs uploaded File:Visual Editor - switch to source mode - pen button.png
- 17:32, 11 October 2019 John d talk contribs uploaded a new version of File:Editing Tutorials 4b- file info right click URL.png (cropped)
- 17:23, 11 October 2019 John d talk contribs uploaded File:Editing Tutorials - 5- insert link into page.png
- 17:21, 11 October 2019 John d talk contribs uploaded File:Editing Tutorials 4b- file info right click URL.png
- 17:20, 11 October 2019 John d talk contribs uploaded File:Editing Tutorials 3c- modifications etc..png
- 14:14, 11 October 2019 Thibeault talk contribs uploaded File:On Chip Hybrid Silicon Quantum Dot Comb Laser With 14 Error Free Channels.pdf
- 14:00, 11 October 2019 Thibeault talk contribs uploaded File:Tunable Antenna-Coupled Intersubband Terahertz (TACIT) Mixer.pdf
- 15:17, 10 October 2019 Thibeault talk contribs uploaded File:Memory-Based Neuromorphic Hardware for Advanced Neural Network Models.pdf
- 14:15, 9 October 2019 Sawyer l talk contribs uploaded File:EVG Plasma Activation Recipe Copying.pdf
- 14:13, 9 October 2019 Sawyer l talk contribs uploaded File:EVG Plasma Activation SOP Rev B.pdf
- 10:09, 9 October 2019 Thibeault talk contribs uploaded File:High Power PICs for Free Space.pdf
- 16:40, 8 October 2019 John d talk contribs uploaded File:Editing Tutorials - Upload PDF - 3b- filename descript upload button.png
- 16:36, 8 October 2019 John d talk contribs uploaded File:Editing Tutorials - Upload PDF - 2- choose file.png
- 16:35, 8 October 2019 John d talk contribs uploaded File:Editing Tutorials - Upload PDF - 1- upload file.png
- 15:16, 8 October 2019 Thibeault talk contribs uploaded File:TechTalk20191010.jpg
- 12:11, 4 October 2019 John d talk contribs uploaded File:194 Ru Etch O2,Cl2.pdf (BillM - Pan2 Ru etch 2019-09-19)
- 11:59, 4 October 2019 John d talk contribs deleted page File:194 Ru Etch O2,Cl2.pdf (for tutorial)
- 11:58, 4 October 2019 John d talk contribs uploaded File:194 Ru Etch O2,Cl2.pdf (Pan2 Ru Etch (Bill Mitchell 2019-09-19))
- 09:39, 25 September 2019 John d talk contribs moved page Plamsa Clean (YES EcoClean) to Plasma Clean (YES EcoClean) without leaving a redirect (spelling)
- 07:58, 25 September 2019 Sawyer l talk contribs uploaded File:YES SOP.pdf
- 11:25, 20 September 2019 Sawyer l talk contribs uploaded File:EB2 SOP.pdf
- 17:28, 18 September 2019 Thibeault talk contribs uploaded File:YES-SPR220vsTemp.jpg
- 17:26, 18 September 2019 Thibeault talk contribs uploaded File:YES150CResists.jpg
- 20:55, 16 September 2019 Thibeault talk contribs uploaded File:TechTalk20190926.jpg
- 16:09, 16 September 2019 Thibeault talk contribs uploaded File:THz Transistors and Template Assisted Selective Epitaxy.pdf
- 16:08, 16 September 2019 Thibeault talk contribs uploaded File:Raith Velion and Ion Beam Lithography.pdf
- 14:37, 16 September 2019 Sawyer l talk contribs uploaded File:MJB 3 SOP.pdf
- 14:36, 16 September 2019 Sawyer l talk contribs deleted page File:MJB 3 Quick Start.pdf (No longer needed)
- 16:08, 11 September 2019 Sawyer l talk contribs uploaded File:MA-6 Exp Mode Visual Aid.pdf
- 16:05, 11 September 2019 Sawyer l talk contribs uploaded File:MA-6 SOP Rev B.pdf
- 15:24, 11 September 2019 Sawyer l talk contribs uploaded File:DUV Flood Expose SOP.pdf
- 15:20, 11 September 2019 Sawyer l talk contribs uploaded File:MJB 3 Quick Start.pdf
- 15:17, 11 September 2019 Sawyer l talk contribs uploaded File:MVD Standard Recipes.pdf
- 15:16, 11 September 2019 Sawyer l talk contribs uploaded File:MVD SOP.pdf
- 15:05, 11 September 2019 Sawyer l talk contribs uploaded File:RIE 3 SOP.pdf
- 15:01, 11 September 2019 Sawyer l talk contribs uploaded File:RIE 2 SOP.pdf
- 14:49, 11 September 2019 Sawyer l talk contribs uploaded File:Dis 0.2mbar Line2.JPG
- 14:48, 11 September 2019 Sawyer l talk contribs uploaded File:ExSitu 0.8mbar Line2.JPG
- 14:48, 11 September 2019 Sawyer l talk contribs uploaded File:ExSitu 0.8mbar.JPG
- 14:48, 11 September 2019 Sawyer l talk contribs uploaded File:ExSitu 0.4mbar Line2.JPG
- 14:48, 11 September 2019 Sawyer l talk contribs uploaded File:ExSitu 0.4mbar.JPG
- 14:33, 11 September 2019 Sawyer l talk contribs uploaded File:EVG Plasma Activation SOP.pdf
- 14:38, 9 September 2019 Ningcao talk contribs uploaded File:CompleteEASE Manual.pdf
- 11:24, 9 September 2019 John d talk contribs uploaded File:Annotated PR etch - Om1000 03 - ARC + Cl + PR etch v1.jpg
- 11:18, 9 September 2019 John d talk contribs uploaded File:ARC etch + Cr etch - UV6 at 2krpm (900nm) survived v2 - screenshot.jpg
- 21:42, 8 September 2019 Thibeault talk contribs uploaded File:TechTalk20190912.jpg
- 21:39, 8 September 2019 Thibeault talk contribs uploaded File:High Performance Lasers on Silicon Slides.pdf
- 21:37, 8 September 2019 Thibeault talk contribs uploaded File:Semiconductor Supermirrors.pdf
- 22:30, 6 September 2019 John d talk contribs uploaded File:PMGI+UV6 lift-off SEM - 2017-06-30 DJ.png
- 16:33, 5 September 2019 Thibeault talk contribs deleted page File:36-Medium-stress SiNx using Unaxis ICP deposition tool-a.pdf
- 16:33, 5 September 2019 Thibeault talk contribs deleted page File:40-Low-stress SiNx at 50 C using Unaxis ICP deposition tool.pdf