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This special page shows all uploaded files.
| Date | Name | Thumbnail | Size | User | Description | Versions |
|---|---|---|---|---|---|---|
| 10:52, 22 August 2023 | ICP -1 Standard Etch Recipes.pdf (file) |  |
474 KB | Sawyer l | 2 | |
| 10:59, 16 August 2023 | IMG 0554.jpg (file) |  |
2.85 MB | Hopkins a | 1 | |
| 06:32, 3 August 2023 | ADT SOP Rev I.pdf (file) | |
2.85 MB | Sawyer l | 1 | |
| 09:33, 2 August 2023 | MA-6 SOP Rev D.pdf (file) | |
709 KB | Sawyer l | 2 | |
| 16:49, 18 July 2023 | JEOL 7600F UserManual.pdf (file) | |
608 KB | John d | v08.12, from Bill Mitchell | 1 |
| 08:57, 15 June 2023 | RTA AET Operating Instructions.pdf (file) | |
496 KB | Millerski w | Operating Instructions | 1 |
| 16:31, 9 June 2023 | Gas mixture comparison.jpg (file) |  |
136 KB | Ffoong | 1 | |
| 16:17, 9 June 2023 | Au oxidation by O2-N2 ash.jpg (file) |  |
124 KB | Ffoong | 1 | |
| 23:36, 5 June 2023 | Surfscan 230113A7G2 after low particles.jpg (file) |  |
878 KB | John d | 1 | |
| 23:35, 5 June 2023 | Surfscan - 230113A7 Gain4 high particles.jpg (file) |  |
1.12 MB | John d | 1 | |
| 09:39, 5 June 2023 | PPR 220-7 Etch Rates vs Temperature.jpg (file) |  |
68 KB | Ffoong | 1 | |
| 09:34, 5 June 2023 | PPR220-7 Etch Rates vs Temperature.jpg (file) |  |
52 KB | Ffoong | 1 | |
| 09:28, 5 June 2023 | PPR220-7 Etch Rates (nm min) vs. Temp(C) Recipe STD O2only 3KW-3min-Temp (1).png (file) | _vs._Temp(C)_Recipe_STD_O2only_3KW-3min-Temp_(1).png) |
26 KB | Ffoong | 1 | |
| 09:19, 5 June 2023 | PPR220-7 Etch Rates (nm min) vs. Temp(C) Recipe STD O2only 3KW-3min-Temp.png (file) | _vs._Temp(C)_Recipe_STD_O2only_3KW-3min-Temp.png) |
20 KB | Ffoong | 1 | |
| 12:08, 2 June 2023 | PECVD1 SiN Stress vs. N2 plot.jpg (file) |  |
85 KB | John d | better formatting, colors axes mathcing markers etc | 2 |
| 09:36, 26 May 2023 | MJB 3 IR Camera SOP Rev B.pdf (file) | |
991 KB | Sawyer l | 2 | |
| 16:30, 18 May 2023 | ASML CD Cals - Example Plot.jpg (file) |  |
32 KB | John d | 1 | |
| 16:28, 18 May 2023 | ASML CD Cals - Example Table.jpg (file) |  |
100 KB | John d | 1 | |
| 09:04, 15 May 2023 | Mechanical Polisher SOP Rev A.pdf (file) | |
192 KB | Millerski w | 1 | |
| 22:05, 10 May 2023 | SEM1 JEOL IT800HSL.jpg (file) |  |
2.69 MB | John d | photo of SEM #1, JEOL IT800HSL | 1 |
| 21:58, 10 May 2023 | Amscope Stereoscope Photo.jpg (file) |  |
2.92 MB | John d | 1 | |
| 21:51, 10 May 2023 | DektakXT.jpg (file) |  |
1.96 MB | John d | image of Dektak XT | 1 |
| 10:34, 10 May 2023 | EB2 SOP Rev G.pdf (file) | |
2.88 MB | Sawyer l | 1 | |
| 10:00, 28 April 2023 | Vented font screnshot.jpg (file) |  |
59 KB | John d | 1 | |
| 09:57, 28 April 2023 | Vernier Template v2 screenshot.jpg (file) |  |
118 KB | John d | 1 | |
| 23:27, 25 April 2023 | IBD Schematic.jpg (file) |  |
112 KB | John d | added numbering for each component | 2 |
| 14:51, 17 April 2023 | Vented font DDJ.gds (file) |  |
28 KB | John d | added "UCSB Nnanofab" in the comments | 2 |
| 12:00, 11 April 2023 | EBeam4 Operating Instructions 4-7-2023.pdf (file) | |
1.91 MB | Barreraz | Updated Operating Instructions for EBeam4 | 1 |
| 13:03, 21 March 2023 | Surfscan P1 SiN 221208Z5G4 after.jpg (file) |  |
1.25 MB | John d | 1 | |
| 12:59, 21 March 2023 | Surfscan G4 before example - P1 230317E7G4 before.jpg (file) |  |
1,014 KB | John d | 1 | |
| 12:56, 21 March 2023 | UCSBTEST1.png (file) |  |
6.52 MB | John d | Typical Recipe UCSB Gain2 for larger particulates | 2 |
| 12:55, 21 March 2023 | UCSBTEST2 .png (file) |  |
6.76 MB | John d | Typical Surfscan results for UCSB Gain4 for smaller particulates | 2 |
| 11:52, 21 March 2023 | ICP -1 Gas Change N2-He-N2.pdf (file) | |
501 KB | Sawyer l | 2 | |
| 11:51, 21 March 2023 | ICP -1 Gas Change CHF3-Ar.pdf (file) | |
498 KB | Sawyer l | 1 | |
| 11:50, 21 March 2023 | ICP -1 Gas Change CF4-SF6-CF4.pdf (file) | |
500 KB | Sawyer l | 2 | |
| 10:12, 21 March 2023 | EBeam5 Operating Procedures.pdf (file) | |
291 KB | Barreraz | 1 | |
| 13:59, 16 March 2023 | ADT SOP Rev H.pdf (file) | |
2.77 MB | Sawyer l | 1 | |
| 16:23, 13 March 2023 | Single centered mask-Piece 2nd litho AUTOSTEP 200.pptx (file) | |
1.47 MB | John d | one user had "corrupt file" problem, but was ok for me. re-uploading just in case. | 2 |
| 08:32, 10 March 2023 | RIE 2 SOP Rev C.pdf (file) | |
1.02 MB | Sawyer l | 1 | |
| 14:55, 8 March 2023 | Oxford Cluster Tool Operating Instructions Rev B.pdf (file) | |
578 KB | Sawyer l | 1 | |
| 10:26, 2 March 2023 | EB2 SOP Rev F.pdf (file) | |
2.9 MB | Sawyer l | 2 | |
| 11:30, 8 February 2023 | YES SOP Rev E.pdf (file) | |
529 KB | Sawyer l | 1 | |
| 10:00, 31 January 2023 | DektakXT Operating Procedure.pdf (file) | |
5.49 MB | Hopkins a | DektakXT SOP | 1 |
| 12:46, 20 January 2023 | Oxford-ICP-Etch Process Control Data Example.jpg (file) |  |
144 KB | John d | 1 | |
| 12:34, 20 January 2023 | ICP2 Process Control Data Example.jpg (file) |  |
118 KB | John d | 1 | |
| 12:16, 20 January 2023 | ICP1 Process Control Data Example.jpg (file) |  |
122 KB | John d | 1 | |
| 12:06, 20 January 2023 | FL-ICP Process Control Data Example.jpg (file) |  |
138 KB | John d | 1 | |
| 09:52, 12 January 2023 | Cs pan1 011123 002.jpg (file) |  |
717 KB | Noahdutra | 1 | |
| 09:52, 12 January 2023 | 30D pan1 011123 002.jpg (file) |  |
841 KB | Noahdutra | 1 | |
| 09:48, 12 January 2023 | 30D oxford 011123 002.jpg (file) |  |
874 KB | Noahdutra | 1 |
