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Date Name Thumbnail Size User Description Versions
22:03, 13 January 2022 2022-01-12 Oxford InP Ridge Wiki Post - Cal03.pdf (file) 1.53 MB John d Oxford ICP Etch Cals03 1
21:55, 13 January 2022 2022-01-12 Oxford InP Ridge Wiki Post - Cal02.pdf (file) 1.11 MB John d Oxford ICP Cal SEMs 1
21:51, 13 January 2022 2022-01-11 Oxford InP Ridge Wiki Post - Cal01.pdf (file) 1.13 MB John d Oxford ICP Etch Cal SEMs 1
10:48, 6 January 2022 EB -3 OPERATING INSTRUCTIONS docx.pdf (file) 43 KB Freeborn d   1
10:15, 5 January 2022 MLA150 SOP Rev J (LS).docx.pdf (file) 2.01 MB Sawyer l   1
11:50, 4 January 2022 ADT Dicing - Blade Exposure diagram.png (file) 196 KB John d   1
09:12, 4 January 2022 Oxford Cobra 300 SOP v2021-12-14.pdf (file) 154 KB Bosch t   1
09:58, 3 January 2022 EB2 SOP Rev C.pdf (file) 3.02 MB Sawyer l   1
09:24, 3 January 2022 EVG Plasma Activation SOP Rev C.pdf (file) 676 KB Sawyer l   1
15:10, 21 December 2021 Out of Focus Exposures - Carl Peterson (Krisnamoorthy Group, 2021-12).png (file) 543 KB John d Added scale bars 200µm 2
11:15, 8 December 2021 MA-6 4-inch BSA chuck - 2631 - measurements.jpg (file) 1.11 MB John d   1
08:57, 30 November 2021 Cleaning Rules for Fluorine ICP Etch tool.pdf (file) 50 KB Freeborn d   1
08:51, 30 November 2021 Editing a Recipe on Plasma.pdf (file) 26 KB Freeborn d   1
14:07, 18 November 2021 Surfscan Low-Particle Example - G2.png (file) 783 KB John d   1
14:05, 18 November 2021 Surfscan Low-Particle Example - G4.png (file) 858 KB John d   1
14:17, 9 November 2021 SOFL0103.pdf (file) 70 KB Ningcao   1
16:59, 8 November 2021 IP210212.pdf (file) 61 KB Ningcao   1
16:56, 8 November 2021 IP210201.pdf (file) 42 KB Ningcao   1
07:51, 1 November 2021 MLA Quarter-Wafer Alignment.jpg (file) 320 KB John d Moved left AlMk to left corner, instead of along edge. User JeurgenM from FP said this is better. 2
10:49, 12 October 2021 Bay 4 toxic Corrosive - wafer sample holders - IMG 4243.jpg (file) 1.86 MB John d   1
12:59, 8 October 2021 Oxford Etcher - InP Ridge Etch using Oxford PlasmaPro 100 Cobra - 2021-09-08.pdf (file) 1.45 MB John d Oxford Etcher - InP Ridge Etch using Oxford PlasmaPro 100 Cobra - 2021-09-08 Ning Cao, 2021-09-08 1
12:55, 8 October 2021 Oxford Etcher - InP Grating Etch at 20 C - Oxford Cobra 300 2021-08-26.pdf (file) 1.32 MB John d Oxford Etcher - InP Grating Etch at 20 C - Oxford Cobra 300 2021-08-26 Ning Cao 1
09:42, 29 September 2021 OxfordPlasmaPro.jpg (file) 33 KB John d shrunk to 400px 2
16:23, 21 September 2021 CAD Tutorial for ASML Reticle v1 GDS.gds (file) 4 KB John d   1
10:28, 10 September 2021 ICP -1 Rules & Important Notes.pdf (file) 501 KB Sawyer l   1
10:27, 10 September 2021 ICP -1 Gas Change N2-He-N2.pdf (file) 501 KB Sawyer l   1
10:27, 10 September 2021 ICP -1 Gas Change CHF3-Ar-CHF3.pdf (file) 498 KB Sawyer l   1
10:26, 10 September 2021 ICP -1 Gas Change CF4-SF6-CF4.pdf (file) 500 KB Sawyer l   1
14:38, 9 September 2021 GCA Local Alignment Mark Dotted.gds (file) 62 KB John d   1
14:36, 9 September 2021 GCA Local Alignment Mark.gds (file) 2 KB John d   1
14:27, 9 September 2021 GCA Global Mark.gds (file) 2 KB John d   1
11:39, 9 September 2021 ADT SOP Rev D.pdf (file) 827 KB Sawyer l   1
11:55, 3 September 2021 Annotated PR etch - Om1000 03 - ARC + Cl + PR etch v1.jpg (file) 210 KB John d v2 - indicated when PR was fully removed 2
13:08, 23 August 2021 ADT Dicing Saw SOP Rev C.pdf (file) 638 KB Sawyer l   2
13:08, 11 August 2021 MA-6 Exp Mode Visual Aid.pdf (file) 566 KB Sawyer l   2
13:05, 11 August 2021 BA6 SOP Rev A.pdf (file) 1.78 MB Sawyer l   1
17:45, 10 August 2021 I2210411.pdf (file) 45 KB Ningcao   1
13:17, 10 August 2021 ADT Dicing Saw SOP Rev B.pdf (file) 634 KB Sawyer l   1
18:24, 9 August 2021 I2210508.pdf (file) 72 KB Ningcao   1
13:15, 4 August 2021 GCA Stepper MaskPlate Master-DarkField 5x.gds (file) 216 KB John d GCA Stepper (Autostep 200 or 6300) Photomask template. Darkfield, at Reticle-scale (5x magnification already applied). Insert your design as Instances with 5x up-scaling applied. 1
17:27, 22 July 2021 I2210308.pdf (file) 79 KB Ningcao   1
07:33, 20 July 2021 Autostep 200 Restart SOP June 2021.pdf (file) 6.2 MB Sawyer l   1
12:18, 19 July 2021 MLA150 Substrate Template Rules.pdf (file) 395 KB Sawyer l   1
09:46, 13 July 2021 200um square v1.gds (file) 170 bytes John d TESTING only - please delte 1
09:22, 13 July 2021 MA-6 SOP Rev D.pdf (file) 710 KB Sawyer l   1
10:36, 2 July 2021 RechargeApp - 02 - F+A auto v2.png (file) 301 KB John d   1
10:27, 2 July 2021 RechargeApp - 01 - line items for other charges.png (file) 61 KB John d   1
13:02, 24 June 2021 User Protocols Coronavirus 2020-09-14-1.pdf (file) 435 KB Thibeault   6
07:32, 27 May 2021 UCSB-Facilities-Use-Agreement.pdf (file) 176 KB John d Rev. 4.2021 2
07:32, 27 May 2021 UCSB Service Agreement.pdf (file) 196 KB John d Rev. 4-2021 4
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