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Date Name Thumbnail Size User Description Versions
17:23, 21 September 2021 CAD Tutorial for ASML Reticle v1 GDS.gds (file) 4 KB John d   1
11:28, 10 September 2021 ICP -1 Rules & Important Notes.pdf (file) 501 KB Sawyer l   1
11:27, 10 September 2021 ICP -1 Gas Change N2-He-N2.pdf (file) 501 KB Sawyer l   1
11:27, 10 September 2021 ICP -1 Gas Change CHF3-Ar-CHF3.pdf (file) 498 KB Sawyer l   1
11:26, 10 September 2021 ICP -1 Gas Change CF4-SF6-CF4.pdf (file) 500 KB Sawyer l   1
15:38, 9 September 2021 GCA Local Alignment Mark Dotted.gds (file) 62 KB John d   1
15:36, 9 September 2021 GCA Local Alignment Mark.gds (file) 2 KB John d   1
15:27, 9 September 2021 GCA Global Mark.gds (file) 2 KB John d   1
12:39, 9 September 2021 ADT SOP Rev D.pdf (file) 827 KB Sawyer l   1
12:55, 3 September 2021 Annotated PR etch - Om1000 03 - ARC + Cl + PR etch v1.jpg (file) 210 KB John d v2 - indicated when PR was fully removed 2
14:08, 23 August 2021 ADT Dicing Saw SOP Rev C.pdf (file) 638 KB Sawyer l   2
14:08, 11 August 2021 MA-6 Exp Mode Visual Aid.pdf (file) 566 KB Sawyer l   2
14:05, 11 August 2021 BA6 SOP Rev A.pdf (file) 1.78 MB Sawyer l   1
18:45, 10 August 2021 I2210411.pdf (file) 45 KB Ningcao   1
14:17, 10 August 2021 ADT Dicing Saw SOP Rev B.pdf (file) 634 KB Sawyer l   1
19:24, 9 August 2021 I2210508.pdf (file) 72 KB Ningcao   1
14:15, 4 August 2021 GCA Stepper MaskPlate Master-DarkField 5x.gds (file) 216 KB John d GCA Stepper (Autostep 200 or 6300) Photomask template. Darkfield, at Reticle-scale (5x magnification already applied). Insert your design as Instances with 5x up-scaling applied. 1
18:27, 22 July 2021 I2210308.pdf (file) 79 KB Ningcao   1
08:33, 20 July 2021 Autostep 200 Restart SOP June 2021.pdf (file) 6.2 MB Sawyer l   1
13:18, 19 July 2021 MLA150 Substrate Template Rules.pdf (file) 395 KB Sawyer l   1
10:46, 13 July 2021 200um square v1.gds (file) 170 bytes John d TESTING only - please delte 1
10:22, 13 July 2021 MA-6 SOP Rev D.pdf (file) 710 KB Sawyer l   1
11:36, 2 July 2021 RechargeApp - 02 - F+A auto v2.png (file) 301 KB John d   1
11:27, 2 July 2021 RechargeApp - 01 - line items for other charges.png (file) 61 KB John d   1
14:02, 24 June 2021 User Protocols Coronavirus 2020-09-14-1.pdf (file) 435 KB Thibeault   6
08:32, 27 May 2021 UCSB-Facilities-Use-Agreement.pdf (file) 176 KB John d Rev. 4.2021 2
08:32, 27 May 2021 UCSB Service Agreement.pdf (file) 196 KB John d Rev. 4-2021 4
13:09, 26 May 2021 MLA150 SOP Rev I (LS).pdf (file) 1.88 MB Sawyer l   1
19:06, 19 May 2021 I2210214.pdf (file) 41 KB Ningcao   1
15:57, 17 May 2021 Nanofabrication Facility Project Description.xlsx (file) 32 KB John d Corrected link to services 2
11:36, 11 May 2021 AlliedPolisher10-1110.jpg (file) 370 KB John d Photo of Allied Polisher model 10-1110 ; Initial photo - cropped and color boosted 1
21:33, 5 May 2021 Board - Search Cards - Select User.png (file) 118 KB John d   1
21:30, 5 May 2021 Trello - Board - Search Cards.png (file) 55 KB John d   1
21:27, 5 May 2021 Trello - Board - Show Menu.png (file) 188 KB John d   1
10:31, 19 April 2021 Tencor FLX SOP Rev B.pdf (file) 296 KB Sawyer l   1
11:14, 12 April 2021 ASML Reticle Programming Params - MyReticleBarCode v1.xlsx (file) 11 KB John d mention optional params 6
17:54, 8 April 2021 Holography Process for 1D-lines and 2D-dots (ARC-11 & THMR-IP3600HP-D)-updated-4-8-2021.pdf (file) 226 KB Ningcao   1
09:15, 31 March 2021 KLayout - Non-Orthogonal Arrays.png (file) 126 KB John d   1
08:31, 16 March 2021 MLA150 SOP Rev H (LS).pdf (file) 1.81 MB Sawyer l   1
11:28, 15 March 2021 RIE 3 SOP Rev D.pdf (file) 1.17 MB Sawyer l   1
07:56, 12 March 2021 RaithVelion.jpg (file) 22 KB Dread   1
10:29, 12 February 2021 MLA150 SOP Rev G (LS).pdf (file) 1.81 MB Sawyer l   1
18:32, 3 February 2021 IP210119.pdf (file) 46 KB Ningcao   1
18:31, 3 February 2021 IP210117.pdf (file) 44 KB Ningcao   1
18:27, 2 February 2021 FE210206.pdf (file) 62 KB Ningcao   1
18:21, 12 January 2021 Photo - GoPro Black 8 and Headstrap.png (file) 243 KB John d   1
19:41, 8 January 2021 I2210102.pdf (file) 41 KB Ningcao   1
19:37, 8 January 2021 I1210113.pdf (file) 45 KB Ningcao   1
09:06, 9 December 2020 Attachment A - UCSB Master Facilities Use Agreement Labs.pdf (file) 151 KB John d Correction - removed FUA page. rev. 6/2019 3
17:07, 8 December 2020 CAD Tutorial for ASML Reticle v1 - screenshot Reticle Layout cell.png (file) 137 KB John d   1
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