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- 12:30, 12 July 2012 diff hist +13 N File:Linberg.jpg {{toolimage}} current
- 12:29, 12 July 2012 diff hist +138 N Tube Furnace AlGaAs Oxidation (Lindberg) Created page with "{{tool|{{PAGENAME}} |picture=Linberg.jpg |type = Thermal Processing |super= Tony Bosch |location=Bay 4 |description =? |manufacturer =? }}"
- 12:28, 12 July 2012 diff hist +13 N File:Goniometer.jpg {{toolimage}} current
- 12:27, 12 July 2012 diff hist -54 ICP Etch 1 (Panasonic E646V)
- 12:25, 12 July 2012 diff hist +13 N File:Oven1&2.jpg {{toolimage}} current
- 12:25, 12 July 2012 diff hist +143 N Ovens 1, 2 & 3 (Labline) Created page with "{{tool|{{PAGENAME}} |picture=Oven1&2.jpg |type = Lithography |super= Adam Abrahamsen |location=Bay 6 |description =? |manufacturer = Labline }}"
- 12:24, 12 July 2012 diff hist -56 Sputter 4 (AJA ATC 2200-V)
- 12:24, 12 July 2012 diff hist +147 N Oven 4 (Thermo-Fisher HeraTherm) Created page with "{{tool|{{PAGENAME}} |picture=Oven4.jpg |type = Lithography |super= Tony Bosch |location=Bay 6 |description = ? |manufacturer = Fisher Scientific }}"
- 12:23, 12 July 2012 diff hist +13 N File:Oven4.jpg {{toolimage}}
- 12:19, 12 July 2012 diff hist +13 N File:Vacuum.jpg {{toolimage}} current
- 12:18, 12 July 2012 diff hist +145 N Vacuum Sealer Created page with "{{tool|{{PAGENAME}} |picture=Vacuum.jpg |type = Packaging |super= Aidan Hopkins |location=Bay 5 |description = ? |manufacturer = ? }} = About ="
- 12:17, 12 July 2012 diff hist +141 N UV Ozone Reactor Created page with "{{tool|{{PAGENAME}} |picture=Ozone.jpg |type = Dry Etch |super= Tony Bosch |location=Bay 5 |description = ? |manufacturer = ? }} = About ="
- 12:13, 12 July 2012 diff hist +13 N File:SpinRinse.jpg {{toolimage}} current
- 12:13, 12 July 2012 diff hist +148 N Spin Rinse Dryer (SemiTool) Created page with "{{tool|{{PAGENAME}} |picture=SpinRinse.jpg |type = Wet Processing |super= Don Freeborn |location=Bay 7 |description = ? |manufacturer = SemiTool }}"
- 11:56, 12 July 2012 diff hist 0 File:Nanometric.jpg uploaded a new version of "File:Nanometric.jpg" current
- 11:55, 12 July 2012 diff hist 0 File:Nanometric.jpg uploaded a new version of "File:Nanometric.jpg"
- 11:55, 12 July 2012 diff hist +13 N File:Filmmetrics.jpg {{toolimage}} current
- 11:53, 12 July 2012 diff hist 0 File:VeecoNanoman.jpg uploaded a new version of "File:VeecoNanoman.jpg"
- 11:53, 12 July 2012 diff hist +55 N Wafer Toxic Corrosive Bench Redirected page to Wet Benches#Wafer Toxic Corrosive Benches current
- 11:52, 12 July 2012 diff hist +255 Wet Benches
- 11:52, 12 July 2012 diff hist +13 N File:WaferToxicBench.jpg {{toolimage}} current
- 11:50, 12 July 2012 diff hist +13 N File:PlatingBench.jpg {{toolimage}} current
- 11:50, 12 July 2012 diff hist +13 N File:HFBench.jpg {{toolimage}} current
- 11:49, 12 July 2012 diff hist +13 N File:ToxicBench.jpg {{toolimage}} current
- 11:48, 12 July 2012 diff hist +13 N File:SpinBench.jpg {{toolimage}} current
- 10:17, 12 July 2012 diff hist 0 m Template:Tool Protected "Template:Tool" ([edit=sysop] (indefinite) [move=sysop] (indefinite))
- 10:17, 12 July 2012 diff hist 0 m Template:Nav2 Protected "Template:Nav2" ([edit=sysop] (indefinite) [move=sysop] (indefinite))
- 10:16, 12 July 2012 diff hist 0 m Main Page Changed protection level for "Main Page" ([edit=sysop] (indefinite) [move=sysop] (indefinite)) [cascading]
- 10:16, 12 July 2012 diff hist 0 m Template:Staff Protected "Template:Staff" ([edit=sysop] (indefinite) [move=sysop] (indefinite))
- 10:16, 12 July 2012 diff hist 0 m Template:FeaturedArticle Protected "Template:FeaturedArticle" ([edit=sysop] (indefinite) [move=sysop] (indefinite))
- 10:04, 12 July 2012 diff hist +41 MediaWiki:Loginprompt
- 10:02, 12 July 2012 diff hist +226 N MediaWiki:Loginprompt Created page with "Only those resisted with the UCSB Nanofab may login and edit the wiki.<br> If you are a registered user with the UCSB Nanofab but need your Wiki account created, please contact t…"
- 09:57, 12 July 2012 diff hist +82 m Editing Tutorials →Editing Restrictions
- 08:36, 12 July 2012 diff hist +75 XeF2 Etch (Xetch)
- 08:19, 12 July 2012 diff hist +57 Tool List →Wet Processing
- 08:18, 12 July 2012 diff hist +52 N HF/TMAH Processing Benches Redirected page to Wet Benches#HF.2FTMAH Processing Bench current
- 08:07, 12 July 2012 diff hist +42 Wet Benches →Detailed Specifications
- 08:06, 12 July 2012 diff hist +238 Wet Benches →Detailed Specifications
- 08:06, 12 July 2012 diff hist +144 Wet Benches
- 08:03, 12 July 2012 diff hist +1,636 Wet Benches →About
- 08:00, 12 July 2012 diff hist +52 N HF/TMAH Processing Bench Redirected page to Wet Benches#HF.2FTMAH Processing Bench current
- 08:00, 12 July 2012 diff hist +52 N HF Processing Bench Redirected page to Wet Benches#HF.2FTMAH Processing Bench current
- 08:00, 12 July 2012 diff hist +507 Wet Benches
- 07:57, 12 July 2012 diff hist +39 N Plating Bench Redirected page to Wet Benches#Plating Bench current
- 07:56, 12 July 2012 diff hist +2 Wet Benches →Detailed Specifications
- 07:56, 12 July 2012 diff hist +2 Wet Benches →About
- 07:56, 12 July 2012 diff hist -3 Wet Benches
- 07:56, 12 July 2012 diff hist +51 Wet Benches →Plating Bench
- 07:55, 12 July 2012 diff hist +204 Wet Benches
- 07:53, 12 July 2012 diff hist +49 N Toxic Corrosive Benches Redirected page to Wet Benches#Toxic Corrosive Benches current
- 07:53, 12 July 2012 diff hist +43 N Spin Coat Benches Redirected page to Wet Benches#Spin Coat Benches current
- 07:52, 12 July 2012 diff hist +41 N Develop Benches Redirected page to Wet Benches#Develop Benches current
- 07:50, 12 July 2012 diff hist +50 N Solvent Cleaning Benches Redirected page to Wet Benches#Solvent Cleaning Benches current
- 07:49, 12 July 2012 diff hist +16 Wet Benches →Toxic Corrosive Benches
- 07:46, 12 July 2012 diff hist +445 Wet Benches →Toxic Corrosive Benches
- 07:44, 12 July 2012 diff hist -1,687 Solvent Benches Redirected page to Wet Benches#Solvent Cleaning Benches current
- 07:43, 12 July 2012 diff hist +1,735 Wet Benches →Solvent Cleaning Benches
- 07:42, 12 July 2012 diff hist -1,708 Photoresist Spin Coat Benches Redirected page to Wet Benches#Spin Coat Benches current
- 07:42, 12 July 2012 diff hist -43 Wet Benches →Develop Benches
- 07:41, 12 July 2012 diff hist -44 Wet Benches →Spin Coat Benches
- 07:40, 12 July 2012 diff hist +1,795 Wet Benches →Spin Coat Benches
- 07:39, 12 July 2012 diff hist -1,363 Develop Wet Benches Redirected page to Wet Benches#Develop Benches current
- 07:39, 12 July 2012 diff hist +24 Wet Benches
- 07:38, 12 July 2012 diff hist +1,409 Wet Benches →Develop Benches
- 07:37, 12 July 2012 diff hist +429 N Wet Benches Created page with "In the lab we have a total of 16 wet benches. They are divided into the following 8 types: *4 Solvent Cleaning Benches *3 Develop Benches *3 Spin Coat Benches *2 [[T…"
- 07:32, 12 July 2012 diff hist +1 File:OxalicAcidDihydrateMSDS.pdf current
- 07:32, 12 July 2012 diff hist +1 File:SelenousAcidMSDS.pdf current
- 07:32, 12 July 2012 diff hist +1 File:HydroiodicAcidMSDS.pdf current
- 07:31, 12 July 2012 diff hist +1 File:LacticAcidMSDS.pdf current
- 07:31, 12 July 2012 diff hist +1 File:LacticAcidFractionalMSDS.pdf current
- 07:31, 12 July 2012 diff hist +1 File:MethacrylicAcidMSDS.pdf current
- 07:27, 12 July 2012 diff hist +10 N File:Xactic-XetchX3-System-Manual.pdf {{manual}} current
- 07:22, 12 July 2012 diff hist +323 Wire Saw (Takatori) →About current
- 07:21, 12 July 2012 diff hist +10 N File:Takatori-Wire-Saw-WSB-K2-Operation.pdf {{manual}} current
- 07:21, 12 July 2012 diff hist +10 N File:Takatori-Wire-Saw-WSD-K2-Instructions.pdf {{manual}} current
- 07:21, 12 July 2012 diff hist +10 N File:Takatori-Wire-Saw-Control-Data-Tranfer-Instructions.pdf {{manual}} current
- 07:17, 12 July 2012 diff hist +4 Tool List →Wet Processing
- 12:08, 11 July 2012 diff hist +13 N File:Microscopes.jpg {{toolimage}} current
- 12:07, 11 July 2012 diff hist +216 Microscopes →Nikon
- 12:05, 11 July 2012 diff hist +71 Microscopes →Olympus
- 12:05, 11 July 2012 diff hist +212 Microscopes
- 12:02, 11 July 2012 diff hist +266 Microscopes
- 12:02, 11 July 2012 diff hist 0 N File:Jenoptik-ProgRes-Manual.pdf current
- 12:01, 11 July 2012 diff hist 0 N File:Nikon-Microscope-OptiPhot-Manual.pdf current
- 12:00, 11 July 2012 diff hist 0 N File:Nikon-Microscope-Manual.pdf current
- 11:45, 11 July 2012 diff hist -1 Tool List →Inspection, Test and Characterization
- 11:45, 11 July 2012 diff hist -1 Tony Bosch →Tools
- 11:44, 11 July 2012 diff hist +45 N 4-Point Probe Resistivity Mapper moved 4-Point Probe Resistivity Mapper to Resistivity Mapper (CDE RESMAP) current
- 11:44, 11 July 2012 diff hist 0 m Resistivity Mapper (CDE RESMAP) moved 4-Point Probe Resistivity Mapper to Resistivity Mapper (CDE RESMAP)
- 11:12, 11 July 2012 diff hist +78 UCSB Nanofab Wiki:About
- 11:05, 11 July 2012 diff hist +2 Lab Rules OLD 2018 →Tools unavailable for intern use during Summer 2012:
- 11:05, 11 July 2012 diff hist +4 Lab Rules OLD 2018 →Tools unavailable for intern use during Summer 2012:
- 10:57, 11 July 2012 diff hist 0 Template:FeaturedArticle
- 10:56, 11 July 2012 diff hist 0 File:GowningRoom.jpg uploaded a new version of "File:GowningRoom.jpg" current
- 10:55, 11 July 2012 diff hist 0 Tool List →Packaging
- 10:53, 11 July 2012 diff hist +1 Surface Analysis (KLA/Tencor Surfscan)
- 10:51, 11 July 2012 diff hist +12 N File:KLA.jpg {{toolimage} current
- 10:51, 11 July 2012 diff hist +187 N Surface Analysis (KLA/Tencor Surfscan) Created page with "{{tool|{{PAGENAME}} |picture=KLA.jpg |type = Inspection, Test and Characterization |super= Adam Abrahamsen |location=Bay 3 |description = |manufacturer = Tencor |materials = |to…"
- 10:49, 11 July 2012 diff hist +16 Lab Rules OLD 2018 →Tools unavailable for intern use during Summer 2012:
- 10:40, 11 July 2012 diff hist +13 N File:CriticalPoint.jpg {{toolimage}} current
- 10:39, 11 July 2012 diff hist +209 N Critical Point Dryer Created page with "{{tool|{{PAGENAME}} |picture=CriticalPoint.jpg |type = Inspection, Test and Characterization |super= Luis Zuzunaga |location=Bay 5 |description = |manufacturer = Energy Beam Sci…"
- 10:37, 11 July 2012 diff hist +13 N File:UVOlympus.jpg {{toolimage}} current
- 10:37, 11 July 2012 diff hist +189 N Deep UV Optical Microscope (Olympus) Created page with "{{tool|{{PAGENAME}} |picture=UVOlympus.jpg |type = Inspection, Test and Characterization |super= Tony Bosch |location=Bay 7 |description = |manufacturer = Olympus |materials = …"
- 10:30, 11 July 2012 diff hist +13 N File:SEMSample.jpg {{toolimage}}
- 10:30, 11 July 2012 diff hist +188 N SEM Sample Coater (Hummer) Created page with "{{tool|{{PAGENAME}} |picture=SEMSample.jpg |type = Inspection, Test and Characterization |super= Tony Bosch |location=Bay 1 |description = |manufacturer = Hummer |materials = |…"
- 10:24, 11 July 2012 diff hist -51 Nano-Imprint (Nanonex NX2000)
- 10:21, 11 July 2012 diff hist +13 N File:Thermal2.jpg {{toolimage}} current
- 10:21, 11 July 2012 diff hist +171 N Thermal Evap 2 (Solder) Created page with "{{tool|{{PAGENAME}} |picture=Thermal2.jpg |type = Vacuum Deposition |super= Brian Lingg |location=Bay 3 |description = ? |manufacturer = Custom |materials = |toolid=12 }}"
- 10:20, 11 July 2012 diff hist +1 Template:Tool
- 10:20, 11 July 2012 diff hist -2 Template:Tool
- 10:18, 11 July 2012 diff hist -1 Template:Tool
- 10:16, 11 July 2012 diff hist +13 N File:Sputter5.jpg {{toolimage}}
- 10:15, 11 July 2012 diff hist +175 N Sputter 5 (AJA ATC 2200-V) Created page with "{{tool|{{PAGENAME}} |picture=Sputter5.jpg |type = Vacuum Deposition |super= Mike Silva |location=Bay 3 |description = ? |manufacturer = Kurt J Lesker |materials = |toolid= }}"
- 10:13, 11 July 2012 diff hist +8 Mike Silva →Tools
- 10:13, 11 July 2012 diff hist +13 N File:BlueMOven.jpg {{toolimage}} current
- 10:12, 11 July 2012 diff hist +193 N High Temp Oven (Blue M) Created page with "{{tool|{{PAGENAME}} |picture=BlueMOven.jpg |type = Lithography |super= Mike Silva |location=Bay 5 |description = High Temperature Oven |manufacturer = Blue M Electric |materials…"
- 10:11, 11 July 2012 diff hist +8 Tool List →Lithography
- 10:10, 11 July 2012 diff hist +13 N File:Vacuum Oven.jpg {{toolimage}} current
- 10:10, 11 July 2012 diff hist +202 N Vacuum Oven (YES) Created page with "{{tool|{{PAGENAME}} |picture=Vacuum Oven.jpg |type = Lithography |super= Tony Bosch |location=Bay 3 |description = Vacuum/Ammonia Oven |manufacturer = Yield Engineering Systems |…"
- 09:31, 11 July 2012 diff hist +2 Mike Silva →Tools
- 09:31, 11 July 2012 diff hist +2 Tool List →Inspection, Test and Characterization
- 09:31, 11 July 2012 diff hist +41 N Tencor Flexus Film Stress moved Tencor Flexus Film Stress to Film Stress (Tencor Flexus) current
- 09:31, 11 July 2012 diff hist 0 m Film Stress (Tencor Flexus) moved Tencor Flexus Film Stress to Film Stress (Tencor Flexus)
- 09:06, 11 July 2012 diff hist 0 Ning Cao
- 09:00, 11 July 2012 diff hist +4 Tony Bosch
- 09:00, 11 July 2012 diff hist +4 Adam Abrahamsen →Tools
- 08:59, 11 July 2012 diff hist +40 N Sputter 4 (ATC 2200-V) moved Sputter 4 (ATC 2200-V) to Sputter 4 (AJA ATC 2200-V) current
- 08:59, 11 July 2012 diff hist 0 m Sputter 4 (AJA ATC 2200-V) moved Sputter 4 (ATC 2200-V) to Sputter 4 (AJA ATC 2200-V)
- 08:59, 11 July 2012 diff hist +40 N Sputter 3 (ATC 2000-F) moved Sputter 3 (ATC 2000-F) to Sputter 3 (AJA ATC 2000-F) current
- 08:59, 11 July 2012 diff hist 0 m Sputter 3 (AJA ATC 2000-F) moved Sputter 3 (ATC 2000-F) to Sputter 3 (AJA ATC 2000-F)
- 08:58, 11 July 2012 diff hist +8 Tool List →Vacuum Deposition
- 07:51, 11 July 2012 diff hist +1 Tool List →Dry Etch
- 07:50, 11 July 2012 diff hist +4 Tony Bosch →Tools
- 07:50, 11 July 2012 diff hist +35 N Unaxis VLR ICP-Etch moved Unaxis VLR ICP-Etch to ICP-Etch (Unaxis VLR) current
- 07:50, 11 July 2012 diff hist 0 m ICP-Etch (Unaxis VLR) moved Unaxis VLR ICP-Etch to ICP-Etch (Unaxis VLR)
- 07:48, 11 July 2012 diff hist +2 Tool List →Vacuum Deposition
- 07:48, 11 July 2012 diff hist +36 N Unaxis VLR ICP-PECVD moved Unaxis VLR ICP-PECVD to ICP-PECVD (Unaxis VLR) current
- 07:48, 11 July 2012 diff hist 0 m ICP-PECVD (Unaxis VLR) moved Unaxis VLR ICP-PECVD to ICP-PECVD (Unaxis VLR)
- 07:32, 11 July 2012 diff hist +1 Bill Mitchell →Tools
- 07:31, 11 July 2012 diff hist +68 N Atomic Force Microsope (Dimension 3100/Nanoscope IVA) moved Atomic Force Microsope (Dimension 3100/Nanoscope IVA) to Atomic Force Microscope (Dimension 3100/Nanoscope IVA) current
- 07:31, 11 July 2012 diff hist 0 m Atomic Force Microscope (Bruker ICON) moved Atomic Force Microsope (Dimension 3100/Nanoscope IVA) to Atomic Force Microscope (Dimension 3100/Nanoscope IVA)
- 07:19, 11 July 2012 diff hist -48 Bill Mitchell →Tools
- 07:19, 11 July 2012 diff hist -33 Template:Tool
- 07:18, 11 July 2012 diff hist +33 Template:Tool
- 07:18, 11 July 2012 diff hist 0 Template:Tool
- 07:17, 11 July 2012 diff hist +59 Template:Tool
- 07:17, 11 July 2012 diff hist +12 Tube Furnace (Tystar 8300)
- 07:16, 11 July 2012 diff hist +6 Template:Tool
- 07:13, 11 July 2012 diff hist +37 Template:StaffInfo
- 07:09, 11 July 2012 diff hist +10 Laser Scanning Confocal M-scope (Olympus LEXT)
- 07:08, 11 July 2012 diff hist +10 Field Emission SEM 2 (JEOL IT800SHL)
- 07:07, 11 July 2012 diff hist +11 Gold Plating Bench
- 07:06, 11 July 2012 diff hist +11 Chemical-Mechanical Polisher (Logitech)
- 07:05, 11 July 2012 diff hist +11 Tube Furnace Wafer Bonding (Thermco)
- 07:05, 11 July 2012 diff hist +11 Rapid Thermal Processor (AET RX6)
- 07:04, 11 July 2012 diff hist +11 Wire Saw (Takatori)
- 07:04, 11 July 2012 diff hist +11 Dicing Saw (ADT)
- 07:03, 11 July 2012 diff hist +11 Flip-Chip Bonder (Finetech)
- 07:03, 11 July 2012 diff hist +11 Wafer Bonder (SUSS SB6-8E)
- 07:02, 11 July 2012 diff hist -2 Wafer Bonder (SUSS SB6-8E)
- 07:01, 11 July 2012 diff hist +33 Tool List →Packaging
- 07:01, 11 July 2012 diff hist -33 Tool List →Lithography
- 07:00, 11 July 2012 diff hist +4 Tool List →Lithography
- 07:00, 11 July 2012 diff hist +8 Adam Abrahamsen →Tools
- 06:59, 11 July 2012 diff hist +4 Lab Rules OLD 2018 →Tools unavailable for intern use during Summer 2012:
- 06:59, 11 July 2012 diff hist +4 ASML DUV Redirected page to Stepper 3 (ASML DUV) current
- 06:59, 11 July 2012 diff hist +34 N Stepper 3 (ASML) moved Stepper 3 (ASML) to Stepper 3 (ASML DUV) current
- 06:59, 11 July 2012 diff hist 0 m Stepper 3 (ASML DUV) moved Stepper 3 (ASML) to Stepper 3 (ASML DUV)
- 06:58, 11 July 2012 diff hist +11 Stepper 3 (ASML DUV)
- 06:58, 11 July 2012 diff hist +11 Stepper 2 (AutoStep 200)
- 06:58, 11 July 2012 diff hist +11 Stepper 1 (GCA 6300)
- 06:58, 11 July 2012 diff hist -5 Tool List →Lithography
- 06:57, 11 July 2012 diff hist -5 Tony Bosch
- 06:57, 11 July 2012 diff hist +43 N Nano-Imprint Tool (Nanonex NX2000) moved Nano-Imprint Tool (Nanonex NX2000) to Nano-Imprint (Nanonex NX2000) current
- 06:57, 11 July 2012 diff hist 0 m Nano-Imprint (Nanonex NX2000) moved Nano-Imprint Tool (Nanonex NX2000) to Nano-Imprint (Nanonex NX2000)
- 06:57, 11 July 2012 diff hist +11 Nano-Imprint (Nanonex NX2000)
- 06:56, 11 July 2012 diff hist +9 Lab Rules OLD 2018 →Tools unavailable for intern use during Summer 2012:
- 06:56, 11 July 2012 diff hist +9 Ning Cao →Tools
- 06:56, 11 July 2012 diff hist +9 Tool List →Lithography
- 06:56, 11 July 2012 diff hist +11 Holographic Lith/PL Setup (Custom)
- 06:55, 11 July 2012 diff hist +48 N Holographic Lith/PL Setup moved Holographic Lith/PL Setup to Holographic Lith/PL Setup (Custom) current
- 06:55, 11 July 2012 diff hist 0 m Holographic Lith/PL Setup (Custom) moved Holographic Lith/PL Setup to Holographic Lith/PL Setup (Custom)
- 06:55, 11 July 2012 diff hist +11 E-Beam Lithography System (JEOL JBX-6300FS)
- 06:52, 11 July 2012 diff hist +23 N Category:NOID Created page with "Tools with No ID added."
- 06:51, 11 July 2012 diff hist +18 Template:Tool
- 06:51, 11 July 2012 diff hist +11 IR Aligner (SUSS MJB-3 IR)
- 06:49, 11 July 2012 diff hist +11 Contact Aligner (SUSS MA-6)
- 06:48, 11 July 2012 diff hist +11 XeF2 Etch (Xetch)
- 06:48, 11 July 2012 diff hist +11 ICP Etch 2 (Panasonic E626I)
- 06:47, 11 July 2012 diff hist +11 ICP Etch 1 (Panasonic E646V)
- 06:47, 11 July 2012 diff hist +12 Lab Rules OLD 2018 →Tools unavailable for intern use during Summer 2012:
- 06:47, 11 July 2012 diff hist +12 Don Freeborn →Tools
- 06:46, 11 July 2012 diff hist +12 Tool List →Dry Etch
- 06:46, 11 July 2012 diff hist +50 N Si Deep RIE (Bosch Etch) moved Si Deep RIE (Bosch Etch) to Si Deep RIE (PlasmaTherm/Bosch Etch) current
- 06:46, 11 July 2012 diff hist 0 m Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) moved Si Deep RIE (Bosch Etch) to Si Deep RIE (PlasmaTherm/Bosch Etch)
- 06:46, 11 July 2012 diff hist +11 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP)
- 06:44, 11 July 2012 diff hist -4 Lab Rules OLD 2018 →Tools unavailable for intern use during Summer 2012:
- 06:44, 11 July 2012 diff hist -4 Don Freeborn
- 06:44, 11 July 2012 diff hist -4 Tool List →Dry Etch
- 06:43, 11 July 2012 diff hist +11 RIE 5 (PlasmaTherm)
- 06:43, 11 July 2012 diff hist +33 N RIE 5 (PlasmaTherm SLR) moved RIE 5 (PlasmaTherm SLR) to RIE 5 (PlasmaTherm) current
- 06:43, 11 July 2012 diff hist 0 m RIE 5 (PlasmaTherm) moved RIE 5 (PlasmaTherm SLR) to RIE 5 (PlasmaTherm)
- 06:43, 11 July 2012 diff hist +11 RIE 3 (MRC)
- 06:43, 11 July 2012 diff hist +11 RIE 2 (MRC)
- 06:43, 11 July 2012 diff hist +11 RIE 1 (Custom)
- 06:42, 11 July 2012 diff hist +11 Plasma Activation (EVG 810)
- 06:41, 11 July 2012 diff hist -5 Lab Rules OLD 2018 →Tools unavailable for intern use during Summer 2012:
- 06:41, 11 July 2012 diff hist -5 Aidan Hopkins →Tools
- 06:41, 11 July 2012 diff hist -5 Tool List →Dry Etch
- 06:40, 11 July 2012 diff hist +41 N Plasma Activation Tool (EVG 810) moved Plasma Activation Tool (EVG 810) to Plasma Activation (EVG 810) current
- 06:40, 11 July 2012 diff hist 0 m Plasma Activation (EVG 810) moved Plasma Activation Tool (EVG 810) to Plasma Activation (EVG 810)
- 19:27, 10 July 2012 diff hist 0 Tool List →Inspection, Test and Characterization
- 19:26, 10 July 2012 diff hist -48 Tool List →Inspection, Test and Characterization
- 17:06, 10 July 2012 diff hist +4 Template:Nav2
- 14:56, 10 July 2012 diff hist -9 Brian Lingg →Tools
- 14:55, 10 July 2012 diff hist +53 N Atomic Layer Deposision (Oxford FlexAL) moved Atomic Layer Deposision (Oxford FlexAL) to Atomic Layer Deposition (Oxford FlexAL) current
- 14:55, 10 July 2012 diff hist 0 m Atomic Layer Deposition (Oxford FlexAL) moved Atomic Layer Deposision (Oxford FlexAL) to Atomic Layer Deposition (Oxford FlexAL)
- 14:50, 10 July 2012 diff hist -79 Tool List →Wet Processing
- 14:50, 10 July 2012 diff hist -79 Aidan Hopkins →Tools
- 13:47, 10 July 2012 diff hist +1 Template:Tool
- 13:47, 10 July 2012 diff hist +23 Template:Tool
- 13:46, 10 July 2012 diff hist +24 Template:Tool
- 13:44, 10 July 2012 diff hist 0 Sputter 2 (SFI Endeavor)
- 13:43, 10 July 2012 diff hist 0 Sputter 3 (AJA ATC 2000-F)
- 13:43, 10 July 2012 diff hist +11 Sputter 4 (AJA ATC 2200-V)
- 13:43, 10 July 2012 diff hist +11 Sputter 3 (AJA ATC 2000-F)
- 13:43, 10 July 2012 diff hist +11 Sputter 2 (SFI Endeavor)
- 13:43, 10 July 2012 diff hist +11 Sputter 1 (Custom) current
- 13:41, 10 July 2012 diff hist +11 PECVD 2 (Advanced Vacuum)
- 13:41, 10 July 2012 diff hist +11 PECVD 1 (PlasmaTherm 790)
- 13:41, 10 July 2012 diff hist +11 Ion Beam Deposition (Veeco NEXUS)
- 13:40, 10 July 2012 diff hist +11 Thermal Evap 1
- 13:39, 10 July 2012 diff hist 0 E-Beam 2 (Custom)
- 13:39, 10 July 2012 diff hist +11 E-Beam 4 (CHA)
- 13:39, 10 July 2012 diff hist +10 E-Beam 3 (Temescal)
- 13:39, 10 July 2012 diff hist +10 E-Beam 2 (Custom)
- 13:38, 10 July 2012 diff hist +10 E-Beam 1 (Sharon)
- 13:37, 10 July 2012 diff hist +10 Atomic Layer Deposition (Oxford FlexAL)
- 13:36, 10 July 2012 diff hist +10 IR Thermal Microscope (QFI)
- 13:35, 10 July 2012 diff hist +11 Atomic Force Microscope (Bruker ICON)
- 13:34, 10 July 2012 diff hist +2 Atomic Force Microscope (Bruker ICON)
- 13:30, 10 July 2012 diff hist +11 ICP-Etch (Unaxis VLR)
- 13:29, 10 July 2012 diff hist +11 ICP-PECVD (Unaxis VLR)
- 13:28, 10 July 2012 diff hist +10 Template:Tool
- 13:27, 10 July 2012 diff hist +2 Template:Tool
- 13:26, 10 July 2012 diff hist +12 Template:Tool
- 13:26, 10 July 2012 diff hist +9 Template:Tool
- 13:12, 10 July 2012 diff hist +30 Template:Tool
- 13:11, 10 July 2012 diff hist +249 Template:Tool
- 13:03, 10 July 2012 diff hist +41 N Photo-emission & IR Microscope (QFI) moved Photo-emission & IR Microscope (QFI) to IR Thermal Microscope (QFI) current