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- 12:26, 20 January 2023 diff hist +214 ICP Etching Recipes →Process Control Data (Fluorine ICP Etcher): re-added example chart with links to charts
- 12:21, 20 January 2023 diff hist +2 ICP Etching Recipes →SiO2 Etch with CHF3/CF4 - Process Control Data (Panasonic 1): fixed links
- 12:20, 20 January 2023 diff hist -4 m ICP Etching Recipes →Process Control Data (Panasonic 1) Tag: Visual edit
- 12:19, 20 January 2023 diff hist +109 ICP Etching Recipes →Process Control Data (Panasonic 1): added `link=` URL to gsheets plots
- 12:18, 20 January 2023 diff hist +486 ICP Etching Recipes →Process Control Data (Panasonic 1): lin to ND's google sheets data, added example image of SPC chart Tag: Visual edit
- 12:16, 20 January 2023 diff hist +47 N File:ICP1 Process Control Data Example.jpg current
- 12:10, 20 January 2023 diff hist +92 ICP Etching Recipes →SiO2 Etching with CHF3/CF4 (Fluorine ICP Etcher): inserted example chart with link to data Tag: Visual edit
- 12:09, 20 January 2023 diff hist +29 Process Group - Process Control Data →Etching (Process Control Data): formatted OLD data Tag: Visual edit
- 12:06, 20 January 2023 diff hist +58 N File:FL-ICP Process Control Data Example.jpg current
- 12:03, 20 January 2023 diff hist +13 ICP Etching Recipes →SiO2 Etching with CHF3/CF4 (FL-ICP): corected toolname in header title Tag: Visual edit
- 12:00, 20 January 2023 diff hist -61 m Process Group - Process Control Data →PlasmaTherm SLR Fluorine Etcher: fixed link to plot Tag: Visual edit
- 12:00, 20 January 2023 diff hist +1 m ICP Etching Recipes →SiO2 Etching with CHF3/CF4 (FL-ICP): fixed plot link Tag: Visual edit
- 11:46, 20 January 2023 diff hist +411 Process Group - Process Control Data →Etching (Process Control Data): link to FL-ICP google sheets (noahD) Tag: Visual edit
- 11:45, 20 January 2023 diff hist +414 ICP Etching Recipes →Process Control Data (Fluorine ICP Etcher): linked to Noah's google sheets - plots & data Tag: Visual edit
- 16:37, 19 January 2023 diff hist +151 Template:Announcements blue-M oven down
- 16:35, 19 January 2023 diff hist +276 Template:Announcements stepper 2 maint.
- 16:01, 19 January 2023 diff hist +151 Template:Announcements stepper 1 PM
- 15:58, 18 January 2023 diff hist +1 m ICP Etch 2 (Panasonic E626I) →Online Training Video: Tag: Visual edit
- 15:57, 18 January 2023 diff hist +17 ICP Etch 2 (Panasonic E626I) Made "online training" into a section heading, so it's obvious in Table of Contents. Also change "page title" levels to "header" level. Tag: Visual edit
- 21:56, 12 January 2023 diff hist -113 Template:Announcements updated OPEN annc
- 15:38, 12 January 2023 diff hist +108 Oxford ICP Etcher - Process Control Data added chamber wet clean current Tag: Visual edit
- 08:33, 11 January 2023 diff hist -194 Template:Announcements nanofab open for LN2 delivery
- 16:28, 10 January 2023 diff hist +66 Template:Announcements LN2 closure
- 17:20, 6 January 2023 diff hist +7 Oxford ICP Etcher - Process Control Data →Etch Rate Dependence on Sample Size (Oxford ICP Etcher): changed name to emphasize Sampel Size effect Tag: Visual edit
- 11:28, 6 January 2023 diff hist +170 Process Group - Process Control Data →ICP-PECVD (Unaxis VLR Dep): link to SiO2/SiN plots separately Tag: Visual edit
- 17:07, 5 January 2023 diff hist +464 Template:News added info about process control data
- 10:43, 5 January 2023 diff hist +182 PECVD Recipes →ICP-PECVD (Unaxis VLR): added "geenral recipe notes" Tag: Visual edit
- 19:22, 3 January 2023 diff hist +126 Wet Benches →Develop Benches: added megasonic Tag: Visual edit
- 18:53, 3 January 2023 diff hist +66 Wafer Bonder (SUSS SB6-8E) →Detailed Specifications: link to MA6 Tag: Visual edit
- 17:41, 3 January 2023 diff hist -21 m Suss Aligners (SUSS MJB-3) →Optical Spectrum with Filter for i-line Exposure Tag: Visual edit
- 17:40, 3 January 2023 diff hist +170 Suss Aligners (SUSS MJB-3) added alignment marks GDS file, made optical spectra smaller. Tag: Visual edit
- 17:38, 3 January 2023 diff hist +135 Contact Aligner (SUSS MA-6) →Documentation: added link to alignment mark GDS file Tag: Visual edit
- 15:32, 3 January 2023 diff hist +481 ASML Stepper 3 - UCSB Test Reticles →Alignment Markers: added CAD files for alignment marks Tag: Visual edit
- 15:29, 3 January 2023 diff hist +72 N File:MA6-FrontBack AlignMarks only.gds CAD File for front/back alignment marks on Contact Aligner current
- 15:26, 3 January 2023 diff hist +90 N File:Contact-AlignFront.gds CAD file for contact alignment mark, as printed on ASML DUV Mask "UCSB-OPC1" current
- 15:25, 3 January 2023 diff hist +95 N File:EBL-GlobalMulti NEG.gds CAD file for EBL negative alignment mark, as printed on ASML DUV mask "UCSB-OPC1" current
- 15:23, 3 January 2023 diff hist +72 N File:EBL-GlobalMulti POS.gds EBL Alignment Mark as printed on ASML DUV Mask "UCSB-OPC1" current
- 15:22, 3 January 2023 diff hist +84 N File:GCA stepper align.gds GCA Stepper Alignment Mark as drawn on ASML DUV Mask Plate "UCSB-OPC1" current
- 11:06, 31 December 2022 diff hist -3 m Template:News →Raith Velion: FIB/SEM Installation
- 11:05, 31 December 2022 diff hist +42 Template:Announcements Lab open after Xmas shutdown
- 08:36, 22 December 2022 diff hist +33 Holographic Lith/PL Setup (Custom) →Detailed Specifications: added max sample size Tag: Visual edit
- 21:15, 21 December 2022 diff hist -393 Template:Announcements nanofab holiday closure
- 10:50, 21 December 2022 diff hist -12 m Stepper Recipes →Anti-Reflective Coatings: removed bold Tag: Visual edit
- 10:49, 21 December 2022 diff hist +19 m Stepper Recipes →Anti-Reflective Coatings Tag: Visual edit
- 10:48, 21 December 2022 diff hist +838 Stepper Recipes →Stepper 3 (ASML DUV): added TOC Tag: Visual edit
- 08:34, 19 December 2022 diff hist -8 m Dry Etching Recipes Tag: Visual edit
- 08:33, 19 December 2022 diff hist +9 Dry Etching Recipes fix Pan1/AlGaAs link Tag: Visual edit
- 00:23, 16 December 2022 diff hist +871 N E-Beam 5 (Plasys) inital page and descriptions Tag: Visual edit: Switched
- 15:58, 15 December 2022 diff hist +112 Stepper Recipes →DS-K101-304: changed spin speed to 2500rpm Tag: Visual edit
- 14:39, 15 December 2022 diff hist +23 Tool List →Thermal Evaporation: Added EBeam 5 (plasys) link to new page Tag: Visual edit
- 15:25, 14 December 2022 diff hist -66 Template:Announcements asml up
- 14:47, 14 December 2022 diff hist +101 Lithography Recipes →Automated Coat/Develop System Recipes (S-Cubed Flexi): note about DSK@220C equivalence to DUV42P Tag: Visual edit
- 07:57, 13 December 2022 diff hist -1 Wafer Cleaver (PELCO Flip-Scribe) changed room --> ESB 1111 current Tag: Visual edit
- 07:53, 13 December 2022 diff hist -48 Template:Announcements ASML Down: laser fail
- 11:17, 12 December 2022 diff hist +126 Microscopes →Microscope Training Guide: basic list of topics Tag: Visual edit
- 21:53, 11 December 2022 diff hist -1 m Template:Announcements
- 21:52, 11 December 2022 diff hist +5 m Template:Announcements
- 21:49, 11 December 2022 diff hist +17 Template:Announcements asml laser pm update
- 00:36, 10 December 2022 diff hist -899 Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher added comment about NP vs ND meas, deleted extraneous tables of old non-standard measurements Tag: Visual edit
- 00:28, 10 December 2022 diff hist +114 Frequently Asked Questions →How do I get my files from the NanoFab computers?: mentioned allowed folder names Tag: Visual edit
- 00:23, 10 December 2022 diff hist -3 m Autostep 200 Mask Making Guidance →CAD Files Tag: Visual edit
- 08:17, 9 December 2022 diff hist +33 m Other Dry Etching Recipes →CAIBE (Oxford Ion Mill): spelling correction current Tag: Visual edit
- 16:55, 6 December 2022 diff hist +13 Template:Announcements EB2 heater update
- 16:52, 6 December 2022 diff hist -550 Process Group - Remote Fabrication Jobs updated to Trello current Tag: Visual edit
- 13:49, 6 December 2022 diff hist +9 m Tube Furnace (Tystar 8300) →Gases Available Tag: Visual edit
- 13:47, 6 December 2022 diff hist -4 m Rapid Thermal Processor (SSI Solaris 150) →Detailed Specificiations: bullets Tag: Visual edit
- 11:34, 6 December 2022 diff hist +181 N File:UCSB ASML DUV Stepper - Programming Worksheet.pptx Similar to ASML programming spreadsheet, with Image coords/sizes, but also includes diagrams and wafer layout specs. More in depth version of prrogramming spreadsheet. current
- 11:19, 6 December 2022 diff hist +165 Stepper 3 (ASML DUV) →Design Tools: note about JobCreator outage Tag: Visual edit
- 17:16, 2 December 2022 diff hist +745 ICP Etching Recipes →Si Etching (Fluorine ICP Etcher): added Al2O3/SiO2 masking procedure Tag: Visual edit
- 17:09, 2 December 2022 diff hist +25 Dry Etching Recipes fixed FL-ICP: Si link Tag: Visual edit
- 12:23, 1 December 2022 diff hist +20 Direct-Write Lithography Recipes converted File links to Media links (open PDF directly) Tag: Visual edit
- 12:20, 1 December 2022 diff hist 0 Direct-Write Lithography Recipes testing File-->Media link
- 12:20, 1 December 2022 diff hist +443 Contact Alignment Recipes links to all PR datasheets current Tag: Visual edit
- 12:16, 1 December 2022 diff hist +17 Direct-Write Lithography Recipes linkto nLOF2020 Tag: Visual edit
- 12:14, 1 December 2022 diff hist 0 File:AXP4000pb-Datasheet.pdf John d uploaded a new version of File:AXP4000pb-Datasheet.pdf current
- 12:10, 1 December 2022 diff hist -42 Contact Alignment Recipes added some of the PR datasheet links Tag: Visual edit
- 00:12, 30 November 2022 diff hist +323 MLA150 - Design Guidelines →Greyscale Lithography: clarified levels and linked to GDSpy Tag: Visual edit
- 17:47, 28 November 2022 diff hist +206 Template:Announcements ASML Dec 12th Laser PM
- 10:54, 28 November 2022 diff hist +111 RIE 5 (PlasmaTherm) →Detailed Specifications: added laser monitor current Tag: Visual edit
- 16:29, 23 November 2022 diff hist +985 Maskless Aligner (Heidelberg MLA150) →Video Trainings: added old video training back Tag: Visual edit
- 11:41, 23 November 2022 diff hist +682 Wet Benches →Plating Bench: added basic info of what is/isn't provided. Tag: Visual edit
- 11:36, 23 November 2022 diff hist +67 Frequently Asked Questions →Bring a new chemical/material into the lab Tag: Visual edit
- 16:57, 22 November 2022 diff hist +42 IBD: Calibrating Optical Thickness minor corrections Tag: Visual edit
- 10:22, 22 November 2022 diff hist +616 Laser Etch Monitoring self-training allowed Tag: Visual edit
- 09:28, 22 November 2022 diff hist +243 ASML Stepper 3 Standard Operating Procedure →Running a focus and/or exposure matrix: added how to view/modufy exposure before exposing Tag: Visual edit
- 14:32, 20 November 2022 diff hist +11 Staff List added Vraj Tel# Tag: Visual edit
- 13:52, 20 November 2022 diff hist +351 N Vraj Mehalana Added contact info & basic info guesses Tag: Visual edit: Switched
- 13:48, 20 November 2022 diff hist +68 Staff List →Financial & Administrative: added Vraj M Tag: Visual edit
- 09:26, 20 November 2022 diff hist +132 Template:Announcements Lee's MA6 service
- 18:44, 15 November 2022 diff hist -553 Sputtering Recipes →Ion Beam Deposition (Veeco NEXUS): fixed links to Historical Data fro SiO/TaO Tag: Visual edit
- 18:14, 15 November 2022 diff hist -132 PECVD Recipes fixed links to pre-2022 historical data Tag: Visual edit
- 16:56, 15 November 2022 diff hist +120 Process Group - Process Control Data link to Old pre-2022 Dep data Tag: Visual edit
- 08:49, 15 November 2022 diff hist -164 Template:Announcements deleete veterans day
- 08:48, 15 November 2022 diff hist -126 Template:Announcements JEOL SEM UP
- 11:43, 14 November 2022 diff hist +173 Photolithography - Manual Edge-Bead Removal Techniques →Lithographic Edge Bead Removal: added location of EBR photo mask Tag: Visual edit
- 13:25, 11 November 2022 diff hist +37 m ICP Etching Recipes →Through Silicon Via etch (DSEiii): author credit Tag: Visual edit
- 13:23, 11 November 2022 diff hist +3,783 ICP Etching Recipes →DSEIII_(PlasmaTherm/Deep_Silicon_Etcher): added procedure for through-wafer etch Tag: Visual edit
- 13:14, 11 November 2022 diff hist +99 Packaging Recipes →Wafer Bonder (Logitech WBS7): reocmmandations on each Tag: Visual edit
- 13:06, 11 November 2022 diff hist -116 Ashers (Technics PEII) →Recipes: link to recipes page, deleted recipes form this page current Tag: Visual edit
- 13:05, 11 November 2022 diff hist -64 Oxygen Plasma System Recipes →Chamber Clean after CF4 Etching: deleted 300W recipe Tag: Visual edit
- 08:37, 11 November 2022 diff hist +16 m Template:Announcements
- 08:35, 11 November 2022 diff hist -822 Template:Announcements deleted ASML msgs, MLA150 msg
- 08:35, 11 November 2022 diff hist +148 Template:Announcements Vet day holiday
- 21:23, 10 November 2022 diff hist -5 m Wet Etching Recipes →Organic removal Tag: Visual edit
- 15:12, 9 November 2022 diff hist +182 Template:Announcements evg down
- 15:11, 9 November 2022 diff hist +32 m Stepper 3 (ASML DUV) →Training Procedure Tag: Visual edit
- 15:07, 9 November 2022 diff hist +497 Stepper 3 (ASML DUV) →Online Video Trainings: added "training procedure" section Tag: Visual edit
- 14:41, 8 November 2022 diff hist +1 m Automated Coat/Develop System (S-Cubed Flexi) →Recipes current Tag: Visual edit
- 14:41, 8 November 2022 diff hist -1 m Automated Coat/Develop System (S-Cubed Flexi)
- 14:41, 8 November 2022 diff hist +267 Automated Coat/Develop System (S-Cubed Flexi) link to recipes table Tag: Visual edit
- 14:39, 8 November 2022 diff hist +10 m S-Cubed Flexi - Operating Procedure current Tag: Visual edit
- 14:39, 8 November 2022 diff hist -541 S-Cubed Flexi - Operating Procedure →Allowed Recipes: link to recipes Tag: Visual edit
- 14:38, 8 November 2022 diff hist +128 Lithography Recipes link to Auto-coater recipes Tag: Visual edit
- 14:36, 8 November 2022 diff hist +2 m Lithography Recipes rmeove TOC
- 14:36, 8 November 2022 diff hist -2 Lithography Recipes add TOC tmeporarily
- 14:35, 8 November 2022 diff hist +3,162 Lithography Recipes →Automated Coat/Develop System Recipes (S-Cubed Flexi): added recipes table Tag: Visual edit
- 14:19, 8 November 2022 diff hist +256 Automated Coat/Develop System (S-Cubed Flexi) indicated which PR's/chems are availabelf for general use Tag: Visual edit
- 13:19, 8 November 2022 diff hist +199 Stepper Recipes →Positive Resist (ASML DUV): added UV26 Tag: Visual edit: Switched
- 13:25, 4 November 2022 diff hist -258 Template:Announcements ASML PM Complete
- 19:13, 3 November 2022 diff hist -410 Template:Announcements deleted JEOL talk
- 16:25, 1 November 2022 diff hist -3 Template:Announcements SEM#1 up
- 08:47, 29 October 2022 diff hist 0 Template:Announcements moved ASML maint higher and increased date
- 08:46, 29 October 2022 diff hist +410 Template:Announcements JEOL EBL Seminar
- 08:35, 29 October 2022 diff hist +85 ICP Etching Recipes →Photoresist and ARC etching (Panasonic 2): link to DUV42P and added thickness Tag: Visual edit
- 08:33, 29 October 2022 diff hist +4 Lithography Recipes →Photolithography Recipes: corrected DUV42p link Tag: Visual edit
- 16:01, 27 October 2022 diff hist +132 Template:Announcements SEM1 down
- 15:44, 27 October 2022 diff hist +291 Nanofab Job Postings added direct link to job posting Tag: Visual edit
- 15:21, 27 October 2022 diff hist +1 Ellipsometer (Woollam) corrected link Tag: Visual edit
- 15:21, 27 October 2022 diff hist 0 m Ellipsometer (Woollam) - Measuring thin metals with oxide pre-measurement John d moved page Ellipsometer (Woolam) - Measuring thin metals with oxide pre-measurement to Ellipsometer (Woollam) - Measuring thin metals with oxide pre-measurement without leaving a redirect: Woollam misspelled as "woolam"
- 15:20, 27 October 2022 diff hist +2,069 N Ellipsometer (Woollam) - Measuring thin metals with oxide pre-measurement pasted Demis' instructions Tag: Visual edit
- 15:17, 27 October 2022 diff hist +140 Ellipsometer (Woollam) →Operating Procedures: added link to oxide-pre-meas instructions Tag: Visual edit
- 08:48, 27 October 2022 diff hist +127 Template:Announcements Au Plating bench down
- 17:11, 26 October 2022 diff hist +62 ICP-PECVD (Unaxis VLR) →About: added SiO2 gap-fill note Tag: Visual edit
- 14:17, 25 October 2022 diff hist +43 Atomic Layer Deposition Recipes →SiO2 deposition (ALD CHAMBER 3): added temperature-variation/recipes avaialble on tool Tag: Visual edit
- 12:03, 25 October 2022 diff hist +60 E-Beam 2 (Custom) →Materials Table: fixed recipes link, bolded heating/oxygen Tag: Visual edit
- 11:59, 25 October 2022 diff hist +91 E-Beam Evaporation Recipes →Materials Table (E-Beam #2): note that data is outdated current Tag: Visual edit
- 11:44, 25 October 2022 diff hist +108 Wet Etching Recipes →Table of Wet Etching Recipes: added header row to bottom Tag: Visual edit: Switched
- 11:42, 25 October 2022 diff hist +141 Wet Etching Recipes move table to top, recipes to bottom, subheadings, added PureStrip info Tag: Visual edit
- 15:59, 24 October 2022 diff hist +4 Mechanical Polisher (Allied) update to {{tool2}}, set Room = 1111
- 01:14, 19 October 2022 diff hist +192 Template:Tool2 →Version: added todo, and newlines current
- 01:11, 19 October 2022 diff hist -4 DUMMY TOOL current
- 01:11, 19 October 2022 diff hist +84 DUMMY TOOL
- 01:10, 19 October 2022 diff hist +4 Template:Tool2 if no recipes, display "Recipes: N/A"
- 01:07, 19 October 2022 diff hist +185 Template:Tool2test current
- 01:06, 19 October 2022 diff hist +4 DUMMY TOOL
- 01:05, 19 October 2022 diff hist -4 DUMMY TOOL
- 01:03, 19 October 2022 diff hist -14 Template:Tool2 remove width=200
- 01:01, 19 October 2022 diff hist -25 Template:Tool2 remove if:recipes
- 00:58, 19 October 2022 diff hist +25 Template:Tool2
- 00:57, 19 October 2022 diff hist +3 Template:Tool2
- 00:55, 19 October 2022 diff hist 0 Template:Tool2
- 00:53, 19 October 2022 diff hist -22 Template:Tool2
- 00:51, 19 October 2022 diff hist +24 Template:Tool2 bolded "sign up for this tool"
- 00:47, 19 October 2022 diff hist +195 Template:Tool2 Made Mfg,Model,Description optional & italics, not bold
- 00:44, 19 October 2022 diff hist +4 Template:Tool2test
- 00:43, 19 October 2022 diff hist -2 Template:Tool2test
- 00:41, 19 October 2022 diff hist 0 Template:Tool2test
- 00:38, 19 October 2022 diff hist +9 Template:Tool2test
- 00:35, 19 October 2022 diff hist +8 DUMMY TOOL
- 00:34, 19 October 2022 diff hist +127 Template:Tool2test make mfg/model not bold and optional (in conditioanls
- 00:30, 19 October 2022 diff hist +37 DUMMY TOOL
- 00:28, 19 October 2022 diff hist +89 Wet Benches →Wafer Toxic Corrosive Benches: changed to tool2, added MikeDay as backup, added materials,mfg,description
- 00:23, 19 October 2022 diff hist +157 Template:Tool2 added "IF" conditional around "recipes" section.
- 00:21, 19 October 2022 diff hist 0 Template:Tool2test
- 00:20, 19 October 2022 diff hist 0 Template:Tool2test
- 00:18, 19 October 2022 diff hist 0 Template:Tool2test
- 00:17, 19 October 2022 diff hist +11 m DUMMY TOOL added type, to remove Category text
- 17:06, 18 October 2022 diff hist +25 Template:Tool2test
- 17:05, 18 October 2022 diff hist -83 DUMMY TOOL try with blank args
- 17:04, 18 October 2022 diff hist +4 DUMMY TOOL trying tool2 updates, tool2test
- 17:03, 18 October 2022 diff hist +7,182 N Template:Tool2test pasted from tool2
- 16:27, 17 October 2022 diff hist +180 Template:Announcements MLA150 software update notes
- 16:24, 17 October 2022 diff hist -229 Template:Announcements Therma Evap 1 up
- 16:23, 17 October 2022 diff hist +232 Template:Announcements ASML maint
- 16:01, 15 October 2022 diff hist +245 Stepper Recipes →Stepper 3 (ASML DUV): LinkedIn to Design Tools section Tag: Visual edit
- 21:53, 13 October 2022 diff hist +55 Lithography Recipes →Chemicals Stocked + Datasheets: added AZ4620 + link to datasheet Tag: Visual edit
- 21:50, 13 October 2022 diff hist -528 Lithography Recipes →General Photolithography Techniques: deleted EBR section, combined it into this section Tag: Visual edit
- 21:49, 13 October 2022 diff hist +451 Photolithography - Manual Edge-Bead Removal Techniques added reasons for EBR and TOC
- 21:43, 13 October 2022 diff hist +2 m Lithography Recipes delete TOC
- 21:42, 13 October 2022 diff hist -2 Lithography Recipes TEMP TOC to get link
- 21:42, 13 October 2022 diff hist +215 Lithography Recipes Other PR processes, added link to reflow info Tag: Visual edit
- 11:14, 8 October 2022 diff hist +37 m Frequently Asked Questions →Authorship on Publications: minor updates Tag: Visual edit
- 20:51, 6 October 2022 diff hist -29 Stepper 2 (AutoStep 200) removed "work in progress" for Mask Making page Tag: Visual edit
- 20:51, 6 October 2022 diff hist +441 Autostep 200 Mask Making Guidance →CAD Files: todo: missing 'reticle handbook" Tag: Visual edit: Switched
- 10:52, 6 October 2022 diff hist -565 Maskless Aligner (Heidelberg MLA150) →Video Trainings: deleted old video link, notice of re-recording Tag: Visual edit
- 23:55, 4 October 2022 diff hist +223 Template:Announcements added NanoFab job openings
- 23:52, 4 October 2022 diff hist -4 m Template:Announcements
- 23:42, 4 October 2022 diff hist 0 Staff List →Process Group: Ning Cao --> OPEN POSITION Tag: Visual edit
- 23:41, 4 October 2022 diff hist +1,071 N Nanofab Job Postings linked to UCSB Jobs pages, instructios, listed Process Technician position Tag: Visual edit
- 23:06, 4 October 2022 diff hist +70 ASML DUV: Edge Bead Removal via Photolithography current Tag: Visual edit
- 23:04, 4 October 2022 diff hist +171 Photolithography - Manual Edge-Bead Removal Techniques →EBR100 Tag: Visual edit
- 23:01, 4 October 2022 diff hist +12 m Lithography Recipes →Edge-Bead Removal: bolded Tag: Visual edit
- 23:00, 4 October 2022 diff hist +41 m Lithography Recipes remove TOC, fix EBR link Tag: Visual edit: Switched
- 22:58, 4 October 2022 diff hist -2 Lithography Recipes TEMP TOC force
- 22:58, 4 October 2022 diff hist +949 Lithography Recipes added edge-bead removal section Tag: Visual edit
- 22:50, 4 October 2022 diff hist -32 DSEIII (PlasmaTherm/Deep Silicon Etcher) fixed link to SOP Tag: Visual edit
- 22:49, 4 October 2022 diff hist +52 N File:Running a process.pdf John d moved page File:Running a process.pdf to File:PT-DSEiii - Running a process.pdf: added tool name to title current Tag: New redirect
- 22:49, 4 October 2022 diff hist 0 m File:PT-DSEiii - Running a process.pdf John d moved page File:Running a process.pdf to File:PT-DSEiii - Running a process.pdf: added tool name to title current
- 22:47, 4 October 2022 diff hist +186 Photolithography - Manual Edge-Bead Removal Techniques linked to DUV Litho EBR Tag: Visual edit
- 13:26, 4 October 2022 diff hist +2 Chemical List →Material Safety Datasheets current Tag: Visual edit
- 13:13, 4 October 2022 diff hist +252 ICP Etching Recipes →Edge-Bead Removal: link to manual RP removal Tag: Visual edit
- 17:08, 3 October 2022 diff hist -360 Template:Announcements deleted GCA's up
- 17:06, 3 October 2022 diff hist +229 Template:Announcements Thermal1 down
- 11:47, 3 October 2022 diff hist +252 m Calculators + Utilities →CAD Design Tips: minor updates Tag: Visual edit
- 10:30, 3 October 2022 diff hist +210 Wet Benches →About: note about HF apron PPE Tag: Visual edit
- 22:52, 1 October 2022 diff hist +76 Tool List →Wet Processing: link to Wafer_Toxic_Corrosive_Bench Tag: Visual edit
- 22:51, 1 October 2022 diff hist +210 Wet Benches →Detailed Specifications: linked KOH bath to SUM Tag: Visual edit
- 16:54, 29 September 2022 diff hist +22 m Dry Etching Recipes fix incorrect color header cell
- 16:47, 29 September 2022 diff hist +74 m Unaxis VLR Etch - Process Control Data bold + colored header row Tag: Visual edit: Switched
- 16:33, 29 September 2022 diff hist +113 ICP Etching Recipes →ICP-Etch (Unaxis VLR): added (empty) section for Unaxis Cleaning Recipes Tag: Visual edit
- 16:31, 29 September 2022 diff hist +186 ICP-Etch (Unaxis VLR) link to recipes, reduce headers to "heading level 1" (were "title" level) current Tag: Visual edit
- 15:44, 29 September 2022 diff hist -145 Template:Announcements ASML network update
- 15:43, 29 September 2022 diff hist -26 Template:Announcements GCA stepper 1 PM done
- 14:28, 29 September 2022 diff hist +245 Filmetrics F40-UV Microscope-Mounted →Good Curve-Fitting: explained reasonable vs. perfect curve fit current Tag: Visual edit
- 08:28, 28 September 2022 diff hist -155 Template:Announcements delete stepper 2 up
- 08:28, 28 September 2022 diff hist -48 Template:Announcements →GCA AutoStep Service: PM complete
- 10:54, 26 September 2022 diff hist -42 Template:Announcements AutoStep up.
- 07:34, 22 September 2022 diff hist +197 Template:Announcements corrected EB3 --> EB2, AUtostep down RMS
- 15:40, 21 September 2022 diff hist +122 Template:Announcements EB2 heater down
- 14:27, 21 September 2022 diff hist -8 Template:Announcements SEM#1 UP
- 08:33, 19 September 2022 diff hist +87 Template:Announcements GCA 6300 PM update
- 08:30, 19 September 2022 diff hist -11 Template:Announcements gca autostep 200 PM update
- 01:53, 17 September 2022 diff hist +77 Template:Announcements asml network update
- 15:50, 16 September 2022 diff hist +85 Sputter 5 (AJA ATC 2200-V) Added detailed specs section & ion mill current Tag: Visual edit
- 09:49, 14 September 2022 diff hist -6 m Template:Announcements
- 13:00, 13 September 2022 diff hist +192 Template:Announcements SEM1 down
- 12:52, 13 September 2022 diff hist +41 Ellipsometer (Woollam) updated wafer size Tag: Visual edit
- 10:04, 13 September 2022 diff hist +86 Optical Film Spectra + Optical Properties (Filmetrics F10-RT-UVX) →Equipment Specifications: addded spot size and glass slides for small samples current Tag: Visual edit
- 10:03, 13 September 2022 diff hist +73 Optical Film Thickness & Wafer-Mapping (Filmetrics F50) Added meas spot size current Tag: Visual edit
- 10:02, 13 September 2022 diff hist +111 Filmetrics F40-UV Microscope-Mounted →Capabilities: added spot size and film thickness limits Tag: Visual edit
- 09:59, 13 September 2022 diff hist +46 Ellipsometer (Woollam) →Specifications: added sample size Tag: Visual edit
- 07:50, 13 September 2022 diff hist -148 Template:Announcements
- 07:50, 13 September 2022 diff hist -49 Template:Announcements aja 4 update
- 09:28, 12 September 2022 diff hist +156 Template:Announcements Sputter 4 down
- 11:05, 9 September 2022 diff hist +26 ICP Etching Recipes →Al2O3 Etching (Panasonic 2): convert to nm/min ER Tag: Visual edit
- 09:58, 9 September 2022 diff hist -683 CC-PRIME OnBoarding 2022-08 linked to QSF video/PDF, removed UCSBNetID requireemnts current Tag: Visual edit
- 09:58, 9 September 2022 diff hist +63 N File:QSF-SOP-020 Policy Guidelines and CHP Rev 2.022.pdf CC-PRIME Onboarding - safety training doc for QSF current
- 19:32, 7 September 2022 diff hist +123 KLayout Design Tips →File Types: Mentioned that MLA150 requires GDS Tag: Visual edit
- 19:30, 7 September 2022 diff hist +370 KLayout Design Tips →File Types: clarify OASIS GDS compatibility Tag: Visual edit
- 18:58, 7 September 2022 diff hist +215 KLayout Design Tips →How to draw circles: better method to convert all Cells to Static Cells Tag: Visual edit
- 18:55, 7 September 2022 diff hist +35 KLayout Design Tips added author credit Tag: Visual edit
- 10:03, 7 September 2022 diff hist -5 m Michael Barreraz current Tag: Visual edit
- 10:02, 7 September 2022 diff hist +4 m User:Barreraz current Tag: Visual edit
- 10:02, 7 September 2022 diff hist +32 N User:Barreraz linked to staff page Tag: Visual edit
- 08:37, 3 September 2022 diff hist -14 Microscopes →Microscope #1: Olympus BHMJL (removed temporarily): changed to Room 1111 Tag: Visual edit
- 08:35, 3 September 2022 diff hist +1,199 KLayout Design Tips link to QNFCF Youtube videos on Cells Tag: Visual edit
- 06:58, 2 September 2022 diff hist +289 Atomic Layer Deposition Recipes →Oxford FlexAL Chamber #1: Metals: added SiO2 recipes Tag: Visual edit
- 10:15, 1 September 2022 diff hist +250 Template:Announcements added GCA Autostep service (Millerski)
- 10:07, 1 September 2022 diff hist -9 Frequently Asked Questions →Who do I contact for an equipment problem or general NanoFab problem?: updated that it texts the supervisor Tag: Visual edit
- 15:01, 31 August 2022 diff hist 0 m Template:Announcements →Chlorine gasses available