User contributions
Jump to navigation
Jump to search
- 11:58, 20 July 2021 diff hist +169 MLA150 - Troubleshooting →Defocus: unable to enter ±25 full range: Added name of recent Resist tempalte "General-Focus" Tag: Visual edit
- 10:50, 15 July 2021 diff hist +583 MLA150 - Design Guidelines →Alignment Marks: comment on mark placement across wafer Tag: Visual edit
- 10:42, 15 July 2021 diff hist +145 MLA150 - Design Guidelines →Automatic Alignment: added Reduced Detection area Tag: Visual edit
- 10:03, 15 July 2021 diff hist +663 MLA150 - Design Guidelines added alignment marks Tag: Visual edit
- 10:53, 14 July 2021 diff hist +65 ICP Etching Recipes →PlasmaTherm/SLR Fluorine Etcher: section header for Cleaning Recipes / TBA Tag: Visual edit
- 10:01, 14 July 2021 diff hist -47 Wet Etching Recipes →The Master Table of Wet Etching (Include All Materials): deleted 2nd "Extra Notes" column, combined date into "Verified by" Tag: Visual edit
- 08:19, 14 July 2021 diff hist +69 Wet Etching Recipes →The Master Table of Wet Etching (Include All Materials): KOH > linked to KOH bath Tag: Visual edit
- 10:46, 13 July 2021 diff hist +41 N File:200um square v1.gds TESTING only - please delte current
- 13:47, 12 July 2021 diff hist +48 m Stepper Recipes →DUV-42P-6: updated etching links Tag: Visual edit
- 13:43, 12 July 2021 diff hist +16 m ICP Etching Recipes →Photoresist and ARC Etching (Panasonic 1): fixed URL link Tag: Visual edit
- 14:19, 9 July 2021 diff hist +928 Atomic Layer Deposition Recipes →Atomic Layer Deposition (Oxford FlexAL): Recipe info on Plasma, Ratios Tag: Visual edit
- 11:49, 9 July 2021 diff hist -2 Services →Other U.C. Campuses: corrected broken email link
- 16:50, 8 July 2021 diff hist +40 Autostep 200 Mask Making Guidance added magnification Tag: Visual edit
- 16:48, 8 July 2021 diff hist +5 Autostep 200 Mask Making Guidance corercted dimensions to 5x5x0.090 Tag: Visual edit
- 16:44, 8 July 2021 diff hist +163 Autostep 200 Mask Making Guidance added Plate materials/dimensions Tag: Visual edit
- 11:20, 7 July 2021 diff hist +88 Nanofab Staff Internal Pages →Process Group: added link to Supplies Costs Tag: Visual edit
- 12:55, 2 July 2021 diff hist +91 Process Group - Billing Instructions →Supplies Costs: sotrage location in notes Tag: Visual edit
- 12:53, 2 July 2021 diff hist -2 m Process Group - Billing Instructions →Supplies Charges: --> Supplies Costs Tag: Visual edit
- 12:53, 2 July 2021 diff hist +51 Process Group - Billing Instructions force TOC
- 12:45, 2 July 2021 diff hist +16 Process Group - Billing Instructions →Supplies Charges: updated prices wafers Tag: Visual edit
- 12:44, 2 July 2021 diff hist +238 Process Group - Billing Instructions added wafer costs Tag: Visual edit
- 11:51, 2 July 2021 diff hist +24 m Process Group - Billing Instructions table title row Tag: Visual edit: Switched
- 11:48, 2 July 2021 diff hist +1,068 Process Group - Billing Instructions added shipping supplies table Tag: Visual edit: Switched
- 11:39, 2 July 2021 diff hist +1,637 N Process Group - Billing Instructions added overhead charges, F&A rate etc. Tag: Visual edit
- 11:36, 2 July 2021 diff hist +27 N File:RechargeApp - 02 - F+A auto v2.png current
- 11:27, 2 July 2021 diff hist +25 N File:RechargeApp - 01 - line items for other charges.png current
- 11:21, 2 July 2021 diff hist +17 m Nanofab Staff Internal Pages Tag: Visual edit
- 11:21, 2 July 2021 diff hist +106 Nanofab Staff Internal Pages →Process Group: link to Billing Instructions Tag: Visual edit
- 23:32, 29 June 2021 diff hist +17 m Chemical List BT --> Lab Director Tag: Visual edit
- 23:31, 29 June 2021 diff hist +466 m Wet Etching Recipes KOH: added mention of "low-stress" SiN Tag: Visual edit
- 23:19, 29 June 2021 diff hist +218 Wet Etching Recipes link to Chemicals List Tag: Visual edit
- 23:09, 29 June 2021 diff hist +33 m Mechanical Polisher (Allied) recipes TBD Tag: Visual edit
- 23:04, 29 June 2021 diff hist -51 Flip-Chip Bonder (Finetech) remove incorrect phone/email tags from Tool template
- 20:35, 23 June 2021 diff hist -801 Process Group - Remote Fabrication Jobs deleted Trello, updated OnDema Tag: Visual edit
- 10:22, 23 June 2021 diff hist +904 Plasma Clean (YES EcoClean) added etch method & applications Tag: Visual edit
- 10:16, 23 June 2021 diff hist +742 Ashers (Technics PEII) →About: applicaitons section Tag: Visual edit
- 09:47, 21 June 2021 diff hist +12 Stepper Recipes →DUV-42P: corrected to 2500rpm for 60nm thick, DUV42P-6 formulation Tag: Visual edit
- 11:30, 17 June 2021 diff hist 0 m Vacuum Deposition Recipes changed IBD SiON A --> R Tag: Visual edit
- 13:46, 14 June 2021 diff hist -293 Template:Announcements ISO spray updat,e deleted ASML maint.
- 10:02, 14 June 2021 diff hist -1 m RIE Etching Recipes →Photoresist and ARC (RIE 5) current Tag: Visual edit
- 10:02, 14 June 2021 diff hist +121 Dry Etching Recipes corrected links to PR & ARC etching Tag: Visual edit
- 10:01, 14 June 2021 diff hist +256 RIE Etching Recipes →Photoresist and ARC: added tool name to header title Tag: Visual edit
- 09:59, 14 June 2021 diff hist +28 ICP Etching Recipes →ICP Etch 1 (Panasonic E626I): corrected header titles to include "(Pan 1/2" Tag: Visual edit
- 10:41, 7 June 2021 diff hist +47 m MLA150 - Troubleshooting →Workaround Tag: Visual edit
- 10:40, 7 June 2021 diff hist +58 m MLA150 - Troubleshooting →Workaround: link to reboot prcedure
- 10:38, 7 June 2021 diff hist +1,997 MLA150 - Troubleshooting Out of Focus exposures - problem + solutions Tag: Visual edit
- 12:12, 3 June 2021 diff hist +175 Vacuum Oven (YES) added info from Brian Lingg current Tag: Visual edit
- 12:09, 3 June 2021 diff hist +114 Ovens - Overview of All Lab Ovens added YES info Tag: Visual edit
- 13:32, 2 June 2021 diff hist +25 m Stepper 3 (ASML DUV) added Model field in Tool templ.
- 13:24, 2 June 2021 diff hist +35 m Vacuum Deposition Recipes BG color of "SiN- Low stress"
- 14:13, 28 May 2021 diff hist +96 Atomic Layer Deposition Recipes →Oxford FlexAL Chamber #3: Dielectrics: started historical data seciton Tag: Visual edit
- 08:34, 27 May 2021 diff hist -2 m Editing Tutorials Tag: Visual edit
- 08:34, 27 May 2021 diff hist +831 Editing Tutorials Updating a file version Tag: Visual edit
- 08:32, 27 May 2021 diff hist 0 File:UCSB-Facilities-Use-Agreement.pdf John d uploaded a new version of File:UCSB-Facilities-Use-Agreement.pdf
- 08:32, 27 May 2021 diff hist 0 File:UCSB Service Agreement.pdf John d uploaded a new version of File:UCSB Service Agreement.pdf
- 08:25, 27 May 2021 diff hist +106 m Frequently Asked Questions →How do I get a login to the wiki?: link to Wiki admin contact page Tag: Visual edit
- 08:07, 27 May 2021 diff hist +19 Template:News →SiO2 etching, High-Aspect Ratio
- 08:05, 27 May 2021 diff hist +51 m Template:News added date to SiO2 etch article
- 08:01, 27 May 2021 diff hist +253 ICP Etching Recipes →SiO2 Etching (Fluorine ICP Etcher): link to publication Tag: Visual edit
- 07:58, 27 May 2021 diff hist +36 ICP Etching Recipes →Ru (Ruthenium) Etch (Panasonic 2): link to pub Tag: Visual edit
- 07:56, 27 May 2021 diff hist +905 Template:News Added info about Bill's SiO2 etching paper
- 07:41, 27 May 2021 diff hist +536 Template:Publications link to Bill's Ru-masked SiO2 paper
- 12:35, 26 May 2021 diff hist +149 Direct-Write Lithography Recipes →Maskless Aligner (Heidelberg MLA150): mention that any I-Line PR will work. Tag: Visual edit
- 13:26, 21 May 2021 diff hist +42 m Template:Announcements
- 13:25, 21 May 2021 diff hist +27 m Template:Announcements
- 13:24, 21 May 2021 diff hist -31 m Template:Announcements linked to new policies directly
- 13:22, 21 May 2021 diff hist +24 m COVID-19 User Policies summary at top of annoucnements Tag: Visual edit
- 15:57, 17 May 2021 diff hist 0 File:Nanofabrication Facility Project Description.xlsx John d uploaded a new version of File:Nanofabrication Facility Project Description.xlsx
- 13:06, 17 May 2021 diff hist +155 Stepper Recipes →DUV-42P: link to FL-ICP and Technics for BARC etches Tag: Visual edit
- 13:04, 17 May 2021 diff hist +526 ICP Etching Recipes →PlasmaTherm/SLR Fluorine Etcher: added BARC and PR etches Tag: Visual edit
- 12:55, 17 May 2021 diff hist +8 m Stepper Recipes →DUV-42P-6: comments on corrected spin speed Tag: Visual edit
- 12:53, 17 May 2021 diff hist +4 Stepper Recipes →DUV-42P: aDDED "-6" to the DUV42P part number Tag: Visual edit
- 12:52, 17 May 2021 diff hist +3 Lithography Recipes →Chemicals Stocked + Datasheets: corrected part number for DUV42P (added "-6") Tag: Visual edit
- 06:17, 17 May 2021 diff hist +8 Nanofab Staff Internal Pages →Process Group: moved lab Stocking to "Old" section Tag: Visual edit
- 06:15, 17 May 2021 diff hist +218 Process Group - Remote Fabrication Jobs link to OnDema.io NanoFab Workspace Tag: Visual edit
- 12:09, 11 May 2021 diff hist +4 Template:News →Wafer Polisher available: link to Lingg's page
- 12:08, 11 May 2021 diff hist +57 m Template:News →Wafer Polisher added to tool list: link to polisher wiki page
- 11:38, 11 May 2021 diff hist +34 Tool List →Wet Processing: link to Mechanical_Polisher_(Allied) Tag: Visual edit
- 11:36, 11 May 2021 diff hist +96 N File:AlliedPolisher10-1110.jpg Photo of Allied Polisher model 10-1110 ; Initial photo - cropped and color boosted current
- 11:33, 11 May 2021 diff hist +620 N Mechanical Polisher (Allied) initial Page
- 16:49, 10 May 2021 diff hist +203 Template:News Added allied polisher
- 06:56, 6 May 2021 diff hist +62 Process Group - Remote Fabrication Jobs link to Trello: UCSB Nanofab Tag: Visual edit
- 06:51, 6 May 2021 diff hist +30 m Process Group - Remote Fabrication Jobs Tag: Visual edit
- 06:50, 6 May 2021 diff hist +10 Process Group - Remote Fabrication Jobs Tag: Visual edit
- 06:50, 6 May 2021 diff hist -43 Process Group - Remote Fabrication Jobs Tag: Visual edit
- 21:34, 5 May 2021 diff hist +920 N Process Group - Remote Fabrication Jobs Trello -filter your own jobs Tag: Visual edit
- 21:33, 5 May 2021 diff hist +46 N File:Board - Search Cards - Select User.png current
- 21:30, 5 May 2021 diff hist +46 N File:Trello - Board - Search Cards.png current
- 21:27, 5 May 2021 diff hist +40 N File:Trello - Board - Show Menu.png current
- 21:22, 5 May 2021 diff hist +136 Nanofab Staff Internal Pages →Process Group: link to Remote Job Tracking Tag: Visual edit
- 09:59, 4 May 2021 diff hist +96 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) →Recipes: mention historical data Tag: Visual edit
- 09:56, 4 May 2021 diff hist +118 ICP Etch 1 (Panasonic E646V) →Recipes: mention historical data Tag: Visual edit
- 09:55, 4 May 2021 diff hist +96 ICP Etch 2 (Panasonic E626I) →Recipes: mentioned historical data Tag: Visual edit
- 06:51, 30 April 2021 diff hist -250 Template:Announcements deleted MLA
- 23:13, 28 April 2021 diff hist -1 m Main Page minor updates
- 23:10, 28 April 2021 diff hist -600 Template:FeaturedArticle current
- 23:06, 28 April 2021 diff hist +23 Editing Tutorials →Editing an Existing Page: link to how to get a login Tag: Visual edit
- 22:56, 28 April 2021 diff hist +443 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →Common Warnings: updated warnings Tag: Visual edit
- 22:44, 28 April 2021 diff hist -22 Template:Announcements deleted ASML 4/26, added HIMT 4/29
- 12:54, 21 April 2021 diff hist +30 Laser Etch Monitor Simulation in Python author credits. current Tag: Visual edit
- 08:11, 20 April 2021 diff hist -765 Template:Announcements deleted Flu Season notice, shortened Weekly Testing article
- 08:07, 20 April 2021 diff hist +272 Template:Announcements asml service Apr 26th 2021
- 07:32, 20 April 2021 diff hist +390 Template:Announcements ASML May service
- 19:55, 16 April 2021 diff hist +175 Frequently Asked Questions →Authorship on Publications: note on process discusssions Tag: Visual edit
- 18:32, 16 April 2021 diff hist +364 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F): Reduced Heading Levels below "Page Title" Tag: Visual edit
- 15:53, 16 April 2021 diff hist -190 Template:Announcements deleted "lab shutdown"
- 09:36, 16 April 2021 diff hist +84 ICP Etching Recipes →SiO2 Etching (Fluorine ICP Etcher): added ER and Sel for 50W & 200W bias Tag: Visual edit
- 11:14, 12 April 2021 diff hist 0 File:ASML Reticle Programming Params - MASKJAN2020 v1.xlsx John d uploaded a new version of File:ASML Reticle Programming Params - MyReticleBarCode v1.xlsx
- 16:13, 9 April 2021 diff hist +1 m Template:News →Digital Microscope: Olympus DSX-1000: correct model in text
- 11:35, 9 April 2021 diff hist +820 Microscopes Added Scope7: Olympus DSX1000 Tag: Visual edit
- 11:29, 9 April 2021 diff hist -2,040 Digital Microscope (Olympus DSX1000) initial updates
- 11:29, 9 April 2021 diff hist +2,040 Laser Scanning Confocal M-scope (Olympus LEXT) revert back to TonyB's April 2020 revision.
- 11:25, 9 April 2021 diff hist -2,040 Laser Scanning Confocal M-scope (Olympus LEXT) initial page
- 11:20, 9 April 2021 diff hist +2,720 N Digital Microscope (Olympus DSX1000) pasted LEXT page source
- 11:19, 9 April 2021 diff hist +82 Tool List →Inspection, Test and Characterization: Link to Olympus DSX1000 page Tag: Visual edit
- 11:14, 9 April 2021 diff hist +1 m Template:News →Digital Microscope: Olympus DX-1000: Corrected model number to DSX
- 13:49, 8 April 2021 diff hist +337 Template:News Olympus DX-1000 announcemnet
- 20:50, 6 April 2021 diff hist +109 m Lithography Recipes →Photolithography Recipes: corrected row colors, link to XHRiC
- 20:47, 6 April 2021 diff hist +37 Lithography Recipes →Photolithography Recipes: added XHRiC BARC to table, and "A" for many PR's previouly blank on MLA150 Tag: Visual edit
- 20:44, 6 April 2021 diff hist +38 m Lithography Recipes TOC formatting Tag: Visual edit
- 20:39, 6 April 2021 diff hist +780 Lithography Recipes linked to each page of litho recipes Tag: Visual edit: Switched
- 09:19, 31 March 2021 diff hist +1,520 N KLayout Design Tips copied from parent page, and added non-orthogonal arrays issue Tag: Visual edit
- 09:15, 31 March 2021 diff hist +53 N File:KLayout - Non-Orthogonal Arrays.png current
- 09:13, 31 March 2021 diff hist +148 Calculators + Utilities →KLayout: link to KLayout Design Tips page Tag: Visual edit
- 15:58, 25 March 2021 diff hist +2 Template:Announcements moved GCA items into main RSS section
- 08:19, 20 March 2021 diff hist -361 Template:Announcements Delete MLA & ASML
- 15:00, 19 March 2021 diff hist +204 MLA150 - Troubleshooting →Nanofiles folder not showing up on SFTP: link to FAQ on Nanofiles FTP Tag: Visual edit
- 14:59, 19 March 2021 diff hist +596 MLA150 - Troubleshooting →Known Bugs & Workarounds: added "Nanofiles folder not showing up" Tag: Visual edit
- 14:55, 19 March 2021 diff hist +331 MLA150 - Troubleshooting →Defocus: unable to enter ±25 full range: updated Tag: Visual edit
- 08:45, 16 March 2021 diff hist +3 m Frequently Asked Questions Tag: Visual edit
- 08:44, 16 March 2021 diff hist +14 m Frequently Asked Questions Tag: Visual edit
- 08:43, 16 March 2021 diff hist +127 Frequently Asked Questions added NanoFab@ece.ucsb.edu note at the top.
- 07:17, 16 March 2021 diff hist +186 Template:Announcements MLA maint.
- 09:56, 15 March 2021 diff hist +11 Focused Ion-Beam Lithography (Raith Velion) added toolid, removed WIP, Pt dep/writing current
- 09:42, 15 March 2021 diff hist +14 Template:Announcements asml calibrated/ready for use
- 07:23, 15 March 2021 diff hist 0 m Template:Announcements
- 06:29, 15 March 2021 diff hist +32 Template:Announcements ASML temp stable/cals
- 16:12, 11 March 2021 diff hist -443 Template:Announcements deleted compressor note, ASML Open for use
- 14:19, 10 March 2021 diff hist +235 Tube Furnace (Tystar 8300) →Process Information: added Gases Available Tag: Visual edit
- 10:13, 9 March 2021 diff hist +31 m Services →Request Remote Fabrication Services: minor emphasis Tag: Visual edit
- 10:11, 9 March 2021 diff hist +25 Services point to 'fab svc on this page instgead of Wix Tag: Visual edit
- 11:41, 5 March 2021 diff hist -4 m Calculators + Utilities →KLayout: large files comments Tag: Visual edit
- 12:54, 3 March 2021 diff hist +412 Services Remote Fab Svc: added UCSB & Inter-UC paperwork Tag: Visual edit
- 19:56, 1 March 2021 diff hist -13 Template:Announcements CR open, compressors
- 12:55, 1 March 2021 diff hist +74 Stepper Recipes →DUV-42P: added 2500rpm note Tag: Visual edit
- 06:23, 1 March 2021 diff hist -143 m Template:Announcements updated post time
- 06:21, 1 March 2021 diff hist +394 Template:Announcements cleanroom closed, compressor down
- 15:50, 26 February 2021 diff hist +386 Laser Etch Monitoring →Procedures: Linked to video training Tag: Visual edit
- 07:46, 26 February 2021 diff hist +31 Atomic Layer Deposition Recipes →Al2O3 deposition (ALD CHAMBER 3): rate on AlOx / O* ~2x faster Tag: Visual edit
- 18:54, 24 February 2021 diff hist +31 Lift-Off with DUV Imaging + PMGI Underlayer →Tips: changed to 2x underlayer thickness Tag: Visual edit
- 10:13, 23 February 2021 diff hist +13 Category:NOID current
- 10:12, 23 February 2021 diff hist +790 N ASML Stepper 3 - Substrates smaller than 100mm/4-inch initial topic placeholders current Tag: Visual edit
- 07:46, 23 February 2021 diff hist +109 Stepper 3 (ASML DUV) →Operating Procedures: link to "ASML Stepper 3 - Substrates smaller than 100mm/4-inch" Tag: Visual edit
- 23:57, 22 February 2021 diff hist +24 m Maskless Aligner (Heidelberg MLA150) Tag: Visual edit: Switched
- 23:56, 22 February 2021 diff hist -28 Maskless Aligner (Heidelberg MLA150) →Video Trainings: New Video Training (v2) Tag: Visual edit: Switched
- 14:02, 18 February 2021 diff hist +34 Maskless Aligner (Heidelberg MLA150) →Detailed Specifications: updated ALignment specs from FAT Tag: Visual edit
- 11:40, 17 February 2021 diff hist -3 E-Beam 1 (Sharon) changed "material tables" to "recipes" to be consistent with rest of site. Tag: Visual edit
- 09:23, 17 February 2021 diff hist +178 Atomic Layer Deposition Recipes →Atomic Layer Deposition (Oxford FlexAL): note on plasma being faster Tag: Visual edit
- 08:55, 17 February 2021 diff hist +335 Template:Announcements ASML PM March 8th
- 10:03, 16 February 2021 diff hist +39 PECVD 2 (Advanced Vacuum) →Recipes: mention historical data Tag: Visual edit
- 04:50, 9 February 2021 diff hist +2 m MLA150 - Troubleshooting →Defocus: unable to enter ±25 full range: typo Tag: Visual edit
- 10:22, 8 February 2021 diff hist +38 Maskless Aligner (Heidelberg MLA150) →Detailed Specifications: added max write area Tag: Visual edit
- 12:27, 5 February 2021 diff hist +53 m MLA150 - Large Image GDS Generation Tag: Visual edit
- 12:05, 5 February 2021 diff hist +422 MLA150 - Troubleshooting added "Stage not centered" Tag: Visual edit
- 23:14, 2 February 2021 diff hist +248 ICP Etching Recipes →PlasmaTherm/SLR Fluorine Etcher: SiVertHF: note on removing Native SiO2 Tag: Visual edit
- 23:08, 2 February 2021 diff hist +73 ICP Etching Recipes added (Fluorine ICP Etcher) to titles Tag: Visual edit
- 17:18, 2 February 2021 diff hist 0 Stepper 3 (ASML DUV) corrected PanOpto video traing link Tag: Visual edit
- 18:11, 1 February 2021 diff hist +64 m Thermal Processing Recipes →Tystar 8300 Tag: Visual edit
- 18:08, 1 February 2021 diff hist +235 Tube Furnace (Tystar 8300) →Recipes: link to recipes page Tag: Visual edit
- 10:28, 1 February 2021 diff hist +255 Services →Request Remote Fabrication Services: separate "paperwork" section for Fab Svc Tag: Visual edit
- 10:22, 1 February 2021 diff hist +1,811 Services →Fabrication Services by NanoFab Staff: pasted Services text - same as the nanotech page. minor updates. Tag: Visual edit
- 10:13, 1 February 2021 diff hist 0 File:UCSB Service Agreement.pdf John d uploaded a new version of File:UCSB Service Agreement.pdf
- 10:09, 1 February 2021 diff hist +79 N Category:COVID description current Tag: Visual edit
- 11:08, 30 January 2021 diff hist +64 Process Group - Lab Stocking/Supplies Tasks Update: not needed. current Tag: Visual edit
- 11:07, 30 January 2021 diff hist +323 ASML Stepper 3 Dicing Guide Programming Update: state doesn’t work and workaround. current Tag: Visual edit
- 06:24, 27 January 2021 diff hist +964 ICP Etching Recipes →High Rate Bosch Etch (DSEIII): Bsoch PR selectivity, tips to reduce black silicon, edge bead removal process link Tag: Visual edit
- 06:21, 27 January 2021 diff hist +28 ASML DUV: Edge Bead Removal via Photolithography credits and date Tag: Visual edit
- 06:18, 27 January 2021 diff hist +138 ASML DUV: Edge Bead Removal via Photolithography note on I-line process Tag: Visual edit
- 14:59, 23 January 2021 diff hist +443 MLA150 - Troubleshooting →Known Bugs & Workarounds: added Exposure Log. Tag: Visual edit
- 13:46, 21 January 2021 diff hist +945 MLA150 - Troubleshooting added Focal Depth motor (contact staff) and Covert not launching Tag: Visual edit
- 13:32, 21 January 2021 diff hist +9 MLA150 - Troubleshooting moved TOC below summary
- 13:31, 21 January 2021 diff hist +1,787 N MLA150 - Troubleshooting added Defocus bug and Compuer Restart. Tag: Visual edit
- 11:32, 21 January 2021 diff hist +161 Maskless Aligner (Heidelberg MLA150) →Documentation: link to MLA150 - Troubleshoting Tag: Visual edit
- 00:40, 21 January 2021 diff hist +427 Oxygen Plasma System Recipes →Plasma Clean (YES EcoClean): guidelines added Tag: Visual edit
- 00:37, 21 January 2021 diff hist +5 m Oxygen Plasma System Recipes →O2 Ashing Tag: Visual edit
- 00:37, 21 January 2021 diff hist +538 Oxygen Plasma System Recipes →Ashers (Technics PEII): added O2 ashing recipes Tag: Visual edit
- 10:06, 20 January 2021 diff hist +186 Sputter 5 (AJA ATC 2200-V) link to recipes Tag: Visual edit
- 08:17, 20 January 2021 diff hist +85 Lift-Off with DUV Imaging + PMGI Underlayer →Suggested Process for Liftoff: ultrasonic note Tag: Visual edit
- 08:13, 20 January 2021 diff hist -1 m Calculators + Utilities →KLayout: reduced recommended number of polygon points Tag: Visual edit
- 08:10, 20 January 2021 diff hist +967 Calculators + Utilities →KLayout: handling large files Tag: Visual edit
- 07:50, 20 January 2021 diff hist 0 File:ASML Reticle Programming Params - MASKJAN2020 v1.xlsx John d uploaded a new version of File:ASML Reticle Programming Params - MyReticleBarCode v1.xlsx
- 07:42, 20 January 2021 diff hist +115 Nanofab Staff Internal Pages link to ASML dicing guide prog. Tag: Visual edit
- 06:33, 15 January 2021 diff hist -665 Template:Announcements deleted "new tool installs"
- 23:15, 12 January 2021 diff hist -2,647 GoPro Hero8 Black (Internal) link to Uploading instructions current Tag: Visual edit
- 23:14, 12 January 2021 diff hist +1,153 N Video Training: Uploading to GauchoCast/Panopto (Internal) pasted info from GoPro page Tag: Visual edit
- 18:31, 12 January 2021 diff hist +9 m ICP Etch 2 (Panasonic E626I) →Documentation: minor formatting Tag: Visual edit
- 18:24, 12 January 2021 diff hist +264 GoPro Hero8 Black (Internal) added photo of GoPro + Headstrap Tag: Visual edit
- 18:21, 12 January 2021 diff hist +62 N File:Photo - GoPro Black 8 and Headstrap.png current
- 10:49, 12 January 2021 diff hist 0 m Vacuum Deposition Recipes SPutt4: Ru: A-->R Tag: Visual edit
- 10:48, 12 January 2021 diff hist +50 Vacuum Deposition Recipes added link to APutter 4 : Ru ("A") Tag: Visual edit
- 10:47, 12 January 2021 diff hist +351 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V): added Ru ; link to SiO2 Etching with Ruthenium Hardmask doc. Tag: Visual edit
- 10:40, 12 January 2021 diff hist +67 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V): added Ru Tag: Visual edit
- 17:32, 11 January 2021 diff hist -46 m ICP Etching Recipes →SiO2 Etching: wrote bias variations Tag: Visual edit
- 17:48, 10 January 2021 diff hist +29 Template:Announcements →New Tool Installations: minor updates to tool status
- 17:46, 10 January 2021 diff hist -192 Template:Announcements deleted MLA maint.
- 18:08, 9 January 2021 diff hist +26 m Lithography Recipes →Holography Recipes: included XHRiC Tag: Visual edit
- 18:03, 9 January 2021 diff hist +5 m Lithography Recipes →Holography Recipes Tag: Visual edit
- 18:02, 9 January 2021 diff hist +80 m Lithography Recipes →Holography Recipes: mentione THMR usage Tag: Visual edit
- 12:27, 8 January 2021 diff hist 0 m Template:Announcements fixed indent
- 22:45, 7 January 2021 diff hist +58 MLA150 - Large Image GDS Generation pasted method Tag: Visual edit
- 22:43, 7 January 2021 diff hist +2,510 N MLA150 - Large Image GDS Generation pasted method Tag: Visual edit
- 22:12, 7 January 2021 diff hist +154 Maskless Aligner (Heidelberg MLA150) →Documentation: link to Large Image Patterning Tag: Visual edit
- 09:11, 6 January 2021 diff hist -105 Template:Announcements deleted annual shutdown, added MLA maint.
- 08:34, 5 January 2021 diff hist +120 m Calculators + Utilities →KLayout Tag: Visual edit
- 08:31, 5 January 2021 diff hist +225 Calculators + Utilities →KLayout: added Circles > PCell method Tag: Visual edit
- 09:21, 4 January 2021 diff hist +170 Direct-Write Lithography Recipes →Positive Resist (MLA150): note about HIMT design giving higher dose result Tag: Visual edit
- 21:28, 23 December 2020 diff hist +136 Frequently Asked Questions →How do I get my files from the NanoFab computers?: link to SUM email page Tag: Visual edit
- 10:06, 12 December 2020 diff hist +4 m Direct-Write Lithography Recipes →Negative Resist (MLA150) Tag: Visual edit
- 09:25, 11 December 2020 diff hist +302 Calculators + Utilities →KLayout: added how to show Origin Tag: Visual edit
- 13:16, 10 December 2020 diff hist +40 PECVD1 Wafer Coating Process corrected titles current Tag: Visual edit
- 13:08, 10 December 2020 diff hist +100 Video Training: Hosting with Zoom and GacuhoCast/Panopto how to locate video to playback current Tag: Visual edit
- 09:06, 9 December 2020 diff hist 0 File:Attachment A - UCSB Master Facilities Use Agreement Labs.pdf John d uploaded a new version of File:Attachment A - UCSB Master Facilities Use Agreement Labs.pdf current
- 17:07, 8 December 2020 diff hist +84 N File:CAD Tutorial for ASML Reticle v1 - screenshot Reticle Layout cell.png current
- 08:01, 8 December 2020 diff hist +22 m File:Facility-Use-MOU---Intercampus-UC-User.pdf cat. Services
- 08:01, 8 December 2020 diff hist +22 m File:UCSB Service Agreement.pdf cat. Services
- 08:01, 8 December 2020 diff hist +19 m File:User Protocols Coronavirus 2020-09-14-1.pdf cat. COVID
- 08:00, 8 December 2020 diff hist +19 m File:COVID Entering the CR and Gowning Protocols-USE THIS ONE v2.pdf cat. COVID current
- 08:00, 8 December 2020 diff hist +19 File:COVID19 ESB Building User Self Admittance Protocol v2.pdf cat COVID current
- 07:54, 8 December 2020 diff hist +23 File:Attachment A - UCSB Master Facilities Use Agreement Labs.pdf added category: services
- 07:54, 8 December 2020 diff hist +80 N Category:Services description added current
- 07:53, 8 December 2020 diff hist +22 Services added Category:Services
- 07:49, 8 December 2020 diff hist 0 File:Attachment A - UCSB Master Facilities Use Agreement Labs.pdf John d uploaded a new version of File:Attachment A - UCSB Master Facilities Use Agreement Labs.pdf
- 09:10, 7 December 2020 diff hist +2,681 N Process Group - Lab Stocking/Supplies Tasks pasted task list 2020-12-07 Tag: Visual edit
- 09:09, 7 December 2020 diff hist +147 Nanofab Staff Internal Pages added procgrp / las stocking/supplies link Tag: Visual edit
- 20:54, 3 December 2020 diff hist +114 m Nanofab Staff Internal Pages →Video Training procedures Tag: Visual edit
- 20:51, 3 December 2020 diff hist -2 Nanofab Staff Internal Pages →Video Training procedures Tag: Visual edit
- 20:43, 3 December 2020 diff hist +136 m Video Training: Hosting with Zoom and GacuhoCast/Panopto Tag: Visual edit
- 17:24, 3 December 2020 diff hist -15 m Nanofab Staff Internal Pages Tag: Visual edit
- 17:08, 3 December 2020 diff hist +2,099 N Video Training: Hosting with Zoom and GacuhoCast/Panopto pasted instructions from other wiki page Tag: Visual edit
- 17:00, 3 December 2020 diff hist +466 m GoPro Hero8 Black (Internal) →Uploading to the Web: minor updates Tag: Visual edit
- 16:39, 3 December 2020 diff hist +25 Direct-Write Lithography Recipes →Positive Resist (MLA150): added line-space for SPR 220-3 Tag: Visual edit
- 07:53, 30 November 2020 diff hist +44 Template:News →Raith Velion: FIB/SEM Installation: update date
- 07:51, 30 November 2020 diff hist -1 Template:Announcements changed thanksgiving --> XMas/NY's holiday clposue
- 06:29, 30 November 2020 diff hist +868 MLA150 - Design Guidelines →DXF: & →Greyscale: sections Tag: Visual edit
- 13:15, 28 November 2020 diff hist +9 Stocked Chemical List added Bromine water: = Br2 current Tag: Visual edit
- 07:24, 23 November 2020 diff hist +1,136 COVID-19 User Policies added weekly testing info Tag: Visual edit
- 07:21, 23 November 2020 diff hist 0 Template:Announcements move weekly testing below TGiving closure
- 07:20, 23 November 2020 diff hist +57 Template:Announcements signature on Weekly Testing, so it shows up in RSS
- 16:16, 20 November 2020 diff hist +30 m Template:Announcements →Weekly Testing strongly urged for UCSB Students/Staff
- 16:14, 20 November 2020 diff hist +1,123 Template:Announcements added free COVID testing rec.