Difference between revisions of "Tool List"
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=Inspection, Test and Characterization= |
=Inspection, Test and Characterization= |
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* [[Microscopes]] |
* [[Microscopes]] |
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* [[Probe Station & Curve Tracer]] |
* [[Probe Station & Curve Tracer]] |
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* [[Optical Film Thickness (Filmetrics)]] |
* [[Optical Film Thickness (Filmetrics)]] |
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− | * [[Scanning Probe Microscope]] |
+ | * [[Scanning Probe Microscope (Veeco NanoMan)]] |
* [[Tencor Flexus Film Stress]] |
* [[Tencor Flexus Film Stress]] |
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+ | |width=400| |
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* [[Optical Film Thickness (Nanometric)]] |
* [[Optical Film Thickness (Nanometric)]] |
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− | * [[SEM Sample Coater]] |
+ | * [[SEM Sample Coater (Hummer)]] |
− | * [[Surface Analysis]] |
+ | * [[Surface Analysis (KLA/Tencor Surfscan)]] |
− | * [[Photo-emission & IR Microscope]] |
+ | * [[Photo-emission & IR Microscope (QFI)]] |
* [[Ellipsometer (Woollam)]] |
* [[Ellipsometer (Woollam)]] |
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* [[Goniometer]] |
* [[Goniometer]] |
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* [[4-Point Probe Resistivity Mapper]] |
* [[4-Point Probe Resistivity Mapper]] |
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+ | * [[Laser Scanning Confocal M-scope (Olympus LEXT)]] |
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+ | * [[Deep UV Optical Microscope (Olympus)]] |
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+ | |- |
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+ | |} |
Revision as of 13:00, 28 June 2012
Lithography
Vacuum Deposition
Dry Etch
Wet Processing
Thermal Processing
- Rapid Thermal Processor (AET RX6)
- Strip Annealer
- Tube Furnace (Tystar 8300)
- Tube Furnace Wafer Bonding (Thermco)
- Tube Furnace AlGaAs Oxidation (Linberg)