Difference between revisions of "Tool List"

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(Vacuum Deposition)
(Inspection, Test and Characterization)
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* [[Goniometer]]
 
* [[Goniometer]]
 
|width=400|
 
|width=400|
* [[Tencor Flexus Film Stress]]
+
* [[Film Stress (Tencor Flexus)]]
 
* [[SEM Sample Coater (Hummer)]]
 
* [[SEM Sample Coater (Hummer)]]
 
* [[Surface Analysis (KLA/Tencor Surfscan)]]
 
* [[Surface Analysis (KLA/Tencor Surfscan)]]

Revision as of 08:31, 11 July 2012

Lithography

Vacuum Deposition

Dry Etch

Wet Processing

Thermal Processing

Packaging

Inspection, Test and Characterization