Difference between revisions of "Tool List"

From UCSB Nanofab Wiki
Jump to: navigation, search
(Dry Etch)
(Vacuum Deposition)
Line 33: Line 33:
 
*[[Sputter 1 (Custom)]]
 
*[[Sputter 1 (Custom)]]
 
*[[Sputter 2 (SFI Endeavor)]]
 
*[[Sputter 2 (SFI Endeavor)]]
*[[Sputter 3 (ATC 2000-F)]]
+
*[[Sputter 3 (AJA ATC 2000-F)]]
*[[Sputter 4 (ATC 2200-V)]]
+
*[[Sputter 4 (AJA ATC 2200-V)]]
 
*[[Sputter 5 (Lesker AXXIS)]]
 
*[[Sputter 5 (Lesker AXXIS)]]
   

Revision as of 07:58, 11 July 2012

Lithography

Vacuum Deposition

Dry Etch

Wet Processing

Thermal Processing

Packaging

Inspection, Test and Characterization