Difference between revisions of "Tool List"

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(Dry Etch)
(Dry Etch)
Line 58: Line 58:
 
*[[RIE 2 (MRC)]]
 
*[[RIE 2 (MRC)]]
 
*[[RIE 3 (MRC)]]
 
*[[RIE 3 (MRC)]]
*[[RIE 5 (PlasmaTherm SLR)]]
+
*[[RIE 5 (PlasmaTherm)]]
 
*[[Si Deep RIE (Bosch Etch)]]
 
*[[Si Deep RIE (Bosch Etch)]]
 
*[[Ashers (Technics PEII)]]
 
*[[Ashers (Technics PEII)]]

Revision as of 05:44, 11 July 2012

Lithography

Vacuum Deposition

Dry Etch

Wet Processing

Thermal Processing

Packaging

Inspection, Test and Characterization