Difference between revisions of "Tool List"

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(Undo revision 1070 by Zwarburg (Talk))
(Reverted edits by Guest (Talk) to last revision by Zwarburg)
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=Lithography=
 
=Lithography=
 
{|
 
{|
|-valign="top"  
+
|-valign="top"
 
|width=300|
 
|width=300|
 
* [[Suss Aligners (SUSS MJB-3)]]
 
* [[Suss Aligners (SUSS MJB-3)]]
 
* [[IR Aligner (SUSS MJB-3 IR)]]
 
* [[IR Aligner (SUSS MJB-3 IR)]]
* [[DUV Flood Expsaad3 (Labline)]]
+
* [[DUV Flood Expose]]
 +
* [[Ovens 1, 2 & 3 (Labline)]]
 
* [[Oven 4 (Fisher)]]
 
* [[Oven 4 (Fisher)]]
 
* [[High Temp Oven (Blue M)]]
 
* [[High Temp Oven (Blue M)]]
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|-valign="top"
 
|-valign="top"
 
|width=300|
 
|width=300|
* [[Gold Plating Bench]]
 
* [[Critical Point Dryer]]
 
* [[Spin Rinse Dryer (SemiTool)]]
 
* [[Chemical-Mechanical Polisher (Logitech)]]
 
|width=400|
 
 
* [[Wet Benches]]
 
* [[Wet Benches]]
 
**[[Solvent Cleaning Benches]]
 
**[[Solvent Cleaning Benches]]
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**[[HF/TMAH Processing Benches]]
 
**[[HF/TMAH Processing Benches]]
 
**[[Plating Bench]]
 
**[[Plating Bench]]
 +
|width=400|
 +
* [[Gold Plating Bench]]
 +
* [[Critical Point Dryer]]
 +
* [[Spin Rinse Dryer (SemiTool)]]
 +
* [[Chemical-Mechanical Polisher (Logitech)]]
 
|-
 
|-
 
|}
 
|}

Revision as of 07:54, 17 July 2012

Lithography

Vacuum Deposition

Dry Etch

Wet Processing

Thermal Processing

Packaging

Inspection, Test and Characterization