Difference between revisions of "Tool List"

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*[[Sputter 1 (Custom)]]  
 
*[[Sputter 1 (Custom)]]  
 
*[[Sputter 2 (SFI Endeavor)]]  
 
*[[Sputter 2 (SFI Endeavor)]]  
*[[Sputter 3 (ATC 2000-F)]]  
+
*[[Sputter 3 (AJA ATC 2000-F)]]  
*[[Sputter 4 (ATC 2200-V)]]  
+
*[[Sputter 4 (AJA ATC 2200-V)]]  
 
*[[Sputter 5 (Lesker AXXIS)]]
 
*[[Sputter 5 (Lesker AXXIS)]]
  

Revision as of 08:58, 11 July 2012

Lithography

Vacuum Deposition

Dry Etch

Wet Processing

Thermal Processing

Packaging

Inspection, Test and Characterization