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- 09:03, 17 January 2020 diff hist +112 ICP Etching Recipes →ICP Etch 1 (Panasonic E626I): added section headings Tag: Visual edit
- 09:02, 17 January 2020 diff hist +166 ICP Etching Recipes →SiO2 Etching (Panasonic 2): added section headings Tag: Visual edit
- 08:59, 17 January 2020 diff hist +46 ICP Etching Recipes →SiO2 Etching (Panasonic 1): added historical data section Tag: Visual edit
- 17:25, 16 January 2020 diff hist -36 Template:Announcements asml PM moved
- 17:03, 14 January 2020 diff hist +247 Template:Announcements ASML PM Feb
- 10:27, 13 January 2020 diff hist +18 Template:Announcements ASML up
- 09:13, 13 January 2020 diff hist -3 Template:Announcements ASML down
- 23:36, 9 January 2020 diff hist +57 m Calculators + Utilities →Refractive Indices Tag: Visual edit
- 11:00, 9 January 2020 diff hist -102 Template:Announcements →ASML is DOWN: Repair Expected Monday: system up
- 15:14, 2 January 2020 diff hist -13 Template:Announcements asml update
- 13:33, 2 January 2020 diff hist +24 m Template:Announcements update ASML title
- 13:33, 2 January 2020 diff hist -118 Template:Announcements removed CR=OPEN, ASML update
- 18:57, 1 January 2020 diff hist +587 PECVD Recipes Added section sub-headings Tag: Visual edit
- 18:42, 1 January 2020 diff hist +405 PECVD 2 (Advanced Vacuum) link to recipes page Tag: Visual edit
- 18:33, 1 January 2020 diff hist +2 m Test Data of etching SiO2 with CHF3/CF4 shortened link text Tag: Visual edit: Switched
- 14:00, 30 December 2019 diff hist -5 m Template:Announcements Undo revision 157023 by John d (talk) Tag: Undo
- 14:00, 30 December 2019 diff hist +5 m Template:Announcements br
- 13:58, 30 December 2019 diff hist -2 m Template:Announcements removed whitespace
- 13:57, 30 December 2019 diff hist -5 m Template:Announcements title HR
- 13:56, 30 December 2019 diff hist +16 m Template:Announcements header level remove
- 11:57, 30 December 2019 diff hist -4 m Template:Announcements title heading level 2
- 11:57, 30 December 2019 diff hist +2 m Template:Announcements title heading level 4
- 11:56, 30 December 2019 diff hist +2 Template:Announcements title heading level
- 11:54, 30 December 2019 diff hist -50 Template:Announcements →ASML is DOWN: level sensor update
- 11:01, 30 December 2019 diff hist +68 Template:Announcements →ASML is DOWN: light bulb update
- 09:50, 28 December 2019 diff hist -29 Template:Announcements nanofab open, asml down
- 16:24, 19 December 2019 diff hist -625 Template:Publications updated notes to show how to make new post
- 16:15, 19 December 2019 diff hist +60 Template:Publications try URL in post title
- 16:13, 19 December 2019 diff hist +1,229 Template:Publications added some selected publications
- 15:56, 19 December 2019 diff hist +2,237 N Template:Publications dummy articles
- 11:06, 19 December 2019 diff hist +107 m Tool List →Lithography Support: link to POLOS section Tag: Visual edit
- 11:05, 19 December 2019 diff hist +279 Tool List →Lithography: added POLOS spinners Tag: Visual edit
- 11:02, 19 December 2019 diff hist -191 Wet Benches enabled automatic TOC
- 11:01, 19 December 2019 diff hist +1,501 Wet Benches Added POLOS section, reformatting headings to use correct level. Tag: Visual edit
- 10:25, 19 December 2019 diff hist -3 m ASML Stepper 3 Error Recovery, Troubleshooting and Calibration typo Tag: Visual edit
- 10:25, 19 December 2019 diff hist +192 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration added some common warnings Tag: Visual edit
- 10:22, 19 December 2019 diff hist +454 Stepper 3 (ASML DUV) →Operating Procedures: added Software options section Tag: Visual edit
- 14:48, 10 December 2019 diff hist +2 m Calculators + Utilities →Fabrication Processes & Converters: fixed BYU URL
- 11:03, 6 December 2019 diff hist +152 m Frequently Asked Questions →Specific Equipment Problem: update equipment problem reporting, added SUM contact info Tag: Visual edit
- 17:19, 3 December 2019 diff hist +778 Calculators + Utilities →CAD Layout Programs: added CAD tips re: Cells Tag: Visual edit
- 12:55, 3 December 2019 diff hist +46 Microscopes →Microscope #1: Olympus BHMJL (Char. Lab, Room 1111): added user manual Tag: Visual edit
- 12:49, 3 December 2019 diff hist +211 Microscopes corrected microscope 1 to olympus, afdded # 5, 6 to Olympus Flour/DUV scopes Tag: Visual edit
- 12:47, 3 December 2019 diff hist +63 N File:Microscope 01 Olympus BHMJL crop.png current
- 02:37, 30 November 2019 diff hist +22 m Lift-Off with DUV Imaging + PMGI Underlayer →Images / Examples: image acknowledgement Tag: Visual edit
- 02:31, 30 November 2019 diff hist +38 Lift-Off with DUV Imaging + PMGI Underlayer Acknowledge development by demis Tag: Visual edit
- 15:33, 27 November 2019 diff hist +42 Frequently Asked Questions →Authorship on Publications: added "if images/data included in paper" Tag: Visual edit
- 15:29, 27 November 2019 diff hist -128 Template:Announcements deleted ASML Down
- 15:26, 27 November 2019 diff hist +12 m ICP-PECVD (Unaxis VLR) →Cluster Configuration: bold Tag: Visual edit
- 15:26, 27 November 2019 diff hist +335 ICP-Etch (Unaxis VLR) added Cluster Config / oink to each modules tool page Tag: Visual edit
- 15:24, 27 November 2019 diff hist -32 m ICP-PECVD (Unaxis VLR) →Cluster Configuration: formatting Tag: Visual edit
- 15:23, 27 November 2019 diff hist +368 ICP-PECVD (Unaxis VLR) added cluster configuration / link to each chamber's tool page Tag: Visual edit
- 14:24, 26 November 2019 diff hist +129 m CAIBE (Oxford Ion Mill) added CAIBE acronym expansion to description, for google searchability Tag: Visual edit
- 14:14, 26 November 2019 diff hist +8 m Atomic Layer Deposition (Oxford FlexAL) added CAIBE acronym Tag: Visual edit
- 14:13, 26 November 2019 diff hist -72 m Atomic Layer Deposition (Oxford FlexAL) typo/grammar Tag: Visual edit
- 14:12, 26 November 2019 diff hist +287 CAIBE (Oxford Ion Mill) added cluster config section Tag: Visual edit
- 14:10, 26 November 2019 diff hist +198 Atomic Layer Deposition (Oxford FlexAL) added cluster config section Tag: Visual edit
- 12:32, 22 November 2019 diff hist +102 PECVD Recipes →SiN deposition (Unaxis VLR): SiN recipes under development Tag: Visual edit
- 17:34, 21 November 2019 diff hist +79 m Stepper 3 (ASML DUV) moved/updated "service provider" Tag: Visual edit
- 12:17, 19 November 2019 diff hist +234 m Stepper Recipes →Anti-Reflective Coatings: links to BARC datasheets Tag: Visual edit
- 12:15, 19 November 2019 diff hist +358 Lithography Recipes added ARC row with links to DSK & DUV42P Tag: Visual edit: Switched
- 18:47, 13 November 2019 diff hist +11 m Aidan Hopkins added whitespace in About so tools list shows up correctly. Tag: Visual edit: Switched
- 18:44, 13 November 2019 diff hist +1 m Template:Announcements moved CR shutdown to top
- 13:29, 13 November 2019 diff hist +1 Automated Coat/Develop System (S-Cubed Flexi) added ToolID (link to SUM)
- 17:34, 12 November 2019 diff hist +1 m Frequently Asked Questions →I can't connect to the Nanofiles FTP server!: saved pasword to end, not usually the culprit Tag: Visual edit
- 17:33, 12 November 2019 diff hist +198 m Frequently Asked Questions →I can't connect to the Nanofiles FTP server!: cyberduck setting Tag: Visual edit
- 01:43, 8 November 2019 diff hist 0 File:Digidat-Toppan Mask order form (UCSB ASML 5500).docx John d uploaded a new version of File:Digidat-Toppan Mask order form (UCSB ASML 5500).docx current
- 01:37, 8 November 2019 diff hist 0 File:ASML Reticle Programming Params - MASKJAN2020 v1.xlsx John d uploaded a new version of File:ASML Reticle Programming Params - MyReticleBarCode v1.xlsx
- 01:35, 8 November 2019 diff hist 0 File:ASML Reticle Programming Params - MASKJAN2020 v1.xlsx John d uploaded a new version of File:ASML Reticle Programming Params - MyReticleBarCode v1.xlsx
- 15:05, 25 October 2019 diff hist +231 Chemical List added photolith chemicals Tag: Visual edit
- 14:49, 25 October 2019 diff hist +51 m Rapid Thermal Processor (SSI Solaris 150) comment clarification Tag: Visual edit
- 14:48, 25 October 2019 diff hist +33 m Rapid Thermal Processor (AET RX6) →Detailed Specifications: "Temp" --> "maximum temp" Tag: Visual edit
- 14:30, 25 October 2019 diff hist -51 IR Thermal Microscope (QFI) deleted erroneous email + phone
- 14:30, 25 October 2019 diff hist -5 IR Thermal Microscope (QFI) →Capabilities: updated objectives: nIR --> Vis + nIR Tag: Visual edit
- 16:26, 17 October 2019 diff hist +673 Frequently Asked Questions →General NanoFab Questions: take suplies from Nanofab? Tag: Visual edit
- 17:42, 11 October 2019 diff hist +149 Editing Tutorials →It won't let me "Save" my changes!: added Edit Source mode info/image Tag: Visual edit
- 17:40, 11 October 2019 diff hist +31 N File:Visual Editor - switch to source mode - pen button.png current
- 17:33, 11 October 2019 diff hist +35 m Editing Tutorials →Linking to a PDF or other file: borders on images Tag: Visual edit
- 17:32, 11 October 2019 diff hist +7 m Editing Tutorials →Linking to a PDF or other file: border and cropped image size Tag: Visual edit
- 17:32, 11 October 2019 diff hist 0 File:Editing Tutorials 4b- file info right click URL.png John d uploaded a new version of File:Editing Tutorials 4b- file info right click URL.png current
- 17:30, 11 October 2019 diff hist +272 m Editing Tutorials →Linking to a PDF or other file: minor update Tag: Visual edit
- 17:23, 11 October 2019 diff hist +385 Editing Tutorials →Linking to a PDF or other file: inserted images Tag: Visual edit
- 17:23, 11 October 2019 diff hist +44 N File:Editing Tutorials - 5- insert link into page.png current
- 17:21, 11 October 2019 diff hist +47 N File:Editing Tutorials 4b- file info right click URL.png
- 17:20, 11 October 2019 diff hist +40 N File:Editing Tutorials 3c- modifications etc..png current
- 17:17, 11 October 2019 diff hist +767 Editing Tutorials →Linking to a PDF or other file: more upload PDF... Tag: Visual edit
- 17:10, 11 October 2019 diff hist +512 Editing Tutorials →Basic Editing: start of "insert PDF" section Tag: Visual edit
- 16:56, 11 October 2019 diff hist -245 Template:Announcements removed ASML
- 16:40, 8 October 2019 diff hist +45 N File:Editing Tutorials - Upload PDF - 3b- filename descript upload button.png current
- 16:36, 8 October 2019 diff hist +50 N File:Editing Tutorials - Upload PDF - 2- choose file.png current
- 16:35, 8 October 2019 diff hist +49 N File:Editing Tutorials - Upload PDF - 1- upload file.png current
- 16:30, 8 October 2019 diff hist +73 Template:Tool minor updates
- 16:25, 8 October 2019 diff hist -24 m Automated Coat/Develop System (S-Cubed Flexi) fixed ToolTemplate 'type' arg
- 16:18, 8 October 2019 diff hist +56 m Stepper 3 (ASML DUV) →Troubleshooting and Recovery: minor grammar Tag: Visual edit
- 16:17, 8 October 2019 diff hist +67 m Stepper 3 (ASML DUV) toolTemplate added Litho links
- 16:16, 8 October 2019 diff hist +50 m Automated Coat/Develop System (S-Cubed Flexi) ToolTemplate: model & mfg. link
- 16:09, 8 October 2019 diff hist +1 m Editing Tutorials move TOC
- 16:07, 8 October 2019 diff hist +125 m Lithography Recipes →Automated Coat/Develop System Recipes (S-Cubed Flexi): link to tool page Tag: Visual edit
- 16:05, 8 October 2019 diff hist +86 Tool List added S-Cubed Flexi to Wet processing tools as well Tag: Visual edit
- 16:04, 8 October 2019 diff hist -10 m Automated Coat/Develop System (S-Cubed Flexi) edit staff use notice Tag: Visual edit
- 16:03, 8 October 2019 diff hist +233 Automated Coat/Develop System (S-Cubed Flexi) added notice abotu staff use only Tag: Visual edit
- 16:00, 8 October 2019 diff hist +395 Automated Coat/Develop System (S-Cubed Flexi) added PR's and links to recipes Tag: Visual edit
- 15:49, 8 October 2019 diff hist +154 Lithography Recipes added S-Cubed coater section Tag: Visual edit
- 15:31, 8 October 2019 diff hist +49 Automated Coat/Develop System (S-Cubed Flexi) Added ToolTemplate - tool type and recepe
- 15:09, 8 October 2019 diff hist +397 N Automated Coat/Develop System (S-Cubed Flexi) initial page
- 15:07, 8 October 2019 diff hist -49 Stepper 1 (GCA 6300) delete email/phone
- 15:06, 8 October 2019 diff hist +86 Tool List →Lithography: link to S-Cubed Coater Tag: Visual edit
- 13:15, 4 October 2019 diff hist -12 Template:Announcements ASML down - TCU, minimal info
- 12:23, 4 October 2019 diff hist +1,487 ICP Etching Recipes →Ru (Ruthenium) Etch (Panasonic 2): Ru etch PDF Tag: Visual edit
- 12:11, 4 October 2019 diff hist +45 N File:194 Ru Etch O2,Cl2.pdf BillM - Pan2 Ru etch 2019-09-19 current
- 14:02, 2 October 2019 diff hist +122 DS-K101-304 Bake Temp. versus Develop Rate →Conditions: added 185*C current Tag: Visual edit
- 21:47, 27 September 2019 diff hist +19 m Gold Plating Bench added model
- 13:51, 25 September 2019 diff hist +52 Stepper Recipes →Positive Resist (ASML DUV): added Annular illum in notes Tag: Visual edit
- 10:54, 25 September 2019 diff hist +13 m Microscopes documentation -> procedures & documentation Tag: Visual edit
- 10:53, 25 September 2019 diff hist +395 Microscopes →Microscope #1: Olympus Optiphot-2 (Bay 3): renamed, moved to Nikon, added info, highlighted Microscope training Tag: Visual edit
- 09:46, 25 September 2019 diff hist +78 YES-150C-Various-Resists link to PR datasheets Tag: Visual edit
- 09:45, 25 September 2019 diff hist +52 YES-150C-Various-Resists Tag: Visual edit
- 09:44, 25 September 2019 diff hist +211 m YES-150C-Various-Resists description Tag: Visual edit
- 09:41, 25 September 2019 diff hist +10 m YES-SPR220-Various-Temps smaller figure Tag: Visual edit
- 09:41, 25 September 2019 diff hist -30 Oxygen Plasma System Recipes →Plasma Clean (YES EcoClean): correct YES EcoClean link Tag: Visual edit
- 09:40, 25 September 2019 diff hist -113 Tool List →Dry Etch: correct YES EcoClean link Tag: Visual edit
- 09:39, 25 September 2019 diff hist 0 m Plasma Clean (YES EcoClean) John d moved page Plamsa Clean (YES EcoClean) to Plasma Clean (YES EcoClean) without leaving a redirect: spelling
- 19:22, 21 September 2019 diff hist 0 m Demis D. John mnor gif tweak Tag: Visual edit
- 19:21, 21 September 2019 diff hist +10 m Demis D. John moved gif
- 19:20, 21 September 2019 diff hist -1 m Demis D. John moved gif
- 16:12, 19 September 2019 diff hist +25 Frequently Asked Questions →Wifi Access in the Nanofab: header for "cell phone calls " section Tag: Visual edit
- 15:59, 19 September 2019 diff hist +263 Frequently Asked Questions →I can't connect to the Nanofiles FTP server!: add'l info about winscp & filezilla blocking Tag: Visual edit
- 08:39, 18 September 2019 diff hist +256 Template:Announcements ASML PM
- 07:42, 17 September 2019 diff hist -29 DS-K101-304 Bake Temp. versus Develop Rate courtesy brian burkett (omit Google) Tag: Visual edit
- 07:37, 17 September 2019 diff hist +450 N DS-K101-304 Bake Temp. versus Develop Rate added data from email form Sean Demura Tag: Visual edit
- 07:31, 17 September 2019 diff hist -558 Stepper Recipes →DS-K101-304: link to bake temp vs. dev. rate Tag: Visual edit
- 11:59, 12 September 2019 diff hist +14 Frequently Asked Questions →Authorship Tag: Visual edit
- 09:31, 12 September 2019 diff hist +124 Lift-Off with DUV Imaging + PMGI Underlayer added PMGI dissolution rate Tag: Visual edit
- 09:17, 12 September 2019 diff hist +367 Frequently Asked Questions →Publications acknowledging the Nanofab: updated, added separate "authorship" sub-heading Tag: Visual edit
- 15:17, 11 September 2019 diff hist +146 Plasma Activation (EVG 810) link to recipes page, not yet fixed Tool info link Tag: Visual edit
- 08:52, 11 September 2019 diff hist +54 Template:Announcements →Logitech Wafer Bonder: Down: 3 week estiamte for repalcement part delivery
- 08:52, 11 September 2019 diff hist +530 Frequently Asked Questions →Processing/Fabrication Questions: user manuals section Tag: Visual edit
- 12:06, 9 September 2019 diff hist +216 m Laser Etch Monitoring →Monitoring Photoresist Etch Rate: minor caption formatting Tag: Visual edit
- 12:02, 9 September 2019 diff hist +56 Laser Etch Monitoring →Monitoring Photoresist Etch Rate: updated captions Tag: Visual edit
- 11:26, 9 September 2019 diff hist +1,138 Laser Etch Monitoring added examples of etch monitoring Tag: Visual edit
- 11:24, 9 September 2019 diff hist +40 N File:Annotated PR etch - Om1000 03 - ARC + Cl + PR etch v1.jpg
- 11:18, 9 September 2019 diff hist +51 N File:ARC etch + Cr etch - UV6 at 2krpm (900nm) survived v2 - screenshot.jpg current
- 08:35, 9 September 2019 diff hist -7 m Tech Talks Seminar Series rename subheading Tag: Visual edit
- 08:34, 9 September 2019 diff hist +45 Tech Talks Seminar Series sub-heading for slides Tag: Visual edit
- 20:22, 7 September 2019 diff hist +281 Lift-Off with DUV Imaging + PMGI Underlayer Minor updates to process Tag: Visual edit
- 22:31, 6 September 2019 diff hist +231 Lift-Off with DUV Imaging + PMGI Underlayer →Examples: insert SEM Tag: Visual edit
- 22:30, 6 September 2019 diff hist +84 N File:PMGI+UV6 lift-off SEM - 2017-06-30 DJ.png current
- 22:18, 6 September 2019 diff hist +1 m Lithography Recipes →Lift-Off Techniques: fixed link
- 22:15, 6 September 2019 diff hist +202 m Lift-Off with DUV Imaging + PMGI Underlayer Tag: Visual edit
- 21:45, 6 September 2019 diff hist +2,196 N Lift-Off with DUV Imaging + PMGI Underlayer initial process
- 18:35, 6 September 2019 diff hist -48 Probe Station & Curve Tracer Changed super to Demis
- 11:46, 6 September 2019 diff hist +137 Step Profilometer (KLA Tencor P-7) added placeholders for detailed specs Tag: Visual edit
- 10:30, 6 September 2019 diff hist -41 Lithography Recipes →Lift-Off Techniques: added links to wiki version of lift-off tutorial + DUV lift-off page Tag: Visual edit
- 21:18, 4 September 2019 diff hist -21 Optical Film Thickness & Wafer-Mapping (Filmetrics F50) Corrected wavelength range & model Tag: Visual edit
- 08:23, 30 August 2019 diff hist +67 Template:News Corrected info and titles
- 08:20, 30 August 2019 diff hist +60 m Template:News →TechTalk: Dr. Garett Cole & Songtao Liu
- 08:19, 30 August 2019 diff hist +277 Template:News Initial placeholder for tech talk
- 08:16, 30 August 2019 diff hist +51 Tech Talks Seminar Series Show table of contents for linking
- 13:33, 27 August 2019 diff hist -633 m Dry Etching Recipes fix ICP1 GaAs link Tag: Visual edit
- 15:36, 23 August 2019 diff hist +94 Demis D. John testing file upload Tag: Visual edit
- 15:35, 23 August 2019 diff hist +40 N File:Demis UCSB-Photonics-Gif.gif current
- 17:47, 22 August 2019 diff hist +365 Template:Announcements added Aidan's SCE outage email
- 15:18, 22 August 2019 diff hist +116 Demis D. John →About: testing editing Tag: Visual edit
- 00:32, 22 August 2019 diff hist +350 Laser Etch Monitoring listed which tools have which laser, added redlink to RIE5 lasermon procedure
- 13:51, 20 August 2019 diff hist +186 Template:Announcements added logitech bonder
- 08:53, 15 August 2019 diff hist +54 m Demis D. John →External Professional Websites: added phosoc Tag: Visual edit
- 16:46, 14 August 2019 diff hist +91 m Demis D. John website work Tag: Visual edit
- 14:01, 14 August 2019 diff hist 0 m Frequently Asked Questions →Bring a new chemical/material into the lab: emphasis Tag: Visual edit
- 14:00, 14 August 2019 diff hist +340 Frequently Asked Questions →Who do I contact for an equipment problem or general NanoFab problem?: added [Report Tool Issue] button Tag: Visual edit
- 13:44, 14 August 2019 diff hist -8 m Frequently Asked Questions →Wifi Access in the Nanofab: minor typo Tag: Visual edit
- 13:43, 14 August 2019 diff hist +161 Frequently Asked Questions →Wifi Access in the Nanofab: mention verizon repeaters Tag: Visual edit
- 11:06, 7 August 2019 diff hist +79 Template:News link to wiki page
- 11:03, 7 August 2019 diff hist +384 Template:News YES ASHER info
- 10:58, 7 August 2019 diff hist +767 Packaging Recipes →Surface Protection: Blue tape Tag: Visual edit
- 10:50, 7 August 2019 diff hist +20 Packaging Recipes →Surface Protection: UV release time Tag: Visual edit
- 13:16, 24 July 2019 diff hist +56 Packaging Recipes →Surface Protection: added details such as "remove from tape" Tag: Visual edit
- 13:14, 24 July 2019 diff hist +280 Dicing Saw (ADT) Corrected staff info infobox, added model number, added tape applicator model number, linked to recipes page
- 13:07, 24 July 2019 diff hist +61 m Packaging Recipes →Mounting/Unmounting Samples: link to nonexistent SOP for tape mounting Tag: Visual edit
- 13:04, 24 July 2019 diff hist +42 Packaging Recipes →Calculated Blade Exposures: 51mm unavailable Tag: Visual edit
- 10:42, 22 July 2019 diff hist +127 m KLA Tencor P7 - Basic profile instructions explain autromatic cals Tag: Visual edit
- 08:53, 21 July 2019 diff hist +8 Logitech WBS7 - Procedure for Wax Mounting with Spin-On Crystalbond added Work In Progress
- 08:53, 21 July 2019 diff hist -2 m Packaging Recipes →Wafer Bonder (Logitech WBS7): link to procedure Tag: Visual edit
- 08:51, 21 July 2019 diff hist +622 Logitech WBS7 - Procedure for Wax Mounting with bulk Crystalbond Stick pasted miguel's procedure Tag: Visual edit
- 16:34, 19 July 2019 diff hist -12 Vacuum Deposition Recipes corrected PECVD2 a-Si link Tag: Visual edit
- 15:32, 19 July 2019 diff hist -47 m Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) →Documentation: corrected link
- 15:32, 19 July 2019 diff hist +117 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) →Documentation: link to SOP & mention Cortex software
- 12:29, 18 July 2019 diff hist -2 Stepper 3 (ASML DUV) changes supervisor to Demis
- 12:27, 18 July 2019 diff hist -51 m Stepper 3 (ASML DUV) corrected supervisor template
- 12:24, 18 July 2019 diff hist +154 m Atomic Layer Deposition Recipes →Atomic Layer Deposition (Oxford FlexAL): 30nm max. thickness indicated Tag: Visual edit
- 22:48, 8 July 2019 diff hist +2 m Template:WIP
- 22:47, 8 July 2019 diff hist +584 GCA 6300 Mask Making Guidance added {{todo}} of corrections needed, delted photronics info
- 16:12, 8 July 2019 diff hist +14 m Stepper Recipes →DS-K101: approx. thickness Tag: Visual edit
- 16:10, 8 July 2019 diff hist +243 m Stepper Recipes →DS-K101: link to datasheet Tag: Visual edit
- 19:30, 7 July 2019 diff hist +343 Frequently Asked Questions →Publications acknowledging the Nanofab: add staff as author is novel process developed Tag: Visual edit
- 11:50, 5 July 2019 diff hist +4 Lithography Recipes →Chemicals Stocked + Datasheets: DSK-101 --> DSK-101-304 Tag: Visual edit
- 14:33, 3 July 2019 diff hist +18 IR Thermal Microscope (QFI) →Capabilities: update MIR camera type Tag: Visual edit
- 14:31, 3 July 2019 diff hist +326 IR Thermal Microscope (QFI) →About: moves MIR wavelength range to Capabilities + some more info about that Tag: Visual edit
- 10:46, 26 June 2019 diff hist +310 Deep UV Optical Microscope (Olympus) detailed specs - first pass Tag: Visual edit
- 10:59, 24 June 2019 diff hist +30 m Tool List corrected photo chemicals link, moved inside table for easier location Tag: Visual edit
- 13:38, 18 June 2019 diff hist +146 IR Thermal Microscope (QFI) added microscope objectives & cameras Tag: Visual edit
- 12:26, 18 June 2019 diff hist +186 IR Thermal Microscope (QFI) link to python script Tag: Visual edit
- 14:23, 13 June 2019 diff hist +587 m Intellemetrics Laser Etch Monitor Procedure for Panasonic ICP Etchers added sub headings, moved recipe edit current Tag: Visual edit
- 08:42, 12 June 2019 diff hist +98 m Stepper 3 (ASML DUV) Indicated that FEM is in SOP Tag: Visual edit
- 00:05, 12 June 2019 diff hist +611 ASML Stepper 3 Standard Operating Procedure →Running a focus and/or exposure matrix: added schematics for die ordering Tag: Visual edit
- 23:56, 11 June 2019 diff hist +32 N File:Stepper 3 - FEM Matrix Schematic.png current
- 23:55, 11 June 2019 diff hist +40 N File:Stepper 3 - FEM Energy Meander Schematic.png current
- 16:46, 11 June 2019 diff hist +612 Oven 4 (Thermo-Fisher HeraTherm) added info, needs verification Tag: Visual edit: Switched
- 16:31, 11 June 2019 diff hist 0 File:Oven4.jpg John d uploaded a new version of File:Oven4.jpg current
- 11:02, 10 June 2019 diff hist +1 m FIJI - Microscope Measurement Tools switch image example current
- 11:01, 10 June 2019 diff hist 0 File:MicroscopeMeasurementTools - FIJI draw measurement - line.png John d uploaded a new version of File:MicroscopeMeasurementTools - FIJI draw measurement - line.png current
- 11:00, 10 June 2019 diff hist +425 FIJI - Microscope Measurement Tools imge of calibrations list Tag: Visual edit
- 10:59, 10 June 2019 diff hist +71 N File:FIJI MMT UCSB-Fork Choose Microscope Calibration drop down.png current
- 10:53, 10 June 2019 diff hist -299 Calculators + Utilities →Analysis Programs: link to FIJI MMT installge/usage page Tag: Visual edit
- 10:49, 10 June 2019 diff hist 0 File:FIJI Install Directory - MacOS.png John d uploaded a new version of File:FIJI Install Directory - MacOS.png current
- 10:48, 10 June 2019 diff hist 0 m FIJI - Microscope Measurement Tools →Installation: image size Tag: Visual edit
- 10:47, 10 June 2019 diff hist +12 m FIJI - Microscope Measurement Tools image broder Tag: Visual edit
- 10:46, 10 June 2019 diff hist +5 m FIJI - Microscope Measurement Tools →Installation: spacing Tag: Visual edit
- 10:45, 10 June 2019 diff hist +3 m FIJI - Microscope Measurement Tools →Installation: tabs images Tag: Visual edit: Switched
- 10:40, 10 June 2019 diff hist +1,338 FIJI - Microscope Measurement Tools inserted images, corrections Tag: Visual edit
- 10:33, 10 June 2019 diff hist +55 N File:MicroscopeMeasurementTools - FIJI draw measurement - line.png
- 10:06, 10 June 2019 diff hist +69 N File:MicroscopeMeasurementTools - FIJI Install - Mac Show Package Contents.png current
- 10:05, 10 June 2019 diff hist +61 N File:MicroscopeMeasurementTools - FIJI Install Directory - WinXP.jpg current
- 10:03, 10 June 2019 diff hist +59 N File:FIJI Install Directory - MacOS.png
- 23:26, 6 June 2019 diff hist +2,910 N FIJI - Microscope Measurement Tools Initial instruction, no links
- 22:14, 6 June 2019 diff hist +46 Optical Film Spectra + Optical Properties (Filmetrics F10-RT-UVX) Changed tool info box name
- 21:39, 6 June 2019 diff hist +4 Optical Film Spectra + Optical Properties (Filmetrics F10-RT-UVX) Added photo
- 21:38, 6 June 2019 diff hist +48 N File:Filmetrics-F10-RT Photo.jpeg Photo of Filmetrics f10-RT-UVX Spectrophotometer current
- 13:01, 6 June 2019 diff hist 0 m Intellemetrics Laser Etch Monitor Procedure for Panasonic ICP Etchers move image
- 12:59, 6 June 2019 diff hist +4 m Intellemetrics Laser Etch Monitor Procedure for Panasonic ICP Etchers temp: manual box set to 300px Tag: Visual edit
- 12:40, 6 June 2019 diff hist 0 File:Filmetrics F40-UV - spectrum curve fit 07.jpg John d uploaded a new version of File:Filmetrics F40-UV - spectrum curve fit 07.jpg current
- 13:50, 4 June 2019 diff hist +121 m ASML Stepper 3 - UCSB Test Reticles →Alignment Markers: MA6 mark: contact Brian/Demis for GDS Tag: Visual edit
- 11:04, 4 June 2019 diff hist +75 Tool List →Thermal Processing: linked to new Ovens Overview page, reorganized ovens under this, removed Strip Annealer link (removed from lab) Tag: Visual edit
- 10:59, 4 June 2019 diff hist -169 Ovens - Overview of All Lab Ovens removed Tool Template - too cluttered and useless
- 10:58, 4 June 2019 diff hist +1,411 Ovens - Overview of All Lab Ovens inital page with some info filled in/guessed at Tag: Visual edit
- 10:55, 4 June 2019 diff hist +2 High Temp Oven (Blue M) tool id included for SUM link
- 10:47, 4 June 2019 diff hist +46 N Oven 4 (Fisher) John d moved page Oven 4 (Fisher) to Oven 4 (Thermo-Fisher HeraTherm): changed out for new oven current
- 10:47, 4 June 2019 diff hist 0 m Oven 4 (Thermo-Fisher HeraTherm) John d moved page Oven 4 (Fisher) to Oven 4 (Thermo-Fisher HeraTherm): changed out for new oven
- 10:44, 4 June 2019 diff hist +169 N Ovens - Overview of All Lab Ovens created page, generic Tool info
- 10:25, 4 June 2019 diff hist +74 Tool List →Thermal Processing for Photolithography: link to new Ovens Overview page Tag: Visual edit
- 11:23, 31 May 2019 diff hist -14 Filmetrics F40-UV Microscope-Mounted removed "screenshots" section --> "Examples" Tag: Visual edit
- 11:23, 31 May 2019 diff hist +1,293 Filmetrics F40-UV Microscope-Mounted →Screenshots + Examples: updated examples & confirming removal of SiO2 on Pt Tag: Visual edit
- 11:13, 31 May 2019 diff hist +19 m Filmetrics F40-UV Quick Start formatting current Tag: Visual edit
- 11:11, 31 May 2019 diff hist +131 Filmetrics F40-UV Quick Start →Sample Measurement: clarified good/bad fit & contatc Ning/Demis for help Tag: Visual edit: Switched
- 23:14, 30 May 2019 diff hist 0 m Template:Tool Removed spaces from filename in example.
- 23:10, 30 May 2019 diff hist +34 m Template:Tool →Options: no spaces in Picture filename
- 23:08, 30 May 2019 diff hist +20 m Template:Tool Typo in recipes thermalmproc
- 23:06, 30 May 2019 diff hist 0 m Rapid Thermal Processor (SSI Solaris 150) Corrected typo in recipe link
- 23:04, 30 May 2019 diff hist +14 m Thermal Processing Recipes More accurate description of how partial pressure derived Tag: Visual edit
- 23:00, 30 May 2019 diff hist +93 m Thermal Processing Recipes →Simulation Parameters: clarified partial pressure is from curve fitting Tag: Visual edit
- 22:56, 30 May 2019 diff hist +63 Tube Furnace (Tystar 8300) →About: specified tube 2: unprocessed, Tube3 processed is ok Tag: Visual edit
- 14:01, 30 May 2019 diff hist 0 m Tool List →Optical/Electron Microscopy: moved SEMs to bottom Tag: Visual edit