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- 00:37, 22 March 2019 diff hist +19 N File:Lab Rules - 4.3 AED.png current
- 00:36, 22 March 2019 diff hist +35 N File:Lab Rules - 4.2 eye wash and shower.png current
- 00:35, 22 March 2019 diff hist +39 N File:Lab Rules - 4.1 map to cottage hospital.png current
- 00:34, 22 March 2019 diff hist +43 N File:Lab Rules - 3.3 wet bench overhead controls.png current
- 00:34, 22 March 2019 diff hist +35 N File:Lab Rules - 3.1 fire and gas alarms.png current
- 00:33, 22 March 2019 diff hist +41 N File:Lab Rules - 2.6.1 spinner bench hotplates.png current
- 00:33, 22 March 2019 diff hist +48 N File:Lab Rules - 2.3 equipment maintaner contact sign.png current
- 00:32, 22 March 2019 diff hist +36 N File:Lab Rules - 1.16 surveillance camera.png current
- 00:31, 22 March 2019 diff hist +685 Lab Rules added images up to surveillance cameras Tag: Visual edit
- 00:30, 22 March 2019 diff hist +40 N File:Lab Rules - 1.15.4 metals weighing scale.png current
- 00:29, 22 March 2019 diff hist +34 N File:Lab Rules - 1.15.2 metals lock box.png current
- 00:29, 22 March 2019 diff hist +42 N File:Lab Rules - 1.14.2 face masks.png current
- 00:28, 22 March 2019 diff hist +42 N File:Lab Rules - 1.13.1 maintenance chase doors.png current
- 00:28, 22 March 2019 diff hist +47 N File:Lab Rules - 1.10.1 supplies racks NanoFab paper.png current
- 00:27, 22 March 2019 diff hist +36 N File:Lab Rules - 1.9.3 glass sharps waste.png current
- 00:26, 22 March 2019 diff hist +39 N File:Lab Rules - 1.8.1 beneficial time sheet.png current
- 00:25, 22 March 2019 diff hist +28 N File:Lab Rules - 1.6 iris scanner.png current
- 00:25, 22 March 2019 diff hist +28 N File:Lab Rules - 1.4.3 ASML masks.png current
- 00:24, 22 March 2019 diff hist +25 N File:Lab Rules - 1.4.2 dry box.png current
- 00:23, 22 March 2019 diff hist +29 N File:Lab Rules - 1.4.1 shelf space.png current
- 22:58, 21 March 2019 diff hist +53 Lab Rules move TOC below summary
- 22:57, 21 March 2019 diff hist +10 m Lab Rules removed Heading level for sub-title Tag: Visual edit
- 22:56, 21 March 2019 diff hist -407 Lab Rules removed bolded titles except for important sections Tag: Visual edit
- 21:38, 21 March 2019 diff hist +53 Lab Rules force numbered headings
- 21:37, 21 March 2019 diff hist +2 Main Page revert to remove numbering
- 21:37, 21 March 2019 diff hist -2 m Main Page test numbered headings
- 21:36, 21 March 2019 diff hist +43 Main Page no numbered headings
- 19:00, 21 March 2019 diff hist +45 m Tool List →Inspection, Test and Characterization: QFI added "thermal" Tag: Visual edit
- 08:05, 19 March 2019 diff hist +14 m ICP Etching Recipes →Si Etching: minor typo Tag: Visual edit
- 07:58, 19 March 2019 diff hist +36 Dry Etching Recipes linked to Fluorine Si etch Tag: Visual edit
- 10:17, 14 March 2019 diff hist +158 Lithography Recipes →General Information: PR's - cleaned up/clarified. Tag: Visual edit
- 10:14, 14 March 2019 diff hist +66 m Lithography Recipes →General Information: minor formatting, check links to litho chemicals section Tag: Visual edit
- 10:10, 14 March 2019 diff hist -2 Lithography Recipes →Chemicals Available + Datasheets: changed name to Stocked
- 10:10, 14 March 2019 diff hist +13 Lithography Recipes →Chemical Datasheets: changed name to "Chemicals Available + Datasheets"
- 13:34, 9 March 2019 diff hist +72 Probe Station & Curve Tracer →Equipment Specifications: update Keithley model
- 16:23, 5 March 2019 diff hist +238 Stepper 3 (ASML DUV) →Process Information: expand recipes text, added wafer size Tag: Visual edit
- 13:53, 4 March 2019 diff hist 0 m Template:Announcements moved Lab Closed to top
- 13:49, 4 March 2019 diff hist 0 m Template:Announcements →Lab Closed Mar. 6th 7-8am: Fire Alarm Testing: corrected date typo
- 13:49, 4 March 2019 diff hist +37 Template:Announcements added date to fire alarm testing
- 11:25, 26 February 2019 diff hist +180 Stepper 2 (AutoStep 200) →Detailed Specifications: info on quadrant mask field sizes Tag: Visual edit
- 10:07, 25 February 2019 diff hist +26 N User:Freeborn d redirect to staff page current
- 10:06, 25 February 2019 diff hist +27 N User:Hopkins a redirect to staff page current
- 10:05, 25 February 2019 diff hist +24 N User:Sawyer l redirect to Lee's staff page current
- 10:01, 25 February 2019 diff hist +29 User:John d redirect to Demis' staff page current
- 13:10, 20 February 2019 diff hist +490 Template:News s-cubed
- 12:56, 20 February 2019 diff hist +135 ASML Stepper 3 Standard Operating Procedure bring reportto sem Tag: Visual edit
- 12:05, 15 February 2019 diff hist +53 m ASML Stepper 3 - UCSB Test Reticles →Alignment Markers: note polarity Tag: Visual edit
- 12:04, 15 February 2019 diff hist -41 m ASML Stepper 3 - UCSB Test Reticles →Alignment Markers: deleted dicing alignment guides comment Tag: Visual edit
- 12:02, 15 February 2019 diff hist +267 Template:Announcements asml PM, added // to Mike's signatures.
- 00:40, 8 February 2019 diff hist 0 m Demis D. John Corrected phone nimber
- 11:39, 6 February 2019 diff hist +176 m Calculators + Utilities →Analysis Programs: link to AFM/profilm3d Tag: Visual edit
- 11:37, 6 February 2019 diff hist +10 m Tool List →Topographical Metrology: Profilm3D new URL Tag: Visual edit
- 11:36, 6 February 2019 diff hist +96 N White-Light/Phase-Shift Interference Profilometer (Filmetrics Profilm3D) John d moved page White-Light/Phase-Shift Interference Profilometer (Filmetrics Profilm3D) to Optical Profilometer - White-Light/Phase-Shift Interference (Filmetrics Profilm3D): clarify capability in title/links current
- 16:58, 4 February 2019 diff hist +352 m Template:Announcements added comments with RSS feed URLs
- 15:10, 4 February 2019 diff hist +252 m Wet Etching Recipes prominent link to master table Tag: Visual edit
- 11:15, 4 February 2019 diff hist -1 m Lee Sawyer fixed spacing error
- 11:04, 4 February 2019 diff hist +86 Template:Announcements test 2
- 11:03, 4 February 2019 diff hist +51 Template:Announcements test post
- 16:31, 31 January 2019 diff hist +33 N File:ASML On Wafer Mark.gds CAD file for ASML Alignment Marks current
- 01:19, 30 January 2019 diff hist +83 m Stocked Chemical List sorting Tag: Visual edit
- 01:17, 30 January 2019 diff hist +2 m Staff List →Process Group: minor formatting Tag: Visual edit
- 01:13, 30 January 2019 diff hist +219 N Lee Sawyer initial page
- 01:11, 30 January 2019 diff hist -25 m Demis D. John →Tools: removed table
- 01:10, 30 January 2019 diff hist +183 Demis D. John →Current Work: added stepper 3, managing role Tag: Visual edit: Switched
- 01:03, 30 January 2019 diff hist +247 Biljana Stamenic →Tools: added stepper #1/2 + Surfscan
- 00:58, 30 January 2019 diff hist -89 Tom Reynolds deleted "directs the lab" text Tag: Visual edit: Switched
- 00:58, 30 January 2019 diff hist +93 Brian Thibeault →Tools: removes JAW, added Stepper #3. Moved text from Tom's to BrianT's. Tag: Visual edit: Switched
- 00:10, 30 January 2019 diff hist +8 m ICP Etching Recipes →Photoresist and ARC etching: ARC --> BARC Tag: Visual edit
- 00:07, 30 January 2019 diff hist +17 Test Data of etching SiO2 with CHF3/CF4 move SEM image to table, changed File: --> direct URL Tag: Visual edit
- 00:05, 30 January 2019 diff hist +12 Test Data of etching SiO2 with CHF3/CF4-ICP1 moved SEM iamge to table, changed File: --> direct link Tag: Visual edit
- 00:03, 30 January 2019 diff hist +14 Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) moved SEM images to table, changed "File:" link --> Direct link to file Tag: Visual edit
- 12:29, 29 January 2019 diff hist +240 Template:News Profilm3D links/update
- 12:23, 29 January 2019 diff hist +6 Template:Announcements changed title to equip. status
- 12:21, 29 January 2019 diff hist +6 Template:Links Added job submission/lab access link
- 12:20, 29 January 2019 diff hist +83 Template:Links Added job submission link
- 03:15, 29 January 2019 diff hist +156 m Frequently Asked Questions →How do I get my files from the NanoFab computers?: explain group folder and re-sending teh email Tag: Visual edit
- 14:12, 28 January 2019 diff hist +4 m Frequently Asked Questions →"Somethign went wrong" while saving my edits! How do i keep my edits?: corrected spelling Tag: Visual edit
- 14:11, 28 January 2019 diff hist +62 m Frequently Asked Questions →"Somethign went wrong" while saving my edits! How do i keep my edits?: updated button names Tag: Visual edit
- 14:09, 28 January 2019 diff hist +1,025 Frequently Asked Questions →Wiki Questions: logged out while editing Tag: Visual edit
- 14:00, 28 January 2019 diff hist +23 m Ellipsometer (Woollam) →Specifications: added lorentz/drude Tag: Visual edit
- 13:59, 28 January 2019 diff hist 0 m Ellipsometer (Woollam) updated ning's phone #
- 13:52, 28 January 2019 diff hist +49 m Ellipsometer (Woollam) set to NingC super + added model; light source type
- 13:49, 28 January 2019 diff hist +242 Optical Film Spectra + Optical Properties (Filmetrics F10-RT-UVX) →About: link to JAw for RIx data Tag: Visual edit
- 13:43, 28 January 2019 diff hist +798 Ellipsometer (Woollam) added specs Tag: Visual edit
- 13:03, 28 January 2019 diff hist +104 Ning Cao →Tools: added JAW ellipsometer Tag: Visual edit
- 13:03, 28 January 2019 diff hist +346 Ning Cao added filmetrics tools Tag: Visual edit
- 12:58, 28 January 2019 diff hist +39 Atomic Layer Deposition (Oxford FlexAL) →ALD Recipes: max thickness → 30nm Tag: Visual edit
- 12:54, 28 January 2019 diff hist +64 m Editing Tutorials →Inserting images into a page: minor mistakes Tag: Visual edit
- 12:46, 28 January 2019 diff hist +641 N Logitech WBS7 - Procedure for Wax Mounting with bulk Crystalbond Stick draft recipe
- 12:43, 28 January 2019 diff hist +632 Wafer Bonder (Logitech WBS7) →About: added more info, placeholders for detailed info Tag: Visual edit
- 12:29, 28 January 2019 diff hist +2 m Dry Etching Recipes fixed ICP2 PR etching link Tag: Visual edit
- 18:04, 25 January 2019 diff hist +117 Staff List moved Admin to top, moved BrianT into Admin group. Changed Equip --> Equip + Faciltiies.
- 10:46, 24 January 2019 diff hist -404 Template:Announcements Cleared announcements
- 08:50, 24 January 2019 diff hist +2 m Dicing Saw (ADT) →Operating Procedures: minor formatting Tag: Visual edit
- 10:09, 23 January 2019 diff hist +206 m Dicing Saw (ADT) →Operating Procedures: links to operating procedures Tag: Visual edit
- 00:23, 17 January 2019 diff hist +179 m Frequently Asked Questions →How do I get my files from the NanoFab computers?: 24hr wait for new group folders
- 00:20, 17 January 2019 diff hist +176 m Calculators + Utilities →CAD Layout Programs: Klayout set database unit
- 12:37, 7 January 2019 diff hist +79 Tool List →Inspection, Test and Characterization: link for Filmetrics profilm3D Tag: Visual edit
- 12:32, 3 January 2019 diff hist -414 Template:Announcements deleted shutdowns, asml issue, updated filmetrics note.
- 22:57, 26 December 2018 diff hist +280 Editing Tutorials →It won't let me "Save" my changes!: pasted actual error message Tag: Visual edit
- 22:55, 26 December 2018 diff hist +1,692 Editing Tutorials FAQ: can't save page / can't upload file Tag: Visual edit
- 19:20, 26 December 2018 diff hist +54 N Stepper 2 (AutoStep 200) Operating Procedures initial placeholder page Tag: Visual edit
- 16:38, 19 December 2018 diff hist -45 Lab Rules finished heading levels! Now need images Tag: Visual edit
- 16:26, 19 December 2018 diff hist +2 m Lab Rules title heading level reduction Tag: Visual edit
- 16:25, 19 December 2018 diff hist -1,964 Lab Rules still updating headings Tag: Visual edit
- 18:23, 18 December 2018 diff hist +130 Calculators + Utilities →Scripts + Programs: added example AFM scan Tag: Visual edit
- 16:39, 18 December 2018 diff hist +1,063 Fluorescence Microscope (Olympus MX51) updated details / FLuorescence filters Tag: Visual edit
- 16:15, 18 December 2018 diff hist +4 m Template:Announcements bolded dates
- 16:10, 18 December 2018 diff hist -292 Template:Announcements deleted email/google issue
- 11:58, 18 December 2018 diff hist +40 Nano-Imprint (Nanonex NX2000) added wikipage to template current
- 11:57, 18 December 2018 diff hist +18 m Tony Bosch fixed typo/spacing
- 11:55, 18 December 2018 diff hist +479 Template:Announcements email issue, asml update
- 11:43, 18 December 2018 diff hist -1,251 Tony Bosch deleted placeholder text Tag: Visual edit: Switched
- 09:30, 18 December 2018 diff hist +97 m Calculators + Utilities →CAD Layout Programs: viewiing update Tag: Visual edit
- 23:03, 17 December 2018 diff hist +119 Template:News →Filmetrics Optical Profilometer: links
- 11:59, 14 December 2018 diff hist +310 Template:News filmetrics profilometer
- 16:26, 12 December 2018 diff hist +39 m Template:News link to KLA P-7 page
- 16:24, 12 December 2018 diff hist +383 Template:News KLATencor: past-tense / Filmetrics installs
- 16:21, 12 December 2018 diff hist +263 Template:Announcements lab shutdown, delete DSEiii issue
- 11:05, 12 December 2018 diff hist +4,303 N Filmetrics F10-RT-UVX Operating Procedure copy/pasted Ning's instructions, converted to wiki format
- 10:46, 12 December 2018 diff hist +72 Optical Film Spectra + Optical Properties (Filmetrics F10-RT-UVX) link to SOP
- 09:24, 8 December 2018 diff hist +19 m ASML 5500: Recovering from an Error minor formats Tag: Visual edit
- 09:19, 8 December 2018 diff hist +13 m Calculators + Utilities →CAD Layout Programs: format folder path Tag: Visual edit
- 09:19, 8 December 2018 diff hist +144 Calculators + Utilities →CAD Layout Programs: Users can download LEdit from Nanofiles SFTP Tag: Visual edit
- 16:45, 7 December 2018 diff hist +328 Stepper 2 (AutoStep 200) moved PR's out of paragraph into separate table. Tag: Visual edit
- 23:05, 6 December 2018 diff hist +1,370 N Optical Film Thickness & Wafer-Mapping (Filmetrics F50) pasted F20 text, update for F50
- 22:57, 6 December 2018 diff hist +1,458 N Optical Film Spectra + Optical Properties (Filmetrics F10-RT-UVX) copied F20 page, updated for f10-rt-uvx
- 22:42, 6 December 2018 diff hist +215 Tool List →Thin-Film Analysis/Measurement: Add links to Filmetrics F10RT-UVX & F50 Tag: Visual edit
- 22:47, 4 December 2018 diff hist +158 m Calculators + Utilities →Refractive Indices: description of why RIx is useful for NanoFab users Tag: Visual edit
- 18:15, 29 November 2018 diff hist +74 m Vacuum Deposition Recipes fixed AJA3 Cr link Tag: Visual edit
- 14:52, 28 November 2018 diff hist +219 Suss MA-6 Backside Alignment QuickStart how to expose more wafers current Tag: Visual edit
- 14:42, 28 November 2018 diff hist +49 Suss MA-6 Backside Alignment QuickStart added illumination knob setting Tag: Visual edit
- 09:11, 27 November 2018 diff hist +33 m Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) →Detailed Specifications: minor update to laser mon description Tag: Visual edit
- 09:10, 27 November 2018 diff hist +77 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) →Recipes: corrected link to recipes sub-heading Tag: Visual edit
- 09:07, 27 November 2018 diff hist +23 m Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) →Detailed Specifications: corrected subscripts Tag: Visual edit
- 16:59, 21 November 2018 diff hist +2 m ICP Etching Recipes →Photoresist and ARC Etching: corrected link Tag: Visual edit
- 11:52, 19 November 2018 diff hist 0 File:ASML Reticle Programming Params - MASKJAN2020 v1.xlsx John d uploaded a new version of File:ASML Reticle Programming Params - MyReticleBarCode v1.xlsx
- 11:30, 19 November 2018 diff hist +33 N File:ASML Reticle Programming Params - MASKJAN2020 v1.xlsx ASML Reticle programming template
- 11:11, 16 November 2018 diff hist +178 Frequently Asked Questions →Specific Equipment Problem: updated equipment problem procedure Tag: Visual edit
- 08:46, 14 November 2018 diff hist +231 Calculators + Utilities klayout> draw circles Tag: Visual edit
- 11:17, 9 November 2018 diff hist +135 Tool List →Dry Etch: link to etch monitors, specifically Laser Etch Monitoring page Tag: Visual edit
- 11:14, 9 November 2018 diff hist 0 m Laser Etch Monitoring John d moved page Intellemetrics Laser Etch Monitoring to Laser Etch Monitoring without leaving a redirect: make it generic to all laser etch monitors
- 11:14, 9 November 2018 diff hist +2,080 N Laser Etch Monitoring initial page, overview of laser monitoring, references and links to non-existent (desired) procedures Tag: Visual edit
- 09:08, 9 November 2018 diff hist +195 Template:Announcements deleted Cary500, added FIlmetrics announcements
- 10:35, 2 November 2018 diff hist +69,241 N Lab Rules initial copy/paste, partially formatted headings. Tag: Visual edit
- 09:56, 1 November 2018 diff hist +122 Photoluminescence PL Setup (Custom) Added spectrometer Tag: Visual edit
- 17:45, 29 October 2018 diff hist +225 Atomic Layer Deposition Recipes added temps and plasma/reactant info Tag: Visual edit
- 17:41, 29 October 2018 diff hist +4 Atomic Layer Deposition Recipes →ZnO Deposition (ALD Chamber 1): added approx rate from old notes Tag: Visual edit
- 13:37, 24 October 2018 diff hist +57 Stepper Recipes →Positive Resist (ASML DUV): UV6-0.7 recipe - mentioned replaced by -0.8 Tag: Visual edit
- 10:40, 23 October 2018 diff hist -139 m Wet Etching Recipes deleted test stuff Tag: Visual edit
- 10:38, 23 October 2018 diff hist +84 m Wet Etching Recipes table test Tag: Visual edit
- 10:34, 23 October 2018 diff hist +57 m Wet Etching Recipes example testing Tag: Visual edit
- 10:30, 22 October 2018 diff hist +29 Packaging Recipes →Mounting/Unmounting Samples: corrected tape model # and link to image
- 10:29, 22 October 2018 diff hist 0 m ADT UV-Tape Table 1042R John d moved page ? to ADT UV-Tape Table 1042R without leaving a redirect: give a name to page current
- 07:15, 22 October 2018 diff hist -360 Template:Announcements deleted lab closed
- 14:09, 17 October 2018 diff hist +2,218 N RIE5 - Standard Operating procedure (Cortex Software) pasted Don's SOP's current Tag: Visual edit
- 13:58, 17 October 2018 diff hist +40 RIE 5 (PlasmaTherm) →Documentation: link to new SOP Tag: Visual edit
- 13:49, 17 October 2018 diff hist -36 Packaging Recipes →Cutting Parameters: made header row Tag: Visual edit
- 13:47, 17 October 2018 diff hist +707 N Logitech WBS7 - Procedure for Wax Mounting with Spin-On Crystalbond pasted draft procedure
- 13:47, 17 October 2018 diff hist -513 Packaging Recipes moved logitech procedure to separate page. Tag: Visual edit
- 12:19, 17 October 2018 diff hist 0 m Editing Tutorials →Inserting images into a page: adjut recommended image height
- 12:18, 17 October 2018 diff hist +119 m Editing Tutorials →Inserting images into a page: moved floating image to end of sentence
- 12:15, 17 October 2018 diff hist +1,717 Editing Tutorials →Inserting images into a page: added instructions for inserting images Tag: Visual edit
- 11:33, 17 October 2018 diff hist +13 N File:MacOS - Happy Mac.png current
- 17:33, 16 October 2018 diff hist +48 Atomic Layer Deposition Recipes →Al O deposition (ALD CHAMBER 3): converted to regular subscripts, indented each recipe param Tag: Visual edit
- 14:40, 16 October 2018 diff hist +7 Template:Announcements lab closed thurs, deleted RIE5 SiCl4
- 14:39, 16 October 2018 diff hist -55 Template:Announcements updates to RIE5, PECVD1
- 09:15, 16 October 2018 diff hist +59 Dicing Saw (ADT) added sections for SOP, Detials Tag: Visual edit
- 09:14, 16 October 2018 diff hist +366 Wafer Bonder (Logitech WBS7) added link to recipes, short About statement. Tag: Visual edit
- 09:12, 16 October 2018 diff hist +893 Packaging Recipes added Logitech Wafer bonder section, initial draft of procedure for wax mounting Tag: Visual edit
- 09:03, 16 October 2018 diff hist +648 Tube Furnace AlGaAs Oxidation (Lindberg) added Description, and blanks secitons for Procedures/Recipes Tag: Visual edit
- 08:58, 16 October 2018 diff hist +287 Dicing Saw (ADT) linked to Dicing Recipes Tag: Visual edit
- 22:28, 15 October 2018 diff hist +1,228 N Packaging Recipes inital pages Tag: Visual edit
- 22:01, 15 October 2018 diff hist +36 MediaWiki:Sidebar added link to Packaging recipes
- 21:44, 15 October 2018 diff hist +228 m Ion Beam Deposition (Veeco NEXUS) →Detailed Specifications: red-link for calibration method Tag: Visual edit
- 21:41, 15 October 2018 diff hist +141 m Ion Beam Deposition (Veeco NEXUS) →Detailed Specifications: added TiN, Argon sample cleaning, nIR DBRs Tag: Visual edit
- 14:52, 15 October 2018 diff hist +2,102 Thermal Processing Recipes Updated thermal ox Recipe names, added Logitech Bonder, Finetech Bonder, Tystar AlGaAs, Lindberg AlGaAs basic info. Tag: Visual edit
- 10:48, 12 October 2018 diff hist +75 PECVD Recipes →PECVD 1 (PlasmaTherm 790): note about software upgrade Tag: Visual edit
- 23:25, 10 October 2018 diff hist -24 m Step Profilometer (KLA Tencor P-7) deleted erroneous "email" field from {tool} template
- 23:24, 10 October 2018 diff hist -2 Template:Tool update Brian Linng's email
- 23:19, 10 October 2018 diff hist +89 Probe Station & Curve Tracer →Equipment Specifications: included Windows PC & scripting environments Tag: Visual edit
- 23:18, 10 October 2018 diff hist +217 Probe Station & Curve Tracer →Equipment Specifications: deleted HP ParamAnalyzer Tag: Visual edit
- 23:16, 10 October 2018 diff hist -62 Tool List →Topographical Metrology: removed Rudolph Ellips & old Dektak Tag: Visual edit
- 23:13, 10 October 2018 diff hist +459 Filmetrics F40-UV Microscope-Mounted added capabilities section Tag: Visual edit
- 23:06, 10 October 2018 diff hist +161 Ellipsometer (Rudolph) note that tool has been removed current
- 13:51, 5 October 2018 diff hist +72 m ASML 5500: Recovering from an Error minor wording Tag: Visual edit
- 08:34, 5 October 2018 diff hist +1,259 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration moved some procedures onto this one common page Tag: Visual edit
- 08:33, 5 October 2018 diff hist -348 Stepper 3 (ASML DUV) →Troubleshooting and Recovery: removed uneeded links Tag: Visual edit
- 08:03, 5 October 2018 diff hist +184 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration link to wafer recovery page Tag: Visual edit
- 08:00, 5 October 2018 diff hist -62 m ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →Error, Calibration, Error logging Procedures for Users: deleted heading Tag: Visual edit
- 07:56, 5 October 2018 diff hist +433 ASML 5500: Recovering from an Error added instruciton to hit Help button Tag: Visual edit
- 15:29, 1 October 2018 diff hist +26 DSEIII (PlasmaTherm/Deep Silicon Etcher) →Recipes: fixed recipes link Tag: Visual edit
- 15:28, 1 October 2018 diff hist +46 m Dry Etching Recipes fixed SLR link Tag: Visual edit
- 18:22, 28 September 2018 diff hist -6 m Stepper Recipes →DS-K101: clarify how to reduce undercut. Tag: Visual edit
- 18:22, 28 September 2018 diff hist +264 Stepper Recipes →Anti-Reflective Coatings: link to DUV42P etch recipes, also set to individual subheadings Tag: Visual edit
- 18:13, 28 September 2018 diff hist +182 Dry Etching Recipes linked PR&ARC etchign to ICP1 & RIE5 sections Tag: Visual edit
- 18:12, 28 September 2018 diff hist +208 RIE Etching Recipes →RIE 5 (PlasmaTherm): added Photoressit & ARC etching, copied from DUV Litho recipes page Tag: Visual edit
- 18:08, 28 September 2018 diff hist +2 m ICP Etching Recipes →Photoresist & ARC Etching: changed name to no ampersand, mathcing ICP2 title Tag: Visual edit
- 18:07, 28 September 2018 diff hist +281 ICP Etching Recipes →ICP Etch 1 (Panasonic E626I): linked to ICP#2 PR/ARC etching recipe Tag: Visual edit
- 16:34, 26 September 2018 diff hist +170 CAIBE (Oxford Ion Mill) link to CAIBE recipes Tag: Visual edit
- 16:32, 26 September 2018 diff hist +29 Dry Etching Recipes fixed CAIBE recipe link Tag: Visual edit
- 22:35, 23 September 2018 diff hist +6 m Wet Etching Recipes →The Master Table of Wet Etching (Include All Materials): Si XTAL orientaiton Tag: Visual edit
- 22:33, 23 September 2018 diff hist +214 Wet Etching Recipes →The Master Table of Wet Etching (Include All Materials): added KOH/Si Tag: Visual edit
- 22:27, 23 September 2018 diff hist +1 m Wet Etching Recipes →Example Wet Etching Table: minor text update Tag: Visual edit
- 22:20, 23 September 2018 diff hist +905 Wet Etching Recipes →The Master Table of Wet Etching (Include All Materials): Added IBD BHF etch rates Tag: Visual edit
- 22:13, 23 September 2018 diff hist +719 Wet Etching Recipes →The Master Table of Wet Etching (Include All Materials): added PECVD#1+2 Si3N4 Tag: Visual edit
- 22:03, 23 September 2018 diff hist +78 m Wet Etching Recipes →The Master Table of Wet Etching (Include All Materials): "Buffered HF" → "HF ("Buffered HF Improved", Transene)" for sortability Tag: Visual edit
- 21:54, 23 September 2018 diff hist +52 Wet Etching Recipes →The Master Table of Wet Etching (Include All Materials): pointed out sorting, changed developers to start with "Developer" for sorting ease. Tag: Visual edit
- 21:51, 23 September 2018 diff hist +240 Wet Etching Recipes →The Master Table of Wet Etching (Include All Materials): updates to "selective to" fields etc. Tag: Visual edit
- 22:00, 18 September 2018 diff hist +500 Oxygen Plasma System Recipes →UV Ozone Reactor: added some basic info Tag: Visual edit
- 21:41, 18 September 2018 diff hist +46 Wafer Bonder (Logitech WBS7) added crummy scheamtic picture from manual
- 16:16, 18 September 2018 diff hist +91 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) →Recipes: fixed recipe links to point to correct section (Fluorine etch, not DeepRIE) Tag: Visual edit
- 16:13, 18 September 2018 diff hist -173 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) removed warning about outdated info
- 11:26, 17 September 2018 diff hist -309 Template:Announcements deleted EB2 upgrade
- 11:26, 17 September 2018 diff hist +129 Template:Announcements gasonics down
- 11:25, 17 September 2018 diff hist -378 Template:Announcements deleted fire alarm test
- 16:26, 14 September 2018 diff hist -217 Template:Announcements Fire Alarm Test, deleted DUVscope, Stepper maintenance
- 17:28, 12 September 2018 diff hist +212 Template:News KLA Tencor profilometer
- 17:13, 12 September 2018 diff hist +309 Template:Announcements EB2 maintenance
- 15:16, 11 September 2018 diff hist +361 Template:Announcements RIE5 software upgrade
- 23:01, 10 September 2018 diff hist +25 Template:Announcements added GCA AutoStep
- 12:27, 6 September 2018 diff hist -219 Template:Announcements IBD update, deleted EBeam 2
- 21:31, 5 September 2018 diff hist +6 m Demis D. John Heading level adjust
- 21:31, 5 September 2018 diff hist -5 Demis D. John Updated position
- 21:30, 5 September 2018 diff hist -1 m Demis D. John →Tools
- 21:29, 5 September 2018 diff hist +294 m Demis D. John Added professional websites Tag: Visual edit
- 11:22, 5 September 2018 diff hist +961 N Chemical List initial page, MSDS linked to google drive, Inventory List "To Be Added" Tag: Visual edit
- 11:10, 5 September 2018 diff hist 0 m Chemical List - OLD 2018-09-05 John d moved page Chemical List to Chemical List - OLD 2018-09-05 without leaving a redirect: eliminating thriple-entry of chemical MSDS etc., moving to google drive links etc.
- 10:41, 5 September 2018 diff hist +1 m Chemical List - OLD 2018-09-05 →UNSORTED: new link searchable, embedded link Tag: Visual edit
- 10:32, 5 September 2018 diff hist +166 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F): Added Au lower limit Tag: Visual edit
- 10:28, 5 September 2018 diff hist +149 Sputter 2 (SFI Endeavor) disclaimer that tool is disabled current
- 10:27, 5 September 2018 diff hist +20 Sputtering Recipes →Sputter 2 (SFI Endeavor): corrected - tool disabled, not removed yet Tag: Visual edit
- 10:25, 5 September 2018 diff hist +129 Sputtering Recipes →Sputter 2 (SFI Endeavor): disclaimer that the tool has been removed Tag: Visual edit
- 10:23, 5 September 2018 diff hist +1 m Sputtering Recipes moved sputter 2 to the bottom
- 22:55, 4 September 2018 diff hist +19 Filmetrics F40-UV Quick Start moved images to in-line Tag: Visual edit
- 17:33, 4 September 2018 diff hist +107 Chemical List - OLD 2018-09-05 added link to Google drive #2 from DJ's MyDrive Tag: Visual edit
- 17:27, 4 September 2018 diff hist +113 N ProcessGroup: Shipping Samples on Dicing Tape+Frame started page current Tag: Visual edit
- 17:17, 4 September 2018 diff hist +5 Template:Announcements ibd source water issue.
- 17:08, 4 September 2018 diff hist +637 m Editing Tutorials →Basic Editing: added partial "inserting images" section Tag: Visual edit
- 17:03, 4 September 2018 diff hist +371 Editing Tutorials →Making a New Page: added screenshot to click in Search results Tag: Visual edit
- 17:00, 4 September 2018 diff hist +74 N File:Editing Tutorial - Hyperlink panel nonexisting page 02 - CLICK arrow.png.png current
- 16:56, 4 September 2018 diff hist +51 Editing Tutorials →Making a New Page: updated intro text to clarify whole procedure Tag: Visual edit
- 16:55, 4 September 2018 diff hist +306 Editing Tutorials →Making a New Page: added screenshot showing to click "Create" tab Tag: Visual edit
- 16:53, 4 September 2018 diff hist +71 N File:Click on "Create" Tab to enter VisualEditing Mode.png current
- 16:48, 4 September 2018 diff hist +346 NanoFab Process Group added Equip Cal section, and 3 Litho tools I know we have procedures for. Tag: Visual edit
- 16:46, 4 September 2018 diff hist -4 NanoFab Process Group →Dicing Procedures: changed link from "new/fresh tape" to just "on tape" - will include the variation on the target page. Tag: Visual edit
- 16:42, 4 September 2018 diff hist +1,652 N NanoFab Process Group created page, Links to various dicing procedures. Added Process Control links as well. Tag: Visual edit
- 01:02, 1 September 2018 diff hist +213 Deep UV Optical Microscope (Olympus) added calibration image Tag: Visual edit
- 01:00, 1 September 2018 diff hist +48 N File:Olympus MX61A-DUV res test 100x DUV v1.png current
- 00:38, 1 September 2018 diff hist +41 m Template:Announcements duv link
- 00:36, 1 September 2018 diff hist -1 m Template:Announcements spacing
- 00:36, 1 September 2018 diff hist -26 Template:Announcements ibd update
- 23:05, 31 August 2018 diff hist +85 Microscopes link to DUV scope Tag: Visual edit
- 23:04, 31 August 2018 diff hist +35 m Deep UV Optical Microscope (Olympus) added description field
- 23:03, 31 August 2018 diff hist +18 m Deep UV Optical Microscope (Olympus) added model field Tag: Visual edit: Switched
- 22:31, 31 August 2018 diff hist +19 m Laser Scanning Confocal M-scope (Olympus LEXT) caption update Tag: Visual edit
- 22:30, 31 August 2018 diff hist +405 Microscopes added some model numbers and links to the relevant pages/manuals Tag: Visual edit
- 08:53, 31 August 2018 diff hist +49 Editing Tutorials separated into basic editign and administration Tag: Visual edit
- 08:50, 31 August 2018 diff hist +1,157 Editing Tutorials Making a new page section, with screenshots Tag: Visual edit
- 08:45, 31 August 2018 diff hist +43 N File:RedLink Screenshot.png current
- 08:42, 31 August 2018 diff hist +72 N File:Editing Tutorial - Hyperlink panel nonexisting page 01.png current
- 08:30, 31 August 2018 diff hist +47 N File:Editing Toolbar Hyperlink Button 01.png current
- 23:49, 30 August 2018 diff hist +146 Template:Announcements DUV scope update
- 07:45, 30 August 2018 diff hist +40 m Suss MA-6 Backside Alignment QuickStart explain "BSA" Tag: Visual edit
- 15:19, 29 August 2018 diff hist +449 Template:Announcements IBD down; Stepper 6300 maint.
- 17:19, 28 August 2018 diff hist -5 m Atomic Layer Deposition Recipes →ZnO Deposition (ALD Chamber 1): itlaics Tag: Visual edit
- 17:13, 28 August 2018 diff hist -149 m Atomic Layer Deposition Recipes →ZrO deposition (ALD CHAMBER 3): removed unneeded comment about HfO (which is already in the HfO section) Tag: Visual edit
- 17:11, 28 August 2018 diff hist +235 Atomic Layer Deposition Recipes →ZnO:Al deposition (ALD CHAMBER 1): described double-loop recipes Tag: Visual edit
- 17:09, 28 August 2018 diff hist +167 Atomic Layer Deposition Recipes →Oxford FlexAL Chamber #1: Metals: added ZnO recipe. Tag: Visual edit
- 15:25, 28 August 2018 diff hist +296 Oxygen Plasma System Recipes →Ashers (Technics PEII): added SiN etch and chamber clean Tag: Visual edit
- 15:20, 28 August 2018 diff hist -21 m Dry Etching Recipes replace bottom link from SiDeepEtch → SLR Fluorine ICP Tag: Visual edit
- 15:00, 28 August 2018 diff hist -65 Dry Etching Recipes renamed/linked SiDeepRIE → SLR Fluorine ICP Tag: Visual edit
- 14:57, 28 August 2018 diff hist +24 Tool List →ICP-RIE: link to SLR Fluorine Etcher Tag: Visual edit
- 14:56, 28 August 2018 diff hist +7 m Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) bolded the top note Tag: Visual edit: Switched
- 14:55, 28 August 2018 diff hist +51 ICP Etching Recipes →PlasmaTherm/SLR Fluorine Etcher: linked to proper/new tool page Tag: Visual edit
- 14:53, 28 August 2018 diff hist +180 ICP Etching Recipes added SLR Fluorine, moved SiDeepRIE to bottom
- 14:53, 28 August 2018 diff hist +166 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) note indicate info is from pre-conversion Tag: Visual edit
- 14:51, 28 August 2018 diff hist +64 N Si Deep RIE (PlasmaTherm/Bosch Etch) John d moved page Si Deep RIE (PlasmaTherm/Bosch Etch) to Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP): tool converted current
- 14:51, 28 August 2018 diff hist 0 m Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) John d moved page Si Deep RIE (PlasmaTherm/Bosch Etch) to Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP): tool converted
- 14:38, 28 August 2018 diff hist +440 ICP Etching Recipes →Si Deep RIE (PlasmaTherm/Bosch Etch): note that the tool does not exist in this configuration any more Tag: Visual edit: Switched
- 14:25, 28 August 2018 diff hist +26 m Stepper 3 (ASML DUV) moved Test Reticles into Process info, othe rminor changes Tag: Visual edit
- 14:14, 24 August 2018 diff hist +6 m Photoluminescence PL Setup (Custom) header formats Tag: Visual edit
- 14:13, 24 August 2018 diff hist +355 Photoluminescence PL Setup (Custom) copied image/info from holography page
- 10:32, 24 August 2018 diff hist +146 N Photoluminescence PL Setup (Custom) iniital page, in progress Tag: Visual edit
- 10:12, 24 August 2018 diff hist +42 Tool List →Inspection, Test and Characterization: PL setup page link Tag: Visual edit
- 23:11, 22 August 2018 diff hist +4 m Talk:Tool List current
- 23:10, 22 August 2018 diff hist +325 N Talk:Tool List mention BrianT, switch Si_DeepRIE --> SLR Fluorine
- 16:03, 22 August 2018 diff hist 0 Tool List →Thermal Processing: corrected Logitech bonder model # & link Tag: Visual edit
- 16:02, 22 August 2018 diff hist +42 N Wafer Bonder (Logitech WSB7) John d moved page Wafer Bonder (Logitech WSB7) to Wafer Bonder (Logitech WBS7): Correct erroneous model number current
- 16:02, 22 August 2018 diff hist 0 m Wafer Bonder (Logitech WBS7) John d moved page Wafer Bonder (Logitech WSB7) to Wafer Bonder (Logitech WBS7): Correct erroneous model number
- 15:20, 22 August 2018 diff hist -15 m Wafer Bonder (Logitech WBS7) removed wrong picture
- 15:17, 22 August 2018 diff hist +288 N Wafer Bonder (Logitech WBS7) initial page, copied source from existing page
- 15:14, 22 August 2018 diff hist 0 Tool List correct Logitech link with model: WSB7 Tag: Visual edit
- 11:54, 22 August 2018 diff hist +77 Tool List →Thermal Processing: link to Logitech wafer bonder Tag: Visual edit
- 11:28, 18 August 2018 diff hist -27 Template:Announcements EBeam #2 heater repair
- 15:04, 16 August 2018 diff hist +188 m Filmetrics F40-UV Microscope-Mounted →About: minor text updates, curve fitting mentioned Tag: Visual edit
- 06:38, 15 August 2018 diff hist +39 Template:Announcements PECVD software upgrade
- 13:57, 14 August 2018 diff hist +127 Frequently Asked Questions →I can't connect to the Nanofiles FTP server!: max # connections Tag: Visual edit
- 10:45, 14 August 2018 diff hist 0 m Frequently Asked Questions →I can't connect to the Nanofiles FTP server!: correct nanofabadmin email address Tag: Visual edit
- 10:43, 14 August 2018 diff hist +362 Frequently Asked Questions →I can't connect to the Nanofiles FTP server!: links to set your FTP client to limit # of connections Tag: Visual edit
- 07:36, 14 August 2018 diff hist +1,164 Frequently Asked Questions blocked form nanofiles solution/faq Tag: Visual edit
- 09:55, 7 August 2018 diff hist -96 Template:Announcements pecvd s/w upgrade date sept.
- 23:46, 5 August 2018 diff hist +354 m ASML Stepper 3 - UCSB Test Reticles →Reticle ID: "UCSB-OPC1": updated description of plate Tag: Visual edit
- 23:40, 5 August 2018 diff hist +687 ASML Stepper 3 Dicing Guide Programming Added negative PR image Tag: Visual edit
- 09:34, 3 August 2018 diff hist +3,277 ASML Stepper 3 - UCSB Test Reticles →Coords for "UCSB_Cal" Calibration Patterns: added coords for each resolution_chart_ORIG Tag: Visual edit
- 08:07, 3 August 2018 diff hist -2 ASML Stepper 3 - UCSB Test Reticles →Alignment Markers: rename multipurpose to EBL Tag: Visual edit
- 22:35, 1 August 2018 diff hist -463 Template:Announcements Deleted old UP items
- 17:31, 1 August 2018 diff hist +44 m ASML Stepper 3 - UCSB Test Reticles White is Chrome, Striped area is Clear Tag: Visual edit
- 17:24, 1 August 2018 diff hist +81 ASML Stepper 3 - UCSB Test Reticles →Reticle ID: "UCSB-OPC1": mention reticle is always installed in Box #1 Tag: Visual edit
- 17:22, 1 August 2018 diff hist +341 m ASML Stepper 3 - UCSB Test Reticles →Calibration Chart Layout: update table and "UCSB_Cal" descriptions/coords for clarity Tag: Visual edit
- 03:29, 1 August 2018 diff hist +338 ASML Stepper 3 - UCSB Test Reticles added contact_mark Tag: Visual edit
- 03:28, 1 August 2018 diff hist +47 N File:Align Front - Screen Shot 2018-07-23 at 11.32.16 AM.png current
- 03:24, 1 August 2018 diff hist +17 m ASML Stepper 3 - UCSB Test Reticles typo
- 03:20, 1 August 2018 diff hist +3,940 ASML Stepper 3 - UCSB Test Reticles added resolution charts + coords etc. Tag: Visual edit
- 03:17, 1 August 2018 diff hist +82 N File:Resolution chart OPC - Screen Shot 2018-07-23 at 1.40.48 PM.png current
- 03:14, 1 August 2018 diff hist +36 N File:Resolution Chart - Screen Shot 2018-07-23 at 1.36.31 PM.png current
- 03:05, 1 August 2018 diff hist +42 N File:UCSB cal - Screen Shot 2018-07-23 at 12.06.58 PM.png current
- 02:58, 1 August 2018 diff hist +1,167 N ASML Stepper 3 - UCSB Test Reticles added UCSB-OPC1 and alignment marks for that reticle Tag: Visual edit
- 02:57, 1 August 2018 diff hist +51 N File:GlobalMulti NEG - Screen Shot 2018-07-23 at 11.22.19 AM.png current
- 02:54, 1 August 2018 diff hist +37 N File:GlobalMulti POS - Screen Shot 2018-07-23 at 11.17.23 AM.png current
- 02:52, 1 August 2018 diff hist +29 N File:Stepper align - Screen Shot 2018-07-23 at 11.24.31 AM.png current
- 02:44, 1 August 2018 diff hist +86 Stepper 3 (ASML DUV) →Operating Procedures: Link to UCSB Test Reticles Tag: Visual edit
- 02:40, 1 August 2018 diff hist +1,722 N ASML Stepper 3 Dicing Guide Programming initial page, included screenshot and basic programming Tag: Visual edit
- 02:32, 1 August 2018 diff hist +41 N File:UCSB Dicing Guides - Die Location - 800px.png current
- 02:26, 1 August 2018 diff hist +50 N File:UCSB Dicing Guides - Image Location on Reticle - 800px.png current
- 02:24, 1 August 2018 diff hist +34 N File:UCSB Dicing Guides - IMG 1199 annotated.jpg current
- 18:28, 27 July 2018 diff hist -123 Template:Announcements Sem up
- 16:12, 27 July 2018 diff hist -129 Template:Announcements sem2 down
- 11:35, 26 July 2018 diff hist -99 Template:Announcements THERMco furnace up, deleted DSEiii
- 11:33, 26 July 2018 diff hist +146 Template:Announcements Sem2 update
- 18:19, 25 July 2018 diff hist +51 m Olympus LEXT OLS4000 Confocal uScope - Quick Start clarified log off button current Tag: Visual edit
- 18:17, 25 July 2018 diff hist +1,417 Olympus LEXT OLS4000 Confocal uScope - Quick Start Inserted screenshots and images Tag: Visual edit
- 18:16, 25 July 2018 diff hist +48 N File:Olympus LEXT - log out-close buttons highlighted.png current
- 18:14, 25 July 2018 diff hist +42 N File:Olympus LEXT - sample load position button.png current
- 18:13, 25 July 2018 diff hist +34 N File:Olympus LEXT - 5x objective button.png current
- 18:11, 25 July 2018 diff hist +29 N File:Olympus LEXT - Imaging Button.png current
- 18:10, 25 July 2018 diff hist +31 N File:Olympus LEXT - Save File button.png current
- 18:05, 25 July 2018 diff hist +37 N File:Olympus LEXT - Cursor Averaging.png current
- 18:03, 25 July 2018 diff hist 0 File:Olympus LEXT - Image Correction button.png John d uploaded a new version of File:Olympus LEXT - Image Correction button.png current
- 18:02, 25 July 2018 diff hist +57 N File:Olympus LEXT - Saturation Highlighting button highlighted.png current
- 17:57, 25 July 2018 diff hist +38 N File:Olympus LEXT - Image Correction button.png
- 17:54, 25 July 2018 diff hist +50 N File:Olympus LEXT - 3-point Leveling Screen highlighted.png current
- 17:49, 25 July 2018 diff hist +51 N File:Olympus LEXT - Profile 2-point Buttons.png current
- 17:40, 25 July 2018 diff hist +26 N File:Olympus LEXT - login guest.png current
- 17:38, 25 July 2018 diff hist +44 N File:Olympus LEXT - Imaging + Measurement Buttons.png current
- 17:35, 25 July 2018 diff hist +33 N File:Olympus LEXT - Acquisition Button.png current
- 17:31, 25 July 2018 diff hist +41 N File:Olympus LEXT - Top-Bottom Setting.png current
- 17:23, 25 July 2018 diff hist +62 N File:Olympus LEXT - acquisition settings - Fine, manual annot.png current
- 17:16, 25 July 2018 diff hist +167 Olympus LEXT OLS4000 Confocal uScope - Quick Start inserted images, partially done Tag: Visual edit
- 17:15, 25 July 2018 diff hist +35 N File:Olympus LEXT - laser imaging button.png current
- 17:12, 25 July 2018 diff hist +33 N File:Olympus LEXT - Live halo.png current
- 17:10, 25 July 2018 diff hist +35 N File:Olympus LEXT - Color imaging button.png current
- 17:07, 25 July 2018 diff hist +38 N File:Olympus LEXT - Button Flag measurement position.png current
- 16:58, 25 July 2018 diff hist +1,784 Laser Scanning Confocal M-scope (Olympus LEXT) describe technique & insert example measurement pic Tag: Visual edit
- 16:57, 25 July 2018 diff hist +37 N File:Olypmus LEXT Example Profile Measurement.png current
- 13:51, 25 July 2018 diff hist +225 Template:Announcements E-Beam 2 heater down
- 13:46, 25 July 2018 diff hist +213 Template:Announcements Sem2 down
- 10:53, 25 July 2018 diff hist +492 Microscopes added LEXT Tag: Visual edit
- 11:49, 24 July 2018 diff hist -22 Template:Announcements sputter 3 up
- 09:30, 24 July 2018 diff hist +153 Template:Announcements thermco furnace down
- 13:26, 23 July 2018 diff hist -56 Template:Announcements DSEiii up
- 18:35, 20 July 2018 diff hist +278 m Olympus LEXT OLS4000 Confocal uScope - Quick Start →Quick-Start General Procedure: Minor grammar etc. Tag: Visual edit
- 17:28, 20 July 2018 diff hist +8 m Template:Announcements →DSE-iii Down: update
- 17:28, 20 July 2018 diff hist +38 Template:Announcements Delete ASML, add sputter 3
- 22:47, 19 July 2018 diff hist +46 m Olympus LEXT OLS4000 Confocal uScope - Quick Start Tag: Visual edit
- 22:44, 19 July 2018 diff hist +4,994 N Olympus LEXT OLS4000 Confocal uScope - Quick Start copy/pasted word doc, no images yet
- 21:32, 19 July 2018 diff hist +99 Laser Scanning Confocal M-scope (Olympus LEXT) link to quickstart page Tag: Visual edit
- 21:26, 19 July 2018 diff hist 0 File:Filmetrics F40-UV - spectrum curve fit 07.jpg John d uploaded a new version of File:Filmetrics F40-UV - spectrum curve fit 07.jpg
- 21:25, 19 July 2018 diff hist 0 File:Filmetrics F40-UV - spectrum curve fit 07.jpg John d uploaded a new version of File:Filmetrics F40-UV - spectrum curve fit 07.jpg
- 21:24, 19 July 2018 diff hist 0 File:Filmetrics F40-UV - spectrum curve fit 07.jpg John d uploaded a new version of File:Filmetrics F40-UV - spectrum curve fit 07.jpg
- 19:31, 18 July 2018 diff hist +149 Template:Announcements DSEiii clasp broke
- 22:13, 17 July 2018 diff hist +14 N UCSB NanoFab Microscope Training coming soon Tag: Visual edit
- 22:09, 17 July 2018 diff hist +116 Microscopes →Documentation: link to microscope training Tag: Visual edit
- 22:07, 17 July 2018 diff hist +15 m Filmetrics F40-UV Quick Start →Sample Measurement Tag: Visual edit
- 22:04, 17 July 2018 diff hist -173 m Filmetrics F40-UV Quick Start delete header pic Tag: Visual edit: Switched
- 18:44, 17 July 2018 diff hist +202 Filmetrics F40-UV Quick Start image reorg Tag: Visual edit
- 18:40, 17 July 2018 diff hist +61 Filmetrics F40-UV Quick Start image reflow editing Tag: Visual edit: Switched
- 18:09, 17 July 2018 diff hist +120 Filmetrics F40-UV Microscope-Mounted added photo Tag: Visual edit
- 18:08, 17 July 2018 diff hist +3,565 N Filmetrics F40-UV Quick Start initial quick start. numbering is kinda messe dup, wrote in 10 min! Tag: Visual edit
- 18:05, 17 July 2018 diff hist +18 N File:Filmetrics F40-UV - spectrum curve fit 07.jpg
- 18:04, 17 July 2018 diff hist +78 N File:Filmetrics F40-UV - dark meas thru hole 06.jpg current
- 18:03, 17 July 2018 diff hist +28 N File:Filmetrics F40-UV - objective choice 05.jpg current
- 18:02, 17 July 2018 diff hist +33 N File:Filmetrics F40-UV - focus on bare silicon 04.jpg current
- 18:01, 17 July 2018 diff hist +15 N File:Filmetrics F40-UV - wafer placement 03.jpg current
- 17:59, 17 July 2018 diff hist +20 N File:Filmetrics F40-UV - light source setting 02.jpg current
- 17:58, 17 July 2018 diff hist +15 N File:Filmetrics F40-UV - system pic 01.jpg current
- 17:57, 17 July 2018 diff hist +457 N Filmetrics F40-UV Microscope-Mounted initial description, link to quick start Tag: Visual edit
- 17:48, 17 July 2018 diff hist +41 Tool List →Inspection, Test and Characterization: link to Filmetrics F-40-UV page Tag: Visual edit
- 17:47, 17 July 2018 diff hist +7 Template:Announcements →ASML Maintenance: timeline update
- 16:39, 17 July 2018 diff hist +355 Atomic Layer Deposition Recipes split up bullets, clarified recipe name, formatting Tag: Visual edit
- 16:34, 17 July 2018 diff hist +155 Atomic Layer Deposition Recipes split into Chamber 1 & Chamber 3 Tag: Visual edit
- 15:57, 17 July 2018 diff hist +208 UV Ozone Reactor add description and model
- 15:53, 17 July 2018 diff hist +4 m UV Ozone Reactor bullet list Tag: Visual edit: Switched
- 15:53, 17 July 2018 diff hist +111 UV Ozone Reactor link to Quick start from TBosch email, and user manual PDF Tag: Visual edit: Switched
- 15:41, 17 July 2018 diff hist +36 N File:UV Ozone Manual Jelight M-144AX.pdf current
- 15:40, 17 July 2018 diff hist +989 N UV Ozone Quick Start quick start from Tony's email current Tag: Visual edit
- 14:40, 17 July 2018 diff hist +23 m Stepper 3 (ASML DUV) →Operating Procedures: added wafer recovery
- 14:39, 17 July 2018 diff hist +6 m ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →Wafer Recovery / Wafer Handler Issues during Batch operation: bold Tag: Visual edit
- 14:38, 17 July 2018 diff hist -10 m ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →Error, Calibration, Error logging Procedures for Users: remove header formatting Tag: Visual edit
- 14:35, 17 July 2018 diff hist +293 m ASML Stepper 3 Error Recovery, Troubleshooting and Calibration moved wafer recovery to top Tag: Visual edit
- 14:31, 17 July 2018 diff hist +2,129 N ASML Stepper 3 Error Recovery, Troubleshooting and Calibration copy/pasted BT's procedures, fomratting Tag: Visual edit
- 14:19, 17 July 2018 diff hist +76 m Stepper 3 (ASML DUV) →Operating Procedures: moved Error recovery to "troubleshootin" section Tag: Visual edit
- 14:17, 17 July 2018 diff hist +315 ASML 5500: Choose Marks for Prealignment added global mark updating current Tag: Visual edit
- 14:14, 17 July 2018 diff hist +117 Stepper 3 (ASML DUV) →Operating Procedures: link to error & calibration procedure Tag: Visual edit
- 14:13, 17 July 2018 diff hist -2 m ASML Stepper 3 Standard Operating Procedure remove colons Tag: Visual edit
- 14:12, 17 July 2018 diff hist -397 ASML Stepper 3 Standard Operating Procedure finalized formatting Tag: Visual edit
- 11:33, 17 July 2018 diff hist -263 m ASML Stepper 3 Standard Operating Procedure partial indenting Tag: Visual edit
- 11:25, 17 July 2018 diff hist +161 ASML Stepper 3 Standard Operating Procedure update indentation Tag: Visual edit
- 11:23, 17 July 2018 diff hist +6,403 N ASML Stepper 3 Standard Operating Procedure initial version, indenting in progress Tag: Visual edit
- 11:19, 17 July 2018 diff hist +80 Stepper 3 (ASML DUV) link to SOP Tag: Visual edit
- 11:16, 17 July 2018 diff hist -1 m Template:Announcements spacing fixes
- 11:15, 17 July 2018 diff hist +37 Template:Announcements delete SLR turbo fail, AMSL maint.
- 09:26, 17 July 2018 diff hist +103 Template:News LaserMon update ICP1
- 07:06, 16 July 2018 diff hist -58 m Sputtering Recipes →Sputter 5 (AJA ATC 2200-V): correct signupmonkey link, footnote star Tag: Visual edit
- 07:04, 16 July 2018 diff hist +74 m Vacuum Deposition Recipes link to sputter 5 section Tag: Visual edit
- 22:43, 14 July 2018 diff hist -168 Template:Announcements remove asml
- 19:02, 14 July 2018 diff hist -1 m Template:Announcements spacing fixes
- 19:02, 14 July 2018 diff hist -234 Template:Announcements stepper 3 wafer stuck
- 08:17, 13 July 2018 diff hist +92 Lithography Recipes →Photolithography Recipes: fixed links to Stepp3 pos PR Tag: Visual edit
- 09:09, 9 July 2018 diff hist +74 Vacuum Deposition Recipes sputt4 link to TiN - recipes table Tag: Visual edit
- 08:17, 9 July 2018 diff hist +23 Template:Announcements holiday fire update
- 16:26, 7 July 2018 diff hist -13 m Template:Announcements delete unaries
- 10:15, 7 July 2018 diff hist +6 m Template:Announcements Bullets
- 10:14, 7 July 2018 diff hist -1 m Template:Announcements →LAB OPEN: formatting
- 10:14, 7 July 2018 diff hist +64 Template:Announcements Lab open
- 22:26, 6 July 2018 diff hist -384 Template:Announcements Lab closed, deleted non-urgent announcements
- 22:04, 6 July 2018 diff hist -17 Template:Announcements SLR down failed turbo
- 22:03, 6 July 2018 diff hist -73 Template:Announcements Ma6 up
- 13:21, 6 July 2018 diff hist +166 Template:Announcements MA-6 down
- 13:20, 6 July 2018 diff hist +103 Template:Announcements lab open update
- 10:22, 6 July 2018 diff hist -295 Template:Announcements lab open
- 08:23, 6 July 2018 diff hist +378 Template:Announcements high humidity
- 23:45, 3 July 2018 diff hist -2 Staff List updated job titles Tag: Visual edit
- 23:25, 3 July 2018 diff hist +333 IR Thermal Microscope (QFI) added link to manual Tag: Visual edit
- 23:15, 3 July 2018 diff hist +12 m Tool List →Thermal Processing: fix table
- 23:09, 3 July 2018 diff hist +76 m Tool List →Thermal Processing: tabled Tag: Visual edit: Switched
- 23:00, 3 July 2018 diff hist +196 Tool List →Dry Etch: categories Tag: Visual edit
- 22:56, 3 July 2018 diff hist +117 Tool List →Vacuum Deposition: categories Tag: Visual edit
- 22:51, 3 July 2018 diff hist +18 m Tool List →Inspection, Test and Characterization: styled table Tag: Visual edit
- 22:50, 3 July 2018 diff hist -112 m Template:Announcements deleted icp2
- 16:41, 3 July 2018 diff hist +34 m Wet Benches →General Information: how to label glassware Tag: Visual edit
- 16:39, 3 July 2018 diff hist 0 m Bill Mitchell code/typo Tag: Visual edit: Switched
- 16:38, 3 July 2018 diff hist +47 Bill Mitchell →Tools: link to ALD Tag: Visual edit
- 16:38, 3 July 2018 diff hist +4 m Atomic Layer Deposition (Oxford FlexAL) →ALD Recipes: link to bill mitchell Tag: Visual edit
- 16:37, 3 July 2018 diff hist +774 Atomic Layer Deposition (Oxford FlexAL) →About: explained dual-chamber setup, added 50nm restriction Tag: Visual edit
- 16:10, 3 July 2018 diff hist +178 m Calculators + Utilities →CAD Layout Programs: credits fo L-edit tutotiral Tag: Visual edit
- 15:58, 3 July 2018 diff hist +1,382 N Suss MA-6 Backside Alignment QuickStart Demis' backside alignmetn quick-start instructions Tag: Visual edit
- 15:48, 3 July 2018 diff hist +45 Contact Aligner (SUSS MA-6) →Documentation: Link to Backside ALignment quickstart Tag: Visual edit
- 15:47, 3 July 2018 diff hist -159 Contact Aligner (SUSS MA-6) →Documentation: combined 4 pages into one PDF Tag: Visual edit
- 15:38, 3 July 2018 diff hist +788 Calculators + Utilities →Scripts + Programs: added CAD/L-Edit/KLayout info Tag: Visual edit
- 14:59, 3 July 2018 diff hist +259 Tool List →Inspection, Test and Characterization: added categories Tag: Visual edit
- 14:27, 3 July 2018 diff hist +131 m Wet Benches →Detailed Specifications: split temps into separate benches Tag: Visual edit
- 14:25, 3 July 2018 diff hist +495 Tool List categories for lithography tools Tag: Visual edit
- 17:00, 26 June 2018 diff hist 0 m Thermal Evaporation Recipes moved In to bottom of table current
- 16:47, 26 June 2018 diff hist +106 ICP Etching Recipes →Ti Etch (Panasonic 1): link to elecrochem paper Tag: Visual edit
- 08:46, 26 June 2018 diff hist -111 Template:Announcements ICP2 up
- 16:23, 25 June 2018 diff hist 0 m Template:Announcements Update timestamp
- 16:20, 25 June 2018 diff hist +124 Template:Announcements ICP he
- 10:04, 25 June 2018 diff hist -137 Template:Announcements icp2 update
- 22:19, 23 June 2018 diff hist +236 Template:Announcements icp2 vac error
- 17:00, 22 June 2018 diff hist 0 m Frequently Asked Questions minor reorg Tag: Visual edit
- 16:56, 22 June 2018 diff hist +634 Lab Rules OLD 2018 →Wet Bench Housekeeping: added descriptions of how to dispose of soaked wipes, for solvent and corrosive. Tag: Visual edit
- 16:49, 22 June 2018 diff hist +195 Lab Rules OLD 2018 →Nanofab Wipes: Non-shedding by request only, s/Pec described particulates a bit. Tag: Visual edit
- 16:46, 22 June 2018 diff hist 0 m Frequently Asked Questions →Can I add equipment reservations to my phone/computer/online calendar?: puncutation Tag: Visual edit
- 16:44, 22 June 2018 diff hist +45 m Frequently Asked Questions →General NanoFab Questions: record issues in tool logbook Tag: Visual edit
- 15:29, 22 June 2018 diff hist 0 Thermal Evaporation Recipes fixed table syntax, which caused both tables to land Outside the expected section
- 15:23, 22 June 2018 diff hist +4 m Thermal Evaporation Recipes corrected materials table subheading --> level 2 (was level 1)
- 15:05, 20 June 2018 diff hist +417 Template:Announcements pecvd1 s/w upgrade
- 13:53, 20 June 2018 diff hist -1 m Sputtering Recipes →Al2O3 deposition (IBD): AlOx recipe name Tag: Visual edit
- 13:31, 20 June 2018 diff hist -361 m Template:Announcements delted old notes
- 18:14, 18 June 2018 diff hist +126 N TEST PAGE testing link to gDrive MSDS folder current Tag: Visual edit
- 17:24, 15 June 2018 diff hist -23 Template:Announcements AFM up
- 17:23, 15 June 2018 diff hist +135 Template:Announcements IBD Update
- 17:22, 15 June 2018 diff hist +197 Template:Announcements RIE5 SiCl4 issue 5min max
- 17:20, 15 June 2018 diff hist +13 Chemical List - OLD 2018-09-05 H2O2 "30%" added Tag: Visual edit
- 15:05, 15 June 2018 diff hist +226 Template:Announcements stepper 2 up
- 15:04, 15 June 2018 diff hist -367 m Template:Announcements PECVD2 deleted
- 16:18, 12 June 2018 diff hist +21 m Template:Announcements pecvd2 retraining required
- 16:17, 12 June 2018 diff hist -185 Template:Announcements rie5 SiCl4 UP, deleted "lab open"
- 16:14, 11 June 2018 diff hist -583 Template:Announcements lab reopened update, deleted DSE wafer removed
- 11:07, 8 June 2018 diff hist +266 Template:Announcements afm down
- 09:33, 8 June 2018 diff hist +9 Template:Announcements dse update, up
- 11:46, 7 June 2018 diff hist +12 Template:Announcements less startling title for lab closed
- 11:45, 7 June 2018 diff hist +489 Template:Announcements lab shutdown Monday june 11
- 09:30, 7 June 2018 diff hist +128 ICP Etch 1 (Panasonic E646V) →About: additional description of Ashing chamber utility Tag: Visual edit
- 09:28, 7 June 2018 diff hist +135 ICP Etch 1 (Panasonic E646V) →Detailed Specifications: added chuck temperatures Tag: Visual edit
- 09:25, 7 June 2018 diff hist +52 ICP Etch 2 (Panasonic E626I) →Detailed Specifications: default chuck temp shown Tag: Visual edit
- 17:18, 6 June 2018 diff hist +15 Template:Announcements bench 7 heated bath update
- 16:19, 5 June 2018 diff hist +18 m Editing Tutorials changed headers to "heading" style Tag: Visual edit
- 16:18, 5 June 2018 diff hist +69 m Editing Tutorials rearrange, minor edits Tag: Visual edit
- 14:37, 5 June 2018 diff hist -211 Template:Announcements deleted rie5 broken wafer
- 17:19, 4 June 2018 diff hist +185 m Calculators + Utilities →Wet Etching: minor description updates Tag: Visual edit
- 17:00, 4 June 2018 diff hist +40 Template:Announcements RIE#5 SiCl4 update
- 16:59, 4 June 2018 diff hist +212 Template:Announcements rie5 wafers in chamber
- 13:41, 4 June 2018 diff hist +4 m Stepper 3 (ASML DUV) →Process Information: italics on sub-bullet Tag: Visual edit
- 13:40, 4 June 2018 diff hist +127 Stepper 3 (ASML DUV) →About: copied info to "process info" Tag: Visual edit
- 12:23, 4 June 2018 diff hist +131 Stepper 3 (ASML DUV) approx maximum wafer bow Tag: Visual edit
- 10:49, 31 May 2018 diff hist +296 ICP Etch 1 (Panasonic E646V) updates, listed SEMI-std. flats Tag: Visual edit
- 20:58, 30 May 2018 diff hist +67 Chemical List - OLD 2018-09-05 →Lithography Chemicals: bolded some stocked chemicals Tag: Visual edit
- 17:26, 30 May 2018 diff hist +12 Template:Announcements many updates