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- 07:07, 13 April 2018 diff hist +12 MediaWiki:Sidebar MSDS --> "Chemicals + MSDS"
- 07:06, 13 April 2018 diff hist +347 Chemical List - OLD 2018-09-05 updated info Tag: Visual edit
- 07:01, 13 April 2018 diff hist +108 Tool List →Wet Processing: link to Chemical List page Tag: Visual edit
- 13:48, 12 April 2018 diff hist -257 Template:Announcements deleted blueM & ICP2 up posts
- 13:48, 12 April 2018 diff hist +292 Template:Announcements rie5 down 4/19
- 13:26, 9 April 2018 diff hist +45 Wet Etching Recipes →The Master Table of Wet Etching (Include All Materials): HF selective to PR Tag: Visual edit
- 13:25, 9 April 2018 diff hist -143 Wet Etching Recipes →The Master Table of Wet Etching (Include All Materials): removed duplicate row Tag: Visual edit
- 13:09, 9 April 2018 diff hist +134 Calculators + Utilities →Scripts + Programs: put analysis prgs at top Tag: Visual edit
- 12:55, 9 April 2018 diff hist +204 Calculators + Utilities link to ProFilmOnline Tag: Visual edit
- 12:41, 9 April 2018 diff hist +51 Calculators + Utilities move nk.py to "Scripts" section Tag: Visual edit
- 12:40, 9 April 2018 diff hist +175 Calculators + Utilities add http://www.lelandstanfordjunior.com Tag: Visual edit
- 12:37, 9 April 2018 diff hist +21 Tube Furnace (Tystar 8300) →About: low-temp ox on tube 1 Tag: Visual edit
- 12:36, 9 April 2018 diff hist +12 m Tube Furnace (Tystar 8300) →About: minor rewording Tag: Visual edit
- 12:33, 9 April 2018 diff hist +1 Template:Tool 300x350px max
- 12:32, 9 April 2018 diff hist -1 Template:Tool image --> file syntax
- 12:29, 9 April 2018 diff hist +4 Template:Tool set height on image
- 12:28, 9 April 2018 diff hist +292 Tube Furnace (Tystar 8300) link to thermal recipes page, minor tweaks otherwsie Tag: Visual edit
- 12:20, 9 April 2018 diff hist 0 m Thermal Processing Recipes →1050°C Dry Oxidation: correction to pressures Tag: Visual edit
- 12:19, 9 April 2018 diff hist -8 m Thermal Processing Recipes →1050°C Wet Oxidation: image adjust Tag: Visual edit
- 12:17, 9 April 2018 diff hist +583 Thermal Processing Recipes →Thermal Oxidation of Silicon: added simulation/data for Wet1050 and Dry1050 Tag: Visual edit: Switched
- 12:13, 9 April 2018 diff hist +52 N File:TyStar Thermal Oxidations - WetOx 1050°C 2018-04-09 zoom.png current
- 12:11, 9 April 2018 diff hist +52 N File:TyStar Thermal Oxidations - WetOx 1050°C 2018-04-09.png current
- 12:09, 9 April 2018 diff hist +32 N File:TyStar Thermal Oxidations - DryOx 1050°C 2018-04-09.png current
- 10:40, 9 April 2018 diff hist +205 DSEIII (PlasmaTherm/Deep Silicon Etcher) →Recipes: linked to recipes Tag: Visual edit
- 00:07, 9 April 2018 diff hist -15 m ICP Etching Recipes →High Rate Bosch Etch (DSEIII): removed test page Tag: Visual edit
- 00:06, 9 April 2018 diff hist -17 m Frequently Asked Questions →A recipe is indicated as "A", Available, where do I find info on this recipe?: typo Tag: Visual edit
- 09:57, 6 April 2018 diff hist +352 ICP Etch 2 (Panasonic E626I) →Documentation: added recipes section Tag: Visual edit
- 09:43, 6 April 2018 diff hist -78 m Dry Etching Recipes deleted test links Tag: Visual edit
- 09:36, 6 April 2018 diff hist -50 ICP Etching Recipes →New test recipe: testing 2 Tag: Visual edit
- 09:33, 6 April 2018 diff hist +67 ICP Etching Recipes →ICP Etch 2 (Panasonic E640): TESTING Tag: Visual edit
- 09:31, 6 April 2018 diff hist +78 Dry Etching Recipes testing Tag: Visual edit
- 09:29, 6 April 2018 diff hist +15 ICP Etching Recipes link to test page Tag: Visual edit
- 10:49, 5 April 2018 diff hist -64 Template:Announcements bluem up
- 09:26, 5 April 2018 diff hist +55 Template:Announcements ibd removed, bluem fuse blown
- 10:21, 2 April 2018 diff hist +5 Template:Announcements icp2 update
- 14:59, 1 April 2018 diff hist +44 Template:Announcements icp2 down
- 21:31, 29 March 2018 diff hist +353 m Template:Announcements edit comments
- 21:09, 28 March 2018 diff hist -158 Template:Announcements IBD up
- 12:29, 28 March 2018 diff hist +186 Template:Announcements asml leveling error
- 11:16, 28 March 2018 diff hist -4 Template:Announcements IBD update
- 09:48, 28 March 2018 diff hist +224 Stepper 3 (ASML DUV) →Troubleshooting and Recovery: link to "ASML 5500: Choose Marks for Prealignment" Tag: Visual edit
- 09:47, 28 March 2018 diff hist +849 N ASML 5500: Choose Marks for Prealignment initial, instructions on how to edit Optical Prealignment alignment choice Tag: Visual edit
- 07:48, 28 March 2018 diff hist +6 m Template:Announcements →IBD: Burning smell from failed supply: grammar
- 07:32, 28 March 2018 diff hist +270 Template:Announcements IBD burning smell.
- 21:43, 27 March 2018 diff hist +166 Template:Announcements adt update
- 12:14, 26 March 2018 diff hist +2 m Template:Announcements →EBeam #4: Re-Training needed: needed --> required
- 12:13, 26 March 2018 diff hist -146 Template:Announcements →EBeam #4: Down for Upgrades: title = UP, retraining
- 12:12, 26 March 2018 diff hist -183 Template:Announcements delete dse-iii wafer stuck
- 12:12, 26 March 2018 diff hist +20 Template:Announcements →ADT Dicing Saw: Software Problem: fixed, note on recent recipes
- 10:49, 26 March 2018 diff hist +93 m Editing Tutorials →Basic Editing: [back] to cancel changes Tag: Visual edit
- 10:30, 26 March 2018 diff hist +9 N File:Home Feed - ResearchGate.pdf current
- 19:55, 24 March 2018 diff hist 0 m Frequently Asked Questions →How do I get a login to the wiki?: cleaned up Tag: Visual edit
- 19:53, 24 March 2018 diff hist +720 Frequently Asked Questions →How do I get a login to the wiki?: Instructions to Create a Login Tag: Visual edit
- 19:48, 24 March 2018 diff hist +113 m Editing Tutorials →Basic Editing: minor updates Tag: Visual edit
- 14:18, 24 March 2018 diff hist +191 Template:Announcements adt software
- 14:10, 24 March 2018 diff hist +183 Template:Announcements dse wafer stuck.
- 09:59, 24 March 2018 diff hist +462 Frequently Asked Questions →Processing/Fabrication Questions: explain/link to photolith datasheets Tag: Visual edit
- 09:51, 24 March 2018 diff hist +238 Frequently Asked Questions →Wiki Questions: instructions to create wiki login Tag: Visual edit
- 09:46, 24 March 2018 diff hist +119 Frequently Asked Questions split into nanofab/processing/wiki question sections Tag: Visual edit
- 09:42, 24 March 2018 diff hist +30 Lithography Recipes →Chemical Datasheets: added "AZ EBR". no link yet Tag: Visual edit
- 21:15, 22 March 2018 diff hist -546 m Template:Announcements remove old items
- 12:41, 21 March 2018 diff hist +16 m Template:Announcements →NanoFab Shutdown: Thurs 3/22 for 1.5hrs: add date
- 12:41, 21 March 2018 diff hist +2 m Template:Announcements →NanoFab Shutdown: Wed 3/22 for 1.5hrs: correct day
- 12:41, 21 March 2018 diff hist -23 Template:Announcements →NanoFab Shutdown 3/21 for 1.5hrs: 3/22 update
- 23:59, 20 March 2018 diff hist -51 m ASML 5500: Recovering from a Typo in Reticle ID sig test revert current
- 23:58, 20 March 2018 diff hist +51 m ASML 5500: Recovering from a Typo in Reticle ID sig test
- 23:58, 20 March 2018 diff hist +297 ASML 5500: Recovering from an Error explained that wafers will be transferred thru stepper Tag: Visual edit
- 23:44, 20 March 2018 diff hist +1 m Template:Announcements sigfix
- 23:43, 20 March 2018 diff hist -28 m Template:Announcements signature test
- 23:43, 20 March 2018 diff hist +21 N MediaWiki:Signature removed user talk link current
- 23:37, 20 March 2018 diff hist +411 Template:Announcements nanofba shutdown, dse update
- 13:57, 20 March 2018 diff hist -54 Template:Announcements sig fix
- 13:57, 20 March 2018 diff hist +357 Template:Announcements DSE repair, EB4 update
- 13:35, 19 March 2018 diff hist +95 Stepper 3 (ASML DUV) →Operating Procedures: recovering from error Tag: Visual edit
- 13:33, 19 March 2018 diff hist +461 N ASML 5500: Recovering from an Error initial, copied from "recover from reticle ID typo"
- 13:23, 19 March 2018 diff hist -497 Template:Announcements pecvd2 update, stepper maint. removed
- 11:38, 19 March 2018 diff hist +198 Stepper 3 (ASML DUV) →Operating Procedures: link to reticle id error Tag: Visual edit
- 11:38, 19 March 2018 diff hist +576 N ASML 5500: Recovering from a Typo in Reticle ID procedure to abort batch Tag: Visual edit
- 17:26, 16 March 2018 diff hist +30 m Template:Announcements pecvd update title
- 17:24, 16 March 2018 diff hist +60 Template:Announcements pecvd2 update
- 14:06, 16 March 2018 diff hist +32 Vacuum Deposition Recipes IBD Al2O3 "R" link Tag: Visual edit
- 14:03, 16 March 2018 diff hist +40 m Ion Beam Deposition (Veeco NEXUS) →Detailed Specifications Tag: Visual edit
- 13:59, 16 March 2018 diff hist +159 Tool List →Lithography: link to available PRs Tag: Visual edit
- 13:45, 16 March 2018 diff hist +99 Dry Etching Recipes ICP2 AL2O3 R link Tag: Visual edit
- 13:44, 16 March 2018 diff hist +95 Dry Etching Recipes ICP2 PR/ARC reipce link Tag: Visual edit
- 13:43, 16 March 2018 diff hist +465 ICP Etching Recipes →ICP Etch 2 (Panasonic E640): PR & ARC recipes added Tag: Visual edit
- 11:04, 16 March 2018 diff hist +31 Template:Announcements →Stepper #1 Maintenance: maint done
- 11:03, 16 March 2018 diff hist -40 Template:Announcements →PECVD #2: High Particulates: down, update
- 08:25, 15 March 2018 diff hist +13 m Template:Announcements EB4 title Upgrades
- 08:24, 15 March 2018 diff hist -28 m Template:Announcements sigfix
- 08:22, 15 March 2018 diff hist -27 m Template:Announcements sigfix
- 08:21, 15 March 2018 diff hist -114 Template:Announcements stepper 1 maintenance update
- 20:37, 13 March 2018 diff hist -119 E-Beam Evaporation Recipes →Materials Table (E-Beam #1): made table sortable, removed header row for sorting Tag: Visual edit
- 20:36, 13 March 2018 diff hist -119 E-Beam Evaporation Recipes →Materials Table (E-Beam #2): made table sortable, removed header row for sorting Tag: Visual edit
- 20:35, 13 March 2018 diff hist -119 E-Beam Evaporation Recipes →Materials Table (E-Beam #4): made table sortable, removed header row for sorting Tag: Visual edit
- 20:33, 13 March 2018 diff hist -9 m Vacuum Deposition Recipes removed 'sortable' tag Tag: Visual edit
- 17:40, 13 March 2018 diff hist +71 Vacuum Deposition Recipes fixed IBD SiOn link Tag: Visual edit
- 17:39, 13 March 2018 diff hist -38 Vacuum Deposition Recipes IBD SiOxNy link Tag: Visual edit
- 17:32, 13 March 2018 diff hist +9 Vacuum Deposition Recipes make table sortable Tag: Visual edit
- 11:49, 13 March 2018 diff hist +22 m Sputtering Recipes →SiOxNy deposition (IBD): subscripts Tag: Visual edit
- 11:49, 13 March 2018 diff hist 0 m Sputtering Recipes →SiOxNy Deposition (IBD): match title formatting of other sections. Tag: Visual edit
- 11:48, 13 March 2018 diff hist +669 Sputtering Recipes added IBD SiOxNy from 2010 Tag: Visual edit
- 11:45, 13 March 2018 diff hist +51 N File:IBD SiON - Dep rate vs O2 flow - wiki.png current
- 11:39, 13 March 2018 diff hist +68 N File:IBD SiON Index @ 623nm vs. O2 Gas Flow - v3 - wiki.jpg current
- 11:31, 13 March 2018 diff hist +3 m Sputtering Recipes →Ion Beam Deposition (Veeco NEXUS): moved SiN section to under SiO2 Tag: Visual edit: Switched
- 08:08, 11 March 2018 diff hist -27 m Template:Announcements sigfix
- 08:07, 11 March 2018 diff hist +151 Template:Announcements pecvd 2 update
- 10:50, 6 March 2018 diff hist +111 Template:Announcements Eb4 update
- 21:30, 3 March 2018 diff hist -113 Template:Announcements Deleted JEOL
- 21:29, 3 March 2018 diff hist -27 m Template:Announcements →PECVD #2: High Particulates: sigfix
- 21:29, 3 March 2018 diff hist +45 Template:Announcements →PECVD #2: High Particulates: update
- 13:13, 28 February 2018 diff hist -119 Template:Announcements removed testing post - 5 tildes does NOT work!
- 18:55, 26 February 2018 diff hist -2 m Template:News spacing fixes
- 18:54, 26 February 2018 diff hist -7 m Template:News spacing fixes
- 18:53, 26 February 2018 diff hist +2 m Template:Announcements minor move
- 18:52, 26 February 2018 diff hist +1 m Template:Announcements minor grammar
- 18:39, 26 February 2018 diff hist -23 m Template:Announcements minor grammar
- 18:29, 26 February 2018 diff hist +3 m Template:Announcements // sig
- 18:29, 26 February 2018 diff hist +114 Template:Announcements testing sig with 5 tildes
- 18:27, 26 February 2018 diff hist -27 m Template:Announcements sigfix
- 18:27, 26 February 2018 diff hist +51 Template:Announcements EB4 down / power supply update
- 00:25, 24 February 2018 diff hist 0 N File:Digidat-Toppan Mask order form (UCSB ASML 5500).docx
- 00:02, 24 February 2018 diff hist +38 N File:Toppan UCSB quotation 041116.pdf toppan quote for ASML mask plates 2016 current
- 18:01, 23 February 2018 diff hist -27 m Template:Announcements →PECVD #2: High Particulates: sigfix
- 18:01, 23 February 2018 diff hist +54 m Template:Announcements sigfix
- 18:00, 23 February 2018 diff hist +252 Template:Announcements pecvd#2 paticulates
- 16:50, 23 February 2018 diff hist -110 Template:Announcements jeol sem up
- 15:06, 21 February 2018 diff hist -7 m Stepper 3 (ASML DUV) →About: minor tweak Tag: Visual edit
- 15:05, 21 February 2018 diff hist +10 m Stepper 3 (ASML DUV) →Operating Procedures: updat elink text Tag: Visual edit
- 15:05, 21 February 2018 diff hist -146 Stepper 3 (ASML DUV) →About: removed field sizes text, pointed to mask making page Tag: Visual edit
- 15:03, 21 February 2018 diff hist -5 Stepper 3 (ASML DUV) →Operating Procedures: linked to Wiki version of Mask making Guidelines Tag: Visual edit
- 14:58, 21 February 2018 diff hist +37 N File:ASML Stepper 3 - Field Sizes - Screen Shot 2018-02-21 at 1.40.22 PM.png current
- 14:27, 21 February 2018 diff hist +510 Stepper 3 (ASML DUV) →About: updated capabilities, moved mask sizes to separate paragraph. Tag: Visual edit
- 08:41, 21 February 2018 diff hist -50 m Template:Announcements sigfix
- 08:40, 21 February 2018 diff hist +673 Template:Announcements stepper 1 + 2 maintenance scheduled
- 08:37, 21 February 2018 diff hist -98 Template:Announcements removed ICP#1
- 00:08, 21 February 2018 diff hist -31 Template:News →Metal Processes on the Atomic Layer Deposition
- 00:07, 21 February 2018 diff hist +83 m Template:News →Metal Processes on the Atomic Layer Deposition: timestamp
- 18:36, 20 February 2018 diff hist +63 Template:Announcements jeol update
- 22:44, 19 February 2018 diff hist +2 m Template:Announcements →Gasonics: Up: grammar
- 08:08, 17 February 2018 diff hist 0 m Template:Announcements →JEOL SEM #2: Up: typo
- 23:30, 16 February 2018 diff hist +49 Template:Announcements →JEOL SEM #2: Down: up temp.
- 02:34, 16 February 2018 diff hist -32 Template:Announcements →ICP#1: Down: up
- 11:19, 15 February 2018 diff hist +274 Lithography Recipes →Chemical Datasheets: explain Chemical Datasheets - lists chemicals availabel in lab Tag: Visual edit
- 14:42, 14 February 2018 diff hist +3 m Template:Announcements →ICP#1: Down: slasshes
- 14:42, 14 February 2018 diff hist -27 m Template:Announcements sig fix
- 14:41, 14 February 2018 diff hist 0 Template:Announcements icp1 dpwn, delete ASML
- 14:40, 14 February 2018 diff hist -27 m Template:Announcements →JEOL SEM #2: Down: sigfix
- 14:40, 14 February 2018 diff hist +16 Template:Announcements →JEOL SEM #2: Up: down
- 17:01, 13 February 2018 diff hist -25 m Template:Announcements sig fix
- 17:01, 13 February 2018 diff hist -228 Template:Announcements jeol sem up
- 17:52, 12 February 2018 diff hist +5 m Template:Announcements cary down title
- 17:52, 12 February 2018 diff hist -27 m Template:Announcements sig fix
- 17:51, 12 February 2018 diff hist +266 Template:Announcements sem2 update
- 14:48, 12 February 2018 diff hist -27 m Template:Announcements sig fixes
- 14:47, 12 February 2018 diff hist +27 Template:Announcements cary update
- 14:46, 12 February 2018 diff hist +155 Template:Announcements gasonics up, mech. pump notice
- 11:16, 12 February 2018 diff hist -5 m Template:Announcements remove spaces
- 11:15, 12 February 2018 diff hist -13 m Template:Announcements sig
- 11:14, 12 February 2018 diff hist +133 Template:Announcements gasnoics down
- 19:53, 10 February 2018 diff hist -24 m Template:Announcements sig
- 19:52, 10 February 2018 diff hist +185 Template:Announcements asml pm done
- 14:34, 9 February 2018 diff hist +110 m Template:News laser mon: links to tools
- 12:56, 9 February 2018 diff hist +8 Template:News sig fixes to "posted"
- 12:54, 9 February 2018 diff hist -2 m Template:News typo
- 12:53, 9 February 2018 diff hist -3 Template:News sig fix
- 12:53, 9 February 2018 diff hist +405 Template:News laser monitors
- 16:52, 8 February 2018 diff hist +6 m Template:Announcements minor format
- 16:40, 8 February 2018 diff hist -27 Template:Announcements sig fix
- 16:40, 8 February 2018 diff hist +154 Template:Announcements jeol gate issue
- 22:16, 6 February 2018 diff hist +369 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F): added height conversion for Sputt3 Tag: Visual edit
- 22:11, 6 February 2018 diff hist 0 N File:Sputter 3 - height conversion v1.PNG current
- 22:09, 6 February 2018 diff hist 0 m Sputtering Recipes →Sputter 4 (AJA ATC 2200-V): alphabetize sputt4 table Tag: Visual edit
- 22:07, 6 February 2018 diff hist +95 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F): added Al2O3 sputt3 Tag: Visual edit
- 22:00, 6 February 2018 diff hist 0 m Sputtering Recipes →Sputter 3 (AJA ATC 2000-F): alphabetize table sputt3 Tag: Visual edit
- 19:02, 6 February 2018 diff hist +99 m Wet Etching Recipes →The Master Table of Wet Etching (Include All Materials): link to AJA4 Al2O3 page Tag: Visual edit
- 19:01, 6 February 2018 diff hist +40 m ICP Etching Recipes →Al2O3 Etching (Panasonic 2): ack brian markman Tag: Visual edit
- 19:00, 6 February 2018 diff hist +296 ICP Etching Recipes →Al2O3 Etching (Panasonic 2): Al2O3 etch data Tag: Visual edit: Switched
- 18:56, 6 February 2018 diff hist 0 N File:Brian Markman - Al2O3 ICP2 Etch Rates 2018.pdf current
- 18:46, 6 February 2018 diff hist +72 ICP Etching Recipes →ICP Etch 2 (Panasonic E640): unfinished Al2O3 etching on ICP2 Tag: Visual edit
- 18:44, 6 February 2018 diff hist 0 m Sputtering Recipes →Sputter 4 (AJA ATC 2200-V): alphabetize TiN Tag: Visual edit
- 18:43, 6 February 2018 diff hist 0 Sputtering Recipes →Al2O3 Deposition (Sputter 4): alphabetize Tag: Visual edit
- 18:40, 6 February 2018 diff hist +57 Vacuum Deposition Recipes added "R" for Sput4 Al & Al2O3 Tag: Visual edit: Switched
- 18:35, 6 February 2018 diff hist +253 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V): Al2O3 Dep sputter 4 + cauchy params Tag: Visual edit
- 18:30, 6 February 2018 diff hist +102 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V): Al2O3 addition to table Tag: Visual edit
- 18:18, 6 February 2018 diff hist +84 Wet Etching Recipes →The Master Table of Wet Etching (Include All Materials): Al2O3 (AJA#4) in 300 MiF Tag: Visual edit
- 12:42, 30 January 2018 diff hist +745 Wet Etching Recipes →The Master Table of Wet Etching (Include All Materials): added HF etch rates for PECVD SiO2, and IBD Al2O3 HF/700-MIF rates Tag: Visual edit
- 08:14, 26 January 2018 diff hist -4 Demis D. John update email addr.
- 18:56, 24 January 2018 diff hist +18 Film Stress (Tencor Flexus) Added model
- 16:27, 24 January 2018 diff hist +734 Frequently Asked Questions Added Nanofiles info. Tag: Visual edit
- 16:20, 24 January 2018 diff hist +125 Calculators + Utilities →General Calculators: link to pyvisa Tag: Visual edit
- 16:18, 24 January 2018 diff hist -16 m Calculators + Utilities →General Calculators: minor italics remove Tag: Visual edit
- 16:16, 24 January 2018 diff hist +1 Tube Furnace (Tystar 8300) fix 'model' typo
- 16:14, 24 January 2018 diff hist +177 Template:Tool added Mike Day & Demis to the staff info template as options. Removed duplicate "model" variable
- 16:06, 24 January 2018 diff hist +89 Template:Tool added Model field
- 16:03, 24 January 2018 diff hist +20 Tube Furnace (Tystar 8300) added model
- 16:01, 24 January 2018 diff hist -55 m Tube Furnace (Tystar 8300) →See Also: fix typo Tag: Visual edit
- 16:01, 24 January 2018 diff hist +307 Tube Furnace (Tystar 8300) →See Also: link to stanford TOX calc Tag: Visual edit
- 15:58, 24 January 2018 diff hist +588 Tube Furnace (Tystar 8300) →Process Information: recipe descriptions, added AlGaAs.001 Tag: Visual edit
- 15:39, 24 January 2018 diff hist +4 m Calculators + Utilities minor italics Tag: Visual edit
- 15:39, 24 January 2018 diff hist +212 Calculators + Utilities →Fabrication Processes & Converters: added Stanford thermal ox calc Tag: Visual edit
- 14:39, 20 January 2018 diff hist +33 m Microscopes →Nikon: make measurements Tag: Visual edit
- 14:38, 20 January 2018 diff hist +101 m Tool List placeholder link for microscope mounted Filmetrics Tag: Visual edit
- 14:36, 20 January 2018 diff hist +24 Optical Film Thickness (Filmetrics) added model
- 08:32, 18 January 2018 diff hist -37 m Wet Etching Recipes update links to master table Tag: Visual edit
- 08:30, 18 January 2018 diff hist +25 m Wet Etching Recipes →Compound Semiconductor Etching: update HLink
- 08:29, 18 January 2018 diff hist +651 Wet Etching Recipes added references section Tag: Visual edit
- 08:44, 17 January 2018 diff hist +210 Atomic Layer Deposition Recipes added "contact bill mitchell" and Added Ru Tag: Visual edit
- 14:36, 16 January 2018 diff hist +22 Optical Film Thickness (Filmetrics) updated tool location & description in template Tag: Visual edit
- 09:49, 12 January 2018 diff hist +177 Chemical List - OLD 2018-09-05 added "1020" to chromium mask etchant to clarify which one we have Tag: Visual edit
- 17:10, 11 January 2018 diff hist +63 Tom Reynolds →Current Work: contact to get lab access Tag: Visual edit
- 13:22, 10 January 2018 diff hist -23 m Template:News fix comment tag
- 13:21, 10 January 2018 diff hist 0 Template:News fix feed tags
- 13:19, 10 January 2018 diff hist +29 m Template:News disabled feedburner link
- 13:19, 8 January 2018 diff hist -1 m Dry Etching Recipes fixed RIE5 GaN link Tag: Visual edit: Switched
- 13:17, 8 January 2018 diff hist +1 Dry Etching Recipes fixed RIE5 links Tag: Visual edit
- 13:15, 8 January 2018 diff hist +19 m Template:Rl/doc arguments heading current
- 13:14, 8 January 2018 diff hist +795 Template:Rl/doc added example, verbose description
- 13:01, 8 January 2018 diff hist +81 Dry Etching Recipes Added "hptotoresist & ARC" row, with A recipes Tag: Visual edit: Switched
- 10:42, 8 January 2018 diff hist +27 Dry Etching Recipes added space to ICP1/2 recipe links, hopefully fixes targeted links Tag: Visual edit
- 11:02, 4 January 2018 diff hist +1 m Template:Announcements typo
- 11:01, 4 January 2018 diff hist +64 Template:Announcements add description
- 11:00, 4 January 2018 diff hist +5 Template:Announcements disable feedburner
- 10:59, 4 January 2018 diff hist -26 m Template:Announcements sig
- 10:58, 4 January 2018 diff hist -166 Template:Announcements no announcments
- 12:51, 28 December 2017 diff hist 0 m MediaWiki:Sidebar minor templates link format
- 12:50, 28 December 2017 diff hist +54 MediaWiki:Sidebar added signupmonkey link
- 10:20, 28 December 2017 diff hist -412 Template:Announcements updated staff holiday & removed wildfire
- 14:08, 23 December 2017 diff hist -126 m Template:Announcements deleted GCS stepper update
- 15:27, 19 December 2017 diff hist +148 m Sputtering Recipes →Sputter 4 (AJA ATC 2200-V): signupmonkey link Tag: Visual edit
- 15:26, 19 December 2017 diff hist +149 m Sputtering Recipes →Sputter 3 (AJA ATC 2000-F): link to singumoney Tag: Visual edit
- 10:48, 14 December 2017 diff hist -15 m Template:News minor grammar
- 10:43, 14 December 2017 diff hist +368 Template:News ALD metals
- 10:39, 14 December 2017 diff hist +4 m Atomic Layer Deposition (Oxford FlexAL) ALD recipes heading
- 10:39, 14 December 2017 diff hist +142 Atomic Layer Deposition (Oxford FlexAL) heading/link to recipes page
- 10:34, 14 December 2017 diff hist -21 Template:Announcements sig update
- 10:32, 14 December 2017 diff hist +552 Template:Announcements holiday closures
- 15:26, 13 December 2017 diff hist 0 m Frequently Asked Questions emergency contact to top
- 15:25, 13 December 2017 diff hist 0 m Frequently Asked Questions moved wiki editing FAQ to bottom
- 15:24, 13 December 2017 diff hist +37 Frequently Asked Questions →Emergencies: added room number Tag: Visual edit
- 18:21, 12 December 2017 diff hist -130 Template:Announcements removed ICP#1
- 14:16, 10 December 2017 diff hist -108 Template:Announcements NanoFab closed
- 21:25, 9 December 2017 diff hist -10 m Frequently Asked Questions →Emergencies Tag: Visual edit
- 23:00, 8 December 2017 diff hist +87 Frequently Asked Questions →Emergencies: building number/info Tag: Visual edit
- 21:38, 7 December 2017 diff hist -90 Template:Announcements level 5 headings
- 21:37, 7 December 2017 diff hist +112 Template:Announcements →Tool Updates: each item gets level 5 heading
- 21:34, 7 December 2017 diff hist +3 Template:Announcements →Announcements: dbl slash delimiter on 1st item
- 21:33, 7 December 2017 diff hist +6 Template:Announcements →Announcements: dbl-slash delimiter
- 21:33, 7 December 2017 diff hist +62 Template:Announcements →Tool Updates: cary 500 update
- 21:31, 7 December 2017 diff hist -27 Template:Announcements →Tools that are currently down: title --> tool updates, use dbl-slash // delimit
- 16:08, 7 December 2017 diff hist +54 Template:Announcements main annc. bumped date
- 16:08, 7 December 2017 diff hist -13 Template:Announcements sig, ist via subheadings lvl4
- 16:06, 7 December 2017 diff hist +11 Template:Announcements separated posts
- 12:18, 6 December 2017 diff hist -6 m Template:Announcements →Announcements: formatting
- 12:17, 6 December 2017 diff hist -7 m Template:Announcements →Announcements: formatting
- 12:16, 6 December 2017 diff hist +15 m Template:Announcements Formatting
- 12:13, 6 December 2017 diff hist +190 Template:Announcements Tool updates
- 10:06, 6 December 2017 diff hist -32 m Template:Announcements sig
- 10:06, 6 December 2017 diff hist -3 Template:Announcements reopened
- 00:20, 6 December 2017 diff hist +4 m Sputter 3 (AJA ATC 2000-F) →Materials Table: try to fix targeted link
- 16:15, 5 December 2017 diff hist +11 m Template:Announcements →Announcements: added newlines
- 16:13, 5 December 2017 diff hist -31 m Template:Announcements remove sig
- 16:13, 5 December 2017 diff hist +25 m Template:Announcements →Announcements: minor update to check syncing
- 11:42, 5 December 2017 diff hist +6 m Template:Announcements bold
- 11:41, 5 December 2017 diff hist +307 Template:Announcements URL to LA times/CalFire
- 11:37, 5 December 2017 diff hist +216 Template:Announcements closed due to power/fire
- 21:17, 2 December 2017 diff hist +167 Template:Announcements added feedburner tag
- 21:16, 2 December 2017 diff hist +157 m Template:News minor comment update
- 18:34, 1 December 2017 diff hist +152 m Frequently Asked Questions →Emergencies: minor updates Tag: Visual edit
- 18:29, 1 December 2017 diff hist -10 Template:Nav2 changed email to Demis instead of NanoFabWiki current
- 18:27, 1 December 2017 diff hist -117 Template:Announcements no annc
- 08:43, 1 December 2017 diff hist 0 File:VisualEditor In Action v1.gif John d uploaded a new version of File:VisualEditor In Action v1.gif current
- 08:09, 1 December 2017 diff hist 0 File:VisualEditor In Action v1.gif John d uploaded a new version of File:VisualEditor In Action v1.gif
- 18:15, 30 November 2017 diff hist +1,038 Editing Tutorials →Basic Editing: added visual editor animation Tag: Visual edit
- 18:10, 30 November 2017 diff hist +33 N File:VisualEditor In Action v1.gif
- 17:50, 30 November 2017 diff hist +62 Template:File added description current
- 17:43, 30 November 2017 diff hist +20 N File:Wiki- Log In - Screen Shot 2017-11-30 at 4.14.49 PM.png current
- 17:39, 30 November 2017 diff hist +5 m Frequently Asked Questions link to NanoFab process group Tag: Visual edit: Switched
- 17:37, 30 November 2017 diff hist +1 Template:HLink/doc minor current
- 17:37, 30 November 2017 diff hist +9 m Template:HLink/doc used Tool List/Vac Dep as example
- 17:35, 30 November 2017 diff hist +104 Template:HLink/doc verbosity
- 17:34, 30 November 2017 diff hist +120 N Template:HLink copied from Template:RL & inserted documentation directly into the page, instead of .../doc current
- 17:33, 30 November 2017 diff hist +298 N Template:HLink/doc copied/updated from RL/doc
- 17:23, 30 November 2017 diff hist +539 Frequently Asked Questions add reservations to calendar Tag: Visual edit
- 17:22, 30 November 2017 diff hist +50 N File:SignupMonkey - Add to Calendar - Screen Shot 2017-11-30 at 3.55.11 PM.png current
- 17:19, 30 November 2017 diff hist +38 N File:SignupMonkey - Add to Calendar - Screen Shot 2017-11-30 at 3.55.10 PM.png current
- 17:14, 30 November 2017 diff hist -14 Frequently Asked Questions →What do I do if I find an error on the wiki?: wiki errors; let Demis know Tag: Visual edit
- 17:12, 30 November 2017 diff hist +181 Frequently Asked Questions →Emergencies: copied text from Signupmonkey, tom's cell phone for general etc. Tag: Visual edit
- 16:43, 30 November 2017 diff hist +1,281 Frequently Asked Questions added "who to contact for problems" Tag: Visual edit
- 16:40, 30 November 2017 diff hist +12 m Lab Rules OLD 2018 →Emergencies and First Aid: newlines between emergency info lines Tag: Visual edit
- 16:23, 30 November 2017 diff hist -558 Staff List descriptions of each group. Tag: Visual edit
- 16:14, 30 November 2017 diff hist +1,649 Staff List split table into tools & process group
- 09:02, 30 November 2017 diff hist +1 m Frequently Asked Questions →A recipe is indicated as "A", Available where do I find info on this recipe?: title grammar Tag: Visual edit
- 09:02, 30 November 2017 diff hist -34 m Frequently Asked Questions avaialbe: shorter title Tag: Visual edit
- 09:00, 30 November 2017 diff hist +50 Frequently Asked Questions force Table of contents
- 08:58, 30 November 2017 diff hist +1,770 Frequently Asked Questions how to find a process, what "available" recipe means Tag: Visual edit
- 17:10, 28 November 2017 diff hist +2 m Template:News typo feedburner
- 16:41, 28 November 2017 diff hist -16 Template:News enable feedburner link
- 16:37, 28 November 2017 diff hist +14 Template:News comment out feedburner
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- 16:27, 28 November 2017 diff hist +43 Template:News added feedBurner
- 13:18, 28 November 2017 diff hist +90 Template:Nav CR's in 2nd row text, spacing on Equip/Rcp text
- 13:14, 28 November 2017 diff hist 0 Template:Nav "welcome..." box 75px --> 45px high
- 13:12, 28 November 2017 diff hist -2 Main Page collapse whitespace
- 13:09, 28 November 2017 diff hist +168 Main Page hide "main page"
- 12:17, 28 November 2017 diff hist +6 Template:Announcements h3 --> h6
- 12:15, 28 November 2017 diff hist +8 Main Page 'how to use...' from H5 --> H3 Tag: Visual edit: Switched
- 12:09, 28 November 2017 diff hist +143 Main Page added announcements template in table
- 12:08, 28 November 2017 diff hist +1 m Template:Announcements cr before sig
- 12:00, 28 November 2017 diff hist -71 Template:Announcements delete description for homepage inclusion
- 11:47, 28 November 2017 diff hist +201 m Template:News updated comments/instructions to remove username links
- 11:39, 28 November 2017 diff hist +105 m Template:Announcements commented
- 11:37, 28 November 2017 diff hist +808 N Template:Announcements annoucnements: 11/28 gas shutdown
- 00:50, 28 November 2017 diff hist -44 Template:News remove whitespace
- 00:48, 28 November 2017 diff hist +16 Template:News level 3 headings
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- 00:44, 28 November 2017 diff hist +46 Template:News hide toc
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- 00:26, 28 November 2017 diff hist -10 Template:News CR between sigs
- 00:22, 28 November 2017 diff hist +18 Template:News added ' (PST)' to each item for proper date parsing
- 00:14, 28 November 2017 diff hist +1 m User talk:John d current
- 00:14, 28 November 2017 diff hist +179 N User talk:John d leave a msg
- 23:54, 27 November 2017 diff hist +1 m Template:News ]
- 23:53, 27 November 2017 diff hist +73 Template:News link to DSE page, see if RSS link changes accordingly
- 23:50, 27 November 2017 diff hist -65 m Template:News fix four tildes
- 23:48, 27 November 2017 diff hist 0 m Template:News trying level-1 header
- 23:43, 27 November 2017 diff hist +35 m User:John d minor Tag: Visual edit
- 23:37, 27 November 2017 diff hist +721 Template:News updated dates with BT's signature
- 23:23, 27 November 2017 diff hist +790 News Feed copied news items from Template:News
- 23:20, 27 November 2017 diff hist +187 Template:News add instructions
- 23:16, 27 November 2017 diff hist +408 Template:News updated for WikiArticleFeeds RSS format
- 23:11, 27 November 2017 diff hist +328 N News Feed text News page
- 00:46, 18 November 2017 diff hist 0 m Dry Etching Recipes Reverted edits by John d (talk) to last revision by Thibeault
- 00:14, 18 November 2017 diff hist 0 Dry Etching Recipes XeF2: Ge etching possible Tag: Visual edit
- 23:56, 15 November 2017 diff hist +4 m Thermal Processing Recipes minor grammar Tag: Visual edit
- 23:56, 15 November 2017 diff hist +855 Thermal Processing Recipes added some text and links to tools. Tag: Visual edit
- 23:42, 15 November 2017 diff hist +248 m Vacuum Deposition Recipes added IBD "A" recipes for all target metals (Si, Ti, Al, Ta). Tag: Visual edit
- 10:58, 15 November 2017 diff hist +67 m Tool List →Vacuum Deposition: minor speling Tag: Visual edit
- 00:55, 14 November 2017 diff hist -1 m Laser Etch Monitor Simulation in Python minor grammar Tag: Visual edit
- 00:54, 14 November 2017 diff hist 0 File:Laser Etch Monitor v2 - AlGaAs stack.png John d uploaded a new version of File:Laser Etch Monitor v2 - AlGaAs stack.png current
- 00:52, 14 November 2017 diff hist +341 Laser Etch Monitor Simulation in Python aded example laser monitor etch Tag: Visual edit
- 00:48, 14 November 2017 diff hist +70 N File:Laser Etch Monitor v2 - AlGaAs stack.png
- 00:33, 14 November 2017 diff hist +147 m E-Beam Evaporation Recipes →Materials Table (E-Beam #1): explained "positions" and 4 hearths Tag: Visual edit
- 00:31, 14 November 2017 diff hist +196 E-Beam Evaporation Recipes →Materials Table (E-Beam #3): explained which can be dep'd simult., rearranged rows for clarity Tag: Visual edit
- 12:16, 11 November 2017 diff hist -8 Calculators + Utilities →Scripts + Programs: minor formatting Tag: Visual edit
- 12:13, 11 November 2017 diff hist +744 Calculators + Utilities Added "analysis progs" section, with FIJI, Gwyddion links
- 11:12, 11 November 2017 diff hist -11 m Calculators + Utilities scripts + programs section Tag: Visual edit
- 11:11, 11 November 2017 diff hist +39 m Calculators + Utilities added python section
- 11:09, 11 November 2017 diff hist -2 m MediaWiki:Sidebar corrected URL calc/util
- 11:08, 11 November 2017 diff hist +24 m MediaWiki:Sidebar Calculators --> Calculators_+_Utilities
- 11:08, 11 November 2017 diff hist 0 m Calculators + Utilities John d moved page Tools + Calculators to Calculators + Utilities without leaving a redirect: better description
- 11:06, 11 November 2017 diff hist 0 m Calculators + Utilities John d moved page Tools/Calculators to Tools + Calculators without leaving a redirect: slash is confusing for URL path
- 11:05, 11 November 2017 diff hist 0 m Calculators + Utilities John d moved page Calculators to Tools/Calculators without leaving a redirect: more than just calculators
- 10:33, 11 November 2017 diff hist +101 Calculators + Utilities →Python Scripts: added GitHub link for QFIScope Tag: Visual edit
- 19:03, 9 November 2017 diff hist +355 Calculators + Utilities →Python Scripts: added lonk to GitHub repo for Keithley I-V script Tag: Visual edit
- 08:30, 9 November 2017 diff hist +7 m Calculators + Utilities →Refractive Indices: specified Python Tag: Visual edit
- 08:29, 9 November 2017 diff hist -12 m Calculators + Utilities →Python Scripts: updated to same indentation format as other lists Tag: Visual edit
- 08:28, 9 November 2017 diff hist +161 m Calculators + Utilities →Python Scripts: best run in Spyder IDE Tag: Visual edit
- 08:25, 9 November 2017 diff hist +64 m Calculators + Utilities →General Calculators: description for Anaconda/Python Tag: Visual edit
- 08:23, 9 November 2017 diff hist +103 m Calculators + Utilities →Python Scripts: bolded titles Tag: Visual edit
- 08:22, 9 November 2017 diff hist +120 m Calculators + Utilities →Python Scripts: updated description. for Keithely IV-Sweep Tag: Visual edit
- 08:17, 9 November 2017 diff hist +684 Calculators + Utilities →General Calculators: added Python Scripts section Tag: Visual edit
- 08:04, 9 November 2017 diff hist +50 m Calculators + Utilities updated nk.py description Tag: Visual edit
- 08:03, 9 November 2017 diff hist +1,116 N Laser Etch Monitor Simulation in Python link to repository & basic usage info. Tag: Visual edit
- 07:54, 9 November 2017 diff hist +240 Calculators + Utilities added laser etch monitor script, nk.py functions for RIx dispersion models Tag: Visual edit
- 23:31, 6 November 2017 diff hist +379 Calculators + Utilities general calcs Tag: Visual edit
- 23:17, 6 November 2017 diff hist +29 m Calculators + Utilities 1st heading Tag: Visual edit
- 23:16, 6 November 2017 diff hist +404 Calculators + Utilities wet etching section: transene + clawson Tag: Visual edit
- 23:11, 6 November 2017 diff hist +18 m Calculators + Utilities headings Tag: Visual edit
- 23:10, 6 November 2017 diff hist +72 m Calculators + Utilities newlines between sections Tag: Visual edit
- 23:07, 6 November 2017 diff hist +855 N Calculators + Utilities initial - links ot external pages/calculators Tag: Visual edit
- 22:45, 6 November 2017 diff hist 0 m MediaWiki:Sidebar calc testing
- 22:44, 6 November 2017 diff hist -1 m MediaWiki:Sidebar calc tests
- 22:43, 6 November 2017 diff hist +11 m MediaWiki:Sidebar fixed calc link
- 22:43, 6 November 2017 diff hist 0 m MediaWiki:Sidebar moved calculators into recipes/data
- 22:41, 6 November 2017 diff hist +24 MediaWiki:Sidebar Added Calculators section
- 22:37, 6 November 2017 diff hist -24 m Sputtering Recipes unbolded titles Tag: Visual edit
- 08:11, 2 November 2017 diff hist +191 Sputtering Recipes →Sputter 5 (Lesker AXXIS): Noted that this tool has been replaced by an AJA sputter Tag: Visual edit
- 14:41, 31 October 2017 diff hist 0 Vacuum Deposition Recipes fixed C bgcolor color
- 14:39, 31 October 2017 diff hist +6 m Sputter 3 (AJA ATC 2000-F) →Detailed Specifications: reworded Tag: Visual edit
- 14:37, 31 October 2017 diff hist +8 m Sputter 4 (AJA ATC 2200-V) →Detailed Specifications: reworded Tag: Visual edit
- 14:36, 31 October 2017 diff hist +6 m Sputter 4 (AJA ATC 2200-V) bolded signupmonkey link Tag: Visual edit
- 14:36, 31 October 2017 diff hist +153 Sputter 4 (AJA ATC 2200-V) added singupmonkey link for currently installed targets Tag: Visual edit
- 14:34, 31 October 2017 diff hist +161 Sputter 3 (AJA ATC 2000-F) Added link to signupmnkey page for currently installed targets Tag: Visual edit
- 17:31, 12 October 2017 diff hist +1 m Thermal Evaporator 1 added missing { current
- 21:23, 8 October 2017 diff hist +13 m PECVD Recipes →OTHER recipes: LS SiN and SiOxNy deposition (PECVD #1): added "low stress' text Tag: Visual edit
- 22:06, 7 October 2017 diff hist +46 m PECVD Recipes →LS SiN deposition (PECVD #2): added text “low stress” for clarity and google searches Tag: Visual edit
- 00:55, 7 October 2017 diff hist +10 m ICP Etching Recipes →SiO2 Etching (Panasonic 2): referred "SiOVert" Tag: Visual edit
- 00:54, 7 October 2017 diff hist +40 m ICP Etching Recipes →SiO2 Etching (Panasonic 1): referred to "SiOVert", the colloquial name for this "std." provided recipe. Tag: Visual edit: Switched
- 00:50, 7 October 2017 diff hist +1 m ICP Etching Recipes →Bosch and Release Etch (Si Deep RIE): >>1µm Tag: Visual edit
- 00:49, 7 October 2017 diff hist +15 m Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) minor
- 00:46, 7 October 2017 diff hist +28 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) →Recipes: link to ICP Etching / recipes section Tag: Visual edit: Switched
- 00:39, 7 October 2017 diff hist +357 ICP Etching Recipes →Bosch and Release Etch (Si Deep RIE): added basic info about bosch process, including new IBD Al2O3 etch selectivity info. Tag: Visual edit
- 22:26, 3 October 2017 diff hist -2 m Template:Nav processes --> recipes
- 14:18, 22 September 2017 diff hist +3 m Dry Etching Recipes Added "A" for GaSb, InP Tag: Visual edit
- 14:16, 22 September 2017 diff hist 0 m Dry Etching Recipes moves Si into proper alphabetical row Tag: Visual edit
- 14:14, 22 September 2017 diff hist +71 Dry Etching Recipes Added Ta2O5 etching, described in paper by Blumenthal Group. Tag: Visual edit
- 14:05, 22 September 2017 diff hist +26 m Dry Etching Recipes removed spurious column |- text, alphabetizing.
- 13:59, 22 September 2017 diff hist 0 m Dry Etching Recipes alphabetized mostly Tag: Visual edit
- 13:52, 22 September 2017 diff hist -2 m Dry Etching Recipes partially alphabetized and removed one spurious row Tag: Visual edit: Switched
- 13:44, 22 September 2017 diff hist -12 m E-Beam Evaporation Recipes →ITO deposition (E-Beam 2): removed bold titles Tag: Visual edit
- 13:44, 22 September 2017 diff hist +22 m E-Beam Evaporation Recipes →Materials Table (E-Beam #1): updated Carbon rates Tag: Visual edit
- 13:42, 22 September 2017 diff hist +57 m E-Beam 1 (Sharon) included "electron beam" & "deposition parameters" to boost in google search Tag: Visual edit
- 16:45, 19 September 2017 diff hist +116 ICP Etching Recipes →SiO2 Etching (Panasonic 2): linked to ICP#1 params Tag: Visual edit: Switched
- 16:42, 19 September 2017 diff hist +127 m ICP Etching Recipes →SiO2 Etching (Panasonic 1): added etch rate, unknown selectivity Tag: Visual edit
- 15:25, 19 September 2017 diff hist +6 E-Beam Evaporation Recipes →Materials Table (E-Beam #1): (minor) Carbon, bolded formatting Tag: Visual edit
- 15:24, 19 September 2017 diff hist +8 m E-Beam Evaporation Recipes added "carbon" for search engines Tag: Visual edit
- 08:48, 19 September 2017 diff hist 0 Vacuum Deposition Recipes fix row color?
- 08:46, 19 September 2017 diff hist +657 Vacuum Deposition Recipes fixed table row color
- 08:42, 19 September 2017 diff hist +517 Vacuum Deposition Recipes Added Carbon on EBeam #1 Tag: Visual edit: Switched
- 19:58, 8 September 2017 diff hist +14 m High Temp Oven (Blue M) removed "8 steps" Tag: Visual edit: Switched
- 19:57, 8 September 2017 diff hist +276 High Temp Oven (Blue M) added description of processes etc. Tag: Visual edit: Switched
- 19:54, 8 September 2017 diff hist +130 Tool List →Thermal Processing: added ovens from "lithography" section
- 17:13, 7 September 2017 diff hist 0 m Spin Rinse Dryer (SemiTool) tool template @ top
- 17:13, 7 September 2017 diff hist +295 Spin Rinse Dryer (SemiTool) added description + capabilities, Tag: Visual edit: Switched
- 10:14, 5 September 2017 diff hist +2 Lithography Recipes →E-Beam Lithography Recipes: testing visual editor Tag: Visual edit: Switched
- 09:37, 5 September 2017 diff hist +159 E-Beam Evaporation Recipes added Carbon, bolded "use with permission only" on oxides. Tag: Visual edit: Switched
- 13:05, 1 September 2017 diff hist +32 Lithography Recipes →General Information: linked to PR/EBL datasheet sec
- 13:03, 1 September 2017 diff hist +11 m Lithography Recipes →General Information: nanoimprinting recipes section title correctly
- 13:02, 1 September 2017 diff hist +6 Lithography Recipes →General Information: bolded "holography"
- 13:00, 1 September 2017 diff hist +573 Lithography Recipes →General Information: link to PhotoLitho recipes + equipment
- 12:56, 1 September 2017 diff hist +8 Lithography Recipes →Low-K Dielectric Recipes: added "Sppin-On" to title
- 12:55, 1 September 2017 diff hist +7 Lithography Recipes →Low-K Dielectric: added Recipes
- 12:55, 1 September 2017 diff hist +7 Lithography Recipes →Nanoimprinting: added recipes
- 12:54, 1 September 2017 diff hist +23 Lithography Recipes →Chemical Datasheets: BCB+SOG --> "Spin-On Dielectrics"
- 09:59, 1 September 2017 diff hist -1 m Lithography Recipes →Chemical Datasheets: extra ]
- 09:58, 1 September 2017 diff hist +3 m Lithography Recipes →Chemical Datasheets: formatting
- 09:58, 1 September 2017 diff hist +92 Lithography Recipes →Chemical Datasheets: 1165 --> Az NMP + link to Microchem page for NMP
- 09:48, 1 September 2017 diff hist 0 m Lithography Recipes →General Information: spelling
- 09:47, 1 September 2017 diff hist +29 m Lithography Recipes →Chemical Datasheets: comment on BCB/SOG for clarity/matching with earlier link text
- 09:45, 1 September 2017 diff hist +17 Lithography Recipes →General Information: BCB/SOG anchor link
- 09:45, 1 September 2017 diff hist +162 Lithography Recipes →General Information: added links to anchors
- 09:39, 1 September 2017 diff hist +340 Lithography Recipes →Chemical Datasheets: Added Anchors for every section
- 09:34, 1 September 2017 diff hist 0 m Lithography Recipes →General Information
- 09:33, 1 September 2017 diff hist +11 m Lithography Recipes →General Information: link to PosPR anchor
- 09:29, 1 September 2017 diff hist +22 Lithography Recipes →Chemical Datasheets: anchor to PosPR
- 12:13, 31 August 2017 diff hist +2 m Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP)
- 12:12, 31 August 2017 diff hist 0 m Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) →Documentation: reorder
- 11:10, 31 August 2017 diff hist -89 Template:StaffInfo removed table
- 11:08, 31 August 2017 diff hist -7 Template:Tool bugfix - extra {{#ifeq {{{super}}}
- 11:02, 31 August 2017 diff hist +89 Template:StaffInfo wrapped in full table
- 10:18, 31 August 2017 diff hist -14 Template:Tool debugging #ifeq showing on page
- 09:56, 31 August 2017 diff hist +97 Template:Tool added <noinclude> mentioning that this template defines supervisor phone numbers/contact info. Also debugging "{{#ifeq" showing up on page.
- 17:02, 24 August 2017 diff hist +7 Lithography Recipes →Chemical Datasheets: New version of UVN-30/renamed from UVN2300
- 17:01, 24 August 2017 diff hist +23 N File:UVN-30 - Negative-Resist-Datasheet - Apr 2004.pdf UVN-30 Datasheet - 2004 current
- 20:30, 15 August 2017 diff hist +1 Stepper Recipes moved 6300-->AutoStep 200 multiplier into GCA 6300 section
- 20:29, 15 August 2017 diff hist +58 Stepper Recipes broke up intro paragraph
- 20:24, 15 August 2017 diff hist +18 Stepper Recipes →Positive Resist (ASML DUV): aka UV6-0.8 (actually written on bottle)
- 20:22, 15 August 2017 diff hist +12 m Stepper Recipes →Anti-Reflective Coatings: formatting
- 20:20, 15 August 2017 diff hist +14 m Stepper Recipes →Anti-Reflective Coatings: aka. for ARC, to aid in searchability
- 20:19, 15 August 2017 diff hist -476 Stepper Recipes →Stepper 3 (ASML DUV): combined ARC section into one section, referenced from pos/neg sections
- 19:52, 15 August 2017 diff hist +83 Stepper Recipes →Positive Resist (ASML DUV): turned ARC into bulleted lists
- 16:16, 15 August 2017 diff hist +26 Stepper Recipes →Positive Resist (ASML DUV): replaced AR2 with DUV-42P
- 23:07, 10 August 2017 diff hist 0 m Demis D. John spelling error
- 14:56, 3 August 2017 diff hist -2 m Template:Recipe current
- 14:56, 3 August 2017 diff hist +1 m Template:Recipe
- 14:54, 3 August 2017 diff hist -2 Template:Recipe format noinclude text
- 14:54, 3 August 2017 diff hist +6 Template:Recipe format noinclide text
- 14:53, 3 August 2017 diff hist +361 Template:Recipe comment help
- 14:43, 3 August 2017 diff hist +86 Template:Recipe added headings, Charact section
- 14:39, 3 August 2017 diff hist +434 N Template:Recipe 1st attempt, using definition list
- 14:08, 3 August 2017 diff hist -145 Editing Tutorials 2017 updates
- 14:00, 3 August 2017 diff hist +81 Frequently Asked Questions linked to Editing_Tutorials
- 11:30, 3 August 2017 diff hist +6 MediaWiki:Sidebar
- 11:29, 3 August 2017 diff hist +7 MediaWiki:Sidebar HR between editing tools
- 11:27, 3 August 2017 diff hist +2 MediaWiki:Sidebar
- 11:27, 3 August 2017 diff hist +16 MediaWiki:Sidebar
- 11:27, 3 August 2017 diff hist -21 MediaWiki:Sidebar
- 11:26, 3 August 2017 diff hist +135 MediaWiki:Sidebar
- 11:25, 3 August 2017 diff hist -135 MediaWiki:Sidebar deleted toolbox etc.
- 09:09, 3 August 2017 diff hist +9 MediaWiki:Sidebar commented out toolbox for now - will reimplement for logged-in users only later
- 11:24, 2 August 2017 diff hist +1,548 N Demis D. John created page, template form T.Bosch's page
- 11:14, 2 August 2017 diff hist +90 Staff List alphabetized, added Demis
- 17:41, 24 July 2017 diff hist -12 m MediaWiki:Sidebar Reverted edits by John d (talk) to last revision by Zwarburg
- 17:41, 24 July 2017 diff hist +12 m MediaWiki:Sidebar highlight processe/equipment secitons
- 08:03, 14 July 2017 diff hist -51 Template:Nav remove l/r borders
- 08:01, 14 July 2017 diff hist 0 m Template:Nav S-->s
- 08:01, 14 July 2017 diff hist +22 m Template:Nav image for arrow left
- 07:55, 14 July 2017 diff hist 0 File:Arrowleft3.png John d uploaded a new version of File:Arrowleft3.png current
- 07:54, 14 July 2017 diff hist +22 N File:Arrowleft3.png left arrow transparent
- 07:49, 14 July 2017 diff hist +26 N File:Arrowleft1.jpeg left-pointing simple arrow current
- 07:48, 14 July 2017 diff hist +475 Template:Nav combined 2nd row, pointed out sidebar
- 22:14, 13 July 2017 diff hist +4 Main Page how to use this wiki
- 22:02, 13 July 2017 diff hist -2 Template:FeaturedArticle image alignments
- 20:45, 13 July 2017 diff hist 0 Template:FeaturedArticle 350-->300px
- 20:44, 13 July 2017 diff hist +105 Template:FeaturedArticle added images back into table, broken up wall-of-text
- 20:31, 13 July 2017 diff hist +38 N File:Bay3 v1.jpg Photo of Bay 3 (evaporators) from 2012 current
- 20:21, 13 July 2017 diff hist +65 N File:GowningRoom v2.jpg shorter, higher contrast/brightness version of owning room <350px current
- 19:48, 13 July 2017 diff hist -100 Template:FeaturedArticle removed blank space, put bullets at top
- 22:59, 20 February 2017 diff hist +1 ICP Etch 2 (Panasonic E626I) corrected laser monitor wavelength
- 11:58, 23 February 2016 diff hist +292 Talk:Main Page suggestions for navigation on front page. current
- 23:29, 20 August 2014 diff hist +59 Wet Etching Recipes →Compound Semiconductor Etching
- 23:26, 20 August 2014 diff hist +131 Sputtering Recipes →SiO{{sub|2}} deposition (IBD): cauchy params
- 23:25, 20 August 2014 diff hist +130 Sputtering Recipes →Si3N4 deposition (IBD): cauchy params
- 23:24, 20 August 2014 diff hist +13 Sputtering Recipes →TiO{{sub|2}} deposition (IBD)
- 23:24, 20 August 2014 diff hist +132 Sputtering Recipes →Ta{{sub|2}}O{{sub|5}} deposition (IBD): cauchy params
- 23:22, 20 August 2014 diff hist +144 Sputtering Recipes →TiO{{sub|2}} deposition (IBD): cauchy params, absorbing <350nm
- 10:23, 16 August 2013 diff hist -33 Sputtering Recipes →Si3N4 deposition (IBD)
- 10:19, 16 August 2013 diff hist +26 Sputtering Recipes →Si3N4 deposition (IBD)