Template:Recipe

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The recipe shown here is just a placeholder - please replace this info with your own. This text won't show up in the final page.

Recipe

Recipe Name
SiOVert_MadeUp
Tool
Panasonic ICP #2
Description
This recipe is made up, and deposits glass with lots of holes in it.
Recipe Parameters
Ar = 20 sccm
O2 = 10 sccm
Pressure = 50 mT
RF = 200 W
Temperature = 200°C
Dep Rate
200 nm/min or 12,000 nm/sec
Notes
Make sure sample is inside out before loading into tool.
This recipe usually doesn't work.
Film will etch in HF

Characterization

Al-thickness-variation-with-rate.jpg