Tool List
Revision as of 20:59, 16 September 2019 by Thibeault (talk | contribs) (→Reactive Ion Etching (RIE))
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Lithography
Photoresists and Lithography Chemicals
Contact Aligners (Optical Exposure)Other Patterning Systems |
Steppers (Optical Exposure)Thermal Processing for Photolithography
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Vacuum Deposition
Physical Vapor Deposition (PVD)
Sputter Deposition |
Chemical Vapor Deposition (CVD) |
Dry Etch
Reactive Ion Etching (RIE)
Etch Monitoring
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ICP-RIE
Other Dry Etching |
Wet Processing
See the Chemical List page for stocked chemicals such as Developers, Etchants, Solvents etc.