Tool List
Revision as of 14:08, 1 May 2018 by Bosch t (talk | contribs) (→Vacuum Deposition: Updated Sputter 5 link)
Lithography
You can see our available photoresists on the Chemical Datasheets page.
Vacuum Deposition
Dry Etch
Wet Processing
See the Chemical List page for stocked chemicals such as Developers, Etchants, Solvents etc.
Thermal Processing
- Rapid Thermal Processor (AET RX6)
- Strip Annealer
- Tube Furnace (Tystar 8300)
- Tube Furnace Wafer Bonding (Thermco)
- Tube Furnace AlGaAs Oxidation (Linberg)
- Wafer Bonder (SUSS SB6-8E)
- Ovens 1, 2 & 3 (Labline)
- Oven 4 (Fisher)
- Oven 5 (Labline)
- High Temp Oven (Blue M)
- Vacuum Oven (YES)