Difference between revisions of "Tool List"

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(→‎Lithography: link to available PRs)
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*[[E-Beam 3 (Temescal)]]  
 
*[[E-Beam 3 (Temescal)]]  
 
*[[E-Beam 4 (CHA)]]  
 
*[[E-Beam 4 (CHA)]]  
*[[Sputter 2 (SFI Endeavor)]]  
+
*[[Blank]]  
 
*[[Sputter 3 (AJA ATC 2000-F)]]  
 
*[[Sputter 3 (AJA ATC 2000-F)]]  
 
*[[Sputter 4 (AJA ATC 2200-V)]]  
 
*[[Sputter 4 (AJA ATC 2200-V)]]  

Revision as of 16:58, 2 April 2018

Lithography

You can see our available photoresists on the Chemical Datasheets page.

Vacuum Deposition

Dry Etch

Wet Processing

Thermal Processing

Packaging

Inspection, Test and Characterization