Difference between revisions of "Tool List"
Jump to navigation
Jump to search
(→Lithography: link to available PRs) |
Reynolds t (talk | contribs) |
||
Line 33: | Line 33: | ||
*[[E-Beam 3 (Temescal)]] | *[[E-Beam 3 (Temescal)]] | ||
*[[E-Beam 4 (CHA)]] | *[[E-Beam 4 (CHA)]] | ||
− | *[[ | + | *[[Blank]] |
*[[Sputter 3 (AJA ATC 2000-F)]] | *[[Sputter 3 (AJA ATC 2000-F)]] | ||
*[[Sputter 4 (AJA ATC 2200-V)]] | *[[Sputter 4 (AJA ATC 2200-V)]] |
Revision as of 16:58, 2 April 2018
Lithography
You can see our available photoresists on the Chemical Datasheets page.
Vacuum Deposition
Dry Etch
Wet Processing
Thermal Processing
- Rapid Thermal Processor (AET RX6)
- Strip Annealer
- Tube Furnace (Tystar 8300)
- Tube Furnace Wafer Bonding (Thermco)
- Tube Furnace AlGaAs Oxidation (Linberg)
- Wafer Bonder (SUSS SB6-8E)
- Ovens 1, 2 & 3 (Labline)
- Oven 4 (Fisher)
- Oven 5 (Labline)
- High Temp Oven (Blue M)
- Vacuum Oven (YES)