Difference between revisions of "Tool List"

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(→‎Thermal Processing: added ovens from "lithography" section)
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*[[RIE 5 (PlasmaTherm)]]  
 
*[[RIE 5 (PlasmaTherm)]]  
 
*[[Si Deep RIE (PlasmaTherm/Bosch Etch)]]  
 
*[[Si Deep RIE (PlasmaTherm/Bosch Etch)]]  
 +
*[[DSEIII (PlasmaTherm/Deep Silicon Etcher)]]
 
*[[Ashers (Technics PEII)]]  
 
*[[Ashers (Technics PEII)]]  
 
*[[UV Ozone Reactor]]  
 
*[[UV Ozone Reactor]]  

Revision as of 09:34, 6 November 2017

Lithography

Vacuum Deposition

Dry Etch

Wet Processing

Thermal Processing

Packaging

Inspection, Test and Characterization